Boat support, bearing assembly and deposition device

Abstract

The utility model relates to a boat support, a bearing assembly and a deposition device. The boat support comprises two end plates and two side plates, the two end plates are arranged at intervals in the length direction of the boat support, first air inlet holes are formed in the end plates, the two side plates are arranged at intervals in the width direction of the boat support, the side plates are connected between the two end plates, and the two side plates and the two end plates jointly define a mounting space continuously extending in the length direction of the boat support. A plurality of second air inlet holes and a plurality of limiting grooves are formed in the side plates, all the second air inlet holes and the limiting grooves in the side plates are formed in the length direction of the boat support at intervals, the first air inlet holes, the second air inlet holes and the limiting grooves communicate with the installation space, and the limiting grooves are used for limiting a butt strap of the boat body. According to the boat support, the bearing assembly and the deposition device, the deposition effect can be improved.

Description

Boat support, load-bearing components and deposition equipment Technical Field

[0001] This application relates to the field of solar cell technology, specifically to a boat support, a support component, and a deposition apparatus. Background Technology

[0002] In the manufacturing process of solar cells, low-pressure chemical vapor deposition (LPCVD) technology is used to deposit polycrystalline silicon and oxide layers on the cells.

[0003] In existing technologies, multiple solar cells are typically supported by a boat support and a boat body. Specifically, the boat support carries multiple boat bodies, and the boat bodies carry multiple solar cells. During the deposition process, the atmospheric field near the boat support beam, which restricts the deposition process, changes, resulting in a thinner film layer deposited on the solar cells near the beam and poor deposition performance. Summary of the Invention

[0004] Therefore, it is necessary to provide a boat support, bearing component, and deposition device that can improve the deposition effect in order to address the above problems.

[0005] A boat support includes two end plates and two side plates. The two end plates are spaced apart along the length of the boat support and each end plate has a first air inlet. The two side plates are spaced apart along the width of the boat support and are connected between the two end plates. The two side plates and the two end plates together form an installation space that extends continuously along the length of the boat support. Each side plate has a plurality of second air inlets and a plurality of limiting grooves. All the second air inlets and all the limiting grooves on the side plates are spaced apart along the length of the boat support. The first air inlets, the second air inlets, and the limiting grooves are all connected to the installation space, and the limiting grooves are used to limit the mounting plate of the boat body.

[0006] In some embodiments, the orthographic projections of the two first air inlets on the two end plates in the longitudinal direction of the boat support completely overlap;

[0007] The second air inlets on the two side plates correspond one-to-one, and the orthographic projections of the two corresponding second air inlets on the two side plates completely overlap in the width direction of the boat support.

[0008] In some embodiments, both the first air inlet and the second air inlet are strip-shaped holes, with the first air inlet extending along the width direction of the boat support and the second air inlet extending along the length direction of the boat support.

[0009] In some embodiments, a limiting groove is provided between every two adjacent second air inlets on the side plate.

[0010] In some embodiments, a reinforcing portion is formed by protrusions between every two adjacent second air inlets on the side plate.

[0011] In some embodiments, the limiting groove extends through the side plate along the width direction of the boat support.

[0012] In some embodiments, the top surface of the side plate is recessed to form the limiting groove.

[0013] In some embodiments, the boat support further includes a buffer member, which corresponds one-to-one with the limiting groove, and the buffer member covers the groove wall of the corresponding limiting groove.

[0014] A carrier component, the carrier component comprising:

[0015] The boat support as described in any of the above embodiments; and

[0016] Multiple boats are continuously arranged in the installation space along the length direction of the boat support. Each boat includes a main body and a mounting plate disposed on opposite sides of the main body. The mounting plate is confined within the limiting groove located on the same side as the main body.

[0017] A deposition apparatus, the deposition apparatus comprising:

[0018] The sedimentary body contains diffusion sedimentation cavities; and

[0019] The carrier component as described in the above embodiments is disposed within the diffusion deposition cavity.

[0020] Compared with the prior art, this application has the following beneficial effects:

[0021] The aforementioned boat support, carrier assembly, and deposition apparatus comprise multiple boats located within an installation space, arranged along the length of the boat support. The deposition atmosphere enters the installation space through a first opening, a second opening, each first air inlet, and each second air inlet, and deposits onto the solar cells within each boat. Because the crossbeams are eliminated, the installation space can extend continuously along the length of the boat support, thus eliminating crossbeam obstructions between adjacent boats. Therefore, within the installation space, the atmosphere is not affected or restricted by the crossbeams, allowing for uniform contact with the solar cells within each boat, resulting in uniform deposition of a film layer of suitable thickness on each boat's solar cells. This results in uniform and effective deposition. Therefore, in this application, by omitting the crossbeams, the adverse effects of the crossbeams on deposition are eliminated, optimizing the deposition effect on the solar cells and improving the yield and productivity of the solar cells. Attached Figure Description

[0022] Figure 1 is a schematic diagram of the structure of the boat carrier in one embodiment of this application;

[0023] Figure 2 is an enlarged schematic diagram of a partial structure A of the boat support shown in Figure 1;

[0024] Figure 3 is a schematic diagram of the structure of the carrier component in one embodiment of this application;

[0025] Figure 4 is a schematic diagram of the boat body in the load-bearing component shown in Figure 3.

[0026] Icon labels:

[0027] 1. Load-bearing components;

[0028] 10. Boat support; 20. Boat body;

[0029] 11. End plate; 111. First air inlet; 112. Mounting space; 12. Side plate; 121. Second air inlet; 122. Limiting groove; 123. Reinforcing part; 13. Buffer component;

[0030] 21. Top plate; 211. Placement space; 22. Bottom plate; 23. Support column; 231. Tooth groove; 24. Laying plate;

[0031] X, length direction; Y, width direction; Z, height direction. Detailed Implementation

[0032] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0033] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0035] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0036] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0037] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0038] In the manufacturing process of solar cells, low-pressure chemical vapor deposition (LPCVD) technology is used to deposit polycrystalline silicon and oxide layers on the cells.

[0039] In existing technologies, multiple solar cells are typically supported by a boat support and a boat body. Specifically, the boat support carries multiple boat bodies, and the boat bodies carry multiple solar cells. During the deposition process, the atmospheric field near the boat support beam, which restricts the deposition process, changes, resulting in a thinner film layer deposited on the solar cells near the beam and poor deposition performance.

[0040] Please refer to Figures 1 to 4. To alleviate the above problems, this application provides a boat support 10. The boat support 10 includes two end plates 11 and two side plates 12. The two end plates 11 are spaced apart along the length direction X of the boat support 10, and a first air inlet 111 is provided on the end plate 11. The two side plates 12 are spaced apart along the width direction Y of the boat support 10, and the side plates 12 are connected between the two end plates 11. The two side plates 12 and the two end plates 11 together form an installation space 112 that extends continuously along the length direction X of the boat support 10. A plurality of second air inlets 121 and a plurality of limiting grooves 122 are provided on the side plates 12. All the second air inlets 121 and all the limiting grooves 122 on the side plates 12 are spaced apart along the length direction X of the boat support 10. The first air inlets 111, the second air inlets 121 and the limiting grooves 122 are all connected to the installation space 112, and the limiting grooves 122 are used to limit the mounting plate 24 of the boat body 20.

[0041] The side plate 12 and the end plate 11 can be fixedly connected by welding, threaded connection or other connection methods.

[0042] Specifically, the top surfaces of the two end plates 11 and the two side plates 12 together form a first opening, and the bottom surfaces of the two end plates 11 and the two side plates 12 together form a second opening. Both the first and second openings are connected to the installation space 112. The boat body 20 is inserted into the installation space 112 from the first opening downwards, and multiple boat bodies 20 are arranged sequentially along the length X of the boat support 10 within the boat support 10.

[0043] In the traditional boat support 10, the crossbeam is set between the two side plates 12 and connected to the two side plates 12. In this application, the crossbeam is omitted, so that the installation space 112 can extend continuously along the length direction X of the boat support 10. Therefore, there is no crossbeam obstructing between each two adjacent boat bodies 20.

[0044] There are multiple limiting grooves 122 on the side plate 12, and the number of limiting grooves 122 on two side plates 12 is the same and they correspond one-to-one. The two corresponding limiting grooves 122 on the two side plates 12 are used to limit the mounting plates 24 on both sides of the same boat body 20. That is, the number of limiting grooves 122 on the side plate 12 is the same as the number of boat bodies 20 and they correspond one-to-one. The limiting grooves 122 on the side plate 12 limit the mounting plates 24 on the corresponding boat body 20 that are located on the same side as the limiting groove 122. The setting of the limiting grooves 122 can realize the installation of the boat body 20.

[0045] Specifically, the first air inlet 111 passes through the end plate 11 along the length direction X of the boat support 10, and the second air inlet 121 passes through the side plate 12 along the width direction Y of the boat support 10. Both the first air inlet 111 and the second air inlet 121 are connected to the installation space 112.

[0046] In actual operation, multiple boats 20 are located within the installation space 112 and arranged along the length X of the boat support 10. The atmosphere used for deposition enters the installation space 112 through the first opening, the second opening, each first air inlet 111, and each second air inlet 121, and is deposited on the solar cells within each boat 20. Because the crossbeams are eliminated, the installation space 112 can extend continuously along the length X of the boat support 10, so there are no crossbeams obstructing between any two adjacent boats 20. Therefore, within the installation space 112, the atmosphere is not affected or restricted by the crossbeams, and the atmosphere can uniformly contact the solar cells within each boat 20, uniformly depositing a film layer of suitable thickness on the solar cells of each boat 20, resulting in uniform and good deposition effect. Thus, in this application, by omitting the crossbeams, the adverse effects of the crossbeams on deposition are eliminated, the deposition effect of the solar cells is optimized, and the yield and productivity of the solar cells are improved.

[0047] In some embodiments, the orthographic projections of the two first air inlets 111 on the two end plates 11 on the longitudinal direction X of the boat support 10 completely overlap; the second air inlets 121 on the two side plates 12 correspond one-to-one, and the orthographic projections of the two corresponding second air inlets 121 on the two side plates 12 on the width direction Y of the boat support 10 completely overlap.

[0048] In this way, along the length direction X of the boat support 10, the atmosphere can be evenly introduced into the installation space 112 through the two first air inlets 111 of the two end plates 11, and along the width direction Y of the boat support 10, the atmosphere can be evenly introduced into the installation space 112 through the air inlets of the two side plates 12, so that the atmosphere can be evenly contacted with the solar cells along the length direction X and the width direction Y of the boat support 10, thereby improving the uniformity of deposition.

[0049] In some embodiments, both the first air inlet 111 and the second air inlet 121 are strip-shaped holes. The first air inlet 111 extends along the width direction Y of the boat support 10, and the second air inlet 121 extends along the length direction X of the boat support 10. This results in the first air inlet 111 having a larger opening area in the width direction Y of the boat support 10, and the second air inlet 121 having a larger opening area in the length direction X of the boat support 10. This increases the opening area of ​​the first air inlet 111 and the second air inlet 121, reducing the obstruction of the atmosphere by the end plate 11 and the side plate 12. This allows the atmosphere to enter the mounting space 112 quickly and in large quantities, making full contact with the solar cells, thereby improving the deposition rate and deposition uniformity.

[0050] In some embodiments, a limiting groove 122 is provided between every two adjacent second air inlets 121 on the side plate 12. In this way, in the height direction Z of the boat support 10, the orthographic projection of the limiting groove 122 falls between the orthographic projections of the two second air inlets 121 adjacent to the limiting groove 122 on the side plate 12.

[0051] It is understood that the portion of the side plate 12 located between the two second air inlets 121 is a solid structure, providing better mechanical strength and support. Therefore, a limiting groove 122 is provided between every two adjacent second air inlets 121 on the side plate 12, ensuring that the weight of the boat body 20 to which the mounting plate 24 overlaps within the limiting groove 122, and the weight of the battery cells within the boat body 20, is primarily applied to the solid structure on the side plate 12 located between the two second air inlets 121 adjacent to the limiting groove 122. This design reduces the possibility of deformation when the side plate 12 supports the boat body 20, extending the service life of the boat support 10.

[0052] Of course, the design of the limiting groove 122 is not limited to the one mentioned above. For example, two or more limiting grooves 122 are provided between every two adjacent second air inlets 121 on the side plate 12.

[0053] Furthermore, in some embodiments, a reinforcing portion 123 is formed between every two adjacent second air inlets 121 on the side plate 12. The design of the reinforcing portion 123 can further improve the mechanical strength of the solid structure between every two adjacent second air inlets 121 on the side plate 12, thereby reducing the possibility of deformation when the side plate 12 supports the boat hull 20 and extending the service life of the boat support 10.

[0054] In some embodiments, the limiting groove 122 extends through the side plate 12 along the width direction Y of the boat support 10. Therefore, when the lap plate 24 overlaps within the limiting groove 122, it can pass through the limiting groove 122 along the width direction Y of the boat support 10 and extend beyond the installation space 112. In this case, the difficulty of exiting the lap plate from within the limiting groove 122 increases, thereby improving the stability of the boat body 20 installation.

[0055] In some embodiments, a limiting groove 122 is formed by a recess in the top surface of the side plate 12. Specifically, the opening of the limiting groove 122 is located on the top surface of the side plate 12 where the limiting groove 122 is located. In actual operation, when the boat body 20 is installed from top to bottom from the first opening, the mounting plate 24 is inserted into the limiting groove 122 from top to bottom until it abuts against the bottom plate 22 of the limiting groove 122. This design of the limiting groove 122 facilitates the insertion of the mounting plate 24 and improves the assembly efficiency of the boat body 20 and the boat support 10.

[0056] In some embodiments, the boat support 10 further includes a buffer 13, which corresponds one-to-one with the limiting groove 122, and the buffer 13 covers the groove wall of the corresponding limiting groove 122.

[0057] Specifically, the buffer 13 can be made of foam, sponge, rubber, or other cushioning materials. Typically, the boat body 20 has a significant total weight after carrying the battery cells. During the installation of the boat body 20 into the installation space 112, due to malfunctions or other factors, an impact may occur between the mounting plate 24 of the boat body 20 and the wall of the limiting groove 122, causing deformation or even damage to the boat support 10 or the boat body 20. In this application, by providing the buffer 13, the design of the buffer 13 can reduce the impact force between the mounting plate 24 and the wall of the limiting groove 122, which helps to extend the service life of the boat body 20 and the boat support 10. Furthermore, after the boat body 20 is installed, the buffer 13, located between the mounting plate 24 and the wall of the limiting groove 122, can further prevent the boat support 10 from deforming under the weight of the boat body 20.

[0058] This application also provides a support component 1, which includes a boat support 10 as described in any of the above embodiments and a plurality of boat bodies 20. All boat bodies 20 are continuously arranged in the installation space 112 along the length direction X of the boat support 10. Each boat body 20 includes a main body and a mounting plate 24 disposed on opposite sides of the main body. The mounting plate 24 is confined within a limiting groove 122 located on the same side as the main body.

[0059] Specifically, the main body of the boat hull 20 includes a top plate 21, a bottom plate 22, and multiple support columns 23. The support columns 23 are connected between the top plate 21 and the bottom plate 22, forming a placement space 211 for placing the battery cells. Multiple grooves 231 are arranged on the surface of the support columns 23 facing the placement space 211 and along the height of the support columns 23. Each groove 231 on the support column 23 corresponds to a battery cell, and the battery cells are secured within the corresponding grooves 231 on the support columns 23. The boat hull 20 also includes two mounting plates 24, which are located outside the placement space 211 on opposite sides of the main body. The mounting plates 24 engage with the limiting grooves 122 on the boat support 10 to allow the boat hull 20 to be mounted on the boat support 10.

[0060] This application also provides a deposition apparatus, which includes a deposition body and a support component 1 as described in any of the above embodiments. The deposition body has a diffusion deposition cavity, and the support component 1 is disposed within the diffusion deposition cavity. When a deposition atmosphere is introduced into the diffusion deposition cavity, the atmosphere enters the boat support 10 and contacts the battery cells in the boat body 20.

[0061] The aforementioned boat support 10, carrier assembly 1, and deposition apparatus, with multiple boat bodies 20 located within the installation space 112 and arranged along the length X of the boat support 10, provide the deposition atmosphere. The atmosphere for deposition enters the installation space 112 through the first opening, the second opening, each first air inlet 111, and each second air inlet 121, and is deposited on the solar cells within each boat body 20. Because the crossbeams are eliminated, the installation space 112 can extend continuously along the length X of the boat support 10, thus there are no crossbeams obstructing either adjacent boat bodies 20. Therefore, within the installation space 112, the atmosphere is not affected or restricted by the crossbeams, allowing the atmosphere to uniformly contact the solar cells within each boat body 20 and uniformly deposit a film layer of suitable thickness on the solar cells of each boat body 20, resulting in uniform and good deposition effect. Therefore, in this application, by omitting the crossbeams, the adverse effects of the crossbeams on deposition are eliminated, optimizing the deposition effect of the solar cells and improving the yield and productivity of the solar cells.

[0062] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0063] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A boat support, characterized in that, The boat support includes two end plates (11) and two side plates (12). The two end plates (11) are spaced apart along the length direction (X) of the boat support, and each end plate (11) has a first air inlet (111). The two side plates (12) are spaced apart along the width direction (Y) of the boat support, and each side plate (12) is connected between the two end plates (11). The two side plates (12) and the two end plates (11) together form an installation space (112) that extends continuously along the length direction (X) of the boat support. The side plate (12) is provided with a plurality of second air inlets (121) and a plurality of limiting grooves (122). All the second air inlets (121) and all the limiting grooves (122) on the side plate (12) are arranged at intervals along the length direction (X) of the boat support. The first air inlet (111), the second air inlet (121) and the limiting groove (122) are all connected to the installation space (112), and the limiting groove (122) is used to limit the mounting plate (24) of the boat body (20).

2. The boat support according to claim 1, characterized in that, The first air inlets (111) on the two end plates (11) have completely overlapping orthographic projections in the length direction (X) of the boat support; the second air inlets (121) on the two side plates (12) correspond one-to-one, and the corresponding second air inlets (121) on the two side plates (12) have completely overlapping orthographic projections in the width direction (Y) of the boat support.

3. The boat support according to claim 1, characterized in that, Both the first air inlet (111) and the second air inlet (121) are strip-shaped holes. The first air inlet (111) extends along the width direction (Y) of the boat support, and the second air inlet (121) extends along the length direction (X) of the boat support.

4. The boat support according to claim 1, characterized in that, A limiting groove (122) is provided between every two adjacent second air inlets (121) on the side plate (12).

5. The boat support according to claim 4, characterized in that, A reinforcing section (123) is formed between each pair of adjacent second air inlets (121) on the side plate (12).

6. The boat support according to claim 1, characterized in that, The limiting groove (122) extends through the side plate (12) along the width direction (Y) of the boat support.

7. The boat support according to claim 1, characterized in that, The top surface of the side plate (12) is recessed to form the limiting groove (122).

8. The boat support according to claim 1, characterized in that, The boat support also includes a buffer (13), which corresponds one-to-one with the limiting groove (122), and the buffer (13) covers the groove wall of the corresponding limiting groove (122).

9. A load-bearing component, characterized in that, The supporting component includes: a boat support as described in any one of claims 1 to 8; and a plurality of boat bodies (20), all of which are continuously arranged in the installation space (112) along the length direction (X) of the boat support. Each boat body (20) includes a main body and a mounting plate (24) disposed on opposite sides of the main body. The mounting plate (24) is confined within the limiting groove (122) located on the same side as it.

10. A deposition apparatus, characterized in that, The deposition apparatus includes: a deposition body having a diffusion deposition cavity therein; and a support component as described in claim 9, the support component being disposed within the diffusion deposition cavity.

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