Safety equipment for monitoring pressure of tungsten hexafluoride reactor

Abstract

The utility model discloses safety equipment for monitoring the pressure of a tungsten hexafluoride reactor. The safety equipment comprises a controller and a reaction kettle, the controller is mounted on one side of the reaction kettle, the wireless transceiver module is mounted on the upper side of the controller, the uninterruptible power supply is mounted at the bottom end of the controller, the electronic pressure gauge is mounted on one side of the upper end of the reaction kettle, and the electromagnetic safety valve is mounted on the other side of the upper end of the reaction kettle; one end of the electromagnetic safety valve and one end of the electronic pressure gauge are provided with wires, the tail ends of the wires are connected with a controller through a conductive mechanism, and one end of the electromagnetic safety valve is provided with a guide pipe. According to the utility model, the wireless transceiver module can realize data transmission and remote interaction between the controller and external equipment or a monitoring center, so that a worker can remotely master the running state of the equipment; and the uninterruptible power supply can continuously supply power to the controller under the condition of sudden power failure, so that normal operation of pressure monitoring and safety protection functions is ensured, and dangers caused by out-of-control equipment due to power failure are avoided.

Description

Technical Field

[0001] This utility model relates to the field of pressure monitoring technology, specifically a safety device for pressure monitoring of tungsten hexafluoride reactors. Background Technology

[0002] Tungsten hexafluoride is a colorless gas or pale yellow liquid, and the solid form is a deliquescent white crystal that fumes in moist air. It is mainly used in the chemical vapor deposition of tungsten as a fluorinating agent. The processing of tungsten hexafluoride requires a reactor, and the pressure in the reactor must be monitored during operation.

[0003] Chinese Patent No. 201621337024.7 discloses a novel intelligent reactor pressure monitoring device, comprising a cylinder, a support, an upper head, a sealing device, a frame, a reducer, a motor, a lower head, a stirring paddle, a pressure sensor, a microcontroller, and a display panel. The lower head is located below the cylinder; the support is located on the outer side of the cylinder; the display panel is located below the support; the upper head is located above the cylinder; the sealing device is located above the upper head; the pressure sensor is located below the upper head; the frame is located above the sealing device; the reducer is located above the frame; the microcontroller is located on the outer side of the frame; the motor is located above the reducer; and the stirring paddle is located below the reducer.

[0004] During use, this utility model cannot remotely transmit the monitored content, and the monitoring equipment cannot operate normally when the power is off. Utility Model Content

[0005] The purpose of this invention is to provide a safety device for pressure monitoring in tungsten hexafluoride reactors, in order to solve the problems raised in the prior art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a safety device for pressure monitoring in a tungsten hexafluoride reactor, comprising a controller and a reactor; the controller is installed on one side of the reactor, a wireless transceiver module is installed on the upper side of the controller, an uninterruptible power supply is installed at the bottom of the controller, an electronic pressure gauge is installed on one side of the upper end of the reactor, and an electromagnetic safety valve is installed on the other side of the upper end of the reactor; both the electromagnetic safety valve and the electronic pressure gauge have wires installed at one end, the ends of the wires are connected to the controller through a conductive mechanism, a conduit is installed at one end of the electromagnetic safety valve, the end of the conduit is connected to a filter mechanism, and the filter mechanism is installed on one side of the reactor.

[0007] Preferably, a display is mounted on the upper side of the controller, and control buttons are mounted on the upper side of the controller below the display.

[0008] Preferably, a voice prompt device is installed on one side of the upper end of the controller.

[0009] Preferably, the filtration mechanism consists of a filter box and filter media, with the filter box installed on one side of the reactor and the filter media filling the inside of the filter box.

[0010] Preferably, the filter box is provided with multiple partitions, which are welded to the inside of the filter box at intervals.

[0011] Preferably, the conductive mechanism consists of a conductive plug and a conductive socket. The conductive plug is installed at the end of a wire, the conductive socket is installed on the upper side of the controller, and the conductive plug is inserted into the conductive socket.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. The wireless transceiver module enables data transmission and remote interaction between the controller and external devices or the monitoring center, allowing staff to remotely monitor the equipment's operating status; the uninterruptible power supply can continuously supply power to the controller in the event of a sudden power outage, ensuring the normal operation of pressure monitoring and safety protection functions, and preventing danger caused by equipment malfunction due to power outage;

[0014] 2. When the pressure inside the reactor reaches or exceeds the preset danger value, the controller will trigger the voice prompt device to issue a clear and loud voice alarm, reminding on-site personnel that the equipment is in a dangerous state and that timely measures need to be taken. Compared with simple light or buzzer alarms, voice prompts can attract the attention of staff more quickly and effectively. Especially in noisy working environments, it can ensure accurate information transmission and avoid delays in handling due to failure to detect alarms in time.

[0015] 3. In the filtration mechanism, the gas discharged from the reactor enters the filter box through the conduit. The filter material is filled inside the filter box. Due to its special physical or chemical properties, it can adsorb and filter impurities, harmful substances or unreacted tungsten hexafluoride in the gas, purifying the discharged gas and preventing environmental pollution or damage to downstream equipment.

[0016] 4. When using the conductive mechanism, during equipment assembly or connection, the conductive plug is accurately inserted into the conductive socket to form a stable electrical connection path, enabling smooth transmission of electrical signals between the electronic pressure gauge, electromagnetic safety valve, and controller. This plug-in connection method facilitates equipment installation, maintenance, and repair. When a component malfunctions, it can be quickly disassembled and replaced, improving the maintainability and work efficiency of the equipment. Attached Figure Description

[0017] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the controller of this utility model;

[0020] Figure 3 This is a schematic diagram of the internal structure of the filtration mechanism of this utility model;

[0021] Figure 4 This is a schematic diagram of the structure of the electronic pressure gauge of this utility model.

[0022] In the diagram: 1. Reactor; 2. Controller; 3. Filtering mechanism; 4. Conduit; 5. Electromagnetic safety valve; 6. Electronic pressure gauge; 7. Wire; 8. Conductive mechanism; 9. Filter box; 10. Filter media; 11. Partition; 12. Conductive socket; 13. Protective cover; 14. Self-cleaning layer; 15. Display; 16. Voice prompt; 17. Wireless transceiver module; 18. Uninterruptible power supply; 19. Control buttons; 20. Conductive plug. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Please see Figure 1 , Figure 2 , Figure 3 , Figure 4In this embodiment of the present invention, a safety device for pressure monitoring of a tungsten hexafluoride reactor includes a controller 2 and a reactor 1. The controller 2 is installed on one side of the reactor 1, with a wireless transceiver module 17 installed on its upper side and an uninterruptible power supply 18 installed at its bottom. An electronic pressure gauge 6 is installed on one side of the upper end of the reactor 1, and an electromagnetic safety valve 5 is installed on the other side of the upper end of the reactor 1. Both the electromagnetic safety valve 5 and the electronic pressure gauge 6 have wires 7 installed at one end, and the ends of the wires 7 are connected to the controller 2 via a conductive mechanism 8. A conduit 4 is installed at one end of the electromagnetic safety valve 5, and the end of the conduit 4 is connected to a filter mechanism 3, which is installed on one side of the reactor. A display 15 is installed on the upper side of the controller 2, and control buttons 19 are installed below the display 15 on the upper side of the controller 2. The display 15 displays key information such as the pressure value inside the reactor 1 and the equipment operating status in real time. The controller 2 provides operators with intuitive information about the equipment's operation. Control buttons 19 allow operators to manually set pressure thresholds, adjust equipment parameters, and start or stop related functions, enabling personalized control. For example, operators can flexibly set upper and lower pressure limits using control buttons 19 according to different reaction process requirements, adapting the equipment to diverse production scenarios. A voice prompt 16 is installed on one side of the upper part of the controller 2. When the pressure inside the reactor 1 reaches or exceeds the preset danger value, the controller 2 will trigger the voice prompt 16, emitting a clear and loud voice alarm to remind on-site personnel that the equipment is in a dangerous state and requires immediate action. Compared to simple light or buzzer alarms, voice prompts can attract the attention of staff more quickly and effectively, especially in noisy working environments, ensuring accurate information transmission and avoiding delays in handling due to failure to detect alarms in time.

[0025] The filtration mechanism 3 consists of a filter box 9 and filter media 10. The filter box 9 is installed on one side of the reactor 1, and the filter media 10 is filled inside the filter box 9. In the filtration mechanism 3, the gas discharged from the reactor 1 enters the filter box 9 through the conduit 4. The filter media 10 fills the filter box 9. Due to its special physical or chemical properties, it can adsorb and filter impurities, harmful substances or unreacted tungsten hexafluoride in the gas, purify the discharged gas, and prevent environmental pollution or damage to downstream equipment.

[0026] The filter box 9 is equipped with multiple partitions 11, which are welded at intervals inside the filter box 9. The partitions 11 divide the internal space of the filter box 9 into multiple independent filtration areas. When the gas passes through the filter box 9, it needs to change its flow direction multiple times to fully contact the filter material 10, which prolongs the residence time of the gas in the filter box 9, significantly improves the filtration effect, and ensures that the discharged gas meets the safety emission standards.

[0027] The conductive mechanism 8 consists of a conductive plug 20 and a conductive socket 12. The conductive plug 20 is installed at the end of the wire 7, and the conductive socket 12 is installed on the upper side of the controller 2. The conductive plug 20 is inserted into the conductive socket 12. When the equipment is assembled or connected, the conductive plug 20 is accurately inserted into the conductive socket 12 to form a stable electrical connection path, so that the electronic pressure gauge 6 and the electromagnetic safety valve 5 can smoothly transmit electrical signals with the controller 2. This plug-in connection method facilitates the installation, maintenance and repair of the equipment. When a component fails, it can be quickly disassembled and replaced, improving the maintainability and working efficiency of the equipment.

[0028] The working principle and usage process of this utility model are as follows: The controller 2, as the core "brain" of the entire equipment, is connected to the electronic pressure gauge 6 and the electromagnetic safety valve 5 via the wire 7. It receives real-time gas pressure data inside the reactor 1 transmitted by the electronic pressure gauge 6. When the reactor 1 is operating normally, the electronic pressure gauge 6 continuously monitors the internal pressure and converts the data into an electrical signal, which is transmitted to the controller 2 via the conductive mechanism 8 through the wire 7. Once the pressure data received by the controller 2 exceeds the preset safety threshold, it will send an opening command to the electromagnetic safety valve 5 through the wire 7 according to the preset program, causing the electromagnetic safety valve 5 to open rapidly and discharge the gas inside the reactor 1 through the conduit 4 to reduce the internal pressure and ensure the safety of the reactor 1. The wireless transceiver module 17 enables data transmission and remote interaction between the controller 2 and external devices or the monitoring center, so that the staff can remotely monitor the operating status of the equipment. In the event of a sudden power outage, the uninterruptible power supply 18 can continuously supply power to the controller 2 to ensure the normal operation of the pressure monitoring and safety protection functions and avoid the danger caused by the equipment losing control due to power failure.

[0029] Finally, it should be noted that the above are merely preferred embodiments of this utility model and are not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A safety device for pressure monitoring in a tungsten hexafluoride reactor, comprising a controller (2) and a reactor (1); characterized in that: The controller (2) is installed on one side of the reactor (1). A wireless transceiver module (17) is installed on the upper side of the controller (2). An uninterruptible power supply (18) is installed at the bottom of the controller (2). An electronic pressure gauge (6) is installed on one side of the upper end of the reactor (1). An electromagnetic safety valve (5) is installed on the other side of the upper end of the reactor (1). A wire (7) is installed at one end of both the electromagnetic safety valve (5) and the electronic pressure gauge (6). The end of the wire (7) is connected to the controller (2) through a conductive mechanism (8). A conduit (4) is installed at one end of the electromagnetic safety valve (5). The end of the conduit (4) is connected to a filter mechanism (3). The filter mechanism (3) is installed on one side of the reactor.

2. The safety device for pressure monitoring in a tungsten hexafluoride reactor according to claim 1, characterized in that: A display (15) is mounted on the upper side of the controller (2), and control buttons (19) are mounted on the upper side of the controller (2) below the display (15).

3. A safety device for pressure monitoring in a tungsten hexafluoride reactor according to claim 1, characterized in that: A voice prompt device (16) is installed on one side of the upper end of the controller (2).

4. A safety device for pressure monitoring in a tungsten hexafluoride reactor according to claim 1, characterized in that: The filtration mechanism (3) consists of a filter box (9) and a filter material (10). The filter box (9) is installed on one side of the reactor (1), and the filter material (10) is filled inside the filter box (9).

5. A safety device for pressure monitoring in a tungsten hexafluoride reactor according to claim 4, characterized in that: The filter box (9) is provided with multiple partitions (11), which are welded at intervals inside the filter box (9).

6. A safety device for pressure monitoring in a tungsten hexafluoride reactor according to claim 1, characterized in that: The conductive mechanism (8) consists of a conductive plug (20) and a conductive socket (12). The conductive plug (20) is installed at the end of the wire (7), and the conductive socket (12) is installed on the upper side of the controller (2). The conductive plug (20) is inserted into the conductive socket (12).

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