Semiconductor cleaning fluid adding system

Abstract

The utility model discloses a semiconductor cleaning liquid adding system which comprises a liquid storage tank, a group of cleaning tanks arranged at equal intervals are arranged on the right side of the liquid storage tank, a pump body is installed on the upper surface of the liquid storage tank, and the input end of the pump body is fixedly communicated with a liquid pumping pipe. The bottom end of the liquid pumping pipe penetrates through the liquid storage tank and extends to the bottom of the liquid storage tank, the output end of the pump body is fixedly communicated with a liquid discharging pipe, and the outer surface of the liquid discharging pipe is fixedly communicated with a group of liquid distributing pipes. Through cooperation of the liquid storage tank, the controller, the liquid discharge pipe, the liquid distribution pipe, a liquid level meter and an electromagnetic valve, the liquid level meter is used for monitoring a cleaning agent, the controller can start a pump body to work in time and open the electromagnetic valve, and therefore the effect of automatically filling the cleaning agent into the cleaning tank can be achieved; the shielding cover can be fixed to the top of the liquid level meter through the connecting rod, the top of the liquid level meter can be protected, and therefore normal work of the liquid level meter is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor cleaning technology, and in particular to a semiconductor cleaning fluid dispensing system. Background Technology

[0002] In semiconductor manufacturing, the cleaning step is a crucial step in ensuring product quality. This process typically requires a large amount of cleaning fluid to effectively remove surface contaminants and residues. When semiconductor materials are separated from the cleaning fluid, some of the cleaning fluid is often carried away with them. This phenomenon not only reduces the concentration of the cleaning fluid but may also affect the effectiveness and efficiency of subsequent cleaning processes. Therefore, in order to maintain the optimal performance of the cleaning fluid and ensure the effectiveness of the cleaning process, the cleaning fluid must be replenished regularly.

[0003] Current cleaning fluid filling systems require operators to check the remaining amount of cleaning fluid before determining whether to add more. They cannot automatically complete the filling process. To address this issue, we propose a semiconductor cleaning fluid filling system. Utility Model Content

[0004] The purpose of this invention is to provide a semiconductor cleaning fluid dispensing system to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A semiconductor cleaning fluid filling system includes a storage tank. A set of cleaning tanks arranged at equal intervals is disposed on the right side of the storage tank. A pump body is mounted on the upper surface of the storage tank. A suction pipe is fixedly connected to the input end of the pump body. The bottom end of the suction pipe penetrates the storage tank and extends to the bottom of the storage tank. A drain pipe is fixedly connected to the output end of the pump body. A set of distribution pipes is fixedly connected to the outer surface of the drain pipe. A ring-shaped connecting rod is fixedly connected to the outer surface of each distribution pipe. A shield is fixedly connected to the bottom end of each set of connecting rods. A level gauge is mounted on the bottom surface of the shield. A solenoid valve is disposed on the outer surface of each distribution pipe. A controller is mounted on the front of the storage tank.

[0007] In a further embodiment, a support plate is fixedly connected to the outer surface of the liquid storage tank, and a set of equally spaced pillars are fixedly connected to the upper surface of the support plate, with the top of each pillar connected to the outer surface of the drain pipe.

[0008] In a further embodiment, each of the cleaning tanks has a partition fixedly connected to its inner wall.

[0009] In a further embodiment, a liquid level window is fixedly embedded on the front of the liquid storage tank.

[0010] In a further embodiment, the bottom surface of the liquid storage tank is fixedly connected with a ring of supporting legs, each of which is located on the edge side of the bottom of the liquid storage tank.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] This device, through the coordination of a storage tank, controller, drain pipe, distribution pipe, level gauge, and solenoid valve, uses the level gauge to monitor the cleaning agent. The controller can promptly start the pump and open the solenoid valve, thus automatically adding cleaning agent into the cleaning tank. A connecting rod and a shield are used to fix the shield to the top of the level gauge, protecting the top of the level gauge and ensuring its normal operation. Attached Figure Description

[0013] Figure 1 A three-dimensional structural diagram of a semiconductor cleaning fluid dosing system.

[0014] Figure 2 A top view of the cleaning tank of a semiconductor cleaning fluid dosing system, representing a three-dimensional structure.

[0015] Figure 3 A three-dimensional structural schematic diagram of the cleaning tank side sectional view of the semiconductor cleaning fluid dosing system.

[0016] In the diagram: 1. Storage tank; 2. Suction pipe; 3. Pump body; 4. Divider pipe; 5. Drain pipe; 6. Support column; 7. Support plate; 8. Partition plate; 9. Cleaning tank; 10. Support leg; 11. Liquid level window; 12. Controller; 13. Solenoid valve; 14. Connecting rod; 15. Shielding cover; 16. Liquid level gauge. Detailed Implementation

[0017] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Please see Figure 1-3 In this utility model, a semiconductor cleaning fluid addition system includes a storage tank 1, which can be used to store the cleaning agent.

[0020] A liquid level window 11 is fixedly embedded on the front of the liquid storage tank 1. The liquid level window 11 allows staff to easily observe the remaining cleaning agent inside the liquid storage tank 1 and add cleaning agent in a timely manner.

[0021] The bottom surface of the liquid storage tank 1 is fixedly connected with a ring of supporting legs 10. Each supporting leg 10 is located on the edge side of the bottom of the liquid storage tank 1, and the supporting legs 10 can provide stable support for the liquid storage tank 1.

[0022] A set of cleaning tanks 9 arranged at equal intervals is provided on the right side of the storage tank 1. A pump body 3 is installed on the upper surface of the storage tank 1. The input end of the pump body 3 is fixedly connected to the suction pipe 2. The bottom end of the suction pipe 2 passes through the storage tank 1 and extends to the bottom of the storage tank 1. The output end of the pump body 3 is fixedly connected to the drain pipe 5. A distribution pipe 4 is fixedly connected to the outer surface of the drain pipe 5. The pump body 3 can draw the cleaning agent, and the drain pipe 5 will divert the cleaning agent to the inner wall of the distribution pipe 4, thereby completing the addition of cleaning agent inside the cleaning tank 9.

[0023] A support plate 7 is fixedly connected to the outer surface of the liquid storage tank 1. A set of equally spaced support columns 6 are fixedly connected to the upper surface of the support plate 7. The top of each support column 6 is connected to the outer surface of the drain pipe 5. The drain pipe 5 can be supported and fixed by the cooperation of the support plate 7 and the support column 6.

[0024] Each dispensing tube 4 has a ring of connecting rods 14 fixedly connected to its outer surface. The bottom of each set of connecting rods 14 is fixedly connected to a shield 15. A level gauge 16 is installed on the bottom surface of the shield 15. The connection of the connecting rods 14 and the shield 15 can fix the level gauge 16. At the same time, the shield 15 can shield the top of the level gauge 16, which can prevent the level gauge 16 from being damaged by the cleaning agent.

[0025] Each dispensing tube 4 is equipped with a solenoid valve 13 on its outer surface. A controller 12 is installed on the front of the storage tank 1. The controller 12 can be used to set the liquid level value of the level gauge 16. When the level gauge 16 detects a low liquid level value, the controller 12 will start the pump body 3 and open the solenoid valve 13 to complete the filling of the cleaning agent. At the same time, when the level gauge 16 detects the highest value of the cleaning agent, the controller 12 will stop the pump body 3 and close the solenoid valve 13, thereby automatically completing the filling of the cleaning agent.

[0026] Each cleaning tank 9 has a partition 8 fixedly connected to its inner wall. The partition 8 can be used to divide the inside of the cleaning tank 9 into a cleaning area and a cleaning fluid filling area to prevent collisions between the semiconductor and the liquid distribution pipe 4 and the liquid level gauge 16 during the cleaning process.

[0027] The working principle of this utility model is as follows: When cleaning agent needs to be added, the level gauge 16 is inserted into the corresponding cleaning tank 9, and the level value is set by the controller 12. When the level gauge 16 detects that the liquid level value inside the cleaning tank 9 is low, the controller 12 will start the pump body 3 and open the corresponding solenoid valve 13. The pump body 3 will draw the cleaning agent inside the storage tank 1 into the drain pipe 5 and then enter the corresponding cleaning tank 9 through the distribution pipe 4 until the liquid level inside the cleaning tank 9 reaches the highest value set by the level gauge 16. At this point, the controller 12 will stop the pump body 3 and close the corresponding solenoid valve 13, thus achieving the effect of automatic cleaning agent addition.

[0028] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0029] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A semiconductor cleaning fluid dispensing system, characterized in that: The system includes a storage tank (1), with a set of cleaning tanks (9) arranged at equal intervals on the right side of the storage tank (1). A pump body (3) is installed on the upper surface of the storage tank (1). The input end of the pump body (3) is fixedly connected to a suction pipe (2). The bottom end of the suction pipe (2) passes through the storage tank (1) and extends to the bottom of the storage tank (1). The output end of the pump body (3) is fixedly connected to a drain pipe (5). A set of distribution pipes (4) is fixedly connected to the outer surface of the drain pipe (5). Each distribution pipe (4) has a ring-shaped connecting rod (14) fixedly connected to its outer surface. The bottom ends of each set of connecting rods (14) are connected together. A shield (15) is fixedly connected to the liquid storage tank (1). A liquid level gauge (16) is installed on the bottom surface of the shield (15). A solenoid valve (13) is provided on the outer surface of each liquid distribution pipe (4). A controller (12) is installed on the front of the liquid storage tank (1). A support plate (7) is fixedly connected to the outer surface of the liquid storage tank (1). A set of equally spaced pillars (6) is fixedly connected to the upper surface of the support plate (7). The top of each pillar (6) is connected to the outer surface of the drain pipe (5). A partition plate (8) is fixedly connected to the inner wall of each cleaning tank (9). A liquid level window (11) is fixedly embedded on the front of the liquid storage tank (1).

2. The semiconductor cleaning fluid dispensing system according to claim 1, characterized in that: The bottom surface of the liquid storage tank (1) is fixedly connected with a ring of supporting legs (10), each of which is located on the edge side of the bottom of the liquid storage tank (1).

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