Joint cleaning device and semiconductor device

Abstract

The utility model discloses a joint cleaning device and semiconductor equipment, the joint cleaning device comprises a linear telescopic structure, and the output end of the linear telescopic structure has an extension state and a retraction state; the connector cleaning device further comprises a purging structure connected with the output end, the purging structure is provided with a jet orifice, and the jet orifice is aligned with the connector when the output end is in an extending state. The output end is controlled by the linear telescopic structure to retract and avoid so as to provide an operation space for joint replacement, and after the joint replacement is completed, the linear telescopic structure stretches out so that the jet orifice of the purging structure can be accurately aligned with the joint for purging and cleaning. Through the combination of the linear telescopic structure and the purging structure, the connector cleaning device provided by the embodiment of the utility model can keep the cleanliness of the connector through the positioning purging of the jet orifice in the steel cylinder replacement process, so that the problem of incomplete manual cleaning is avoided, the direct contact between the connector and the external environment is avoided, and the service life of the connector is prolonged. Therefore, pollution of impurities to the connector is effectively prevented.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, and in particular to a connector cleaning device and a semiconductor device. Background Technology

[0002] The semiconductor industry is a crucial pillar of modern industry, and its manufacturing processes place extremely high demands on the cleanliness of the process environment. In semiconductor production, the purity of specialty gases directly affects product yield and quality. Therefore, specialty gas distribution systems play a critical role in semiconductor manufacturing processes, and their design and operation must ensure that the cleanliness of the gases consistently meets stringent standards.

[0003] Specialty gas cabinets in specialty gas distribution systems are typically located in non-clean areas of semiconductor manufacturing plants, a layout that facilitates maintenance and operation. Changing gas cylinders is a routine operation during the use of these cabinets. However, during this process, the cylinder connections are inevitably exposed to ambient air containing particulate matter, which can potentially enter the gas piping system through these connections.

[0004] Current industry-standard cleaning solutions have significant drawbacks. First, wiping cylinder connectors with lint-free cloths relies on manual operation, making it difficult to guarantee standardized and consistent cleaning results. Second, while multiple purging cycles can remove some particles, even a small number of particles passing through can accelerate wear on valve diaphragms. These problems lead to internal leakage in valves, shorten their lifespan, and ultimately affect the reliability and gas purity of the specialty gas delivery system. Therefore, there is an urgent need to develop a more effective cleaning solution for cylinder connectors. Utility Model Content

[0005] The problem solved by this invention is to provide a connector cleaning device and a semiconductor device to improve the cleanliness of the connector during the replacement of gas cylinders.

[0006] To address the aforementioned problems, this utility model provides a connector cleaning device for cleaning the connector at the end of a connecting pipe. The device includes: a linear telescopic structure with an output end that has two states: extended and retracted; and a purging structure connected to the output end, the purging structure including an airflow channel and a spray nozzle communicating with the airflow channel, the spray nozzle being used to align with the connector when the output end is extended.

[0007] Optionally, the purging structure is annular, and the injection port is provided on the inner peripheral sidewall of the purging structure.

[0008] Optionally, the injection nozzles are arranged at equal angular intervals along the circumference on the inner peripheral sidewall, and the injection nozzles are aligned with the center of the purging structure.

[0009] Optionally, the connector cleaning device further includes a fixing bracket for fixing the output end of the linear telescopic structure to the purging structure.

[0010] Optionally, the fixed bracket includes: a connecting plate, which is fixedly connected to the output end of the linear telescopic structure; and a fixing ring, one end of which is fixedly connected to the connecting plate and the other end of which is fixedly connected to the purging structure.

[0011] Optionally, the linear telescopic structure includes a cylinder, with the output end disposed on the cylinder; the connector cleaning device further includes an air supply unit, which includes a first air path connected to the cylinder to control the extension or retraction of the output end; and a second air path connected to the purging structure to provide purging gas.

[0012] Optionally, the connector cleaning device further includes: a first solenoid valve, disposed in the first air path, wherein when the first solenoid valve is open, the output end extends and when the first solenoid valve is closed, the output end retracts; a second solenoid valve, disposed in the second air path, wherein when the second solenoid valve is open, the purging structure performs purging and when the second solenoid valve is closed, the purging structure stops purging; and a controller, connected to the first solenoid valve and the second solenoid valve, for controlling the opening or closing of the first solenoid valve and the second solenoid valve.

[0013] Optionally, the connector cleaning device further includes: a pressure gauge, disposed on the connecting pipe, for detecting the pressure at the connector and transmitting the detected pressure value to the controller; when the pressure detected by the pressure gauge drops below a first preset pressure value, controlling the first solenoid valve and the second solenoid valve to open; when the pressure detected by the pressure gauge reaches a second preset pressure value, controlling the first solenoid valve to remain open and controlling the second solenoid valve to close, wherein the second preset pressure value is greater than the first preset pressure value.

[0014] Optionally, the gas supplied by the gas supply unit includes nitrogen.

[0015] This utility model also provides a semiconductor device, which includes: a special gas cabinet; a connecting pipe disposed on the special gas cabinet; a connector disposed at the end of the connecting pipe; the connector cleaning device includes a linear telescopic structure disposed on the connecting pipe for cleaning the connector.

[0016] Compared with the prior art, the technical solution of this utility model has the following advantages:

[0017] The connector cleaning device provided in this embodiment of the invention is used to clean connectors during cylinder replacement. The connector cleaning device includes a linear telescopic structure with an extended and retracted output end. The device also includes a blowing structure connected to the output end, which has an airflow channel and a spray nozzle communicating with the airflow channel. When the output end is extended, the spray nozzle is aligned with the connector. The linear telescopic structure controls the output end to retract, providing operating space for cylinder replacement. After cylinder replacement, the linear telescopic structure extends, allowing the spray nozzle of the blowing structure to accurately align with the connector for cleaning. Through the combination of the linear telescopic structure and the blowing structure, the connector cleaning device provided in this embodiment of the invention can maintain the cleanliness of the connector during cylinder replacement by positioning and blowing through the spray nozzle, avoiding the problem of incomplete manual cleaning and preventing direct contact between the connector and the external environment, thereby effectively preventing contamination of the connector by impurities.

[0018] In an optional embodiment, the connector cleaning device further includes: a first solenoid valve, disposed in the first air path; when the first solenoid valve is open, the output end extends; when the first solenoid valve is closed, the output end retracts; a second solenoid valve, disposed in the second air path; when the second solenoid valve is open, the purging structure performs purging; when the second solenoid valve is closed, the purging structure stops purging; and a controller, connected to the first and second solenoid valves, for controlling the opening and closing of the first and second solenoid valves. The connector cleaning device also includes: a pressure gauge, disposed on the connecting pipe, for detecting the pressure at the connector and transmitting the detected pressure value to the controller; the controller receives the pressure signal from the pressure gauge and controls the first and second solenoid valves to open when the pressure detected by the pressure gauge drops below a first preset pressure value; and controls the first solenoid valve to remain open and the second solenoid valve to close when the pressure detected by the pressure gauge reaches a second preset pressure value, wherein the second preset pressure value is greater than the first preset pressure value. By installing a pressure gauge at the connector to detect the pressure and transmitting the pressure signal to the controller, a trigger indication is provided for the controller to automatically control the opening and closing of the first and second solenoid valves. This avoids the uncertainties of traditional manual operation and significantly improves the reliability and efficiency of connector cleaning. During cylinder replacement, the pressure in the connecting pipe decreases. When the pressure drops below a first preset pressure value, both the first and second solenoid valves open simultaneously. When the pressure reaches the first preset pressure value, the first solenoid valve remains open, while the second solenoid valve closes.

[0019] This utility model embodiment also provides a semiconductor device, including a special gas cabinet; a connecting pipe disposed on the special gas cabinet; a connector disposed at the end of the connecting pipe; and a connector cleaning device including a linear telescopic structure disposed on the connecting pipe for cleaning the connector. By providing a connector cleaning device comprising a linear telescopic structure and a purging structure on the connecting pipe, when the connector needs cleaning, the linear telescopic structure drives its output end to extend, allowing the nozzle of the purging structure connected to the output end to accurately aim at the connector for purging and cleaning. This effectively prevents particulate matter from entering the valve surface and causing damage, achieving automatic cleaning of the connector, extending the valve's service life, and avoiding the problem of incomplete cleaning by traditional manual cleaning methods. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the joint cleaning device in an embodiment of this utility model, and Figure 1 The indicated state is that the first solenoid valve is closed and the second solenoid valve is closed;

[0021] Figure 2 This is a schematic diagram of the joint cleaning device in an embodiment of this utility model, and Figure 2 The state shown is that the first solenoid valve is open and the second solenoid valve is open.

[0022] Figure 3 This is a schematic diagram of the joint cleaning device in an embodiment of this utility model, and Figure 3 The state shown is that the first solenoid valve is open and the second solenoid valve is closed;

[0023] Figure 4 This is a functional block diagram of the controller, the first solenoid valve, the second solenoid valve, and the pressure gauge in an embodiment of this utility model. Detailed Implementation

[0024] As the background technology reveals, current cleaning solutions used in the semiconductor industry for gas cylinder replacement have significant shortcomings. First, wiping cylinder connectors with a lint-free cloth relies on manual operation, making it difficult to guarantee standardized and consistent cleaning results. Second, while multiple purging cycles can remove some particles, frequent particle passage accelerates wear on valve diaphragms. These problems lead to internal leakage in valves, shorten their lifespan, and ultimately affect the reliability and purity of the specialty gas delivery system. Therefore, there is an urgent need to develop a more effective cleaning solution for gas cylinder connectors.

[0025] To address the aforementioned problems, this utility model provides a connector cleaning device for cleaning the connector at the end of the connecting pipe during cylinder replacement. The connector cleaning device includes a linear telescopic structure with an extended and retracted output end. The device also includes a blowing structure connected to the output end, which has an airflow channel and a spray nozzle communicating with the airflow channel. When the output end is extended, the spray nozzle is aligned with the connector. The linear telescopic structure controls the output end to retract, providing operating space for cylinder replacement. After cylinder replacement, the linear telescopic structure extends, allowing the spray nozzle of the blowing structure to accurately align with the connector for cleaning. Through the combination of the linear telescopic structure and the blowing structure, the connector cleaning device provided in this utility model maintains the cleanliness of the connector during cylinder replacement through targeted blowing from the spray nozzle, avoiding the problem of incomplete manual cleaning and preventing direct contact between the connector and the external environment, thus effectively preventing contamination of the connector by impurities.

[0026] To make the above-mentioned objectives, features and advantages of the present invention more apparent and understandable, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0027] Figure 1 This is a schematic diagram of the joint cleaning device in an embodiment of this utility model, and Figure 1 The indicated state is that the first solenoid valve is closed and the second solenoid valve is closed; Figure 2 This is a schematic diagram of the joint cleaning device in an embodiment of this utility model, and Figure 2 The state shown is that the first solenoid valve is open and the second solenoid valve is open. Figure 3 This is a schematic diagram of the joint cleaning device in an embodiment of this utility model, and Figure 3 The state shown is that the first solenoid valve is open and the second solenoid valve is closed; Figure 4 This is a functional block diagram of the controller, the first solenoid valve, the second solenoid valve, and the pressure gauge in an embodiment of this utility model.

[0028] The connector cleaning device is used to clean the connector A at the end of the connecting pipe 500 during the replacement of special gas cylinders in the special gas cabinet. It includes: a linear telescopic structure 100, including an output end 100a, which has two states: extended and retracted; and a purging structure 200 connected to the output end 100a. The purging structure 200 includes an airflow channel (not shown in the figure) and a spray nozzle 201 communicating with the airflow channel. The spray nozzle 201 is used to align the connector A when the output end 100a is extended.

[0029] The connector cleaning device provided in this embodiment of the utility model is used to clean the connector at the end of the connecting pipe 500 during the replacement of a gas cylinder. The connector cleaning device includes a linear telescopic structure 100, whose output end 100a has two states: extended and retracted. The connector cleaning device also includes a blowing structure 200 connected to the output end 100a. The blowing structure 200 has an airflow channel and a spray nozzle 201 communicating with the airflow channel. When the output end 100a is extended, the spray nozzle 201 is aligned with the connector A. The linear telescopic structure 100 controls the output end 100a to retract and provide operating space for the gas cylinder replacement. After the gas cylinder replacement is completed, the linear telescopic structure 100 extends so that the spray nozzle 201 of the blowing structure 200 is accurately aligned with the connector A for blowing and cleaning. By combining the linear telescopic structure 100 with the purging structure 200, the connector cleaning device provided in this embodiment of the present invention can maintain the cleanliness of connector A by positioning and purging through the spray nozzle 201 during the replacement of the gas cylinder, avoiding the problem of incomplete manual cleaning, avoiding direct contact between connector A and the external environment, and thus effectively preventing impurities from contaminating connector A.

[0030] The linear telescopic structure 100 extends and retracts by driving the output end 100a. When the output end 100a retracts, it provides the necessary operating space for cylinder replacement. When the output end 100a extends, the spray nozzle 201 of the purging structure 200 can be aligned with the connector A for cleaning. This effectively avoids the problem of incomplete manual cleaning, making the entire cleaning process more automated and reliable, and improving the cleaning efficiency and quality of connector A.

[0031] In this embodiment, the linear telescopic structure 100 includes a cylinder, and the output end 100a is disposed on the cylinder. The extension and retraction actions are achieved by driving the output end 100a through the cylinder. The cylinder can directly use nitrogen gas already available in the special gas cabinet as the driving gas source, reducing system complexity and contamination risk. Furthermore, the cylinder has a simple structure and few moving parts, avoiding the generation of mechanical wear particles, and can meet the stringent cleanliness requirements in semiconductor manufacturing processes.

[0032] It should be noted that connector A is located at the end of connecting pipe 500. Connecting pipe 500 is used to transfer the special gas in the cylinder to the special gas holder (not shown in the figure).

[0033] It should also be noted that the linear telescopic structure 100 is installed on the connecting pipe 500 to provide a stable motion basis for the joint cleaning device.

[0034] In this embodiment, the purging structure 200 is annular, and the jet nozzle 201 is provided on the inner peripheral sidewall of the purging structure 200.

[0035] The purging structure 200 is annular, and a spray port 201 is provided on the inner peripheral side wall of the purging structure 200. When the purging structure 200 extends, it can form a circular purging area around the connector A, thereby generating a uniform positive pressure environment around the cylinder connector A. This effectively blocks external particles from contacting the cylinder connector A, avoids the problem of incomplete manual cleaning, and prevents the connector A from directly contacting the external environment, thus effectively preventing impurities from contaminating the connector A.

[0036] In this embodiment, the injection ports 201 are arranged at equal angular intervals along the circumference on the inner peripheral sidewall, and the injection ports 201 are aligned with the center of the purging structure 200. The number of injection ports 201 is six, eight, ten, or twelve.

[0037] The spray nozzles 201 are arranged at equal angular intervals along the circumference of the annular purging structure 200 and aligned with the center of the purging structure 200. By forming a uniform high-pressure purging area around the cylinder connector A, the connector A is cleaned in all directions without dead angles, thereby effectively preventing external particles from contacting the connector A. This ensures the cleanliness of the process gas and guarantees the cleanliness of the connector A.

[0038] In this embodiment, the connector cleaning device further includes a fixing bracket 300 for fixing the output end 100a of the linear telescopic structure 100 to the blowing structure 200.

[0039] The fixed bracket 300 fixes the output end 100a of the linear telescopic structure 100 to the blowing structure 200, realizing a stable connection between the output end 100a of the linear telescopic structure 100 and the blowing structure 200. This allows the blowing structure 200 to move with the output end 100a of the linear telescopic structure 100, thereby ensuring that the spray nozzle 201 of the blowing structure 200 can accurately align with the connector A for cleaning. This ensures the reliability and efficiency of the entire cleaning process, enabling the connector cleaning device to effectively prevent particulate matter from contaminating the connector A.

[0040] In this embodiment, the fixed bracket 300 includes: a connecting plate 301, which is fixedly connected to the output end 100a of the linear telescopic structure 100; and a fixing ring 302, one end of which is fixedly connected to the connecting plate 301, and the other end of which is fixedly connected to the purging structure 200.

[0041] As an example, the connecting plate 301 and the fixing ring 302 are connected by welding or other fixing methods.

[0042] In this embodiment, the connector cleaning device further includes an air supply unit (not shown in the figure), which includes a first air passage 401 connected to the cylinder to control the extension or retraction of the output end 100a; and a second air passage 402 connected to the purging structure 200 to provide purging gas.

[0043] The air supply unit controls the output end 100a through the first air passage 401, while the second air passage 402 is connected to the purging structure. After passing through the airflow channel, the gas is ejected from the injection port 201 to provide purging gas for the purging structure 200. Through the coordinated operation of the air supply unit, the cylinder, and the purging structure 200, the joint cleaning device can perform corresponding functions at different stages. For example, when the output end 100a retracts, the purging structure 200 stops purging; when the output end 100a extends, the purging structure 200 performs precise cleaning of the joint A.

[0044] In this embodiment, the gas supplied by the gas supply unit includes nitrogen. Nitrogen is an inert gas with stable chemical properties and will not react chemically with other substances; moreover, it will not contaminate the semiconductor process or introduce new impurities. In other embodiments, the gas supply unit may also supply other inert gases.

[0045] In this embodiment, the first air passage 401 is connected to the cylinder through the air passage connector 405, and the second air passage 402 is also connected to the airflow channel of the purging structure 200 through the air passage connector 405.

[0046] It should be noted that the gas supply unit includes a gas supply source (not shown in the figure), and both the first gas passage 401 and the second gas passage 402 are connected to the gas supply source.

[0047] In this embodiment, the connector cleaning device further includes: a first solenoid valve 401a, disposed in the first air passage 401; when the first solenoid valve 401a is open, the output end 100a extends; when the first solenoid valve 401a is closed, the output end 100a retracts; a second solenoid valve 402a, disposed in the second air passage 402; when the second solenoid valve 402a is open, the purging structure 200 performs purging; when the second solenoid valve 402a is closed, the purging structure 200 stops purging; and a controller 403 (e.g., Figure 4 As shown, it is connected to the first solenoid valve 401a and the second solenoid valve 402a, and is used to control the opening or closing of the first solenoid valve 401a and the second solenoid valve 402a.

[0048] The first solenoid valve 401a and the second solenoid valve 402a are controlled by the controller 403. The opening and closing of the first solenoid valve 401a controls the supply of air to the cylinder via the first air passage 401, enabling the cylinder to extend and retract. The opening and closing of the second solenoid valve 402a controls the supply of air to the purging structure 200 via the second air passage 402, enabling the cleaning operation of connector A when the output end 100a is extended. Through the coordination of the first solenoid valve 401a, the second solenoid valve 402a, and the controller 403, the cylinder and the purging structure 200 work collaboratively during the replacement of the special gas cylinder, which helps improve the cleanliness of the connector.

[0049] It should be noted that when the first solenoid valve 401a is open, the first air passage 401 is unobstructed, and the output end 100a of the linear telescopic structure 100 is in the extended position. When the first solenoid valve 401a is closed, the first air passage 401 is blocked, and the output end 100a of the linear telescopic structure 100 is in the retracted position. When the second solenoid valve 402a is open, the second air passage 402 is unobstructed, and the nozzle 201 of the purging structure 200 blows air into connector A for purging. When the second solenoid valve 402a is closed, the second air passage 402 is blocked, and the nozzle 201 of the purging structure 200 stops purging.

[0050] In this embodiment, the connector cleaning device further includes: a pressure gauge (not shown in the figure), which is installed on the connecting pipe 500 to detect the pressure at the connector A and transmit the detected pressure value to the controller 403; when the pressure detected by the pressure gauge drops below a first preset pressure value, the first solenoid valve 401a and the second solenoid valve 402a are controlled to open; when the pressure detected by the pressure gauge reaches a second preset pressure value, the first solenoid valve 401a is controlled to remain open, the second solenoid valve 402a is controlled to close, and the second preset pressure value is greater than the first preset pressure value.

[0051] A pressure gauge is installed on the connecting pipe 500 to detect the pressure in the connecting pipe 500 and transmit the pressure signal to the controller 403. This provides a trigger indication for the controller 403 to automatically control the opening and closing of the first solenoid valve 401a and the second solenoid valve 402a, avoiding the uncertainty of traditional manual operation and significantly improving the reliability and efficiency of cleaning connector A. During the cylinder replacement process, the pressure in the connecting pipe 500 decreases. When the pressure drops below a first preset pressure value, the first solenoid valve 401a and the second solenoid valve 402a open simultaneously; when the pressure reaches the first preset pressure value, the first solenoid valve 401a remains open, while the second solenoid valve 402a closes.

[0052] In this embodiment, a digital pressure gauge is used to accurately monitor the pressure at connector A, ensuring that the pressure signal is accurately transmitted to the controller 403.

[0053] In this embodiment, the controller 403 includes a programmable logic controller (PLC). The PLC 403 possesses strong anti-interference capabilities and environmental adaptability, enabling stable operation in semiconductor manufacturing environments and ensuring the reliability of the cleaning device. Therefore, it meets the stringent stability requirements of semiconductor manufacturing, resulting in high industrial-grade reliability for the entire system and improving overall equipment performance. Furthermore, the modular design of the PLC provides excellent expandability, allowing for flexible configuration of input / output interfaces according to actual needs. This facilitates easy connection with the first solenoid valve 401a and the second solenoid valve 402a, enabling flexible adjustments based on system requirements and enhancing system adaptability for future maintenance and upgrades.

[0054] It should be noted that the signal transmission between the controller 403 and the pressure gauge, the first solenoid valve 401a and the second solenoid valve 402a is a conventional setup in the art and will not be described in detail here.

[0055] The working process of the joint cleaning device can be divided into the following stages according to the time sequence:

[0056] First, the preparation phase. When it is necessary to replace the gas cylinder, the controller 403 first issues a command to close the first solenoid valve 401a and the second solenoid valve 402a. At this time, because the first solenoid valve 401a is closed, the air pressure in the first air passage 401 decreases, causing the output end 100a of the cylinder to be in a retracted state, providing sufficient operating space for the operator to replace the gas cylinder. At the same time, because the second solenoid valve 402a is closed, the second air passage 402 will not supply air to the purging structure 200.

[0057] Second, the extension positioning. When the pressure gauge detects that the pressure in the connecting pipe 500 has dropped below the first preset pressure value (e.g., 10 PSI), the controller 403 controls the first solenoid valve 401a and the second solenoid valve 402a to open. Nitrogen gas enters the cylinder through the first gas passage 401. Driven by the nitrogen gas pressure, the cylinder pushes the output end 100a to extend outward. Since the fixed bracket 300 firmly connects the purging structure 200 to the output end 100a, the purging structure 200 will move synchronously with the output end 100a until the injection port 201 on its inner circumferential sidewall is accurately aligned with the connector A.

[0058] Nitrogen gas is delivered to the purging structure 200 through the second gas path 402. Since the purging structure 200 adopts a ring structure and multiple injection ports 201 are arranged at equal angles along the circumference on its inner peripheral sidewall, all injection ports 201 are aligned with the center of the purging structure 200. Therefore, when nitrogen gas is ejected at high speed from these injection ports 201, a uniform annular purging area is formed around the cylinder connector A, generating a stable positive pressure environment. This achieves all-round, dead-angle-free cleaning of connector A and effectively prevents external particles from contacting connector A.

[0059] Third, the reset is completed. When the pressure gauge detects that the pressure in the connecting pipe 500 reaches the second preset pressure value (e.g., 100 PSI), the first solenoid valve 401a remains open, keeping the cylinder in the extended position and occupying the operating space required for loading and unloading the cylinder, preventing operator error. At the same time, the controller 403 controls the second solenoid valve 402a to close, and the second gas line 402 stops supplying purging nitrogen to the purging structure 200.

[0060] Throughout the entire operation, the programmable logic controller 403 plays a control role. It monitors the system pressure in real time and controls the opening and closing sequence of the first solenoid valve 401a and the second solenoid valve 402a to ensure the coordination between the output end 100a of the linear telescopic structure of the connector cleaning device and the purging structure 200.

[0061] The automated cleaning method of the connector cleaning device not only avoids the uncertainties of traditional manual cleaning methods, but also prevents particulate contamination from the source by maintaining a positive pressure environment around the gas cylinder connector A, effectively extending the service life of the valve and improving the reliability and stability of the entire special gas holder.

[0062] Continue to refer to Figures 1 to 4 This utility model also provides a semiconductor device, including: a special gas cabinet (not shown in the figure); a connecting pipe 500 disposed on the special gas cabinet; a connector A disposed at the end of the connecting pipe 500; and a connector cleaning device including a linear telescopic structure 100 disposed on the connecting pipe 500 for cleaning the connector A.

[0063] When the semiconductor device provided in this embodiment of the utility model is in operation, a connector cleaning device including a linear telescopic structure 100 and a blowing structure 200 is provided on the connecting pipe 500. When connector A needs to be cleaned, the linear telescopic structure 100 drives the output end 100a to extend, so that the spray nozzle 201 of the blowing structure 200 connected to the output end 100a can be accurately aimed at connector A for blowing and cleaning. This can effectively prevent particulate matter from entering the disc surface and damaging the valve, realize automatic cleaning of connector A, extend the service life of the valve, and thus avoid the problem of incomplete cleaning by traditional manual cleaning methods.

[0064] Specialty gas cabinets, as devices for distributing specialty gases in the semiconductor manufacturing process, are placed in non-clean areas of semiconductor manufacturing plants to provide infrastructure support for the storage and distribution of process specialty gases, thereby enabling control over the supply of specialty gases. This ensures the stability of the supply of specialty gases required for the semiconductor manufacturing process, allowing the entire manufacturing process to proceed smoothly.

[0065] The connecting pipe 500 is installed on the special gas holder to establish a physical channel for the transportation of special gas, thereby realizing a reliable connection between the gas cylinder and the gas holder system. This ensures the safe transportation of special gas and enables the entire special gas distribution system to operate stably.

[0066] Connector A is located at the end of the connecting pipe 500, thereby enabling rapid connection and sealing between the gas cylinder and the panel of the special gas cabinet. This ensures the airtightness and safety of the special gas transportation process, providing an important guarantee for the normal operation of the special gas distribution system. It also enables the replacement and supply of gas cylinders to be carried out safely and reliably, which is conducive to maintaining the continuity of the semiconductor manufacturing process.

[0067] In this embodiment, the linear telescopic structure 100 is disposed on the connecting pipe 500. The linear telescopic structure 100, disposed on the connecting pipe 500, provides a stable motion basis for the joint cleaning device, thereby enabling accurate positioning and effective cleaning of the cleaning device.

[0068] A linear telescopic structure 100 is fixedly mounted on a connecting pipe 500, and its output end 100a is connected to a purging structure 200 via a fixed bracket 300. The fixed bracket 300 includes a connecting plate 301 and a fixing ring 302. The connecting plate 301 is fixedly connected to the output end 100a of the linear telescopic structure 100, one end of the fixing ring 302 is fixedly connected to the connecting plate, and the other end of the fixing ring 302 is fixedly connected to the purging structure 200. When the output end 100a is extended, the spray nozzle 201 of the purging structure 200 can accurately align with connector A for purging and cleaning; when the output end 100a is retracted, it provides operating space for cylinder replacement. The entire system is controlled by a solenoid valve and a pneumatic system, achieving automated operation.

[0069] During the operation of the joint cleaning device, the steps performed include: linear control, used to control the extension and retraction of the linear telescopic structure 100; and purging control, used to control the purging and stopping of the purging structure. The joint cleaning device achieves control over the linear telescopic structure 100 and the purging structure 200, ensuring the automation and reliability of the joint A cleaning process, thus improving the working efficiency of the joint cleaning device.

[0070] Linear control is used to control the motion of the linear telescopic structure 100, ensuring that the output end 100a can retract the linear telescopic structure 100 according to process requirements. This provides the necessary operating space for cylinder replacement, thus ensuring the safety and reliability of the entire replacement process. At the output end 100a, the linear telescopic structure 100 extends as required. Then, purging control controls the operation of the purging structure 200, achieving directional purging of connector A. This ensures the cleanliness of connector A, effectively reducing the risk of particulate contamination and extending valve life.

[0071] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A connector cleaning device, characterized in that, Used for cleaning the joints at the ends of connecting pipes, including: A linear telescopic structure includes an output end, which has two states: extended and retracted. A purging structure is connected to the output end. The purging structure includes an airflow channel and a jet nozzle communicating with the airflow channel. The jet nozzle is used to align with the connector when the output end extends.

2. The joint cleaning device as described in claim 1, characterized in that, The purging structure is annular, and the injection port is provided on the inner peripheral sidewall of the purging structure.

3. The joint cleaning device as described in claim 2, characterized in that, The injection nozzles are arranged at equal angular intervals along the circumference on the inner peripheral sidewall, and the injection nozzles are aligned with the center of the purging structure.

4. The joint cleaning device as described in claim 2, characterized in that, The joint cleaning device also includes: A fixed bracket is used to fix the output end of the linear telescopic structure to the purging structure.

5. The joint cleaning device as described in claim 4, characterized in that, The fixing bracket includes: The connecting plate is fixedly connected to the output end of the linear telescopic structure; A fixing ring, one end of which is fixedly connected to the connecting plate, and the other end of which is fixedly connected to the purging structure.

6. The joint cleaning device as described in claim 1, characterized in that, The linear telescopic structure includes a cylinder, and the output end is disposed on the cylinder; The connector cleaning device further includes: an air supply unit, the air supply unit comprising: The first air passage is connected to the cylinder and controls the extension or retraction of the output end; The second gas path is connected to the purging structure and is used to provide purging gas.

7. The joint cleaning device as described in claim 6, characterized in that, The joint cleaning device also includes: A first solenoid valve is installed in the first air path. When the first solenoid valve is open, the output end extends out, and when the first solenoid valve is closed, the output end retracts. A second solenoid valve is installed in the second air path. When the second solenoid valve is open, the purging structure performs purging; when the second solenoid valve is closed, the purging structure stops purging. The controller is connected to the first solenoid valve and the second solenoid valve and is used to control the opening or closing of the first solenoid valve and the second solenoid valve.

8. The joint cleaning device as described in claim 7, characterized in that, The joint cleaning device also includes: A pressure gauge is installed on the connecting pipe to detect the pressure at the joint and transmit the detected pressure value to the controller; When the pressure detected by the pressure gauge drops below the first preset pressure value, the first solenoid valve and the second solenoid valve are controlled to open. When the pressure detected by the pressure gauge reaches the second preset pressure value, the first solenoid valve is controlled to remain open, the second solenoid valve is controlled to close, and the second preset pressure value is greater than the first preset pressure value.

9. The joint cleaning device as described in claim 6, characterized in that, The gas supplied by the gas supply unit includes nitrogen.

10. A semiconductor device, characterized in that, include: Special gas holder; The connecting pipe is installed on the special gas holder; A connector is provided at the end of the connecting pipe; The joint cleaning device according to any one of claims 1 to 9, wherein the linear telescopic structure of the joint cleaning device is disposed on the connecting pipe for cleaning the joint.

Images