Coating carrier plate and multi-source plasma evaporation deposition equipment

Abstract

The utility model relates to the technical field of solar cell coating, in particular to a coating carrier plate and multi-source plasma evaporation deposition equipment. The film coating carrier plate comprises a frame assembly, a tray assembly and a cover plate assembly, the frame assembly comprises a cross beam and a vertical beam which are adjacent to each other, the vertical beam is configured to be in sliding connection with a conveying rail, a plurality of tray tables are arranged on the cross beam at intervals in the first direction, and the thickness of each tray table in the third direction is H. The thickness of the tray table close to the middle line of the cross beam is larger than that of the edge tray table in the direction from the vertical beam to the middle line of the cross beam. The cross beam midline extends in the second direction. The tray assembly is arranged on the tray table; the tray assembly is configured to place a substrate to be coated. And the cover plate assembly is arranged on the tray assembly and shields the non-coating surface of the substrate to be coated. The coating carrier plate can improve the coating quality of the substrate to be coated and improve the photoelectric conversion efficiency; and meanwhile, high deformation resistance is achieved, and the production stability is improved.

Description

Technical Field

[0001] This utility model relates to the field of solar cell coating technology, and in particular to a coating carrier and a multi-source plasma evaporation deposition device. Background Technology

[0002] Existing carrier plates for multi-source plasma enhanced chemical vapor deposition (PED) equipment have significant defects in the solar cell coating process. First, due to the coating principle, the non-coated surface (P-side) of the solar cell is prone to film deposition, leading to a decrease in both the cell's appearance and coating quality, thus reducing the cell's photoelectric conversion efficiency. Second, the strength and deformation resistance of the carrier plate frame in existing technologies are insufficient, making it prone to bending deformation during equipment operation. This can cause problems such as cell misalignment, detachment, and even microcracks or edge chipping, affecting production stability and increasing costs.

[0003] Therefore, there is an urgent need to design a coating carrier and a multi-source plasma evaporation deposition equipment to solve the above technical problems. Utility Model Content

[0004] The primary objective of this invention is to provide a coating carrier plate that can improve the coating quality of the substrate to be coated and increase the photoelectric conversion efficiency; at the same time, it also has high resistance to deformation and improves production stability.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] This utility model provides a coating carrier plate, comprising:

[0007] A frame assembly comprising adjacent crossbeams and vertical beams, the vertical beams being configured to slide with a conveyor track, and a plurality of pallet platforms spaced apart on the crossbeams along a first direction, the pallet platforms having a thickness H along a third direction;

[0008] Along the direction from the vertical beam to the centerline of the horizontal beam, the thickness of the pallet platform near the centerline of the horizontal beam is greater than the thickness of the pallet platform at the edge; the centerline of the horizontal beam extends toward the second direction; the first direction, the second direction, and the third direction are perpendicular to each other;

[0009] A tray assembly disposed on the tray platform; the tray assembly is configured to hold a substrate to be coated.

[0010] A cover plate assembly is disposed on the tray assembly and covers the non-coated surface of the substrate to be coated.

[0011] As an alternative technical solution for coating carrier plates, the thickness H of the tray gradually increases along the direction from the vertical beam to the centerline of the horizontal beam.

[0012] As an optional technical solution for a coating carrier plate, the crossbeam includes two side beams and one middle beam, and the vertical beams are configured as two; the side beams and the middle beam are arranged in parallel and extend along the first direction, and the two vertical beams are arranged in parallel and extend along the second direction.

[0013] As an optional technical solution for coating carrier plate, the frame assembly further includes a reinforcing member, one end of which is connected to the crossbeam and the other end of which is connected to the vertical beam, and the reinforcing member, the crossbeam and the vertical beam together form a triangular area.

[0014] As an optional technical solution for a coating carrier plate, the width of the crossbeam along the second direction is A, and the thickness of the crossbeam along the third direction is B, where A / B = 0.3 to 0.8.

[0015] As an optional technical solution for a coating carrier plate, the cover plate assembly has a frame and a shielding member, the shielding member being detachably connected to the frame; the frame is attached to the tray assembly.

[0016] As an optional technical solution for coating carrier plate, the cover plate assembly further includes a fixing member, the shielding member is provided with a first mounting hole, the frame is provided with a second mounting hole, the fixing member passes through the first mounting hole and the second mounting hole and installs the shielding member on the upper end surface of the frame.

[0017] As an optional technical solution for a coating carrier, the tray assembly includes a plurality of first support rods arranged at equal intervals along a first direction and a plurality of second support rods arranged at equal intervals along a second direction, wherein two adjacent first support rods and two adjacent second support rods are arranged to form a placement position for placing the substrate to be coated.

[0018] As an optional technical solution for coating carrier, in one of the film placement positions, the first support rod has C first protrusions on its side wall, and the second support rod has D second protrusions on its side wall, where C / D = 1 to 5.

[0019] The second objective of this invention is to provide a multi-source plasma evaporation deposition device, which has high production stability, can improve the coating quality of the substrate to be coated, and improve the photoelectric conversion efficiency.

[0020] To achieve this objective, the present invention adopts the following technical solution:

[0021] This utility model provides a multi-source plasma evaporation deposition device, which includes a conveyor track, a plasma evaporation unit and the aforementioned coating carrier plate. The coating carrier plate is slidably connected to the conveyor track, and the plasma evaporation unit is disposed below the coating carrier plate. The plasma evaporation unit is configured to coat the coating surface of the substrate to be coated.

[0022] The beneficial effects of this utility model include at least the following:

[0023] This invention provides a coating carrier plate, comprising a frame assembly, a tray assembly, and a cover assembly. The frame assembly includes adjacent horizontal and vertical beams, with the vertical beams slidably connected to a conveyor track. Multiple trays are spaced apart on the horizontal beams along a first direction, each tray having a thickness H along a third direction. Along the direction from the vertical beams to the centerline of the horizontal beams, the thickness of the trays near the centerline is greater than that of the edge trays. The centerline of the horizontal beams extends towards a second direction. The first, second, and third directions are perpendicular to each other. The tray assembly is disposed on the trays and configured to hold the substrate to be coated. The cover assembly is disposed on the tray assembly and covers the non-coated surface of the substrate.

[0024] The frame components consist of adjacent horizontal and vertical beams forming an integrated frame structure. The vertical beams are slidably connected to the conveyor rail, ensuring stable transport of the coating carrier within the equipment. Multiple trays are spaced apart along the first direction on the horizontal beams, with the trays near the center line being thicker than those at the edges. This design provides stronger support for the central portion of the coating carrier when bearing the substrate, reducing deformation caused by larger central loads, improving the carrier's resistance to deformation, ensuring stability during operation, and reducing the risk of substrates falling or shifting. The cover plate assembly shields the non-coating surface of the substrate, effectively preventing film deposition on this surface, thereby improving the coating quality and photoelectric conversion efficiency of the solar cells.

[0025] This invention also provides a multi-source plasma evaporation deposition equipment, which has high production stability, can improve the coating quality of the substrate to be coated, and improve the photoelectric conversion efficiency. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of the coating carrier plate provided in this embodiment of the utility model;

[0028] Figure 2 This is an exploded view of the coating carrier plate provided in this embodiment of the utility model;

[0029] Figure 3 yes Figure 2 A magnified view of a portion of point a.

[0030] Figure 4(a) is a side view of the frame assembly without the tray assembly provided in the embodiment of the present invention;

[0031] Figure 4(b) is a side view of the frame assembly for placing the tray assembly provided in an embodiment of the present invention;

[0032] Figure 5 yes Figure 2 A magnified view of a section at point b in the middle;

[0033] Figure 6 This is a top view of the tray assembly provided in this embodiment of the utility model;

[0034] Figure 7 yes Figure 6 A magnified view of a section at point c in the middle;

[0035] Figure 8 This is a structural schematic diagram of the frame component provided in an embodiment of the present invention from another perspective;

[0036] Figure 9 This is a cross-sectional view of the beam provided in an embodiment of this utility model.

[0037] Figure Labels

[0038] 10. Frame components; 11. Crossbeams; 111. Edge beams; 112. Intermediate beams; 12. Vertical beams; 13. Pallet platform; 14. Reinforcing members;

[0039] 20. Tray assembly; 21. First support rod; 211. First protrusion; 22. Second support rod; 221. Second protrusion; 23. Placement position;

[0040] 30. Cover plate assembly; 31. Frame; 32. Shielding element; 33. First mounting hole; 34. Second mounting hole. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0043] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0044] In the description of this utility model, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0045] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0046] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the horizontal thickness of the first feature is greater than that of the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the horizontal thickness of the first feature is less than that of the second feature.

[0047] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0048] This embodiment provides a coating carrier plate that can improve the coating quality of solar cells and increase the photoelectric conversion efficiency of solar cells; at the same time, it also has high resistance to deformation and improves the production stability of solar cells.

[0049] like Figures 1-5 As shown, the coating carrier mainly includes a frame assembly 10, a tray assembly 20, and a cover assembly 30. The frame assembly 10 includes adjacent crossbeams 11 and vertical beams 12. The vertical beams 12 are configured to slide along a conveyor track. Multiple tray platforms 13 are spaced apart on the crossbeams 11 along a first direction. The thickness of each tray platform 13 along a third direction is H. The tray platforms 13 can be fixed to the crossbeams 11 by welding or other methods. The vertical beams 12 point towards the centerline of the crossbeams 11 (the centerline of the crossbeams 11 is...). Figure 2 The thickness of the tray platform 13 near the center line of the crossbeam 11 is greater than the thickness of the edge tray platform 13, and the center line of the crossbeam 11 extends towards the second direction. The first direction, the second direction, and the third direction are perpendicular to each other. The tray assembly 20 is disposed on the tray platform 13 and is configured to hold the substrate to be coated. The cover assembly 30 is disposed on the tray assembly 20 and covers the non-coated surface of the substrate to be coated.

[0050] It should be noted that the first direction, the second direction, and the third direction are respectively Figure 2 The X-axis, Y-axis, and Z-axis directions.

[0051] Based on the above design, in this embodiment, the crossbeams 11 and vertical beams 12 of the frame assembly 10 are adjacent to each other to form an integral frame structure. The vertical beams 12 are slidably connected to the conveyor track to ensure stable conveying of the coating carrier plate within the equipment. Multiple trays 13 are spaced apart along the first direction on the crossbeams 11, and the thickness of the trays 13 near the center line of the crossbeams 11 is greater than the thickness of the edge trays 13. This design gives the coating carrier plate stronger support capacity in the center when carrying the substrate to be coated, reducing deformation caused by large central loads, improving the deformation resistance of the coating carrier plate, ensuring the stability of the coating carrier plate during operation, and reducing the risk of the substrate to be coated falling or shifting. The cover plate assembly 30 shields the non-coated surface of the substrate, effectively preventing the deposition of film layers on the non-coated surface, thereby improving the coating quality and photoelectric conversion efficiency of the solar cell.

[0052] In some alternative embodiments, the thickness H of the tray platform 13 gradually increases along the direction from the vertical beam 12 to the centerline of the horizontal beam 11, further optimizing the structural strength and stability of the frame assembly 10. This allows the frame assembly 10 to better resist deformation when supporting the tray assembly 20, ensuring the smooth progress of the coating process. This gradual thickness design makes the strength distribution of the horizontal beam 11 more reasonable, with higher strength in the central part, effectively resisting downward bending deformation. This ensures the flatness of the coating carrier during operation, improves the coating quality, and reduces problems such as substrate displacement and falling off caused by deformation of the frame assembly 10.

[0053] As shown in Figures 4(a) and 4(b), the dashed line in Figure 4(b) represents the horizontal line, and the dotted line represents the centerline of the crossbeam 11. Figure 4(a) shows a schematic diagram of the frame assembly 10 before the tray assembly 20 is placed on the frame assembly 10. The thickness of the tray platform 13 near the centerline of the crossbeam 11 is greater than the thickness of the edge tray platforms 13. In some implementations, the lower surfaces of all tray platforms 13 can be on the same horizontal plane. Due to the different thicknesses of the tray platforms 13, the upper surfaces of all tray platforms 13 are not on the same horizontal plane. As shown in Figure 4(b), the dashed line indicates that after the tray assembly 20 carrying the substrate to be coated is placed on the frame assembly 10, the tops of all tray assemblies 20 are on the same horizontal plane, thus ensuring that all the substrates to be coated on the tray assembly 20 are on the same horizontal plane, improving the coating quality. As shown in Figure 4(b), the thickness of the tray platform 13 near the center line of the crossbeam 11 is greater than that of the edge tray platform 13. This makes the central part have stronger support capacity, reduces the deformation caused by the large central load, and improves the deformation resistance of the coating carrier plate.

[0054] like Figures 1-2As shown, in this embodiment, the crossbeam 11 includes two side beams 111 and one middle beam 112, and two vertical beams 12. The side beams 111 and the middle beam 112 are arranged in parallel and extend along a first direction, while the two vertical beams 12 are arranged in parallel and extend along a second direction. This structural design allows the frame assembly 10 to form a stable rectangular frame. The cooperation of the side beams 111 and the middle beam 112 can effectively distribute the load and improve the load-bearing capacity of the crossbeam 11, while the vertical beams 12 support each other with the crossbeam 11, enhancing the rigidity of the frame assembly 10. In multi-source plasma evaporation deposition equipment, the coating carrier plate needs to frequently reciprocate and carry the substrate to be coated. Such a frame assembly 10 structure can effectively resist forces in various directions, reduce frame deformation and damage, extend the service life of the coating carrier plate, and also help ensure the consistency of the coating.

[0055] like Figure 8 As shown, in some optional embodiments, the frame assembly 10 further includes a reinforcing member 14, one end of which is connected to the crossbeam 11 and the other end to the vertical beam 12. The reinforcing member 14, the crossbeam 11, and the vertical beam 12 together form a triangular region. This triangular structure provides extremely high stability, distributing various forces experienced by the coating carrier plate during use evenly across the crossbeam 11 and the vertical beam 12, reducing local stress concentration and lowering the likelihood of bending, twisting, or other deformations in the frame assembly 10. During the coating process, the coating carrier plate needs to withstand the weight of the substrate to be coated, as well as the vibrations and impacts generated during equipment operation. The reinforcing member 14 enables the frame assembly 10 to better resist these external forces, maintaining its shape and position, thereby ensuring the stability of the tray platform 13 and the cover assembly 30 and improving the coating quality.

[0056] like Figure 9 As shown, in some optional embodiments, the width of the crossbeam 11 along the second direction is A, and the thickness of the crossbeam 11 along the third direction is B, with A / B = 0.3 to 0.8. When the ratio of the width to the thickness of the crossbeam 11 is within this range, the cross-sectional properties of the crossbeam 11 can achieve a good balance. A wider width can increase the lateral stability of the crossbeam 11 and improve its resistance to lateral bending, while an appropriate thickness ensures the strength and rigidity of the crossbeam 11 in the vertical direction. In the actual use of the coating carrier, the crossbeam 11 needs to simultaneously bear the vertical load caused by the weight of the coating substrate and the horizontal force and moment generated during equipment operation. By controlling the A / B ratio to be between 0.3 and 0.8, the mechanical properties of the crossbeam 11 in various directions can be more coordinated, effectively reducing the deformation of the crossbeam 11 under complex stress conditions, thereby ensuring the flatness and stability of the coating carrier and ensuring the coating quality of the substrate to be coated during the coating process.

[0057] like Figures 1-2As shown, the cover assembly 30 has a frame 31 and a shielding member 32, which is detachably connected to the frame 31. The frame 31 overlaps the tray assembly 20. The detachable connection between the shielding member 32 and the frame 31 allows for easy separation of the shielding member 32 from the frame 31 when cleaning, maintenance, or replacement is required, without disassembling the entire cover assembly 30, thus reducing maintenance costs and time. The frame 31, overlapping the tray assembly 20, forms a relatively enclosed space, shielding the non-coated surface of the substrate to be coated and preventing film deposition on the non-coated surface.

[0058] Furthermore, the cover plate assembly 30 in this embodiment also includes a fixing member. The shielding member 32 has a first mounting hole 33, and the frame 31 has a second mounting hole 34. The fixing member passes between the first mounting hole 33 and the second mounting hole 34 and mounts the shielding member 32 onto the upper surface of the frame 31. This connection method not only provides sufficient connection strength but also effectively prevents the shielding member 32 from shifting or warping when subjected to external vibrations, airflow impacts, or other factors. During the coating process, the internal environment of the equipment is relatively complex; airflow, temperature changes, and particle impacts can all affect the shielding member 32. Through the fixing action of the fixing member, the shielding member 32 can always maintain a tight fit with the frame 31, ensuring the continuity and stability of the shielding effect, thereby continuously and effectively protecting the non-coated surface of the coated substrate from contamination and improving production efficiency.

[0059] Alternatively, the fastener can be a component such as a bolt or screw.

[0060] Optionally, the frame 31 is a stainless steel rectangular tube, and the shielding part 32 is an aluminum alloy part.

[0061] like Figure 2 , Figures 5-7 As shown, in this embodiment, the tray assembly 20 includes a plurality of first support rods 21 arranged at equal intervals along a first direction and a plurality of second support rods 22 arranged at equal intervals along a second direction. Two adjacent first support rods 21 and two adjacent second support rods 22 form a placement position 23 for placing the substrate to be coated. The tray assembly 20 employs a grid structure composed of multiple first support rods 21 and second support rods 22, which not only provides stable support but also allows for adjustments to the spacing and arrangement of the first and second support rods 21 and 22, thereby changing the size and shape of the placement position 23 to accommodate substrates of different specifications and quantities, meeting diverse production needs. Furthermore, the grid structure also provides ventilation and heat dissipation, which helps maintain a stable temperature of the substrate during the coating process, further improving the coating quality.

[0062] Furthermore, in this embodiment, in one substrate placement position 23, C first protrusions 211 are provided on the side wall of the first support rod 21, and D second protrusions 221 are provided on the side wall of the second support rod 22, where C / D = 1 to 5. Specifically, the first protrusions 211 and the second protrusions 221 serve as support points for the substrate to be coated, ensuring that the substrate only contacts the first protrusions 211 and the second protrusions 221, rather than the entire surface of the first support rod 21 or the entire surface of the second support rod 22. This reduces the contact area between the substrate and the tray assembly 20, thereby reducing the occurrence of uneven coating or obstruction of the coating area due to excessive contact. Meanwhile, the C / D ratio is controlled between 1 and 5. While ensuring the stability of the substrate to be coated, the number of the first bump 211 and the second bump 221 is reduced as much as possible, so that more of the surface of the substrate to be coated is exposed to the coating environment, increasing the coating area, improving the utilization rate and coating efficiency of the coating material, and thus improving the photoelectric conversion efficiency of the solar cell.

[0063] This embodiment also provides a multi-source plasma evaporation deposition apparatus, which includes a conveyor track, a plasma evaporation unit and the aforementioned coating carrier plate. The coating carrier plate is slidably connected to the conveyor track, and the plasma evaporation unit is disposed below the coating carrier plate. The plasma evaporation unit is configured to coat the coating surface of the substrate to be coated.

[0064] During operation, the coating carrier plate of this multi-source plasma evaporation deposition equipment can slide smoothly on the conveyor track, accurately transporting the substrate to be coated to the coating position of the plasma evaporation unit. The cover plate assembly 30 effectively protects the non-coating surface of the substrate from contamination, ensuring coating quality; the high strength and deformation resistance of the frame assembly 10 ensure the stability and reliability of the coating carrier plate during operation, reducing damage to the substrate and production failures during the coating process.

[0065] This multi-source plasma evaporation deposition equipment has high production stability, can improve the coating quality of the substrate to be coated, and improve the photoelectric conversion efficiency.

[0066] Obviously, the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Many other equivalent embodiments may be included without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

[0067] Note that in the description of this specification, the references to terms such as "some embodiments," "other embodiments," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

Claims

1. A coated carrier plate, characterized in that, include: A frame assembly (10) includes adjacent crossbeams (11) and vertical beams (12), the vertical beams (12) being configured to slide in connection with a conveyor track, and a plurality of pallet platforms (13) being spaced apart on the crossbeams (11) along a first direction, the pallet platforms (13) having a thickness of H along a third direction; Along the direction from the vertical beam (12) to the centerline of the horizontal beam (11), the thickness of the pallet platform (13) near the centerline of the horizontal beam (11) is greater than the thickness of the pallet platform (13) at the edge; the centerline of the horizontal beam (11) extends toward the second direction; the first direction, the second direction, and the third direction are perpendicular to each other; A tray assembly (20) is disposed on the tray table (13); the tray assembly (20) is configured to hold a substrate to be coated; A cover plate assembly (30) is disposed on the tray assembly (20) and covers the non-coated surface of the substrate to be coated.

2. The coating carrier plate according to claim 1, characterized in that, Along the direction from the vertical beam (12) to the centerline of the horizontal beam (11), the thickness H of the tray platform (13) gradually increases.

3. The coating carrier plate according to claim 1, characterized in that, The crossbeam (11) includes two side beams (111) and one middle beam (112), and the vertical beams (12) are arranged in two; the side beams (111) and the middle beams (112) are arranged in parallel and extend along the first direction, and the two vertical beams (12) are arranged in parallel and extend along the second direction.

4. The coating carrier plate according to claim 1, characterized in that, The frame assembly (10) also includes a reinforcing member (14), one end of which is connected to the crossbeam (11) and the other end of which is connected to the vertical beam (12). The reinforcing member (14), the crossbeam (11), and the vertical beam (12) together form a triangular area.

5. The coating carrier plate according to claim 1, characterized in that, The width of the crossbeam (11) along the second direction is A, and the thickness of the crossbeam (11) along the third direction is B, where A / B = 0.3 to 0.

8.

6. The coating carrier plate according to claim 1, characterized in that, The cover assembly (30) has a frame (31) and a shield (32), the shield (32) being detachably connected to the frame (31); the frame (31) is attached to the tray assembly (20).

7. The coating carrier plate according to claim 6, characterized in that, The cover plate assembly (30) also includes a fixing member. The shielding member (32) is provided with a first mounting hole (33), and the frame (31) is provided with a second mounting hole (34). The fixing member passes through the first mounting hole (33) and the second mounting hole (34) and installs the shielding member (32) on the upper surface of the frame (31).

8. The coating carrier plate according to claim 1, characterized in that, The tray assembly (20) includes a plurality of first support rods (21) arranged at equal intervals along a first direction and a plurality of second support rods (22) arranged at equal intervals along a second direction. Two adjacent first support rods (21) and two adjacent second support rods (22) are arranged to form a placement position (23) for placing the substrate to be coated.

9. The coating carrier plate according to claim 8, characterized in that, In one of the film placement positions (23), the side wall of the first support rod (21) is provided with C first protrusions (211), and the side wall of the second support rod (22) is provided with D second protrusions (221), where C / D = 1 to 5.

10. A multi-source plasma evaporation deposition apparatus, characterized in that, The multi-source plasma evaporation deposition equipment includes a conveyor track, a plasma evaporation unit, and a coating carrier plate according to any one of claims 1-9. The coating carrier plate is slidably connected to the conveyor track, and the plasma evaporation unit is disposed below the coating carrier plate. The plasma evaporation unit is configured to coat the coating surface of the substrate to be coated.

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