Spray head lifting device and semiconductor equipment

Abstract

The utility model relates to a spray header lifting device and semiconductor equipment, and the spray header lifting device comprises a first aluminum pipe which is provided with an axial through first gas channel; one end of the second aluminum pipe sleeves the first aluminum pipe, and the other end of the second aluminum pipe is connected with the spray header; the second aluminum pipe is provided with a second gas channel which is axially through and is communicated with the first gas channel; the first sealing piece is arranged between the outer wall of the first aluminum pipe and the inner wall of the second aluminum pipe, so that the first gas channel and the second gas channel form a sealed channel; the telescopic auxiliary device comprises a stainless steel corrugated pipe arranged on the first aluminum pipe in a sleeving mode. One end of the stainless steel corrugated pipe is in sealed connection with the first aluminum pipe, and the other end is in sealed connection with the second aluminum pipe so as to adapt to axial relative displacement of the first aluminum pipe and the second aluminum pipe. The semiconductor equipment comprises a semiconductor chamber, a spray header, a supply device and the spray header lifting device. According to the utility model, pipeline sliding and pipeline sealing can be realized.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a spray head lifting device and semiconductor equipment. Background Technology

[0002] In semiconductor integrated circuit manufacturing processes, chemical vapor deposition (CVD) technology is widely used to deposit thin film materials on wafer surfaces. During the CVD process, process gases are typically sprayed uniformly onto the wafer surface within a semiconductor chamber via a spray nozzle to achieve uniform film deposition. To meet the adjustment requirements of the distance between the spray nozzle and the wafer for different process steps, the spray nozzle must have the ability to move axially within the chamber.

[0003] In existing technologies, the raising and lowering of sprinkler heads is usually achieved through a rigid gas delivery pipeline in conjunction with an external drive mechanism. However, in order to achieve the raising and lowering movement of the sprinkler head, the gas delivery pipeline needs to have axial expansion and contraction capabilities, and rigid pipelines cannot adapt to such displacement compensation requirements. If a simple sliding sleeve structure is used, it is difficult to ensure both sealing performance and corrosion resistance and mechanical fatigue life.

[0004] Therefore, it is necessary to provide a new spray head lifting device and semiconductor equipment to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0005] The technical problem to be solved by this application is how to provide a spray head lifting device and semiconductor equipment that can achieve both sliding and sealing.

[0006] To solve the above-mentioned technical problems, according to an embodiment of this application, a spray head lifting device is provided, comprising: a first aluminum tube having an axially penetrating first gas channel; a second aluminum tube, one end of which is sleeved on the first aluminum tube, and the other end of which is used to connect to a spray head; the second aluminum tube having an axially penetrating second gas channel communicating with the first gas channel; a first sealing member disposed between the outer wall of the first aluminum tube and the inner wall of the second aluminum tube, so that the first gas channel and the second gas channel form a sealed channel; and a telescopic auxiliary device, comprising a stainless steel corrugated pipe sleeved on the first aluminum tube; one end of the stainless steel corrugated pipe is sealed to the first aluminum tube, and the other end is sealed to the second aluminum tube, so as to adapt to the axial relative displacement of the first aluminum tube and the second aluminum tube.

[0007] According to an embodiment of this application, a first sealing groove is formed on the inner wall of the second aluminum tube; the first sealing member is disposed in the first sealing groove and extends to the outside of the first sealing groove, so that one side of the first sealing member abuts against the outer wall of the first aluminum tube and the other side abuts against the bottom wall of the first sealing groove.

[0008] According to an embodiment of this application, the first aluminum tube includes a connecting section and an extension section disposed at the end of the connecting section, the diameter of the connecting section is larger than the diameter of the extension section, and the second aluminum tube is sleeved on the extension section; the first gas channel passes through the connecting section and the extension section; one end of the stainless steel corrugated pipe is disposed at the end of the connecting section, and the other end is disposed at the end of the second aluminum tube.

[0009] According to an embodiment of this application, the telescopic auxiliary device further includes a first stainless steel connector and a second stainless steel connector; the first stainless steel connector includes an annular first segment and a second segment connected to the first segment; the first segment is disposed on the side wall of the connecting segment, and the second segment is parallel to the end face of the connecting segment; the second stainless steel connector includes an annular third segment and a fourth segment connected to the third segment; the third segment is disposed on the side wall of the second aluminum tube, and the fourth segment is parallel to the end face of the second aluminum tube; one end of the stainless steel corrugated tube is disposed on the second segment, and the other end is disposed on the fourth segment.

[0010] According to an embodiment of this application, a second sealing groove is provided at the end of the connecting segment; a second sealing member is provided in the second sealing groove and the second sealing member extends to the outside of the second sealing groove, so that one side of the second sealing member abuts against the second segment and the other side abuts against the bottom wall of the second sealing groove.

[0011] According to an embodiment of this application, a third sealing groove is provided at the end of the second aluminum tube; a third sealing member is provided in the third sealing groove and the third sealing member extends to the outside of the third sealing groove, so that one side of the third sealing member abuts against the fourth segment and the other side abuts against the bottom wall of the third sealing groove.

[0012] According to an embodiment of this application, the inner wall of the second aluminum tube is provided with a protruding structure, and the distance between the protruding structure and the outer wall of the first aluminum tube is smaller than the distance between the inner wall of the second aluminum tube and the outer wall of the first aluminum tube.

[0013] According to an embodiment of this application, the protruding structure is provided in multiple ways, and the multiple protruding structures extend along the axial direction of the first aluminum tube; the outer wall of the first aluminum tube is provided with multiple adapter structures, and the multiple protruding structures and the multiple adapter structures are staggered along the axial direction of the first aluminum tube.

[0014] A semiconductor device includes a semiconductor chamber, a spray head, a supply device, and the aforementioned spray head lifting device; the spray head is disposed inside the semiconductor chamber; the spray head lifting device is disposed at the top of the semiconductor chamber, and a first aluminum tube is connected to the supply device, and a second aluminum tube is connected to the spray head, so that gas supplied by the supply device enters the semiconductor chamber via the first aluminum tube, the second aluminum tube, and the spray head.

[0015] By adopting the above technical solution, a first aluminum tube and a second aluminum tube are set up to form an axially continuous sealed gas channel. A sliding seal is achieved through the cooperation of the first sealing element. A stainless steel bellows is configured on the outside as a telescopic auxiliary device. The elastic deformation capacity of the bellows provides a telescopic gas delivery channel for the spray head, so as to ensure that the gas does not leak during the lifting and lowering movement of the spray head. At the same time, the first stainless steel connector and the second stainless steel connector solve the problem that aluminum and stainless steel cannot be directly welded. In cooperation with the first sealing element, the gas will not corrode the stainless steel material, thereby improving the service life and reliability of the device. Attached Figure Description

[0016] Figure 1 This is a cross-sectional structural diagram of a spray head lifting device according to an embodiment of the present utility model.

[0017] Figure 2 for Figure 1 Enlarged view of part A in the middle.

[0018] Figure label:

[0019] 100, First aluminum tube; 101, First gas passage; 110, Connecting section; 111, Second sealing groove; 112, Second sealing element; 120, Extension section; 200, Second aluminum tube; 201, Second gas passage; 202, Third sealing groove; 203, Third sealing element; 210, First sealing groove; 300, First sealing element; 410, Stainless steel corrugated pipe; 420, First stainless steel connector; 421, First section; 422, Second section; 430, Second stainless steel connector; 431, Third section; 432, Fourth section. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0021] The following is in conjunction with the appendix Figure 1-2 The specific embodiments of this utility model will be further described in detail below.

[0022] The present invention provides a spray head lifting device and a semiconductor device. The spray head lifting device is used in the semiconductor device to enable the spray head to be raised and lowered within the semiconductor chamber. Specifically, the spray head lifting device includes a first aluminum tube 100, a second aluminum tube 200, a first sealing element 300, and a telescopic auxiliary device.

[0023] In some embodiments, the first aluminum tube 100 has a first gas channel 101 extending along its own axial direction to facilitate gas delivery; one end of the second aluminum tube 200 is sleeved on the first aluminum tube 100 and is movable along the axial direction of the first aluminum tube 100; the other end of the second aluminum tube 200 is used to connect to a spray head so that the spray head can move relative to the first aluminum tube 100 along the axial direction of the first aluminum tube 100; at the same time, the second aluminum tube 200 has a second gas channel 201 extending axially and communicating with the first gas channel 101, so that gas can enter the spray head after passing through the first gas channel 101 and the second gas channel 201 in sequence, so as to facilitate the wafer processing process.

[0024] In some embodiments, to prevent gas leakage from the connection between the first aluminum tube 100 and the second aluminum tube 200 during relative movement of the second aluminum tube 200 and the first aluminum tube 100, a first sealing element 300 is provided. Specifically, the first sealing element 300 is disposed between the outer wall of the first aluminum tube 100 and the inner wall of the second aluminum tube 200, so that the first gas channel 101 and the second gas channel 201 form a sealed channel. During gas transportation, gas enters the second gas channel 201 after passing through the first gas channel 101. Gas leaking from the connection between the first aluminum tube 100 and the second aluminum tube 200 is blocked by the first sealing element 300 and cannot leak to the outside, thereby preventing gas leakage from the connection between the first aluminum tube 100 and the second aluminum tube 200.

[0025] In some embodiments, a telescopic auxiliary device is provided to facilitate the relative movement between the first aluminum tube 100 and the second aluminum tube 200. The telescopic auxiliary device includes a stainless steel corrugated pipe 410 sleeved on the first aluminum tube 100. One end of the stainless steel corrugated pipe 410 is sealed to the first aluminum tube 100, and the other end is sealed to the second aluminum tube 200 to accommodate the axial relative displacement of the first aluminum tube 100 and the second aluminum tube 200. Specifically, the corrugated pipe can provide a telescopic gas delivery channel for the spray head in the semiconductor device that needs to move up and down. At the same time, it can withstand the mechanical fatigue of high-frequency reciprocating motion through its inherent elastic deformation capability, and the corrugated pipe provides displacement compensation capability for axial telescopic movement, thereby facilitating the axial relative movement of the first aluminum tube 100 and the second aluminum tube 200.

[0026] In some embodiments, the inner wall of the second aluminum tube 200 is provided with a first sealing groove 210, which is annular and has a rectangular cross-section. The first sealing element 300 is an O-ring, which is disposed within the first sealing groove 210 and extends to the outside of the first sealing groove 210, such that one side of the first sealing element 300 abuts against the outer wall of the first aluminum tube 100 and the other side abuts against the bottom wall of the first sealing groove 210. Specifically, the inner ring of the first sealing element 300 abuts against the outer wall of the first aluminum tube 100, and the outer ring of the first sealing element 300 abuts against the bottom wall of the first sealing groove 210. The outer wall of the first aluminum tube 100 and the bottom wall of the first sealing groove 210 cooperate to compress the first sealing element 300, thereby sealing the connection between the first aluminum tube 100 and the second aluminum tube 200 so that gas does not leak from the connection between the first aluminum tube 100 and the second aluminum tube 200.

[0027] In some embodiments, to facilitate the relative movement between the first aluminum tube 100 and the second aluminum tube 200, and to facilitate the installation of the stainless steel corrugated pipe 410, the first aluminum tube 100 includes a connecting section 110 and an extension section 120 located at the end of the connecting section 110. Both the connecting section 110 and the extension section 120 are cylindrical, and the inner diameters at the connection point of the connecting section 110 and the extension section 120 are the same. The connecting section 110 and the extension section 120 can be fixed by bonding, welding, or integral molding. In this embodiment, integral molding is preferred. The diameter of the connecting section 110 is larger than the diameter of the extension section 120, and the second aluminum tube 200 is sleeved on the extension section 120. Specifically, the extension... The diameter of the extension section 120 is smaller than the inner diameter of the second aluminum tube 200, which facilitates the second aluminum tube 200 to be fitted onto the extension section 120 and to move axially along the side wall of the extension section 120 along the first aluminum tube 100. In addition, the first gas channel 101 passes through the connecting section 110 and the extension section 120 to facilitate the gas transport process. One end of the stainless steel corrugated pipe 410 is located at the end of the connecting section 110, and the other end is located at the end of the second aluminum tube 200, so that there is a gap between the inner wall of the stainless steel corrugated pipe 410 and the outer wall of the extension section 120, thereby reducing the possibility of interference with the inner wall of the stainless steel corrugated pipe 410 when the second aluminum tube 200 and the first aluminum tube 100 move relative to each other, thereby increasing the service life.

[0028] In some embodiments, to facilitate the installation of the stainless steel corrugated pipe 410, the telescopic auxiliary device further includes a first stainless steel connector 420 and a second stainless steel connector 430; wherein both the first stainless steel connector 420 and the second stainless steel connector 430 are annularly arranged. Specifically, the first stainless steel connector 420 includes an annular first segment 421 and a second segment 422 connected to the first segment 421. More specifically, both the first segment 421 and the second segment 422 are annularly arranged, with the first segment 421 extending axially toward the first aluminum pipe 100 and the second segment 422 extending radially toward the first aluminum pipe 100; the first segment 421... The first stainless steel connector 420 can be connected to the second segment 422 by bonding, welding or integral molding. In this embodiment, the two are preferably connected by integral molding. At the same time, the first segment 421 is provided on the side wall of the connecting segment 110 and connected to the side wall of the connecting segment 110. Its setting method can be snap-fit ​​or threaded connection, etc., which is not limited here. The main point is that there will be no relative displacement between the first segment 421 and the connecting segment 110, so as to connect the first stainless steel connector 420 to the connecting segment 110. Meanwhile, the second segment 422 is parallel to the end face of the connecting segment 110 so as to facilitate the connection between the stainless steel corrugated pipe 410 and the first stainless steel connector 420. In addition, the second stainless steel connector 430 includes an annular third segment 431 and a fourth segment 432 connected to the third segment 431; the third segment 431 is disposed on the side wall of the second aluminum tube 200, and the fourth segment 432 is parallel to the end face of the second aluminum tube 200; both the third segment 431 and the fourth segment 432 are annularly arranged, the third segment 431 extends axially toward the first aluminum tube 100, and the fourth segment 432 extends radially toward the first aluminum tube 100; the third segment 431 and the fourth segment 432 can be connected by bonding, welding or integral molding. In this embodiment, the two are preferably connected by integral molding; at the same time, the third segment 431 is disposed on the side wall of the connecting segment 110 and connected to the side wall of the second aluminum tube 200. Its setting method can be snap-fit ​​or threaded connection, etc., which is not limited here. The main point is that there will be no relative displacement between the third segment 431 and the second aluminum tube 200, thereby connecting the second stainless steel connector 430 and the second aluminum tube 200. More specifically, one end of the stainless steel corrugated pipe 410 is located in the second section 422, and the other end is located in the fourth section 432. The connection method can be bonding, welding, or integral molding, etc. In this embodiment, welding is preferred. It is worth noting that since the stainless steel corrugated pipe 410 is made of stainless steel, and stainless steel will be corroded after contacting the special gas in the first gas channel 101 or the second gas channel 201, the first aluminum pipe 100 and the second aluminum pipe 200 are both made of aluminum.Since stainless steel and aluminum cannot be welded together, a first stainless steel connector 420 and a second stainless steel connector 430 are provided. The first stainless steel connector 420 is connected to the first aluminum tube 100 by thread or snap-fit, and the second stainless steel connector 430 is connected to the second aluminum tube 200 by thread or snap-fit. The two ends of the stainless steel corrugated pipe 410 are welded to the first stainless steel connector 420 and the second stainless steel connector 430 respectively, thereby achieving the connection between the stainless steel corrugated pipe 410 and the first aluminum tube 100 and the second aluminum tube 200, while reducing the possibility of gas corrosion of the stainless steel corrugated pipe 410.

[0029] In some embodiments, to further ensure the sealing between the first stainless steel connector 420 and the first aluminum tube 100, a second sealing groove 111 is provided at the end of the connecting section 110, and the second sealing groove 111 is annularly arranged; a second sealing element 112 is provided in the second sealing groove 111 and extends to the outside of the second sealing groove 111, so that one side of the second sealing element 112 abuts against the second section 422 and the other side abuts against the bottom wall of the second sealing groove 111; specifically, the shape of the second sealing element 112 is the same as the shape of the second sealing groove 111. The two components are fitted together, both surrounding the first gas passage 101, and the second seal 112 extends to the outside of the second sealing groove 111 so that the second seal 112 can contact the second segment 422. During the sealing process, one side of the second seal 112 abuts against the bottom wall of the second sealing groove 111, and the other side of the second seal 112 abuts against the end face of the second segment 422, thereby sealing the space between the end face of the connecting segment 110 and the end face of the second segment 422, further enhancing the sealing performance between the first stainless steel connector 420 and the first aluminum tube 100. It is worth noting that the cross-section of the second sealing groove 111 is trapezoidal, that is, the distance between the side walls of the second sealing groove 111 gradually decreases along the direction from the bottom wall of the second sealing groove 111 towards the opening of the second sealing groove 111.

[0030] In some embodiments, to further ensure the sealing between the second stainless steel connector 430 and the second aluminum tube 200, a third sealing groove 202 is provided at the end of the second aluminum tube 200, and the third sealing groove 202 is annularly arranged; a third sealing element 203 is provided in the third sealing groove 202 and extends to the outside of the third sealing groove 202, so that one side of the third sealing element 203 abuts against the fourth segment 432 and the other side abuts against the bottom wall of the third sealing groove 202; specifically, the shape of the third sealing element 203 is the same as the shape of the third sealing groove 202. The two components are fitted together, both surrounding the second gas passage 201, and the third seal 203 extends to the outside of the third sealing groove 202 so that the third seal 203 can contact the fourth segment 432. During the sealing process, one side of the third seal 203 abuts against the bottom wall of the third sealing groove 202, and the other side of the third seal 203 abuts against the end face of the fourth segment 432, thereby sealing the space between the end face of the second aluminum tube 200 and the end face of the fourth segment 432, further enhancing the sealing performance between the second stainless steel connector 430 and the second aluminum tube 200. It is worth noting that the cross-section of the third sealing groove 202 is trapezoidal, that is, the distance between the side walls of the third sealing groove 202 gradually decreases along the direction from the bottom wall of the third sealing groove 202 towards the opening of the third sealing groove 202.

[0031] In some embodiments, to further reduce the corrosion of the first seal 300 by the gas in the pipeline, the inner wall of the second aluminum tube 200 is provided with a protruding structure. The distance between the protruding structure and the outer wall of the first aluminum tube 100 is smaller than the distance between the inner wall of the second aluminum tube 200 and the outer wall of the first aluminum tube 100. One or more protruding structures can be provided, and the protruding structure reduces the distance between the inner wall of the second aluminum tube 200 and the outer wall of the extension section 120, thereby slowing down the rate at which the gas enters the first seal 300, so as to reduce the rate of gas corrosion of the first seal 300.

[0032] In some specific embodiments, the protruding structure is arranged in a ring and placed on the inner wall of the end of the second aluminum tube 200. The first sealing groove 210 is provided on the protruding structure and extends radially through the protruding structure to the side wall of the second aluminum tube 200. The first sealing element 300 is placed in the first sealing groove 210. At this time, due to the arrangement of the protruding structure, the distance between the protruding structures on both sides of the first sealing element 300 and the outer wall of the extension section 120 is reduced, thereby reducing the contact area between the gas and the first sealing element 300, so as to reduce the corrosion of the first sealing element 300 by the gas.

[0033] In some other embodiments, multiple protrusions are provided, and each protrusion is arranged in a strip shape. These multiple protrusions extend axially along the first aluminum tube 100 and are evenly distributed circumferentially along the second aluminum tube 200. The outer wall of the first aluminum tube 100 is provided with multiple adapter structures, which are the same as the protrusions, all arranged in a strip shape. These adapter structures are evenly spaced axially along the first aluminum tube 100, and the multiple protrusions and adapter structures are staggered axially along the first aluminum tube 100, meaning that between every two adjacent protrusions... An adapter structure is provided to reduce the gap between the inner wall of the second aluminum tube 200 and the outer wall of the first aluminum tube 100. In addition, multiple protruding structures and multiple adapter structures are staggered along the axial direction of the first aluminum tube 100, which can also provide a limiting effect when the first aluminum tube 100 and the second aluminum tube 200 move relative to each other, so as to reduce the possibility of the stainless steel corrugated pipe 410 being subjected to circumferential shear force due to the tendency of the first aluminum tube 100 and the second aluminum tube 200 to move relative to each other, thereby improving the service life of the stainless steel corrugated pipe 410.

[0034] This application also discloses a semiconductor device, which includes a semiconductor chamber, a spray head, a supply device, and the aforementioned spray head lifting device. The spray head is located inside the semiconductor chamber; the spray head lifting device is located at the top of the semiconductor chamber. A first aluminum tube 100 is connected to the supply device, and a second aluminum tube 200 is connected to the spray head, so that the gas supplied by the supply device enters the semiconductor chamber via the first aluminum tube 100, the second aluminum tube 200, and the spray head. During operation, the supply device supplies plasma gas or NF3 gas. The gas passes sequentially through the first gas channel 101 and the second gas channel 201 before entering the spray head and then into the semiconductor chamber.

[0035] This application provides a spray head lifting device and a semiconductor device. By setting up a first aluminum tube 100 and a second aluminum tube 200 that are nested together, an axially through sealed gas channel is formed. A sliding seal is achieved through the cooperation of a first sealing element 300. A stainless steel bellows 410 is configured externally as a telescopic auxiliary device. The elastic deformation capacity of the bellows provides a telescopic gas delivery channel for the spray head, so as to ensure that the gas does not leak during the lifting and lowering movement of the spray head. At the same time, the first stainless steel connector 420 and the second stainless steel connector 430 solve the problem that aluminum and stainless steel cannot be directly welded. In cooperation with the first sealing element 300, the gas will not corrode the stainless steel material, thereby improving the service life and reliability of the device.

[0036] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A spray head lifting device, characterized in that, include: The first aluminum tube has an axially penetrating first gas channel; The second aluminum tube has one end sleeved on the first aluminum tube and the other end used to connect to the spray head; the second aluminum tube has a second gas channel that is axially connected and communicates with the first gas channel. A first sealing element is disposed between the outer wall of the first aluminum tube and the inner wall of the second aluminum tube, so that the first gas passage and the second gas passage form a sealed passage; as well as The telescopic auxiliary device includes a stainless steel corrugated pipe sleeved on the first aluminum tube; one end of the stainless steel corrugated pipe is sealed to the first aluminum tube and the other end is sealed to the second aluminum tube to accommodate the axial relative displacement of the first aluminum tube and the second aluminum tube.

2. The spray head lifting device according to claim 1, characterized in that, The inner wall of the second aluminum tube is provided with a first sealing groove; the first sealing member is disposed in the first sealing groove and extends to the outside of the first sealing groove, so that one side of the first sealing member abuts against the outer wall of the first aluminum tube and the other side abuts against the bottom wall of the first sealing groove.

3. The spray head lifting device according to claim 1, characterized in that, The first aluminum tube includes a connecting section and an extension section located at the end of the connecting section. The diameter of the connecting section is larger than the diameter of the extension section, and the second aluminum tube is sleeved on the extension section. The first gas channel passes through the connecting section and the extension section. One end of the stainless steel corrugated pipe is located at the end of the connecting section, and the other end is located at the end of the second aluminum tube.

4. The spray head lifting device according to claim 3, characterized in that, The telescopic auxiliary device also includes a first stainless steel connector and a second stainless steel connector; The first stainless steel connector includes an annular first segment and a second segment connected to the first segment; The first segment is located on the side wall of the connecting segment, and the second segment is parallel to the end face of the connecting segment; The second stainless steel connector includes an annular third section and a fourth section connected to the third section; the third section is disposed on the side wall of the second aluminum tube, and the fourth section is parallel to the end face of the second aluminum tube. One end of the stainless steel corrugated pipe is located in the second section, and the other end is located in the fourth section.

5. The spray head lifting device according to claim 4, characterized in that, The end of the connecting section is provided with a second sealing groove; a second sealing element is provided in the second sealing groove and the second sealing element extends to the outside of the second sealing groove, so that one side of the second sealing element abuts against the second section and the other side abuts against the bottom wall of the second sealing groove.

6. The spray head lifting device according to claim 4, characterized in that, The end of the second aluminum tube is provided with a third sealing groove; a third sealing element is provided in the third sealing groove and the third sealing element extends to the outside of the third sealing groove, so that one side of the third sealing element abuts against the fourth segment and the other side abuts against the bottom wall of the third sealing groove.

7. The spray head lifting device according to claim 1, characterized in that, The inner wall of the second aluminum tube is provided with a protruding structure, and the distance between the protruding structure and the outer wall of the first aluminum tube is smaller than the distance between the inner wall of the second aluminum tube and the outer wall of the first aluminum tube.

8. The spray head lifting device according to claim 7, characterized in that, The protruding structure is provided in multiple ways, and the multiple protruding structures extend along the axial direction of the first aluminum tube; the outer wall of the first aluminum tube is provided with multiple adapter structures, and the multiple protruding structures and the multiple adapter structures are staggered along the axial direction of the first aluminum tube.

9. A semiconductor device, characterized in that, Includes a semiconductor chamber, a spray head, a supply device, and a spray head lifting device as described in any one of claims 1-8; The spray head is located inside the semiconductor chamber; The spray head lifting device is located at the top of the semiconductor chamber, and the first aluminum tube is connected to the supply device, and the second aluminum tube is connected to the spray head, so that the gas supplied by the supply device enters the semiconductor chamber through the first aluminum tube, the second aluminum tube and the spray head.

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