Portable cover plate system for optical defect measurement machine

Abstract

The utility model discloses a portable cover plate system for an optical defect measurement machine. The portable cover plate system comprises a bottom plate, a quick-release cover plate and a quick-release protective cover, the bottom plate is fixed on the machine table body, and a first notch is formed in the bottom plate; the quick-release cover plate is fixedly connected to the first notch through a first quick-release assembly and covers the first notch. A second notch is formed in the quick-release cover plate; the quick-release protective cover is fixedly connected to the second notch through a second quick-release assembly and covers the second notch. The cover plate system provided by the utility model not only has a good protection function on the optical assembly, but also can effectively protect the original threads of the aluminum base of the machine table from being damaged by frequent disassembly of the screws, is convenient and rapid to operate, improves the maintenance, disassembly and assembly convenience, and improves the working efficiency. In addition, the requirement for regional operation of the optical system in the maintenance process can be met, and the device has great practical value and technical improvement significance for prolonging the service life of the machine body.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to a convenient cover plate system for optical measurement defect equipment. Background Technology

[0002] In semiconductor manufacturing, it is necessary to detect the number of particulate matter and other defects in the product. In the existing technology, the protective cover of the optical path and optical components at the rear of the optical measurement defect machine is generally fixed to the base of the machine's optical path area with screws. During the disassembly and maintenance of the machine, the screws need to be frequently removed and installed, which can easily damage the threads of the aluminum casting base. In severe cases, the cover cannot be installed and the machine cannot operate normally. Utility Model Content

[0003] The purpose of this utility model is to provide a convenient cover plate system for optical measurement defect equipment to overcome the shortcomings of the existing technology. It can effectively protect the internal optical path mechanism components of the equipment, while also facilitating maintenance, disassembly, testing and observation. It has great technical value in protecting the base of the equipment body and improving the ease of operation.

[0004] The objective of this utility model is achieved through the following technical solution:

[0005] A portable cover plate system for an optical measurement defect machine includes a base plate, a quick-release cover plate, and a quick-release protective cover.

[0006] The base plate is fixed to the machine body, and the base plate is provided with a first notch;

[0007] The quick-release cover is fixedly connected to the first notch via a first quick-release assembly, thus covering the first notch; the quick-release cover is provided with a second notch.

[0008] The quick-release protective cover is fixedly connected to the second notch via a second quick-release component, thus covering the second notch.

[0009] Preferably, the base plate is fixedly connected to the machine body by fixing screws.

[0010] Preferably, the first quick-release component is a quick-release latch lock.

[0011] Preferably, the second quick-release component is a quick-release latch lock.

[0012] Preferably, the quick-release protective cover is provided with a transparent observation window.

[0013] Preferably, the quick-release cover is provided with a first handle.

[0014] Preferably, the quick-release protective cover is provided with a second handle.

[0015] The cover plate system provided in this application not only provides excellent protection for optical components, but also effectively protects the original threads of the machine's aluminum base from damage caused by frequent screw removal. Moreover, the system is easy and quick to operate, improving the convenience of maintenance, disassembly, and installation. In addition, it can also meet the needs of operating the optical system in different areas during maintenance, which has significant practical value and technical improvement significance for extending the life of the machine body. Attached Figure Description

[0016] Figure 1 This is a structural schematic diagram of the cover plate system provided in this application;

[0017] Explanation of reference numerals in the attached figures:

[0018] 1-First quick-release assembly; 2-First handle; 3-Quick-release protective cover; 4-Base plate; 5-Quick-release cover plate; 6-Second quick-release assembly; 7-Observation window. Detailed Implementation

[0019] A preferred embodiment of this application provides a portable cover plate system for an optical measurement defect machine, such as... Figure 1 As shown, it includes a base plate 4, a quick-release cover plate 5, and a quick-release protective cover 3.

[0020] The base plate 4 is fixed to the machine body and has a first notch. A quick-release cover 5 is fixedly connected to the first notch via a first quick-release assembly 1, covering the first notch. The quick-release cover 5 has a second notch. A quick-release protective cover 3 is fixedly connected to the second notch via a second quick-release assembly 6, covering the second notch. The areas of the base plate 4, the quick-release cover 5, and the quick-release protective cover 3 decrease sequentially.

[0021] This application divides the protective cover in the prior art into three stacked components. The base plate can be fixedly connected to the original aluminum base of the machine body using the existing method (i.e., fixing screws). The first notch can be located in the optical system area. A quick-release cover can be quickly connected or removed from the base plate via a first quick-release assembly, covering and protecting the first notch. The second notch is located in the area for easy observation of the optical system. A quick-release protective cover can be quickly connected or removed from the quick-release cover via a second quick-release assembly, covering and protecting the second notch. The quick-release protective cover can be removed separately for easy observation of the optical system in that area. When the optical system needs maintenance, the larger quick-release cover can be quickly removed, facilitating maintenance operations without frequent disassembly of the base plate connected to the aluminum base of the machine body, reducing damage to the aluminum base connection.

[0022] The cover system provided in this application can also be applied to other similar scenarios. The location and size of the quick-release cover and quick-release protective cover can be adjusted according to the actual situation.

[0023] Therefore, the cover plate system provided in this application not only provides good protection for optical components, but also effectively protects the original threads of the machine's aluminum base from damage caused by frequent screw removal. Moreover, the system is easy and quick to operate, improving the convenience of maintenance, disassembly, and installation. In addition, it can also meet the needs of operating the optical system in different areas during maintenance, which has great practical value and technical improvement significance for extending the life of the machine body.

[0024] Preferably, both the first quick-release component 1 and the second quick-release component 6 adopt quick-release latch locks. Quick-release latch locks are easy to install and remove, and the connection is relatively firm and stable, with strong sealing performance.

[0025] Preferably, the quick-release protective cover is equipped with a transparent observation window 7, which makes it easier to observe the internal optical system. The transparent observation window is preferably made of acrylic material.

[0026] Preferably, the quick-release cover 5 is provided with a first handle 2, which makes it easy to take out the quick-release cover.

[0027] Preferably, the quick-release protective cover 3 is provided with a second handle, which makes it easy to take out the quick-release protective cover.

[0028] Round steel handles are preferred for both the first and second handles.

[0029] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if such modifications and modifications fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and modifications.

Claims

1. A portable cover plate system for an optical measurement defect machine, characterized in that, Includes a base plate, a quick-release cover, and a quick-release protective cover; The base plate is fixed to the machine body, and the base plate is provided with a first notch; The quick-release cover is fixedly connected to the first notch via a first quick-release assembly, thus covering the first notch; the quick-release cover is provided with a second notch. The quick-release protective cover is fixedly connected to the second notch via a second quick-release component, thus covering the second notch.

2. The portable cover plate system for an optical measurement defect machine as described in claim 1, characterized in that, The base plate is fixedly connected to the machine body by fixing screws.

3. The portable cover plate system for an optical measurement defect machine as described in claim 1, characterized in that, The first quick-release component is a quick-release latch lock.

4. The portable cover plate system for an optical measurement defect machine as described in claim 1, characterized in that, The second quick-release component is a quick-release latch lock.

5. The portable cover plate system for an optical measurement defect machine as described in claim 1, characterized in that, The quick-release protective cover is equipped with a transparent observation window.

6. The portable cover plate system for an optical measurement defect machine as described in claim 1, characterized in that, The quick-release cover is equipped with a first handle.

7. The portable cover plate system for an optical measurement defect machine as described in claim 1, characterized in that, The quick-release protective cover is equipped with a second handle.

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