Device for detecting internal pollution of wafer box

Abstract

The utility model provides a wafer cassette internal pollution detection device, and relates to the wafer cassette detection device field, the wafer cassette internal pollution detection device comprises a pedestal, the upper end of the pedestal is connected with a side plate, the upper side of the pedestal is provided with a detection rack, the inner side of the side plate is slidingly connected with a detection assembly, the detection rack comprises a fixed rack, the inner side wall of the fixed rack is provided with a limiting strip, and the limiting strip is connected with the detection assembly. A groove plate is arranged on the upper side of the fixing frame, a measuring plate is slidably inserted into the upper end of the groove plate, a limiting plate is arranged at the top of the measuring plate, the detection assembly comprises a lifting plate, the outer end of the lifting plate is connected with a mounting plate, and a dust detector is mounted on the upper side of the mounting plate. And the outer end of the dust detector is connected with a detection probe through a wire. According to the utility model, pollution detection can be conveniently carried out on the surface of the slot on the inner side of the wafer box, and meanwhile, the appearance of the wafer box can be conveniently detected.

Description

Technical Field

[0001] This utility model relates to the technical field of wafer cell inspection devices, specifically to a device for detecting internal contamination in a wafer cell. Background Technology

[0002] Wafer cassettes are used for placing wafers and facilitating wafer transfer; they are generally perforated frame structures made of metal. A search of existing technology (publication number: CN220382059U) reveals "a wafer cassette inspection device, wherein the wafer cassette has a receiving space for accommodating wafers, and the inner sidewall of the receiving space is provided with spaced-apart positioning members, with a slot for inserting a wafer formed between adjacent positioning members. The wafer cassette inspection device includes: a main body; a toothed assembly disposed on the outer sidewall of the main body; the toothed assembly includes multiple spaced-apart protrusions; wherein, when the wafer cassette is in a deformed state and the toothed assembly begins to enter the wafer cassette, the positioning members restrict at least one of the protrusions from extending into the slot; after the wafer cassette is in a deformed state and the toothed assembly enters the wafer cassette, the positioning members restrict the movement of at least one of the protrusions along the extension direction of the slot. This application can effectively detect defective wafer cassettes, prevent defective wafer cassettes from being used, and reduce the risk of product or equipment damage."

[0003] While existing wafer cassette inspection devices can inspect the external dimensions of wafer cassettes, they still have some shortcomings: the existing wafer cassette inspection devices can only inspect the slots of the wafer cassettes. However, when the wafer cassette is used to load wafers, the surface of the slots must be inspected for contamination. Otherwise, contaminants such as dust particles may be present and contaminate the wafers. At the same time, existing inspection devices are not convenient for inspecting the overall external dimensions of the wafer cassette to ensure that its appearance has not been deformed. Utility Model Content

[0004] To overcome the shortcomings of the existing technology, a wafer cell internal contamination detection device is provided to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, a wafer cassette internal contamination detection device is provided, comprising: a base, a side plate connected to the upper end of the base, a detection frame provided on the upper side of the base, and a detection component slidably connected to the inner side of the side plate; the detection frame includes a fixed frame, a limiting strip provided on the inner side wall of the fixed frame, and a groove plate provided on the upper side of the fixed frame; a measuring plate slidably inserted into the upper end of the groove plate, and a limiting plate provided on the top of the measuring plate; the detection component includes a lifting plate, a mounting plate connected to the outer end of the lifting plate, and a dust detector mounted on the upper side of the mounting plate, with a detection probe connected to the outer end of the dust detector via a wire.

[0006] Furthermore, the side plate has a drive groove and a limiting groove inside, and a lead screw is rotatably connected inside the drive groove, and a lifting motor is connected to the upper end of the lead screw.

[0007] Furthermore, the lifting plate is slidably connected in the drive groove and the limiting groove, and the lead screw passes through the lifting plate, and guide strips are provided on both sides of the lifting plate.

[0008] Furthermore, an electric actuator is installed at the bottom of the mounting plate, and a movable plate is connected to the outer end of the electric actuator. A guide rod is connected between the movable plate and the mounting plate.

[0009] Furthermore, a steering motor is installed at the bottom of the movable plate, and a drive shaft is connected to the upper end of the steering motor, and a fixed plate is connected to the upper end of the drive shaft.

[0010] Furthermore, the detection probe is installed in the fixed plate, and the detection probe faces the detection frame.

[0011] Furthermore, the upper end of the measuring plate is provided with a damping rotating shaft, and the limiting plate is rotatably connected to the measuring plate through the damping rotating shaft, and a scale line is provided on one side of the outer wall of the measuring plate.

[0012] The beneficial effects of this utility model are as follows:

[0013] 1. The testing fixture includes a fixed frame and a limiting strip, which facilitates the placement of the wafer cassette on the upper side of the limiting strip. At this time, the wafer cassette is tightly attached to the inner wall of the fixed frame, and the length of the wafer cassette is equal to the length of the two parallel limiting strips, and the width of the wafer cassette is equal to the width of the other limiting strip. Then, by pulling the measuring plate upward from the slot plate, the limiting plate passes over the upper end of the wafer cassette. Then, the limiting plate is flipped to a horizontal position, and the measuring plate is moved downward so that the limiting plate is placed on the upper end of the wafer cassette. At this time, the height of the wafer cassette is measured through the scale lines on the outer wall of the measuring plate, thereby realizing the detection of the length, width and height of the wafer cassette, and thus realizing the detection of the overall appearance dimensions of the wafer cassette to ensure that its appearance is not deformed.

[0014] 2. When the wafer cassette is placed on the mounting bracket, the dust detector is activated, and a laser detection beam is generated through the detection probe. Then, the lifting motor is activated, and the dust detector is moved downwards through the lead screw, lifting plate, and mounting plate until the detection probe is at the height of the wafer cassette. Then, the detector is pushed into the inside of the wafer cassette by the electric push rod. At this time, the detection probe can scan the dust surface of each slot on the inside of the wafer cassette. Then, the fixing plate is rotated by the steering motor and drive shaft to scan all the slot surfaces on the inside of the wafer cassette, thereby realizing the detection of contamination of the slots inside the wafer cassette. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model.

[0016] Figure 2 This is a three-dimensional structural diagram of the testing frame according to an embodiment of the present utility model.

[0017] Figure 3 This is a three-dimensional structural diagram of the detection component according to an embodiment of the present utility model.

[0018] Figure 4 This is a top view of the wafer cassette structure according to an embodiment of the present invention.

[0019] In the diagram: 1. Base; 2. Side plate; 21. Drive slot; 22. Limit slot; 23. Lifting motor; 24. Lead screw; 3. Detection frame; 31. Fixing frame; 32. Limiting strip; 33. Slot plate; 34. Measuring plate; 35. Damping shaft; 36. Limiting plate; 4. Detection assembly; 41. Lifting plate; 42. Mounting plate; 43. Dust detector; 431. Wire; 432. Detection probe; 44. Fixing plate; 45. Steering motor; 451. Drive shaft; 46. Moving plate; 47. Electric actuator; 48. Guide rod. Detailed Implementation

[0020] Reference Figures 1 to 4 As shown, this utility model provides a wafer cassette internal contamination detection device, including: a base 1, a side plate 2 connected to the upper end of the base 1, a detection frame 3 provided on the upper side of the base 1, and a detection component 4 slidably connected to the inner side of the side plate 2. The detection frame 3 includes a fixing frame 31, and a limiting strip 32 is provided on the inner side wall of the fixing frame 31. A groove plate 33 is provided on the upper side of the fixing frame 31. A measuring plate 34 is slidably inserted into the upper end of the groove plate 33. A limiting plate 36 is provided on the top of the measuring plate 34. A damping shaft 35 is provided on the upper end of the measuring plate 34. The limiting plate 36 is rotatably connected to the measuring plate 34 through the damping shaft 35. A scale line is provided on one outer wall of the measuring plate 34. The detection component 4 includes a lifting plate 41, and a mounting plate 42 is connected to the outer end of the lifting plate 41. A dust detector 43 is mounted on the upper side of the mounting plate 42. At the same time, a detection probe 432 is connected to the outer end of the dust detector 43 through a wire 431.

[0021] In this embodiment, the base 1, side plate 2, detection frame 3, and detection component 4 constitute the main structure of the wafer cassette internal contamination detection device involved in this application.

[0022] Specifically, the mounting bracket 31 is designed as an N-shaped structure in the top view, and the opening side of the mounting bracket 31 faces the side plate 2. At the same time, the length and width of the mounting bracket 31 match the wafer cassette to be tested. That is, when the wafer cassette is stably placed on the limiting strip 32 inside the mounting bracket 31, the size of the wafer cassette does not deform.

[0023] Specifically, the thickness of the limiting plate 36 is less than that of the measuring plate 34. When the limiting plate 36 is flipped to the horizontal position, the edge of the measuring plate 34 limits and blocks the limiting plate 36 in the horizontal direction.

[0024] Specifically, the height of the slot plate 33 is kept fixed and set to be less than the height of the wafer cell to be tested. Then, by measuring the scale line on the edge of the measuring plate 34, when the limiting plate 36 is placed on the upper end of the wafer cell, the position of the scale line on the upper surface of the slot plate 33 can be observed, and the height of the wafer cell can be measured.

[0025] It should be noted that the distance from the limit strip 32 to the upper surface of the groove plate 33, and the height of the groove plate 33 itself are known quantities.

[0026] Specifically, the dust detector 43 is set as a laser dust particle counter in the prior art. Its basic principle is that the detection laser of the optical sensor is scattered by dust particles and received by the photosensitive element to generate a pulse signal. The pulse signal is output and amplified, and then digital signal processing is performed. By comparing it with the standard particle signal, the comparison result is expressed with different parameters.

[0027] Among them, the detection probe 432 is part of the laser dust particle counter, and the detection end of the detection probe 432 is tilted downward.

[0028] like Figure 1 and Figure 3 In the middle, the side plate 2 has a drive groove 21 and a limit groove 22 inside, and a lead screw 24 is rotatably connected inside the drive groove 21. The upper end of the lead screw 24 is connected to a lifting motor 23. The lifting plate 41 is slidably connected in the drive groove 21 and the limit groove 22. The lead screw 24 is screwed through the lifting plate 41. Guide strips are provided on both sides of the lifting plate 41. An electric push rod 47 is installed at the bottom of the mounting plate 42. A moving plate 46 is connected to the outer end of the electric push rod 47. A guide rod 48 is connected between the moving plate 46 and the mounting plate 42. A steering motor 45 is installed at the bottom of the moving plate 46. A drive shaft 451 is connected to the upper end of the steering motor 45. A fixed plate 44 is connected to the upper end of the drive shaft 451. The detection probe 432 is installed in the fixed plate 44 and faces the detection frame 3.

[0029] As a preferred implementation, by setting up a lifting motor 23 and a lead screw 24, the dust detector 43 can be easily driven to move up and down, thereby enabling scanning and detection of the slots in each wafer cell.

[0030] It should be noted that a guide groove is provided in the limiting groove 22, and the guide strip is slidably engaged in the guide groove to achieve stable movement of the lifting plate 41.

[0031] As a preferred implementation, by providing a steering motor 45 and a drive shaft 451, it is convenient to rotate the detection probe 432 at multiple angles, thereby facilitating the scanning of slots in multiple directions on the inner wall of the wafer cassette.

[0032] In use, the testing fixture includes a fixing frame and limiting strips, facilitating the placement of the wafer cassette onto the upper side of the limiting strips. At this point, the wafer cassette is flush against the inner wall of the fixing frame, with its length equal to the two parallel limiting strips and its width equal to the width of the other limiting strip. The measuring plate is then pulled upwards from the slot plate, allowing the limiting plate to pass over the top of the wafer cassette. The limiting plate is then flipped to a horizontal position, and the measuring plate is moved downwards until the limiting plate is positioned on top of the wafer cassette. The height of the wafer cassette is then measured using the scale lines on the outer wall of the measuring plate. When the wafer cassette is placed on the mounting bracket, the dust detector is activated, which generates a laser detection beam through the detection probe. Then, the lifting motor is activated, and the dust detector is moved downwards through the lead screw, lifting plate, and mounting plate until the detection probe is at the height of the wafer cassette. Then, the dust detector is pushed into the inside of the wafer cassette by the electric push rod. At this time, the detection probe can scan the dust surface of each slot inside the wafer cassette. Then, the fixing plate is rotated by the steering motor and drive shaft to achieve scanning of all slot surfaces inside the wafer cassette.

[0033] The wafer cassette internal contamination detection device of this invention can effectively solve the problems mentioned in the background technology. It achieves the effect of facilitating contamination detection on the inner slot surface of the wafer cassette and simultaneously facilitating the inspection of the wafer cassette appearance, based on the existing wafer cassette internal contamination detection device technology.

Claims

1. A device for detecting contamination inside a wafer cell, comprising: The base (1) is characterized in that: the upper end of the base (1) is connected to a side plate (2), and the upper side of the base (1) is provided with a detection frame (3), and the inner side of the side plate (2) is slidably connected to a detection component (4). The detection frame (3) includes a fixed frame (31), and the inner side wall of the fixed frame (31) is provided with a limiting strip (32). The upper side of the fixed frame (31) is provided with a groove plate (33), the upper end of the groove plate (33) is slidably inserted with a measuring plate (34), and the top of the measuring plate (34) is provided with a limiting plate (36). The detection component (4) includes a lifting plate (41), and the outer end of the lifting plate (41) is connected to a mounting plate (42). The upper side of the mounting plate (42) is equipped with a dust detector (43), and the outer end of the dust detector (43) is connected to a detection probe (432) through a wire (431).

2. The wafer cassette internal contamination detection device according to claim 1, characterized in that, The side plate (2) has a drive groove (21) and a limit groove (22) inside. A lead screw (24) is rotatably connected inside the drive groove (21), and a lifting motor (23) is connected to the upper end of the lead screw (24).

3. The wafer cassette internal contamination detection device according to claim 1, characterized in that, The lifting plate (41) is slidably connected in the drive groove (21) and the limiting groove (22), and the lead screw (24) is screwed through the lifting plate (41), and guide strips are provided on both sides of the lifting plate (41).

4. The wafer cassette internal contamination detection device according to claim 1, characterized in that, An electric actuator (47) is installed at the bottom of the mounting plate (42), and a movable plate (46) is connected to the outer end of the electric actuator (47), and a guide rod (48) is connected between the movable plate (46) and the mounting plate (42).

5. The wafer cassette internal contamination detection device according to claim 4, characterized in that, The bottom of the movable plate (46) is equipped with a steering motor (45), and the upper end of the steering motor (45) is connected to a drive shaft (451), and the upper end of the drive shaft (451) is connected to a fixed plate (44).

6. The wafer cassette internal contamination detection device according to claim 1, characterized in that, The detection probe (432) is installed in the fixed plate (44) and the detection probe (432) faces the detection frame (3).

7. The wafer cassette internal contamination detection device according to claim 1, characterized in that, The upper end of the measuring plate (34) is provided with a damping shaft (35), and the limiting plate (36) is rotatably connected to the measuring plate (34) through the damping shaft (35), and a scale line is provided on one side of the outer wall of the measuring plate (34).

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