Device for detecting internal pollution of wafer box

By designing a contamination detection device inside the wafer cell, which utilizes a limiting strip for fixation, a measuring plate for measurement, and a dust detector for scanning, the problem of existing devices being unable to detect slot contamination and surface deformation has been solved, enabling comprehensive inspection of the wafer cell.

CN224203070UActive Publication Date: 2026-05-05XINFU SEMICONDUCTOR TECHNOLOGY (HEFEI) CO LTD
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Patent Information

Application Number
CN202520690673.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-04-14
Publication Date
2026-05-05
Estimated Expiration
2035-04-14

AI Technical Summary

Technical Problem

Existing wafer cell inspection equipment can only inspect slots, but cannot detect contaminants on the slot surface, nor can it detect whether there is deformation in the overall appearance and dimensions of the wafer cell.

Method used

A device for detecting contamination inside a wafer cassette is designed, comprising a base, side plates, a detection frame, a limiting strip, a measuring plate, a dust detector, and a detection probe. The wafer cassette is fixed by the limiting strip, the measuring plate measures the dimensions, and the dust detector and detection probe perform laser scanning to achieve comprehensive detection of the inside and outside of the wafer cassette.

Benefits of technology

It enables the detection of contamination on the inner slot surface of the wafer box and the precise measurement of its external dimensions, ensuring that the wafer box does not deform or become contaminated during use.

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Abstract

The utility model provides a wafer cassette internal pollution detection device, and relates to the wafer cassette detection device field, the wafer cassette internal pollution detection device comprises a pedestal, the upper end of the pedestal is connected with a side plate, the upper side of the pedestal is provided with a detection rack, the inner side of the side plate is slidingly connected with a detection assembly, the detection rack comprises a fixed rack, the inner side wall of the fixed rack is provided with a limiting strip, and the limiting strip is connected with the detection assembly. A groove plate is arranged on the upper side of the fixing frame, a measuring plate is slidably inserted into the upper end of the groove plate, a limiting plate is arranged at the top of the measuring plate, the detection assembly comprises a lifting plate, the outer end of the lifting plate is connected with a mounting plate, and a dust detector is mounted on the upper side of the mounting plate. And the outer end of the dust detector is connected with a detection probe through a wire. According to the utility model, pollution detection can be conveniently carried out on the surface of the slot on the inner side of the wafer box, and meanwhile, the appearance of the wafer box can be conveniently detected.
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