Semiconductor test probe convenient to replace
By designing easily replaceable semiconductor test probes and utilizing a rotating sleeve and damping spring structure, the problems of time-consuming and labor-intensive replacement and easy damage of traditional probes are solved, achieving rapid replacement and vibration protection, and improving testing efficiency and accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 深圳市欧瑞特实业有限公司
- Filing Date
- 2025-04-21
- Publication Date
- 2026-05-05
AI Technical Summary
Traditional probe replacement methods are cumbersome, time-consuming, and labor-intensive. They can easily damage the probes during disassembly and installation, affecting test accuracy and shortening their service life.
A semiconductor test probe that is easy to replace is designed. It is connected to the mounting post by a rotating sleeve and combined with a bidirectional threaded rod, a limiting plate and a damping spring to realize convenient installation and disassembly of the probe. The damping spring buffers vibration to protect the probe structure.
It enables rapid probe replacement, improves testing efficiency and accuracy, extends probe lifespan, and reduces vibration damage to the probe structure.
Smart Images

Figure CN224203273U_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of probe technology, specifically to a semiconductor test probe that is easy to replace. Background Technology
[0002] With the rapid development of semiconductor technology, chips are becoming increasingly integrated, smaller in size, and more complex in function. This necessitates high-precision, high-reliability testing methods during chip manufacturing to ensure chip quality and performance. Semiconductor test probes, as key components connecting testing equipment to chips, are becoming increasingly important. For example, in large-scale integrated circuit production, each chip needs to undergo electrical performance testing to screen out defective products, preventing problems in subsequent packaging and applications, thereby reducing production costs and improving production efficiency.
[0003] In semiconductor manufacturing, testing is a crucial and labor-intensive process. Traditional probe replacement methods are cumbersome; for example, some probe bases are paired with probe bodies, requiring reinstallation of the matching base for replacement, which consumes significant time and manpower. However, with the development of the semiconductor industry, the demand for testing efficiency is increasing. Easily replaceable probes can quickly replace worn or damaged probes, reducing downtime for testing equipment, improving overall testing efficiency, and meeting the needs of large-scale production.
[0004] In situations where replacement is inconvenient, operators may accidentally damage the probe during disassembly and installation, such as bending, deformation, or accelerated tip wear. This will not only affect the accuracy of the current test but also shorten the probe's lifespan.
[0005] To address the aforementioned issues, a semiconductor test probe that is easy to replace is proposed. Utility Model Content
[0006] The purpose of this invention is to provide a semiconductor test probe that is easy to replace, which solves the problem in the prior art where operators may accidentally damage the probe during disassembly and installation when it is inconvenient to replace it, such as bending, deformation or accelerated tip wear. This not only affects the accuracy of the current test, but also shortens the service life of the probe.
[0007] To achieve the above objectives, this utility model provides the following technical solution: a replaceable semiconductor test probe, comprising a tube, a connecting sleeve at the bottom of the tube, a probe at the bottom of the connecting sleeve, a mounting post fixedly connected to the top of the probe, a rotating sleeve threadedly connected to the outer ring of the top of the mounting post, a limiting groove formed at the top of the rotating sleeve, a bidirectional threaded rod rotatably connected inside the connecting sleeve, a limiting disk fixedly connected to the outer ring of the front end of the bidirectional threaded rod, and a protective component provided inside the tube.
[0008] By adopting the above technical solution, the rotating sleeve is installed by the threaded ring of the mounting column and the threaded groove of the rotating sleeve, and then the rotating sleeve is installed by the limiting groove and the limiting plate.
[0009] As a further description of the above technical solution: the protection component includes a connecting plate, which is fixedly connected to the outer ring of the connecting sleeve.
[0010] By adopting the above technical solution, the connecting sleeve is fixed by the connecting plate.
[0011] As a further description of the above technical solution: both the front and rear outer rings of the bidirectional threaded rod are threaded with nut pairs.
[0012] By adopting the above technical solution, the nut assembly moves on the outer ring of the bidirectional threaded rod.
[0013] As a further description of the above technical solution: the nuts are internally connected by a limiting rod that slides through them, and the limiting rod is fixedly connected to the inner wall of the connecting sleeve.
[0014] By adopting the above technical solution, the nut assembly is limited and controlled by the limiting rod.
[0015] As a further description of the above technical solution: a movable plate is fixedly connected to the bottom of the nut assembly.
[0016] By adopting the above technical solution, the moving plate is moved by the movement of the nut pair.
[0017] As a further description of the above technical solution: the bottom of the movable plate is fixedly connected to a limiting plate, and the limiting plate is slidably connected to the limiting groove.
[0018] By adopting the above technical solution, the limiting plate slides on the inner wall of the limiting groove, and then the limiting control is achieved.
[0019] As a further description of the above technical solution: the inside of the pipe is provided with evenly distributed slots, and the slots are slidably connected to the connecting plate.
[0020] By adopting the above technical solution, the damping spring can move internally through the slot.
[0021] As a further description of the above technical solution: a damping spring is fixedly connected to the bottom of the connecting plate, and the damping spring is fixedly connected to the inner wall of the tube.
[0022] By adopting the above technical solution, damping springs are used for buffering and protection.
[0023] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0024] 1. The present invention provides a semiconductor test probe that is easy to replace. First, by rotating the rotating sleeve and utilizing its threaded connection with the mounting post, the rotating sleeve moves up and down along the mounting post to install the rotating sleeve. Then, the bidirectional threaded rod drives the limiting plate, the moving plate, the nut pair and other components to move, thereby causing the bidirectional threaded rod to rotate. With the cooperation of the nut pair and the limiting rod, the probe and the mounting post can be easily taken out or put in from the bottom of the connecting sleeve, realizing convenient replacement of the probe.
[0025] 2. The present invention provides a semiconductor test probe that is easy to replace. When the probe vibrates upon contact with a semiconductor device, the connecting sleeve will displace. The connecting plate on the outer ring of the connecting sleeve slides within the slot inside the tube. The damping spring at the bottom of the connecting plate buffers the vibration of the connecting sleeve, converting the vibration energy into elastic potential energy. This reduces the vibration transmitted to the tube and other components, protects the probe and the entire test probe structure, and improves the accuracy and stability of the test. Attached Figure Description
[0026] Figure 1 This is a schematic diagram of the overall structure of this utility model;
[0027] Figure 2 This is a schematic diagram of the limiting groove of this utility model;
[0028] Figure 3 This is a cross-sectional structural diagram of the connecting sleeve of this utility model;
[0029] Figure 4 This is a cross-sectional structural diagram of the pipe of this utility model.
[0030] In the diagram: 1. Pipe; 2. Connecting sleeve; 3. Probe; 4. Mounting post; 5. Rotating sleeve; 6. Limiting groove; 7. Limiting plate; 8. Bidirectional threaded rod; 9. Limiting rod; 10. Limiting disc; 11. Nut pair; 12. Moving plate; 13. Slot; 14. Damping spring; 15. Connecting plate. Detailed Implementation
[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0032] To further understand the contents of this utility model, a detailed description of this utility model will be provided with reference to the accompanying drawings.
[0033] Reference Figures 1-4This utility model discloses a replaceable semiconductor test probe, comprising a tube 1. The tube 1 serves as the basic support structure for the entire test probe, and has evenly distributed slots 13 inside. The slots 13 are designed to cooperate with the connecting plate 15 on the outer ring of the connecting sleeve 2. The connecting plate 15 can slide within the slots 13, which provides the basis for subsequent buffering and shock absorption functions.
[0034] The connecting sleeve 2 is located at the bottom of the pipe 1, and a bidirectional threaded rod 8 is rotatably connected inside it. Nut pairs 11 are threadedly connected to the outer rings of both ends of the bidirectional threaded rod 8. A limiting rod 9 is slidably connected through and between the nut pairs 11, and the limiting rod 9 is fixedly connected to the inner wall of the connecting sleeve 2. This structural design allows the nut pairs 11 to move smoothly along the axial direction of the bidirectional threaded rod 8 under the constraint of the limiting rod 9 when the bidirectional threaded rod 8 rotates, avoiding wobbling or deviation. A limiting plate 10 is fixedly connected to the outer ring of the front end of the bidirectional threaded rod 8, which restricts the axial movement of the bidirectional threaded rod 8 and ensures its stability during rotation. A moving plate 12 is fixedly connected to the bottom of the nut pairs 11, and a limiting plate 7 is fixedly connected to the bottom of the moving plate 12. When the bidirectional threaded rod 8 drives the nut pairs 11 to move, the moving plate 12 and the limiting plate 7 move synchronously.
[0035] The probe 3 is located at the bottom of the connecting sleeve 2, and a mounting post 4 is fixedly connected to its top. A rotating sleeve 5 is threadedly connected to the outer ring of the top of the mounting post 4, and a limiting groove 6 is formed on the top of the rotating sleeve 5. When installing or replacing the probe 3, rotating the rotating sleeve 5, utilizing the threaded connection between the rotating sleeve 5 and the mounting post 4, allows the rotating sleeve 5 to move up and down along the mounting post 4. When the rotating sleeve 5 moves to the appropriate position, the bidirectional threaded rod 8 drives the nut pair 11 to move, which in turn drives the moving plate 12 and the limiting plate 7 to move, inserting the limiting plate 7 into the limiting groove 6 on the top of the rotating sleeve 5, thereby achieving limiting control of the rotating sleeve 5 and completing the installation or fixing of the probe 3 and the mounting post 4. When it is necessary to disassemble the probe 3, the operation is reversed, allowing the probe 3 and the mounting post 4 to be easily and quickly removed from the bottom of the connecting sleeve 2.
[0036] A connecting plate 15 is fixedly connected to the outer ring of the connecting sleeve 2. A damping spring 14 is fixedly connected to the bottom of the connecting plate 15, and the damping spring 14 is fixedly connected to the inner wall of the tube 1. When the probe 3 vibrates upon contact with the semiconductor device, the connecting sleeve 2 will displace. The connecting plate 15 on the outer ring of the connecting sleeve 2 slides within the slot 13 inside the tube 1. The damping spring 14 at the bottom of the connecting plate 15 buffers the vibration of the connecting sleeve 2, converting the vibration energy into elastic potential energy. This reduces the vibration transmitted to the tube 1 and other components, protects the probe 3 and the entire test probe structure, and improves the accuracy and stability of the test.
[0037] Working Principle: When probe 3 needs to be installed or replaced, the rotating sleeve 5 is rotated. Since the rotating sleeve 5 is threadedly connected to the mounting post 4, the rotating sleeve 5 will move along the mounting post 4. The bidirectional threaded rod 8 drives the nut pair 11 to move. The limiting rod 9 limits the nut pair 11, allowing the moving plate 12 to engage with the limiting plate 7. The limiting plate 7 is inserted into the limiting groove 6 for limiting control. When probe 3 contacts the semiconductor device, vibration may occur. At this time, the connecting sleeve 2 will shift due to the vibration, and the connecting plate 15 on the outer ring of the connecting sleeve 2 will slide within the slot 13 inside the tube 1. The damping spring 14 at the bottom of the connecting plate 15 will buffer the vibration of the connecting sleeve 2, converting the vibration energy into the elastic potential energy of the damping spring 14, reducing the vibration transmitted to the tube 1 and other components, thereby protecting probe 3 and the entire test probe structure, and improving the accuracy and stability of the test.
[0038] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.
[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A replaceable semiconductor test probe, comprising a tube (1), characterized in that: The tube (1) is provided with a connecting sleeve (2) at the bottom, and a probe (3) is provided at the bottom of the connecting sleeve (2). A mounting post (4) is fixedly connected to the top of the probe (3). A rotating sleeve (5) is threadedly connected to the outer ring of the top of the mounting post (4). A limiting groove (6) is opened on the top of the rotating sleeve (5). A bidirectional threaded rod (8) is rotatably connected inside the connecting sleeve (2). A limiting disk (10) is fixedly connected to the outer ring of the front end of the bidirectional threaded rod (8). A protective component is provided inside the tube (1).
2. The easily replaceable semiconductor test probe according to claim 1, characterized in that: The protective component includes a connecting plate (15), which is fixedly connected to the outer ring of the connecting sleeve (2).
3. The easily replaceable semiconductor test probe according to claim 1, characterized in that: The outer rings at both ends of the bidirectional threaded rod (8) are threaded with nut pairs (11).
4. A replaceable semiconductor test probe according to claim 3, characterized in that: The nut pair (11) is internally connected by a limiting rod (9), and the limiting rod (9) is fixedly connected to the inner wall of the connecting sleeve (2).
5. A replaceable semiconductor test probe according to claim 3, characterized in that: The bottom of the nut assembly (11) is fixedly connected to a movable plate (12).
6. A replaceable semiconductor test probe according to claim 5, characterized in that: The bottom of the movable plate (12) is fixedly connected to a limiting plate (7), and the limiting plate (7) is slidably connected to the limiting groove (6).
7. A replaceable semiconductor test probe according to claim 1, characterized in that: The tube (1) has evenly distributed slots (13) inside, and the slots (13) are slidably connected to the connecting plate (15).
8. A replaceable semiconductor test probe according to claim 2, characterized in that: The bottom of the connecting plate (15) is fixedly connected to a damping spring (14), and the damping spring (14) is fixedly connected to the inner wall of the tube (1).