Adsorption device and carrying equipment

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to an adsorption device and carrying equipment, and solves the problem that the carrying efficiency and the equipment cost cannot be considered at the same time in the carrying equipment in the related technology. The adsorption device comprises a bearing assembly, a first driving assembly, a first adsorption assembly and a second adsorption assembly. The first adsorption assembly and the second adsorption assembly are both connected to the bearing assembly, and the bearing assembly can be installed at the tail end of a carrying manipulator, so that the first adsorption assembly and the second adsorption assembly are driven by the carrying manipulator to move so as to carry a pair of half sheets at the same time, the carrying efficiency is improved, and the labor intensity of workers is reduced. And the number of carrying manipulators is reduced, the carrying cost is reduced, and the carrying efficiency and the equipment cost are both considered. Besides, the first driving assembly drives the first adsorption assembly to reciprocate in the first direction, so that the first half sheet and the second half sheet in the pair of half sheets are placed in sequence, and the fragment probability is reduced.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and specifically to an adsorption device and a conveying device. Background Technology

[0002] In the production of solar cells, silicon wafers need to be transferred from stacking boxes to graphite boats using handling equipment. This handling equipment is typically a combination of robots and adsorption modules. The mainstream whole-wafer stacking boxes in the industry are single-row, with a single adsorption module for each wafer. With process improvements, the market for half-wafers is growing, with two half-wafers corresponding to one whole wafer. A pair of half-wafers are arranged in two rows in the stacking box. Current technologies using a single robot with a single adsorption module can only transfer one half-wafer at a time, resulting in low efficiency. Alternatively, some technologies utilize two robots, each carrying an adsorption module, to transport a pair of half-wafers at a time, but this is more expensive. Utility Model Content

[0003] In view of this, the present disclosure provides an adsorption device and a handling equipment, which solves the problem that handling equipment in the related art cannot balance handling efficiency and equipment cost.

[0004] In a first aspect, embodiments of this disclosure provide an adsorption device configured to transport one or more half-sheets, the pair of half-sheets including a first half-sheet and a second half-sheet; wherein the adsorption device includes: a support assembly capable of being mounted on the end effector of a transport robot; a first drive assembly including a first drive member and a first movable member connected to each other, the first drive member being mounted on the support assembly, the first movable member reciprocating along a first direction under the drive of the first drive member; a first adsorption assembly connected to the first movable member, reciprocating along the first direction under the drive of the first movable member, the first adsorption assembly being configured to adsorb one or more of the first half-sheets; and a second adsorption assembly connected to the support assembly, the second adsorption assembly being configured to adsorb one or more of the second half-sheets.

[0005] In some embodiments, the adsorption device further includes: a second driving component, comprising a second driving member and a second movable member connected to each other, the second driving member being mounted on the bearing component, and the second movable member reciprocating along a second direction under the drive of the second driving member, the second direction being perpendicular to the first direction; wherein, the second adsorption component is connected to the second movable member and reciprocates along the second direction under the drive of the second movable member.

[0006] In some embodiments, the adsorption device further includes: a plurality of first sensors mounted on the support component, the plurality of first sensors being spaced apart in the second direction; a first sensing element disposed on the second adsorption component, the first sensing element being disposed adjacent to the first sensors, the first sensing element being able to reciprocate along the second direction with the second adsorption component, and the corresponding first sensor being able to detect the first sensing element when the first sensing element passes the first sensor.

[0007] In some embodiments, the adsorption device is further configured to transport one or more half-sheets between a stacking box and a boat structure. The distance between the geometric center of the first bearing area and the geometric center of the second bearing area of ​​the stacking box is a first distance, and the distance between the geometric center of the third bearing area and the geometric center of the fourth bearing area of ​​the boat structure is a second distance. Both the first and third bearing areas are configured to bear the first half-sheet, and both the second and fourth bearing areas are configured to bear the second half-sheet. The adsorption device further includes: a first limiting member installed on the bearing assembly; a second limiting member installed on the bearing assembly and spaced apart from the first limiting member along the second direction; and a third limiting member disposed on the second adsorption assembly, located between the first and second limiting members. When the third limiting member moves to abut against the first limiting member, the distance between the geometric center of the first adsorption assembly and the geometric center of the second adsorption assembly is the first distance; when the third limiting member moves to abut against the second limiting member, the distance between the geometric center of the first adsorption assembly and the geometric center of the second adsorption assembly is the second distance.

[0008] In some embodiments, the first limiting member includes: a first mounting portion mounted on the bearing assembly, the first mounting portion having a first threaded portion extending along the second direction; a first limiting portion screwed to the first threaded portion to make the position of the first limiting portion relative to the first mounting portion in the second direction adjustable, wherein the third limiting member is movable to abut against the first limiting portion; and / or, the second limiting member includes: a second mounting portion mounted on the bearing assembly, the second mounting portion having a second threaded portion extending along the second direction; a second limiting portion screwed to the second threaded portion to make the position of the second limiting portion relative to the second mounting portion in the second direction adjustable, wherein the third limiting member is movable to abut against the second limiting portion.

[0009] In some embodiments, the first driving member includes: a motor mounted on the bearing assembly; a lead screw connected to the motor and rotating under the drive of the motor; the first movable member includes: a lead screw nut screwed to the lead screw and connected to the first adsorption assembly, the lead screw nut reciprocating along the first direction under the drive of the lead screw to drive the first adsorption assembly to reciprocate along the first direction; and / or, the second driving member includes: a cylinder barrel mounted on the bearing assembly; the second movable member includes: a cylinder rod connected to the cylinder barrel and reciprocating along the second direction under the drive of the cylinder barrel; a floating joint connected to the end of the cylinder rod away from the cylinder barrel, the floating joint also being connected to the second adsorption assembly.

[0010] In some embodiments, the adsorption device further includes: a second sensor mounted on the support component; and a second sensing element disposed on the first adsorption component, wherein the second sensing element is disposed adjacent to the second sensor, the second sensing element is capable of reciprocating along the first direction with the first adsorption component, and the second sensor is capable of detecting the second sensing element when the second sensing element passes the second sensor.

[0011] In some embodiments, the adsorption device further includes: one or more first guide rails mounted on the support component; one or more first sliders mounted on the first adsorption component, the first sliders being slidably connected to the first guide rails; and / or, the adsorption device further includes: one or more second guide rails mounted on the support component; one or more second sliders mounted on the second adsorption component, the second sliders being slidably connected to the second guide rails.

[0012] In some embodiments, the first adsorption assembly includes: a plurality of first adsorption elements, the plurality of first adsorption elements being spaced apart along the first direction; a first connector connecting the plurality of first adsorption elements, the first connector also being connected to the first movable element; the second adsorption assembly includes: a plurality of second adsorption elements, the plurality of second adsorption elements being spaced apart along the first direction; a second connector connecting the plurality of second adsorption elements, the second connector also being connected to the second movable element; the adsorption device further includes: a first gas distribution pipe extending along the first direction, the first gas distribution pipe having a first air extraction port at both ends, the first gas distribution pipe also having a plurality of first sub-air extraction ports spaced apart along the first direction, the plurality of first sub-air extraction ports communicating with the first air extraction port, the first air extraction port communicating with an air extraction device, the plurality of first sub-air extraction ports communicating with the plurality of first adsorption elements; a second gas distribution pipe extending along the first direction, the second gas distribution pipe having a second air extraction port at both ends, the second gas distribution pipe also having a plurality of second sub-air extraction ports spaced apart along the first direction, the plurality of second sub-air extraction ports communicating with the second air extraction port, the second air extraction port communicating with the air extraction device, the plurality of second sub-air extraction ports communicating with the plurality of second adsorption elements.

[0013] Secondly, one embodiment of this disclosure provides a handling device, including: a handling robot; and the adsorption device described in the first aspect, installed at the end of the handling robot.

[0014] By connecting both the first and second adsorption components to the carrier component, the carrier component can be installed at the end of a handling robot. This allows the first and second adsorption components to be driven by a single handling robot to simultaneously handle a pair of half-sheets, which improves handling efficiency, reduces the number of handling robots, and lowers handling costs. In other words, it balances both handling efficiency and equipment cost.

[0015] The inventors discovered that placing a pair of half-sheets simultaneously on a boat structure would cause fragmentation. By setting a first driving component, which can drive the first adsorption component to reciprocate along a first direction, the first half-sheet and the second half-sheet of a pair of half-sheets can be placed sequentially, reducing the probability of fragmentation. Attached Figure Description

[0016] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a structural schematic of an adsorption device provided in an embodiment of this disclosure.

[0018] Figure 2 The diagram shown is a schematic representation of the structure of an adsorption device provided in an embodiment of this disclosure after the carrier component has been removed.

[0019] Figure 3 The image shown is an embodiment of this disclosure. Figure 2 The adsorption device shown is partially enlarged in region A.

[0020] Figure 4 The image shown is an embodiment of this disclosure. Figure 2 The image shows a magnified view of the adsorption device in region B.

[0021] Figure 5 The diagram shown is a structural schematic of the first limiting member, the second limiting member, and the third limiting member provided in an embodiment of this disclosure.

[0022] Figure 6 The diagram shown is a structural schematic of a stacking box and a half sheet provided in an embodiment of this disclosure.

[0023] Figure 7 The diagram shown is a schematic representation of a boat structure and a half-sheet material according to an embodiment of this disclosure.

[0024] Figure 8 The diagram shown is a structural schematic of a handling device provided in an embodiment of this disclosure.

[0025] Figure label:

[0026] 1. Handling equipment; 10. Adsorption device; 110. Bearing assembly; 120. First drive assembly; 121. First drive component; 1211. Motor; 1212. Lead screw; 122. First movable component; 1221. Lead screw nut; 130. First adsorption assembly; 131. First adsorption component; 132. First connecting component; 140. Second adsorption assembly; 141. Second adsorption component; 142. Second connecting component; 150. Second drive assembly; 151. Second drive component; 1511. Cylinder barrel; 152. Second movable component; 1521. Cylinder rod; 1522. Floating joint; 160. First sensor; 170. First sensing element; 180. First limiting component; 181. First mounting part; 1811. First threaded part; 182. First limiting part; 190. Second limiting component; 191. 2. Mounting section; 1911. Second threaded section; 192. Second limiting section; 210. Third limiting component; 220. Second sensor; 230. Second sensing component; 240. First guide rail; 250. First slider; 260. Second guide rail; 270. Second slider; 280. First air distribution pipe; 281. First air extraction port; 282. First sub-air extraction port; 290. Second air distribution pipe; 291. Second air extraction port; 292. Second sub-air extraction port; 2. Half sheet material; 201. First half sheet material; 202. Second half sheet material; 4. Stacking box; 41. First bearing area; 42. Second bearing area; 5. Boat structure; 51. Third bearing area; 52. Fourth bearing area; 6. Air extraction device; 20. Handling robot; Y, first direction; X, second direction; D1, first spacing; D2, second spacing. Detailed Implementation

[0027] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0028] Figure 1 The diagram shown is a structural schematic of an adsorption device provided in an embodiment of this disclosure. Figure 2 The diagram shown is a schematic representation of the structure of an adsorption device provided in an embodiment of this disclosure after the carrier component has been removed. Figure 3 The image shown is an embodiment of this disclosure. Figure 2 The adsorption device shown is partially enlarged in region A. Figure 4 The image shown is an embodiment of this disclosure. Figure 2 The image shows a magnified view of the adsorption device in region B. Figure 5The diagram shown is a structural schematic of the first limiting member, the second limiting member, and the third limiting member provided in an embodiment of this disclosure. Figure 6 The diagram shown is a structural schematic of a stacking box and a half sheet provided in an embodiment of this disclosure. Figure 7 The diagram shown is a schematic representation of a boat structure and a half-sheet material according to an embodiment of this disclosure. Figure 8 The diagram shown is a structural schematic of a handling device provided in an embodiment of this disclosure. Figure 8 The diagram shown is a structural schematic of a handling device provided in an embodiment of this disclosure. Figures 1 to 8 As shown, an adsorption device 10 provided in one embodiment of this disclosure includes a support component 110, a first driving component 120, a first adsorption component 130, and a second adsorption component 140.

[0029] Specifically, such as Figure 6 and Figure 7 As shown, a pair of half-sheets 2 include a first half-sheet 201 and a second half-sheet 202. Exemplarily, a carrier assembly 110 can be mounted on the end effector of a handling robot 20. A first drive assembly 120 includes a first drive member 121 and a first movable member 122 connected to each other. The first drive member 121 is mounted on the carrier assembly 110, and the first movable member 122 reciprocates along a first direction Y under the drive of the first drive member 121. A first adsorption assembly 130 is connected to the first movable member 122 and reciprocates along the first direction Y under the drive of the first movable member 122. The first adsorption assembly 130 is configured to adsorb one or more first half-sheets 201. A second adsorption assembly 140 is connected to the carrier assembly 110 and is configured to adsorb one or more second half-sheets 202.

[0030] For example, the half-sheet 2 is a sheet material such as a silicon wafer, glass substrate, crystal wafer, or solar cell. The first half-sheet 201 and the second half-sheet 202 are cut from a single sheet. For example, the first drive assembly 120 is a device such as a cylinder or electric actuator.

[0031] By connecting both the first adsorption component 130 and the second adsorption component 140 to the carrier component 110, the carrier component 110 can be installed at the end of a handling robot 20. This allows the first adsorption component 130 and the second adsorption component 140 to be driven by a handling robot 20 to simultaneously handle a pair of half-sheets 2, which improves handling efficiency, reduces the number of handling robots 20, and lowers handling costs. In other words, it balances handling efficiency and equipment cost.

[0032] The inventors discovered that placing a pair of half-sheets 2 simultaneously on a boat structure would cause fragmentation. By setting a first driving component 120, the first driving component 120 can drive the first adsorption component 130 to reciprocate along the first direction Y, thereby realizing the sequential placement of the first half-sheet 201 and the second half-sheet 202 of the pair of half-sheets 2, reducing the probability of fragmentation.

[0033] In some embodiments, such as Figure 2 As shown, the adsorption device 10 further includes a second driving assembly 150. The second driving assembly 150 includes a second driving member 151 and a second movable member 152 connected to each other. The second driving member 151 is mounted on the support assembly 110, and the second movable member 152 reciprocates along a second direction X under the drive of the second driving member 151. The second adsorption assembly 140 is connected to the second movable member 152 and reciprocates along the second direction X under the drive of the second movable member 152. The second direction X is perpendicular to the first direction Y.

[0034] In practical applications, the first distance D1 between the first bearing area 41 and the second bearing area 42 of the stacking box 4 is different from the second distance D2 between the third bearing area 51 and the fourth bearing area 52 of the boat structure 5. By enabling the second adsorption component 140 to move along the second direction X, the distance between the first adsorption component 130 and the second adsorption component 140 can be adjusted. Thus, when the adsorption device 10 grabs half a sheet of material 2 from the stacking box 4, the distance between the first adsorption component 130 and the second adsorption component 140 is adjusted to the first distance D1, and when the adsorption device 10 grabs half a sheet of material 2 from the boat structure 5, the distance between the first adsorption component 130 and the second adsorption component 140 is adjusted to the second distance D2, so that the adsorption device 10 can be adapted to situations where the first distance D1 and the second distance D2 are different.

[0035] In some embodiments, the adsorption device 10 is further configured to transport one or more half sheets between the stacking box 4 and the boat structure 5. The distance between the geometric center of the first bearing area 41 of the stacking box 4 and the geometric center of the second bearing area 42 is a first distance D1, and the distance between the geometric center of the third bearing area 51 of the boat structure 5 and the geometric center of the fourth bearing area 52 is a second distance D2. The first bearing area 41 and the third bearing area 51 are both configured to bear the first half sheet 201, and the second bearing area 42 and the fourth bearing area 52 are both configured to bear the second half sheet 202.

[0036] The adsorption device 10 also includes a first limiting member 180, a second limiting member 190 and a third limiting member 210.

[0037] The first limiting member 180 is installed on the bearing assembly 110. The second limiting member 190 is installed on the bearing assembly 110 and is spaced apart from the first limiting member 180 along the second direction X. The third limiting member 210 is disposed on the second adsorption assembly 140, and the third limiting member 210 is located between the first limiting member 180 and the second limiting member 190.

[0038] When the third limiting member 210 moves to abut against the first limiting member 180, the distance between the geometric center of the first adsorption component 130 and the geometric center of the second adsorption component 140 is the first distance D1. When the third limiting member 210 moves to abut against the second limiting member 190, the distance between the geometric center of the first adsorption component 130 and the geometric center of the second adsorption component 140 is the second distance D2. Thus, the distance between the first adsorption component 130 and the second adsorption component 140 can be adjusted to either the first distance D1 or the second distance D2 using the first limiting member 180, the second limiting member 190, and the third limiting member 210.

[0039] In some embodiments, such as Figure 3 As shown, the adsorption device 10 also includes a plurality of first sensors 160 and a first sensing element 170. The plurality of first sensors 160 are mounted on the support assembly 110. The plurality of first sensors 160 are spaced apart in the second direction X. The first sensing element 170 is disposed on the second adsorption assembly 140, adjacent to the first sensors 160. The first sensing element 170 can reciprocate along the second direction X with the second adsorption assembly 140. When the first sensing element 170 passes the first sensor 160, the corresponding first sensor 160 can detect the first sensing element 170. Therefore, the position of the first sensing element 170 can be detected by the first sensor 160, thereby determining the distance between the first adsorption assembly 130 and the second adsorption assembly 140. In other words, the distance between the first adsorption assembly 130 and the second adsorption assembly 140 can be automatically adjusted by the second driving assembly 150 so that the distance between the first adsorption assembly 130 and the second adsorption assembly 140 is equal to a first distance D1 and a second distance D2 under different conditions.

[0040] For example, the first sensor 160 is a slot-type photoelectric sensor, and the first sensing element 170 is a sheet metal part. When the first sensing element 170 passes the first sensor 160, the first sensing element 170 can extend into the sensing slot of the first sensor 160, so that the first sensor 160 detects the first sensing element 170.

[0041] In some embodiments, such as Figure 3 and Figure 5As shown, the first limiting member 180 includes a first mounting portion 181 and a first limiting portion 182. The first mounting portion 181 is mounted on the support assembly 110 and has a first threaded portion 1811 extending in the second direction X. The first limiting portion 182 is screwed to the first threaded portion 1811, so that the position of the first limiting portion 182 relative to the first mounting portion 181 in the second direction X is adjustable. The third limiting member 210 is movable to abut against the first limiting portion 182.

[0042] The second limiting member 190 includes a second mounting portion 191 and a second limiting portion 192. The second mounting portion 191 is mounted on the support assembly 110. The second mounting portion 191 has a second threaded portion 1911 extending in the second direction X. The second limiting portion 192 is screwed to the second threaded portion 1911, so that the position of the second limiting portion 192 relative to the second mounting portion 191 in the second direction X is adjustable. The third limiting member 210 is movable to abut against the second limiting portion 192.

[0043] For example, when the third limiting member 210 moves to abut against the first limiting part 182, the distance between the first adsorption component 130 and the second adsorption component 140 is equal to the first distance D1; when the third limiting member 210 moves to abut against the second limiting part 192, the distance between the first adsorption component 130 and the second adsorption component 140 is equal to the second distance D2.

[0044] For example, when the third limiting member 210 moves to abut against the first limiting part 182, the distance between the first adsorption component 130 and the second adsorption component 140 is equal to the second distance D2; when the third limiting member 210 moves to abut against the second limiting part 192, the distance between the first adsorption component 130 and the second adsorption component 140 is equal to the first distance D1.

[0045] By making the position of the first limiting part 182 relative to the first mounting part 181 in the second direction X adjustable, and the position of the second limiting part 192 relative to the second mounting part 191 in the second direction X adjustable, it is convenient to adjust the distance between the first limiting part 182 and the second limiting part 192, so that the distance between the first adsorption component 130 and the second adsorption component 140 can be adjusted as needed.

[0046] In some embodiments, such as Figure 2 As shown, the first driving component 121 includes a motor 1211 and a lead screw 1212. The motor 1211 is mounted on the bearing assembly 110, and the lead screw 1212 is connected to the motor 1211 and rotates under the drive of the motor 1211.

[0047] The first movable component 122 includes a lead screw nut 1221. The lead screw nut 1221 is screwed to the lead screw 1212 and connected to the first adsorption assembly 130. Driven by the lead screw 1212, the lead screw nut 1221 reciprocates along the first direction Y, thereby driving the first adsorption assembly 130 to reciprocate along the first direction Y. The drive mechanism consisting of the motor 1211, the lead screw 1212, and the lead screw nut 1221 offers high precision and good reliability.

[0048] In some embodiments, such as Figure 2 As shown, the second driving member 151 includes a cylinder barrel 1511, which is mounted on the bearing assembly 110. The second movable member 152 includes a cylinder rod 1521 and a floating joint 1522. The cylinder rod 1521 is connected to the cylinder barrel 1511 and reciprocates along the second direction X under the drive of the cylinder barrel 1511.

[0049] The floating joint 1522 is connected to the end of the cylinder rod 1521 away from the cylinder barrel 1511, and is also connected to the second adsorption assembly 140. The floating joint 1522 can alleviate the coaxiality between the connection positions of the cylinder rod 1521 and the second adsorption assembly 140, so that even if the coaxiality is low, the thrust of the cylinder rod 1521 will not be reduced.

[0050] In some embodiments, such as Figure 4 As shown, the adsorption device 10 further includes a second sensor 220 and a second sensing element 230. The second sensor 220 is mounted on the support assembly 110. The second sensing element 230 is disposed on the first adsorption assembly 130, adjacent to the second sensor 220. The second sensing element 230 can reciprocate along the first direction Y with the first adsorption assembly 130. When the second sensing element 230 passes the second sensor 230, the second sensor 220 can detect the second sensing element 230. By using the second sensor 220 and the second sensing element 230 to detect the position of the first adsorption assembly 130, it is determined whether the first adsorption assembly 130 has moved into position.

[0051] For example, the second sensor 230 is mounted on the lead screw nut 1221, and the lead screw nut 1221 is fixedly connected to the first adsorption assembly 130, so that the second sensor 230 is indirectly connected to the first adsorption assembly 130.

[0052] In some embodiments, such as Figure 2As shown, the adsorption device 10 further includes one or more first guide rails 240 and one or more first sliders 250. One or more first guide rails 240 are mounted on the support assembly 110. One or more first sliders 250 are mounted on the first adsorption assembly 130. The first sliders 250 are slidably connected to the first guide rails 240. The adsorption device 10 also includes one or more second guide rails 260 and one or more second sliders 270. One or more second guide rails 260 are mounted on the support assembly 110. One or more second sliders 270 are mounted on the second adsorption assembly 140. The second sliders 270 are slidably connected to the second guide rails 260. By using the first guide rails 240, first sliders 250, second guide rails 260, and second sliders 270 to guide the first adsorption assembly 130 and the second adsorption assembly 140, the movement accuracy of the first adsorption assembly 130 and the second adsorption assembly 140 is improved.

[0053] In some embodiments, such as Figure 2 As shown, the first adsorption assembly 130 includes a plurality of first adsorption elements 131 and a first connector 132. The plurality of first adsorption elements 131 are spaced apart along a first direction Y. The first connector 132 connects the plurality of first adsorption elements 131 and is also connected to a first movable element 122. Exemplarily, the first adsorption element 131 has a plurality of first adsorption ports for adsorbing half-sheets 2. Exemplarily, the first adsorption element 131 is a suction cup.

[0054] The second adsorption assembly 140 includes a plurality of second adsorption elements 141 and a second connector 142. The plurality of second adsorption elements 141 are spaced apart along a first direction Y. The second connector 142 connects the plurality of second adsorption elements 141 and is also connected to a second movable element 152. Exemplarily, the second adsorption elements 141 have a plurality of second adsorption ports for adsorbing half-sheets 2. Exemplarily, the second adsorption elements 141 are suction cups.

[0055] For example, such as Figure 2 As shown, the adsorption device 10 also includes a first gas distribution pipe 280 and a second gas distribution pipe 290.

[0056] The first air distribution pipe 280 extends along the first direction Y. Both ends of the first air distribution pipe 280 have first air extraction ports 281, achieving uniform air extraction. The first air distribution pipe 280 also has a plurality of first sub-air extraction ports 282 spaced apart along the first direction Y. The plurality of first sub-air extraction ports 282 are connected to the first air extraction ports 281. The first air extraction ports 281 are connected to the air extraction device 6, and the plurality of first sub-air extraction ports 282 are connected to the first adsorption element 131.

[0057] The second air distribution pipe 290 extends along the first direction Y. Both ends of the second air distribution pipe 290 have second air extraction ports 291, achieving uniform air extraction. The second air distribution pipe 290 also has a plurality of second sub-air extraction ports 292 spaced apart along the first direction Y. The plurality of second sub-air extraction ports 292 are connected to the second air extraction ports 291, the second air extraction ports 291 are connected to the air extraction device 6, and the plurality of second sub-air extraction ports 292 are connected to a plurality of second adsorption elements 141.

[0058] This application also provides a handling device 1. In some embodiments, such as Figure 8 As shown, the handling equipment 1 includes a handling robot 20 and an adsorption device 10, with the adsorption device 10 installed at the end of the handling robot 20.

[0059] Since the handling equipment 1 includes the adsorption device 10, the handling equipment 1 has all the technical features and effects of the adsorption device 10, which will not be described in detail here.

[0060] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts, nuts, screws, clips, magnets, etc. In some connections where the form of detachable engagement is not explicitly limited, a non-detachable connection can be achieved using welding, bonding, etc.

[0061] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0062] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0063] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0064] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0065] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. An adsorption device configured to transport one or more half-sheets, the pair of said half-sheets comprising a first half-sheet and a second half-sheet; characterized in that, The adsorption device includes: The load-bearing component can be installed at the end of a handling robot. The first drive assembly includes a first drive member and a first movable member connected to each other. The first drive member is mounted on the bearing assembly, and the first movable member reciprocates along a first direction under the drive of the first drive member. A first adsorption component is connected to the first movable component and reciprocates along the first direction under the drive of the first movable component. The first adsorption component is configured to adsorb one or more of the first half-sheets. A second adsorption component is connected to the carrier component, and the second adsorption component is configured to adsorb one or more of the second half-sheet.

2. The adsorption device according to claim 1, characterized in that, Also includes: The second drive assembly includes a second drive member and a second movable member connected to each other. The second drive member is mounted on the bearing assembly. The second movable member reciprocates along a second direction under the drive of the second drive member. The second direction is perpendicular to the first direction. The second adsorption component is connected to the second movable component and reciprocates along the second direction under the drive of the second movable component.

3. The adsorption device according to claim 2, characterized in that, Also includes: A plurality of first sensors are mounted on the carrier assembly, and the plurality of first sensors are spaced apart in the second direction; A first sensing element is disposed on the second adsorption component. The first sensing element is disposed adjacent to the first sensor. The first sensing element can reciprocate along the second direction with the second adsorption component. When the first sensing element passes the first sensor, the corresponding first sensor can detect the first sensing element.

4. The adsorption device according to claim 2, characterized in that, The adsorption device is further configured to transport one or more half-sheets between a stacking box and a boat structure. The distance between the geometric center of the first bearing area and the geometric center of the second bearing area of ​​the stacking box is a first distance, and the distance between the geometric center of the third bearing area and the geometric center of the fourth bearing area of ​​the boat structure is a second distance. The first bearing area and the third bearing area are both configured to bear the first half-sheet, and the second bearing area and the fourth bearing area are both configured to bear the second half-sheet. The adsorption device further includes: The first limiting member is installed on the bearing assembly; The second limiting member is installed on the bearing assembly and is spaced apart from the first limiting member along the second direction; A third limiting member is disposed on the second adsorption component, and the third limiting member is located between the first limiting member and the second limiting member; Wherein, when the third limiting member moves to abut against the first limiting member, the distance between the geometric center of the first adsorption component and the geometric center of the second adsorption component is the first distance; when the third limiting member moves to abut against the second limiting member, the distance between the geometric center of the first adsorption component and the geometric center of the second adsorption component is the second distance.

5. The adsorption device according to claim 4, characterized in that, The first limiting member includes: A first mounting portion is mounted on the support assembly, the first mounting portion having a first threaded portion extending along the second direction; The first limiting part is screwed to the first threaded part so that the position of the first limiting part relative to the first mounting part in the second direction is adjustable, wherein the third limiting member can move to abut against the first limiting part; And / or, The second limiting member includes: A second mounting portion is mounted on the bearing assembly, and the second mounting portion has a second threaded portion extending along the second direction; The second limiting part is screwed to the second threaded part so that the position of the second limiting part relative to the second mounting part in the second direction is adjustable, wherein the third limiting member can move to abut against the second limiting part.

6. The adsorption device according to any one of claims 2 to 5, characterized in that, The first driving element includes: The motor is mounted on the supporting component; A lead screw is connected to the motor and rotates under the drive of the motor; The first active component includes: A lead screw nut is screwed to the lead screw and connected to the first adsorption component. The lead screw nut reciprocates along the first direction under the drive of the lead screw, thereby driving the first adsorption component to reciprocate along the first direction. And / or, The second driving element includes: The cylinder barrel is mounted on the load-bearing assembly; The second movable component includes: The cylinder rod is connected to the cylinder barrel and reciprocates along the second direction under the drive of the cylinder barrel; A floating connector is connected to the end of the cylinder rod away from the cylinder barrel, and the floating connector is also connected to the second adsorption assembly.

7. The adsorption device according to any one of claims 1 to 5, characterized in that, Also includes: The second sensor is installed on the support assembly; The second sensing element is disposed on the first adsorption component. The second sensing element is disposed adjacent to the second sensor. The second sensing element can reciprocate along the first direction with the first adsorption component. When the second sensing element passes the second sensor, the second sensor can detect the second sensing element.

8. The adsorption device according to any one of claims 1 to 5, characterized in that, The adsorption device further includes: One or more first guide rails are mounted on the load-bearing assembly; One or more first sliders are installed on the first adsorption assembly, and the first sliders are slidably connected to the first guide rail; And / or, The adsorption device further includes: One or more second guide rails are mounted on the load-bearing assembly; One or more second sliders are installed on the second adsorption assembly, and the second sliders are slidably connected to the second guide rail.

9. The adsorption device according to any one of claims 2 to 5, characterized in that, The first adsorption component includes: Multiple first adsorption elements are arranged at intervals along the first direction; A first connector connects to a plurality of the first adsorption elements, and the first connector is also connected to the first movable element; The second adsorption component includes: Multiple second adsorption elements are arranged at intervals along the first direction; The second connector connects to a plurality of the second adsorption elements, and the second connector is also connected to the second movable element; The adsorption device further includes: The first air distribution pipe extends along the first direction. Both ends of the first air distribution pipe have a first air extraction port. The first air distribution pipe also has a plurality of first sub-air extraction ports spaced apart along the first direction. The plurality of first sub-air extraction ports are connected to the first air extraction port. The first air extraction port is connected to the air extraction device. The plurality of first sub-air extraction ports are connected to the plurality of first adsorption elements. The second air distribution pipe extends along the first direction. Both ends of the second air distribution pipe have second air extraction ports. The second air distribution pipe also has a plurality of second sub-air extraction ports spaced apart along the first direction. The plurality of second sub-air extraction ports are connected to the second air extraction port. The second air extraction port is connected to the air extraction device. The plurality of second sub-air extraction ports are connected to the plurality of second adsorption elements.

10. A handling device, characterized in that, include: Handling robot; The adsorption device as described in any one of claims 1 to 9 is installed at the end of the handling robot.

Images