Dust adsorption device

Abstract

The utility model relates to a dust adsorption device which comprises a first shell, an air inlet pipe, an air outlet pipe and an adsorption assembly, the upper end and the lower end in the first shell are communicated with the air outlet pipe and the air inlet pipe respectively, and the adsorption assembly is located in the first shell and comprises an adsorption pipe, a fixing column and an end plate. The upper ends and the lower ends of the fixing columns are fixedly connected with the end plates respectively, the fixing columns are circumferentially arranged with the axis of the air outlet pipe as the axis, and each fixing column is fixedly connected with at least one column of adsorption pipes. Through low-temperature adsorption, adsorbent adsorption and normal-temperature adsorption, the dust content in the adsorbed waste gas is greatly reduced, the quantity of dust deposited on the inner wall of the pipeline is reduced, and the pipeline between the dry pump and the waste gas treatment equipment is prevented from being blocked.

Description

Technical Field

[0001] This utility model relates to the field of dust adsorption, and in particular to a dust adsorption device. Background Technology

[0002] In the semiconductor manufacturing industry, the waste gases generated during semiconductor production need to be treated. When dry pumps transport waste gases, they need to travel through long pipelines to reach the waste gas treatment equipment. Because semiconductor waste gases contain dust, this dust accumulates in the pipelines during transport, causing blockages. To avoid these blockages, the pipelines need to be disassembled and cleaned periodically by hand, increasing costs and workload. Utility Model Content

[0003] The present invention aims to solve the above problems by providing a dust adsorption device.

[0004] A dust adsorption device includes: a first housing, an inlet pipe, an outlet pipe, and an adsorption assembly. The upper and lower ends of the first housing are respectively connected to the outlet pipe and the inlet pipe. The adsorption assembly is located inside the first housing. The adsorption assembly includes adsorption tubes, fixed columns, and end plates. The upper and lower ends of the fixed columns are respectively fixedly connected to the end plates. The fixed columns are arranged circumferentially with the axis of the outlet pipe as the axis, and each fixed column is fixedly connected to at least one row of adsorption tubes.

[0005] Preferably, the fixed columns are arranged evenly in a circle with the axis of the gas outlet pipe as the axis, and each row of adsorption tubes is arranged evenly in a straight line along the fixed columns; the axis of the adsorption tubes is perpendicular to the axis of the gas outlet pipe.

[0006] Preferably, the upper end plate is annular and the lower end plate is circular.

[0007] Preferably, it further includes a mesh plate and a support plate. The inner side of the first housing sidewall is fixedly connected to two sets of support plates. The two sets of support plates are arranged vertically, and a mesh plate is placed on each set of support plates. The mesh plate is located below the adsorption assembly. Adsorbent is disposed between the two mesh plates.

[0008] Preferably, it further includes a second housing, which is located below the first housing. The first housing and the second housing are fixedly and detachably connected. The interior of the first housing is connected to the interior of the second housing. The air outlet pipe is fixedly connected to the first housing, and the air inlet pipe is fixedly connected to the second housing.

[0009] Preferably, the first housing includes a first tube and an upper end plate, the upper end of the first tube being fixed to and detachably connected to the upper end plate; the second housing includes a second tube and a lower end plate, the lower end of the second tube being fixed to and detachably connected to the lower end plate.

[0010] The adsorption assembly further includes a connecting column and a fixing plate. The connecting column is fixedly connected to the end plate, and the connecting column is fixedly connected to the fixing plate. The fixing plate is fixed to the lower side of the upper end plate and is detachably connected.

[0011] Preferably, it further includes a refrigeration cylinder, an inlet pipe, and an outlet pipe. The refrigeration cylinder is located inside the second housing and is fixedly connected to the lower end plate of the second housing. The inlet pipe and the outlet pipe are respectively fixedly connected to the lower end plate and communicate with the inner cavity of the refrigeration cylinder.

[0012] Preferably, it also includes a partition plate located in the inner cavity of the refrigeration cylinder. The lower part of the partition plate is fixedly connected to the lower end plate, and a channel is formed between the upper part of the partition plate and the inner wall of the refrigeration cylinder. The liquid inlet pipe and the liquid outlet pipe are located on the left and right sides of the partition plate, respectively.

[0013] Preferably, it also includes an outer cylinder and fins, wherein the inner wall of the outer cylinder is fitted with the outer side of the refrigeration cylinder, and the fins are fixedly connected to the outer side of the outer cylinder.

[0014] Preferably, the fin is a ring with notches, and two adjacent notches in the vertical direction are staggered.

[0015] This invention has the following advantages: through three adsorption processes—low-temperature adsorption, adsorbent adsorption, and room-temperature adsorption—the dust content in the adsorbed waste gas is greatly reduced, thus decreasing the amount of dust deposited on the inner wall of the pipe and preventing blockage of the pipe between the dry pump and the waste gas treatment equipment. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0017] Figure 1 : A top view of the structure of this utility model;

[0018] Figure 2 :exist Figure 1 Schematic diagram of the cross-sectional structure at point AA;

[0019] Figure 3 : A three-dimensional structural diagram of this utility model after removing the shell;

[0020] Figure 4 : Schematic diagram of the three-dimensional structure of the adsorption assembly;

[0021] Figure 5 : A three-dimensional structural diagram of this utility model. Detailed Implementation

[0022] The present invention will be further described below with reference to the accompanying drawings and examples:

[0023] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] like Figures 1 to 5 As shown, a dust adsorption device includes: a first housing 1, an inlet pipe 3, an outlet pipe 4, and an adsorption assembly 5. The upper and lower ends of the first housing 1 are respectively connected to the outlet pipe 4 and the inlet pipe 3. The adsorption assembly 5 is located inside the first housing 1. The adsorption assembly 5 includes adsorption tubes 52, fixing columns 55, and end plates 51. The upper and lower ends of the fixing columns 55 are respectively fixedly connected to the end plates 51. The fixing columns 55 are arranged circumferentially around the axis of the outlet pipe 4, and each fixing column 55 is fixedly connected to at least one row of adsorption tubes 52. During the process of the exhaust gas from the inlet pipe 3 to the outlet pipe 4, it passes through the adsorption tubes 52, and some of the dust in the exhaust gas is adsorbed by the inner and outer walls of the adsorption tubes 52. The tubular shape of the adsorption tubes 52 increases the surface area in contact with the exhaust gas.

[0027] Preferably, the fixed columns 55 are arranged evenly in a circle with the axis of the exhaust pipe 4 as the axis, and each row of adsorption tubes 52 is arranged evenly in a straight line along the fixed columns 55; the axis of the adsorption tubes 52 is perpendicular to the axis of the exhaust pipe 4.

[0028] Preferably, the upper end plate 51 is annular and the lower end plate 51 is circular. The lower end plate 51 blocks the exhaust gas flow, preventing the exhaust gas from moving directly upwards axially without passing through the adsorption pipe 52.

[0029] Preferably, it also includes a mesh plate 6 and a support plate 11. The inner side wall of the first housing 1 is fixedly connected to two sets of support plates 11. The two sets of support plates 11 are arranged vertically, and a mesh plate 6 is placed on each set of support plates 11. The mesh plate 6 is located below the adsorption assembly 5. An adsorbent is provided between the two mesh plates 6. The mesh plate 6 is used to limit the adsorbent. The adsorbent is in solid granular form.

[0030] Preferably, it also includes a second housing 2, which is located below the first housing 1. The first housing 1 and the second housing 2 are fixedly and detachably connected to each other, so as to facilitate cleaning after disassembly. The interior of the first housing 1 is connected to the interior of the second housing 2. The air outlet pipe 4 is fixedly connected to the first housing 1, and the air inlet pipe 3 is fixedly connected to the second housing 2.

[0031] Preferably, the first housing 1 includes a first tube and an upper end plate 10, the upper end of the first tube being fixed to and detachably connected to the upper end plate 10; the second housing 2 includes a second tube and a lower end plate 20, the lower end of the second tube being fixed to and detachably connected to the lower end plate 20; wherein the detachable connection can be a flange or clamp connection.

[0032] The adsorption assembly 5 further includes a connecting column 53 and a fixing plate 54. The connecting column 53 is fixedly connected to the end plate 51, and the connecting column 53 is fixedly connected to the fixing plate 54. The fixing plate 54 is fixed to the lower side of the upper end plate 10 and is detachably connected. The detachable connection can be a flange or a clamp connection.

[0033] Preferably, it also includes a refrigeration cylinder 7, an inlet pipe 71, and an outlet pipe 72. The refrigeration cylinder 7 is located inside the second housing 2 and is fixedly connected to the lower end plate 20 of the second housing 2. The inlet pipe 71 and the outlet pipe 72 are respectively fixedly connected to the lower end plate 20 and communicate with the inner cavity of the refrigeration cylinder 7.

[0034] Preferably, it also includes a partition 73, which is located in the inner cavity of the refrigeration cylinder 7. The lower part of the partition 73 is fixedly connected to the lower end plate 20, and a channel is formed between the upper part of the partition 73 and the inner wall of the refrigeration cylinder 7. The liquid inlet pipe 71 and the liquid outlet pipe 72 are located on the left and right sides of the partition 73, respectively.

[0035] Preferably, it also includes an outer cylinder 8 and fins 81. The inner wall of the outer cylinder 8 is attached to the outer side of the refrigeration cylinder 7, and the fins 81 are fixedly connected to the outer side of the outer cylinder 8. The fins 81 increase the contact area with the exhaust gas.

[0036] Preferably, the fin 81 is an annular ring with a notch 80, and two adjacent notches 80 in the vertical direction are staggered, that is, the two notches 80 do not overlap when viewed from above.

[0037] Working principle:

[0038] During operation, cooling fluid (such as cooling water) enters the refrigeration cylinder 7 through the inlet pipe 71, cools the refrigeration cylinder 7, and then flows out through the outlet pipe 72. The refrigeration cylinder 7 cools the outer cylinder 8 it is in contact with, thereby lowering the temperature of the fins 81. Exhaust gas enters the second shell 2 through the inlet pipe 3 and gradually moves upward along the air duct between the fins 81. During this process, the exhaust gas neutralizes the particles and adsorbs them onto the surface of the fins 81.

[0039] After leaving the fins 81, the exhaust gas continues to move upward and combines with the adsorbent between the mesh plates 6. The dust and some harmful gases in the exhaust gas are adsorbed by the adsorbent.

[0040] The upward-moving exhaust gas is blocked by the lower end plate 51, and can only pass radially through the adsorption tube 52 into the cavity inside the adsorption assembly 5. During this process, the exhaust gas is adsorbed on the inner and outer surfaces of the adsorption tube 52. After adsorption, the exhaust gas leaves through the outlet pipe 4 and then enters the exhaust gas treatment equipment through a pipeline. The dust content in the adsorbed exhaust gas is greatly reduced, which reduces the amount of dust deposited on the inner wall of the pipeline and prevents blockage of the pipeline between the dry pump and the exhaust gas treatment equipment.

[0041] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A dust adsorption device, characterized in that, include: The first housing (1), the air inlet pipe (3), the air outlet pipe (4) and the adsorption assembly (5) are connected to the air outlet pipe (4) and the air inlet pipe (3) at the upper and lower ends of the first housing (1) respectively. The adsorption assembly (5) is located inside the first housing (1). The adsorption assembly (5) includes an adsorption tube (52), a fixing column (55) and an end plate (51). The upper and lower ends of the fixing column (55) are fixedly connected to the end plate (51) respectively. The fixing columns (55) are arranged in a circle with the axis of the air outlet pipe (4) as the axis. Each fixing column (55) is fixedly connected to at least one row of adsorption tubes (52).

2. The dust adsorption device according to claim 1, characterized in that: The fixed column (55) is arranged evenly in a circle with the axis of the outlet pipe (4) as the axis, and each column of adsorption tubes (52) is arranged evenly in a straight line along the fixed column (55); the axis of the adsorption tube (52) is perpendicular to the axis of the outlet pipe (4).

3. The dust adsorption device according to claim 1, characterized in that: The upper end plate (51) is annular, and the lower end plate (51) is circular.

4. The dust adsorption device according to claim 3, characterized in that: It also includes a mesh plate (6) and a support plate (11). The inner side wall of the first housing (1) is fixedly connected to two sets of support plates (11). The two sets of support plates (11) are arranged in the vertical direction. A mesh plate (6) is placed on each set of support plates (11). The mesh plate (6) is located below the adsorption assembly (5). An adsorbent is provided between the two mesh plates (6).

5. The dust adsorption device according to claim 1, characterized in that: It also includes a second housing (2), which is located below the first housing (1). The first housing (1) and the second housing (2) are fixedly and detachably connected. The interior of the first housing (1) is connected to the interior of the second housing (2). The air outlet pipe (4) is fixedly connected to the first housing (1), and the air inlet pipe (3) is fixedly connected to the second housing (2).

6. The dust adsorption device according to claim 5, characterized in that: The first housing (1) includes a first tube and an upper end plate (10), the upper end of the first tube is fixed to and detachably connected to the upper end plate (10); the second housing (2) includes a second tube and a lower end plate (20), the lower end of the second tube is fixed to and detachably connected to the lower end plate (20); The adsorption assembly (5) further includes a connecting column (53) and a fixing plate (54). The connecting column (53) is fixedly connected to the end plate (51), and the connecting column (53) is fixedly connected to the fixing plate (54). The fixing plate (54) is fixedly and detachably connected to the lower side of the upper end plate (10).

7. A dust adsorption device according to claim 6, characterized in that: It also includes a refrigeration cylinder (7), an inlet pipe (71) and an outlet pipe (72). The refrigeration cylinder (7) is located inside the second housing (2) and is fixedly connected to the lower end plate (20) of the second housing (2). The inlet pipe (71) and the outlet pipe (72) are fixedly connected to the lower end plate (20) and communicate with the inner cavity of the refrigeration cylinder (7).

8. The dust adsorption device according to claim 7, characterized in that: It also includes a partition (73), which is located in the inner cavity of the refrigeration cylinder (7). The lower part of the partition (73) is fixedly connected to the lower end plate (20), and a channel is formed between the upper part of the partition (73) and the inner wall of the refrigeration cylinder (7). The liquid inlet pipe (71) and the liquid outlet pipe (72) are located on the left and right sides of the partition (73), respectively.

9. A dust adsorption device according to claim 7, characterized in that: It also includes an outer cylinder (8) and fins (81), the inner wall of the outer cylinder (8) is attached to the outer side of the cooling cylinder (7), and the fins (81) are fixedly connected to the outer side of the outer cylinder (8).

10. A dust adsorption device according to claim 9, characterized in that: The fin (81) is an annular ring with notches (80), and two adjacent notches (80) in the vertical direction are staggered.

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