Composite cold trap

Abstract

The utility model relates to a composite cold trap, including: shell, attachment plate, external mesh cylinder, intake pipe and exit pipe, the inner cavity of shell is communicated with intake pipe and exit pipe respectively, attachment plate and external mesh cylinder are located inside the shell, attachment plate is located between external mesh cylinder and intake pipe, external mesh cylinder is located between attachment plate and exit pipe, and the attachment plate is located between the attachment plate and exit pipe. And an adsorbent is arranged in the outer net cylinder. According to the utility model, the plurality of attachment plates and the second baffle plate define the air duct, so that the contact area between waste gas and the attachment plates is increased, and the quantity of dust deposited on the attachment plates in the waste gas is increased; the adsorbent is arranged in the annular cavity between the outer net cylinder and the inner net cylinder, so that the waste gas radially penetrates through the adsorbent, the resistance when the adsorbent leaves the adsorbent is reduced, and the flow rate of the waste gas is increased, so that the quantity of the waste gas treated in unit time is increased; and the waste gas passes through each position of the adsorbent, so that all the adsorbents adsorb the waste gas more uniformly, and the adsorbents are saved.

Description

Technical Field

[0001] This utility model relates to the field of dust adsorption, and in particular to a composite cold trap. Background Technology

[0002] In the semiconductor manufacturing industry, the waste gases generated during semiconductor production need to be treated. When dry pumps transport waste gases, they need to travel through long pipelines to reach the waste gas treatment equipment. Because semiconductor waste gases contain dust, this dust accumulates in the pipelines during transport, causing blockages. To avoid these blockages, the pipelines need to be disassembled and cleaned periodically by hand, increasing costs and workload.

[0003] Existing waste gas adsorption devices have relatively high resistance, resulting in a slow flow rate of waste gas within the device, which is unsuitable for treating large volumes of waste gas. Furthermore, the waste gas often passes through the same fixed location as the adsorbent, meaning that while the adsorbent at that location is saturated, the adsorbent at other locations is not yet saturated. However, all the adsorbent still needs to be replaced at this point, leading to waste. Utility Model Content

[0004] The present invention aims to solve the above problems by providing a composite cold trap.

[0005] A composite cold trap includes: a shell, an attachment plate, an outer mesh cylinder, an inlet pipe, and an outlet pipe. The inner cavity of the shell is connected to the inlet pipe and the outlet pipe, respectively. The attachment plate and the outer mesh cylinder are located inside the shell. The attachment plate is located between the outer mesh cylinder and the inlet pipe. The outer mesh cylinder is located between the attachment plate and the outlet pipe. An adsorbent is disposed inside the outer mesh cylinder.

[0006] Preferably, the housing includes an inner cylinder, a bottom plate, and a top plate. The bottom of the inner cylinder is fixedly connected to the bottom plate, the top of the inner cylinder is fixedly and detachably connected to the top plate, the air inlet pipe is fixedly connected to the inner cylinder, and the air outlet pipe is fixedly connected to the top plate.

[0007] Preferably, it further includes an outer cylinder, which is located outside the inner cylinder and fixedly connected to the inner cylinder. A cooling cavity is formed between the inner cylinder and the outer cylinder. The outer cylinder is fixedly connected to an inlet pipe and an outlet pipe, respectively, and the inlet pipe and the outlet pipe are respectively connected to the cooling cavity.

[0008] Preferably, it further includes a first baffle and a second baffle. The attachment plate is cylindrical, and the multiple attachment plates have the same center but different radii. Ventilation holes are formed on the side of the attachment plate. A second baffle is provided on the outer side of the attachment plate near the ventilation holes. The first baffle is located at the upper end of the attachment plate and blocks the space between two adjacent attachment plates and the space between the outermost attachment plate and the inner cylinder.

[0009] Preferably, it also includes a guide plate and a second fixing rod, the second fixing rod passing through the interior of the innermost attachment plate, the upper and lower ends of the second fixing rod being fixedly connected to the guide plate and the bottom plate respectively, the guide plate being located above the first baffle, and a channel being formed between the outer side of the guide plate and the inner cylinder.

[0010] Preferably, it further includes a first fixing rod and a support plate. The first fixing rod is located below the top plate and is fixed to and detachably connected to the top plate. The lower end of the first fixing rod is fixedly connected to the support plate, and the outer mesh cylinder is placed above the support plate.

[0011] Preferably, it also includes an inner mesh cylinder, which is located inside the outer mesh cylinder and placed above the tray. The adsorbent is located between the outer mesh cylinder and the inner mesh cylinder, and there is an annular space between the outer side of the outer mesh cylinder and the inner wall of the shell.

[0012] Preferably, the adsorbent is absorbent cotton.

[0013] Preferably, it also includes a drain pipe, the base plate is fixedly connected to the drain pipe, and the drain pipe is connected to the inner cavity of the shell.

[0014] Preferably, it also includes casters, with multiple casters installed under the base plate.

[0015] This invention has the following advantages: multiple attachment plates and a second baffle form an air duct, thereby increasing the contact area between the exhaust gas and the attachment plates and increasing the amount of dust in the exhaust gas deposited on the attachment plates; an adsorbent is provided in the annular cavity between the outer and inner mesh cylinders, allowing the exhaust gas to pass radially through the adsorbent, reducing the resistance when the adsorbent leaves the adsorbent, increasing the exhaust gas flow rate and thus increasing the amount of exhaust gas processed per unit time; the exhaust gas passes through various positions of the adsorbent, making all the adsorbents adsorb the exhaust gas more evenly, thus saving adsorbent. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.

[0017] Figure 1 : A top view of the structure of this utility model;

[0018] Figure 2 :exist Figure 1 Schematic diagram of the cross-sectional structure at point AA;

[0019] Figure 3 :exist Figure 2A cross-sectional three-dimensional structural diagram at point BB;

[0020] Figure 4 : A three-dimensional structural diagram of the present invention with part of the shell removed;

[0021] Figure 5 : A three-dimensional structural diagram of this utility model. Detailed Implementation

[0022] The present invention will be further described below with reference to the accompanying drawings and examples:

[0023] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] like Figures 1 to 5 As shown, a composite cold trap includes: a shell, an attachment plate 3, an outer mesh cylinder 6, an inlet pipe 13, and an outlet pipe 14. The inner cavity of the shell is connected to the inlet pipe 13 and the outlet pipe 14, respectively. The attachment plate 3 and the outer mesh cylinder 6 are located inside the shell. The attachment plate 3 is located between the outer mesh cylinder 6 and the inlet pipe 13, and the outer mesh cylinder 6 is located between the attachment plate 3 and the outlet pipe 14. An adsorbent is disposed inside the outer mesh cylinder 6.

[0027] Preferably, the housing includes an inner cylinder 1, a bottom plate 11, and a top plate 12. The bottom of the inner cylinder 1 is fixedly connected to the bottom plate 11, the top of the inner cylinder 1 is fixedly and detachably connected to the top plate 12, the air inlet pipe 13 is fixedly connected to the inner cylinder 1, and the air outlet pipe 14 is fixedly connected to the top plate 12.

[0028] Preferably, the system further includes an outer cylinder 2, which is located outside the inner cylinder 1 and fixedly connected to it. A cooling chamber 20 is formed between the inner cylinder 1 and the outer cylinder 2. The outer cylinder 2 is fixedly connected to an inlet pipe 21 and an outlet pipe 22, respectively, and the inlet pipe 21 and the outlet pipe 22 are respectively connected to the cooling chamber 20. More preferably, the outlet pipe 22 is higher than the inlet pipe 21, so that the cooling water in the cooling chamber 20 flows from bottom to top. The additional gravity received by the cooling water slows down its movement speed, resulting in a longer heat exchange time and more thorough heat exchange between the cooling water and the inner cylinder 1.

[0029] Preferably, it also includes a first baffle 4 and a second baffle 31. The attachment plate 3 is cylindrical, and the multiple attachment plates 3 have the same center but different radii. The side of the attachment plate 3 has a ventilation hole 30. The second baffle 31 is provided on the outer side of the attachment plate 3 near the ventilation hole 30. The first baffle 4 is located at the upper end of the attachment plate 3 and blocks the space between two adjacent attachment plates 3 and the space between the outermost attachment plate 3 and the inner cylinder 1.

[0030] Preferably, it also includes a guide plate 5 and a second fixing rod 9. The second fixing rod 9 passes through the innermost attachment plate 3. The upper and lower ends of the second fixing rod 9 are fixedly connected to the guide plate 5 and the bottom plate 11, respectively. The guide plate 5 is located above the first baffle 4. A channel 50 is formed between the outer side of the guide plate 5 and the inner cylinder 1.

[0031] Preferably, it also includes a first fixing rod 8 and a support plate 81. The first fixing rod 8 is located below the top plate 12 and is fixed to and detachably connected to the top plate 12. The lower end of the first fixing rod 8 is fixedly connected to the support plate 81, and the outer mesh cylinder 6 is placed above the support plate 81.

[0032] Preferably, the system further includes an inner mesh cylinder 7, which is located inside the outer mesh cylinder 6 and placed above the support plate 81. The adsorbent is located between the outer mesh cylinder 6 and the inner mesh cylinder 7. An annular space exists between the outer surface of the outer mesh cylinder 6 and the inner wall of the shell. The inner mesh cylinder 7 is not filled with adsorbent to allow for an upward airflow channel for the exhaust gas. The upper ends of the outer mesh cylinder 6 and the inner mesh cylinder 7 are as close as possible to the top plate 12.

[0033] Preferably, the adsorbent is absorbent cotton.

[0034] Preferably, the system also includes a drain pipe 16, which is fixedly connected to the base plate 11 and communicates with the inner cavity of the shell. Some exhaust gas will generate condensate on the inner wall of the inner cylinder 1 and the attachment plate 3 via the drain pipe 16.

[0035] Preferably, it also includes casters 17, with multiple casters 17 installed below the base plate 11.

[0036] Working principle:

[0037] During operation, cooling water flows into the cooling chamber 20 to cool the inner wall of the inner cylinder 1 and the attachment plates 3. Exhaust gas enters the inner cylinder 1 through the inlet pipe 13. The exhaust gas moves sequentially around the outer side of each attachment plate 3. After being blocked by the corresponding second baffle 31, the exhaust gas enters the innermost attachment plate 3 through the vent 30. During this process, the exhaust gas is blocked by the first baffle 4 and cannot leave the space outside the second baffle 31. Dust is deposited on the cooled inner cylinder 1 and attachment plates 3, and the water generated by the condensation of the exhaust gas is discharged outward through the drain pipe 16.

[0038] The exhaust gas flows upwards from the innermost layer of the attachment plate 3, then exits the attachment plate 3. The exhaust gas is blocked by the guide plate 5 and moves outwards, passing through the channel 50 and moving upwards to the outer side of the outer mesh cylinder 6.

[0039] The exhaust gas passes radially through the adsorbent between the outer mesh cylinder 6 and the inner mesh cylinder 7, and some dust or harmful gases are adsorbed by the adsorbent. Finally, the exhaust gas leaves the interior of the casing through the exhaust pipe 14.

[0040] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A composite cold trap, characterized in that, include: The shell consists of an attachment plate (3), an outer mesh cylinder (6), an air inlet pipe (13), and an air outlet pipe (14). The inner cavity of the shell is connected to the air inlet pipe (13) and the air outlet pipe (14) respectively. The attachment plate (3) and the outer mesh cylinder (6) are located inside the shell. The attachment plate (3) is located between the outer mesh cylinder (6) and the air inlet pipe (13). The outer mesh cylinder (6) is located between the attachment plate (3) and the air outlet pipe (14). An adsorbent is provided inside the outer mesh cylinder (6).

2. The composite cold trap according to claim 1, characterized in that: The housing includes an inner cylinder (1), a bottom plate (11) and a top plate (12). The bottom of the inner cylinder (1) is fixedly connected to the bottom plate (11), the top of the inner cylinder (1) is fixedly and detachably connected to the top plate (12), the air inlet pipe (13) is fixedly connected to the inner cylinder (1), and the air outlet pipe (14) is fixedly connected to the top plate (12).

3. A composite cold trap according to claim 2, characterized in that: It also includes an outer cylinder (2), which is located outside the inner cylinder (1) and fixedly connected to the inner cylinder (1). A cooling chamber (20) is formed between the inner cylinder (1) and the outer cylinder (2). The outer cylinder (2) is fixedly connected to the water inlet pipe (21) and the water outlet pipe (22) respectively. The water inlet pipe (21) and the water outlet pipe (22) are respectively connected to the cooling chamber (20).

4. A composite cold trap according to claim 2, characterized in that: It also includes a first baffle (4) and a second baffle (31). The attachment plate (3) is cylindrical. Multiple attachment plates (3) have the same center and different radii. The side of the attachment plate (3) has a ventilation hole (30). The second baffle (31) is provided on the outside of the attachment plate (3) near the ventilation hole (30). The first baffle (4) is located at the upper end of the attachment plate (3) and blocks the space between two adjacent attachment plates (3) and the space between the outermost attachment plate (3) and the inner cylinder (1).

5. A composite cold trap according to claim 4, characterized in that: It also includes a guide plate (5) and a second fixing rod (9). The second fixing rod (9) passes through the innermost attachment plate (3). The upper and lower ends of the second fixing rod (9) are fixedly connected to the guide plate (5) and the bottom plate (11) respectively. The guide plate (5) is located above the first baffle (4). A channel (50) is formed between the outer side of the guide plate (5) and the inner cylinder (1).

6. A composite cold trap according to claim 2, characterized in that: It also includes a first fixing rod (8) and a support plate (81). The first fixing rod (8) is located below the top plate (12) and is fixed to and detachably connected to the top plate (12). The lower end of the first fixing rod (8) is fixedly connected to the support plate (81). The outer mesh cylinder (6) is placed above the support plate (81).

7. A composite cold trap according to claim 6, characterized in that: It also includes an inner mesh cylinder (7), which is located inside the outer mesh cylinder (6). The inner mesh cylinder (7) is placed above the tray (81). The adsorbent is located between the outer mesh cylinder (6) and the inner mesh cylinder (7). There is an annular space between the outer side of the outer mesh cylinder (6) and the inner wall of the shell.

8. A composite cold trap according to claim 1, characterized in that: The adsorbent is absorbent cotton.

9. A composite cold trap according to claim 2, characterized in that: It also includes a drain pipe (16), the base plate (11) is fixedly connected to the drain pipe (16), and the drain pipe (16) is connected to the inner cavity of the shell.

10. A composite cold trap according to claim 2, characterized in that: It also includes casters (17), with multiple casters (17) installed under the base plate (11).

Images