Multifunctional spin coating equipment

Abstract

The utility model provides multifunctional spin-coating equipment. The multifunctional spin-coating equipment comprises a plasma processing assembly, a glue uniformizing assembly and a heating and cooling assembly, a plasma processing assembly is arranged above the glue uniformizing assembly, a heating and cooling assembly is arranged in the glue uniformizing assembly, and the plasma processing assembly and the heating and cooling assembly can move. The multifunctional spin-coating equipment provided by the utility model has the functions of plasma treatment, glue spin-coating, heating and cooling at the same time, the occupied space of the equipment is greatly reduced, the equipment cost is reduced, a sheet to be treated does not need to be frequently moved in the whole glue uniformizing process, and the problem that the sheet to be treated is dirty due to the fact that the sheet to be treated is frequently moved is solved.

Description

Technical Field

[0001] This utility model belongs to the field of diffractive waveguide manufacturing technology, specifically relating to a multifunctional spin coating device. Background Technology

[0002] The existing methods for fabricating diffractive optical waveguides are generally as follows:

[0003] 1. Prepare an imprint master with a preset grating structure.

[0004] Specifically, photoresist is spin-coated onto a substrate, and beam interference exposure is performed on the photoresist on the substrate to obtain a photoresist mask with altered properties. The photoresist mask with altered properties on the substrate is then developed to obtain a substrate with a photoresist grating mask. The substrate with the photoresist grating mask is then etched to obtain an imprint master with a preset grating structure.

[0005] 2. The grating structure of the embossing master is transferred to the soft film using a nanoimprinting process, and the inverse structure of the grating structure is obtained on the soft film.

[0006] Specifically, an imprinting adhesive is uniformly spin-coated onto an imprinting master, a soft film substrate is bonded to the imprinting master, and pressure is applied to fill the grating structure of the imprinting master with the imprinting adhesive, resulting in an inverse structure of the grating structure on the imprinting adhesive. The imprinting adhesive with the inverse structure of the grating structure is then cured and demolded using ultraviolet light, and transferred to the soft film substrate to obtain a soft film with the inverse structure of the grating structure.

[0007] 3. The inverse structure of the grating structure on the soft film is transferred onto the glass wafer using a nanoimprinting process to obtain a glass wafer with a grating structure, thereby obtaining a diffractive waveguide.

[0008] Specifically, product adhesive is spin-coated onto a glass wafer, and a flexible film with an inverse grating structure is bonded to the product adhesive on the glass wafer. Pressure is applied to fill the inverse grating structure of the flexible film with the product adhesive, thus obtaining a grating structure on the product adhesive. Ultraviolet light is used for curing and demolding to separate the flexible film with the inverse grating structure from the product adhesive with the grating structure, resulting in a glass wafer with a grating structure, thereby obtaining a diffractive waveguide.

[0009] Those skilled in the art refer to the steps of spin-coating photoresist onto a substrate or spin-coating product adhesive onto a glass wafer as a spin coating process. Existing spin coating processes include sequentially performing plasma treatment, spin-coating adhesive, heating, and cooling on the sheet to be processed (substrate or glass wafer). These existing steps require placing the sheet to be processed into corresponding functional equipment for processing. This process has several drawbacks: firstly, frequent movement of the sheet can easily lead to contamination; secondly, the equipment is costly and bulky. Utility Model Content

[0010] In order to overcome the shortcomings of the existing technology, this utility model provides a multifunctional spin coating device.

[0011] The technical solution of this utility model is as follows:

[0012] This utility model provides a multifunctional spin coating device, including a plasma treatment component, a spin coating component, and a heating and cooling component;

[0013] The plasma treatment component is disposed above the spin coating component, and the heating and cooling component is disposed inside the spin coating component.

[0014] The plasma processing component and the heating and cooling component are movable.

[0015] Furthermore, the plasma processing assembly includes a first drive motor, a first lead screw, a first slider, a first support frame, and a plasma processing device;

[0016] One end of the first lead screw is connected to the shaft of the first drive motor, and the first lead screw body is provided with a first slider;

[0017] The plasma treatment device is installed at the bottom of the first support frame, and the first support frame is connected to the first slider.

[0018] Furthermore, the spin coating assembly includes a spin coating chamber, a spin coating stage, a support column, and a second drive motor;

[0019] The homogenizing stage is placed inside the homogenizing chamber. The top surface of the homogenizing stage is used to place the sheet to be processed. The bottom surface of the homogenizing stage is connected to the top of the support column. The bottom end of the support column passes through the bottom of the homogenizing chamber and is connected to the second drive motor.

[0020] Furthermore, the spin coating assembly also includes a vacuum ventilation assembly, which includes an adsorption tank, an adsorption hole, a first connecting hole, a second connecting hole, a pipe, and a vacuum pump.

[0021] The adsorption hole is located at the center of the spin coating stage, and multiple adsorption grooves are arranged around the adsorption hole on the top surface of the spin coating stage.

[0022] The support column is provided with the first connecting hole, the second drive motor is provided with the second connecting hole, the top end of the first connecting hole is connected to the adsorption hole, the bottom end of the first connecting hole is connected to the top end of the second connecting hole, the bottom end of the second connecting hole is connected to one end of the pipe, and the other end of the pipe is connected to the vacuum pump.

[0023] Furthermore, the heating and cooling assembly includes a second support frame, a tray, a heating element, a cooling element, a third drive motor, a second lead screw, and a slide rail;

[0024] The bottom end of the second support frame is fixed to the bottom of the glue-coating chamber, and the top end of the second support frame is provided with the third drive motor;

[0025] The tray is disposed in the uniform glue chamber, and the tray has a threaded hole on the outer bottom surface of the tray bottom. The slide rail is disposed on the side wall of the uniform glue chamber.

[0026] The bottom end of the second lead screw is connected to the shaft of the third drive motor, and the top end of the second lead screw is connected to the threaded hole.

[0027] The tray has heating and cooling components inside the bottom, and the side of the tray is connected to the slide rail via a slider.

[0028] Furthermore, the heating element includes a heating element and an external wire. The heating element is disposed inside the tray near the inner bottom surface, and the heating element is connected to the external wire.

[0029] Furthermore, the cooling component includes cooling channels and cooling water;

[0030] The tray has cooling channels located inside the bottom of the tray near the outer bottom surface;

[0031] The cooling water can flow through the cooling channel.

[0032] Furthermore, this also includes ventilation ducts and waste liquid discharge ducts;

[0033] The top end of the exhaust duct penetrates the side end of the tray, and the bottom end of the exhaust duct penetrates the bottom of the gelling chamber.

[0034] The top end of the waste liquid discharge pipe penetrates the side end of the tray, and the bottom end of the waste liquid discharge pipe penetrates the bottom of the homogenizing chamber.

[0035] Furthermore, it also includes a cover, which is detachably mounted on the top of the gelling chamber.

[0036] Furthermore, it also includes a lifting assembly, which includes a cylinder, a connecting rod, a support rod, and a through hole;

[0037] The cylinder is fixed on the second support frame, and the through hole is provided on the glue-spreading platform;

[0038] One end of the connecting rod is connected to the cylinder, and the other end of the connecting rod is connected to the support rod;

[0039] The cylinder can drive the support rod to move up and down within the through hole via a connecting rod.

[0040] Compared with the prior art, the technical solution of this utility model has the following beneficial effects:

[0041] This invention provides a multifunctional spin coating device, including a plasma treatment component, a spin coating component, and a heating and cooling component. The plasma treatment component is positioned above the spin coating component, and the heating and cooling component is located within the spin coating component. Both the plasma treatment component and the heating and cooling component are movable. This multifunctional spin coating device simultaneously performs plasma treatment, spin coating of adhesive, heating, and cooling functions, significantly reducing equipment space requirements and costs. Furthermore, the entire spin coating process eliminates the need for frequent movement of the sheet to be treated, avoiding the problem of contamination caused by frequent sheet movement. Attached Figure Description

[0042] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0043] Figure 1 A schematic diagram of the structure of the multifunctional spin coating equipment provided by this utility model;

[0044] Figure 2 This is a top view of the homogenization stage.

[0045] Figure 3 This is an enlarged sectional view illustrating a portion of the pallet's structure.

[0046] Wherein, 1-1-First drive motor A, 1-2-First drive motor B, 2-1-First lead screw A, 2-2-First lead screw B, 3-1-First slider A, 3-2-First slider B, 4-First support frame, 5-Plasma treatment equipment, 6-Spreading chamber, 7-Spreading stage, 8-Support column, 9-Second drive motor, 10-Adsorption hole, 11-Adsorption tank, 12-First connecting hole, 13-1-Third drive motor A 13-2-Third drive motor B, 14-1-Second lead screw A, 14-2-Second lead screw B, 15-Second support frame, 16-Tray, 17-Heating element, 18-Cooling channel, 19-Cylinder, 20-Connecting rod, 21-Support rod, 22-Penetrating hole, 22-1-First penetrating hole, 22-2-Second penetrating hole, 22-3-Third penetrating hole, 23-Exhaust duct, 24-Waste liquid discharge duct, 25-Cover. Detailed Implementation

[0047] The technical solution of this utility model will be clearly and completely described below with reference to its embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0048] In this document, the terms "first," "second," and other similar words are not intended to imply any order, quantity, or importance, but are merely used to distinguish different elements. The terms "one," "a," and other similar words are not intended to indicate the existence of only one of the stated things, but rather that the description refers only to one of the stated things, which may have one or more. The terms "comprising," "including," and other similar words are intended to indicate a logical relationship, not a spatial relationship. For example, "A includes B" means that logically B belongs to A, not that spatially B is located inside A. Furthermore, the meanings of the terms "comprising," "including," and other similar words should be considered open-ended, not closed. For example, "A includes B" means that B belongs to A, but B does not necessarily constitute all of A; A may also include other elements such as C, D, and E.

[0049] In this document, the terms "embodiment," "this embodiment," "preferred embodiment," and "one embodiment" do not imply that the description applies only to one specific embodiment, but rather that such description may also be applicable to one or more other embodiments. Those skilled in the art will understand that any description made herein relating to one embodiment can be substituted, combined, or otherwise incorporated with the descriptions in one or more other embodiments. Such substitutions, combinations, or other incorporations resulting in new embodiments are readily conceived by those skilled in the art and fall within the protection scope of this utility model.

[0050] In this description, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0051] This utility model provides a multifunctional spin coating device, which has functions such as plasma treatment, uniform coating, heating and cooling.

[0052] The multi-functional spin coating equipment includes a plasma treatment component, a spin coating component, and a heating and cooling component.

[0053] A plasma treatment component is installed above the spin coating assembly, and a heating and cooling component is installed inside the spin coating assembly.

[0054] The plasma processing components and heating / cooling components are movable.

[0055] For example, the plasma processing assembly described above includes a first drive motor, a first lead screw, a first slider, a first support frame, and a plasma processing device.

[0056] One end of the first lead screw is connected to the shaft of the first drive motor, and the first slider is set on the body of the first lead screw.

[0057] A plasma treatment device is installed at the bottom of the first support frame, and the first support frame is connected to the first slider.

[0058] like Figure 1 As shown, the first drive motor is divided into first drive motor A1-1 and first drive motor B1-2, the first lead screw is divided into first lead screw A2-1 and first lead screw B2-2, and the first slider is divided into first slider A3-1 and first slider B3-2.

[0059] One end of the first lead screw A2-1 is connected to the shaft of the first drive motor A1-1, and the first slider A3-1 is set on the body of the first lead screw A2-1.

[0060] One end of the first lead screw B2-2 is connected to the shaft of the first drive motor B1-2, and the first slider B3-2 is set on the body of the first lead screw B2-2.

[0061] One end of the first support frame 4 is connected to the first slider A3-1, and the other end of the first support frame 4 is connected to the first slider B3-2. The plasma treatment device 5 is installed at the middle position of the bottom end of the first support frame 4.

[0062] For example, the above-mentioned spin coating assembly includes a spin coating chamber 6, a spin coating stage 7, a support column 8, a second drive motor 9, and a vacuum ventilation assembly.

[0063] A spin coating stage 7 is placed inside the spin coating chamber 6. The top surface of the spin coating stage 7 is used to place the sheet to be processed. The sheet to be processed can be a substrate or a glass wafer, etc.

[0064] The bottom surface of the uniform adhesive carrier 7 is connected to the top of the support column 8, and the bottom end of the support column 8 passes through the bottom of the uniform adhesive chamber 6 and is connected to the second drive motor 9.

[0065] The vacuum ventilation assembly includes an adsorption port 10 (e.g. Figure 2 As shown), adsorption tank 11 (as shown) Figure 2 As shown), the first connecting hole 12 (as shown) Figure 1 (shown in the figure), second connecting hole (not shown in the figure), pipe (not shown in the figure), and vacuum pump (not shown in the figure).

[0066] The adsorption hole 10 is provided at the center of the spin coater 7, and a plurality of adsorption grooves 11 are provided around the adsorption hole 10 on the top surface of the spin coater 7.

[0067] The support column 8 is provided with the first connecting hole 12, and the second drive motor is provided with the second connecting hole. The top end of the first connecting hole is connected to the adsorption hole, the bottom end of the first connecting hole is connected to the top end of the second connecting hole, the bottom end of the second connecting hole is connected to one end of the pipe, and the other end of the pipe is connected to the vacuum pump.

[0068] For example, the heating and cooling assembly includes a second support frame, a tray, a heating element, a cooling element, a third drive motor, a second lead screw, and a slide rail.

[0069] The second support frame is installed in the homogenizing chamber, with its bottom end fixed to the bottom of the homogenizing chamber and its top end equipped with a third drive motor.

[0070] The tray is placed inside the uniform coating chamber, and is positioned above the second support frame. The tray has threaded holes on its outer bottom surface, and the slide rails are installed on the side walls of the uniform coating chamber.

[0071] The bottom end of the second lead screw is connected to the shaft of the third drive motor, and the top end of the second lead screw is connected to the threaded hole.

[0072] The side of the tray is connected to the slide rail via a slider.

[0073] like Figure 1 As shown, the third drive motor is divided into the third drive motor A13-1 and the third drive motor B13-2, the second lead screw is divided into the second lead screw A14-1 and the second lead screw B14-2, and the slide rail is divided into the first slide rail and the second slide rail.

[0074] The bottom end of the second support frame 15 is fixed to the bottom of the uniform adhesive chamber 6, and the top two sides of the second support frame 15 are respectively provided with the third drive motor A13-1 and the third drive motor B13-2.

[0075] The tray 16 inside the uniform glue chamber 6 has a first threaded hole and a second threaded hole on both sides of the outer bottom surface of the tray bottom, and the two side walls of the uniform glue chamber 6 are respectively provided with a first slide rail and a second slide rail.

[0076] The bottom end of the second lead screw A14-1 is connected to the shaft of the third drive motor A13-1, and the top end of the second lead screw A14-1 is connected to the first threaded hole. The bottom end of the second lead screw B14-2 is connected to the shaft of the third drive motor B13-2, and the top end of the second lead screw B14-2 is connected to the second threaded hole.

[0077] The first side of the tray 16 is connected to the first slide rail via the first slider, and the second side of the tray is connected to the second slide rail via the second slider.

[0078] The tray 16 has heating and cooling components installed inside the bottom of the tray.

[0079] For example, the heating element includes a heating element and an external lead wire, and the heating element 17 is disposed inside the tray 16 near the inner bottom surface (e.g., Figure 3 As shown, the heating element is connected to an external wire. The heating element can be a ceramic heating element, etc.

[0080] For example, the cooling component includes cooling channels and cooling water, such as Figure 3 As shown, a cooling channel 18 is provided inside the tray 16 near the outer bottom surface, through which cooling water can circulate. This cooling channel can be arranged in a curved and spiraling manner inside the tray bottom near the outer bottom surface.

[0081] In a preferred embodiment, the multifunctional spin coating equipment of this utility model may further include a lifting assembly. An example of the lifting assembly includes a cylinder 19, a connecting rod 20, a support rod 21, and a through hole 22 (e.g., ...). Figure 1 (As shown).

[0082] The cylinder 19 is fixed on the second support frame 15. A through hole 22 is provided on the glue-spreading platform 7. One end of the connecting rod 20 is connected to the cylinder 19, and the other end of the connecting rod 20 is connected to the support rod 21. The cylinder 19 can drive the support rod 21 to move up and down within the through hole 22 through the connecting rod 20.

[0083] like Figure 2 As shown, the spin coating stage 7 is provided with a first penetrating hole 22-1, a second penetrating hole 22-2, and a third penetrating hole 22-3. Correspondingly, a first cylinder, a second cylinder, and a third cylinder are respectively provided on the second support frame. The first cylinder is connected to a first connecting rod, and the first connecting rod is connected to a first support rod. The first support rod can pass through the first penetrating hole. The second cylinder is connected to a second connecting rod, and the second connecting rod is connected to a second support rod. The second support rod can pass through the second penetrating hole. The third cylinder is connected to a third connecting rod, and the third connecting rod is connected to a third support rod. The third support rod can pass through the third penetrating hole.

[0084] As a preferred embodiment, the multifunctional spin coating equipment provided by this utility model may also include an exhaust pipe and a waste liquid discharge pipe.

[0085] Among them, such as Figure 1As shown, the top end of the exhaust pipe 23 passes through the side end of the tray 16, and the bottom end of the exhaust pipe 23 passes through the bottom of the homogenizing chamber 6. After the bottom end of the exhaust pipe passes through the bottom of the homogenizing chamber, it can be connected to the vacuum equipment. The exhaust pipe is used to adsorb the glue mist generated above the homogenizing chamber during the homogenizing operation.

[0086] Among them, such as Figure 1 As shown, the top end of the waste liquid discharge pipe 24 passes through the side end of the tray 16, and the bottom end of the waste liquid discharge pipe 24 passes through the bottom of the homogenizing chamber 6. The bottom end of the waste liquid discharge pipe can be connected to the waste liquid collection device. The waste liquid discharge pipe is used to collect and discharge residual glue that splashes around the homogenizing chamber due to the rotation of the homogenizing platform during the homogenizing operation.

[0087] The multifunctional spin coating equipment provided by this utility model may also include a cover 25, which is detachably mounted on the top of the uniform coating chamber 6 (e.g., Figure 1 (As shown). The cover is detachably connected to the top of the spin coater chamber, such as through an interference fit. The purpose of the cover at the top of the spin coater chamber is to prevent the spin coater from splashing glue outside the chamber during the spin coater operation due to the rotation of the spin coater platform.

[0088] The following specific examples illustrate the steps for performing a uniform coating operation using the multifunctional spin coating equipment provided by this utility model:

[0089] 1. Place the sheet to be processed on the homogenizing stage.

[0090] 2. Start the cylinder. The cylinder drives the support rod to rise through the connecting rod and pass through the penetration hole of the uniform adhesive stage to support and lift the sheet to be treated to the corresponding position for plasma treatment.

[0091] 3. Start the first drive motor. The first drive motor drives the plasma treatment equipment on the first support frame to move above the sheet to be treated via the first lead screw. Start the plasma treatment equipment to perform plasma treatment on the sheet to be treated, changing the surface energy of the uniform adhesive surface of the sheet to be treated. After the operation is completed, the first drive motor drives the plasma treatment equipment on the first support frame to move back to the initial position via the first lead screw.

[0092] 4. Start the cylinder. The cylinder drives the support rod to descend via the connecting rod, and the descending position of the support rod is at least below the position of the tray.

[0093] 5. Start the vacuum pump to ensure that the vacuum ventilation component firmly adheres the sheet to be processed to the homogenizing stage.

[0094] 6. Perform glue dispensing operation on the sheet to be treated on the glue dispensing platform. Start the second drive motor. The second drive motor drives the glue dispensing platform to rotate through the support column. During the rotation of the glue dispensing platform, the glue is spin-coated onto the glue dispensing surface of the sheet to be treated.

[0095] 7. Start the third drive motor. The third drive motor, via the second lead screw, raises the tray to near the bottom of the spin coater. Activate the heating element to indirectly heat the sheet to be processed on the spin coater. After the operation is complete, turn off the heating element. Activate the cooling element to indirectly cool the sheet to be processed on the spin coater. After the operation is complete, turn off the cooling element. After the heating and cooling operations are completed, start the third drive motor. The third drive motor, via the second lead screw, lowers the tray to the initial position.

[0096] 8. Start the cylinder. The cylinder drives the support rod to rise through the connecting rod and pass through the through hole of the glue-spreading platform to support and lift the sheet to be processed to the unloading position, and then remove the sheet to be processed.

[0097] The above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although the utility model has been described in detail with reference to the above embodiments, those skilled in the art can still make modifications or equivalent substitutions to the specific implementation of this utility model. Any modifications or equivalent substitutions that do not depart from the spirit and scope of this utility model are within the protection scope of the claims of this utility model pending approval.

Claims

1. A multifunctional spin coating device, characterized in that, Includes plasma processing components, spin coating components, and heating and cooling components; The plasma treatment component is disposed above the spin coating component, and the heating and cooling component is disposed inside the spin coating component. The plasma processing component and the heating and cooling component are movable.

2. The multifunctional spin coating equipment according to claim 1, characterized in that, The plasma processing assembly includes a first drive motor, a first lead screw, a first slider, a first support frame, and a plasma processing device; One end of the first lead screw is connected to the shaft of the first drive motor, and the first lead screw body is provided with a first slider; The plasma treatment device is installed at the bottom of the first support frame, and the first support frame is connected to the first slider.

3. The multifunctional spin coating equipment according to claim 1, characterized in that, The spin coating assembly includes a spin coating chamber, a spin coating stage, a support column, and a second drive motor. The homogenizing stage is placed inside the homogenizing chamber. The top surface of the homogenizing stage is used to place the sheet to be processed. The bottom surface of the homogenizing stage is connected to the top of the support column. The bottom end of the support column passes through the bottom of the homogenizing chamber and is connected to the second drive motor.

4. The multifunctional spin coating equipment according to claim 3, characterized in that, The spin coating assembly also includes a vacuum ventilation assembly, which includes an adsorption tank, an adsorption hole, a first connecting hole, a second connecting hole, a pipe, and a vacuum pump. The adsorption hole is located at the center of the spin coating stage, and multiple adsorption grooves are arranged around the adsorption hole on the top surface of the spin coating stage. The support column is provided with the first connecting hole, the second drive motor is provided with the second connecting hole, the top end of the first connecting hole is connected to the adsorption hole, the bottom end of the first connecting hole is connected to the top end of the second connecting hole, the bottom end of the second connecting hole is connected to one end of the pipe, and the other end of the pipe is connected to the vacuum pump.

5. The multifunctional spin coating equipment according to claim 3, characterized in that, The heating and cooling assembly includes a second support frame, a tray, a heating element, a cooling element, a third drive motor, a second lead screw, and a slide rail; The bottom end of the second support frame is fixed to the bottom of the glue-coating chamber, and the top end of the second support frame is provided with the third drive motor; The tray is disposed in the uniform glue chamber, and the tray has a threaded hole on the outer bottom surface of the tray bottom. The slide rail is disposed on the side wall of the uniform glue chamber. The bottom end of the second lead screw is connected to the shaft of the third drive motor, and the top end of the second lead screw is connected to the threaded hole. The tray has heating and cooling components inside the bottom, and the side of the tray is connected to the slide rail via a slider.

6. The multifunctional spin coating equipment according to claim 5, characterized in that, The heating element includes a heating element and an external wire. The heating element is disposed inside the tray near the inner bottom surface, and the heating element is connected to the external wire.

7. The multifunctional spin coating equipment according to claim 5, characterized in that, The cooling component includes a cooling channel and cooling water; The tray has cooling channels located inside the bottom of the tray near the outer bottom surface; The cooling water can flow through the cooling channel.

8. The multifunctional spin coating equipment according to claim 5, characterized in that, It also includes ventilation ducts and waste liquid discharge ducts; The top end of the exhaust duct penetrates the side end of the tray, and the bottom end of the exhaust duct penetrates the bottom of the gelling chamber. The top end of the waste liquid discharge pipe penetrates the side end of the tray, and the bottom end of the waste liquid discharge pipe penetrates the bottom of the homogenizing chamber.

9. The multifunctional spin coating equipment according to claim 3, characterized in that, It also includes a cover, which is detachably mounted on the top of the gelling chamber.

10. The multifunctional spin coating equipment according to claim 5, characterized in that, It also includes a lifting assembly, which includes a cylinder, a connecting rod, a support rod, and a through hole; The cylinder is fixed on the second support frame, and the through hole is provided on the glue-spreading platform; One end of the connecting rod is connected to the cylinder, and the other end of the connecting rod is connected to the support rod; The cylinder can drive the support rod to move up and down within the through hole via a connecting rod.

Images