Single-furnace type vacuum coating equipment

Abstract

The utility model relates to the technical field of coating equipment, in particular to single-furnace type vacuum coating equipment, which comprises a coating cavity, the coating cavity is connected with vacuumizing equipment, the coating cavity is connected with an auxiliary cavity through an intercommunication pipeline, and an intercommunication valve is arranged in the intercommunication pipeline. And the auxiliary cavity is arranged to be matched with the intercommunication valve, so that the energy consumption is reduced in the repeated vacuumizing process of the single-furnace vacuum coating equipment, and the operation efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a single-furnace vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment, including decorative coating and functional film coating, comes in two forms: single-furnace and continuous. Continuous coating equipment maintains a constant vacuum chamber, resulting in low energy consumption for the vacuum pump. However, it is only suitable for large-scale, single-process production and is not convenient for flexibly switching coating processes to achieve small-batch customized functional or color coatings. Single-furnace equipment offers greater flexibility and can be combined with... Figure 1 As shown, during production, the coating chamber 1 needs to be repeatedly filled with air and evacuated to change the workpiece to be coated. The energy consumption of evacuation is relatively high, and it takes time to re-evacuate after each new workpiece is placed in. After the previous batch of coating is completed, the air filling valve 100 fills the coating chamber 1 with air, then the chamber door or top cover is opened, the coated workpiece is taken out and the new workpiece to be coated is placed, the chamber door or top cover is closed, the rotary vane pump in the roughing pump group 30 is started first, and the roughing valve 130 is opened to evacuate the coating chamber 1. When the vacuum degree in the coating chamber 1 reaches 900Pa, the Roots pump in the roughing pump group 30 is started to accelerate the extraction of low vacuum. When the vacuum degree in the chamber reaches 2Pa, the roughing valve 130 is closed, and then the fore-stage valve 310 and the fine-stage valve 140 are opened in sequence. At this time, the roughing pump group 30 acts as a pre-stage auxiliary to the high vacuum pump 40. The high-vacuum pump 40 draws the vacuum from 2 Pa to the required base vacuum for coating (usually 0.02 Pa or higher). Once the base vacuum is reached, the coating process can begin. After coating, the fine-vacuum valve 140 and each stage of the vacuum pump are closed sequentially. The inflation valve 100 is opened to completely fill the coating chamber 1 with atmosphere. The chamber door or top cover is then opened again to load the workpiece. As can be seen from the above process, the high vacuum drawn into the coating chamber 1 for each batch is completely released after coating. Furthermore, during the staged vacuuming process, the time required to switch from atmospheric pressure (approximately 100,000 Pa) to 2 Pa via the fine-vacuum valve 140 for high-vacuum extraction is often quite long. This results in both increased energy consumption for re-vacuuming and reduced equipment efficiency due to waiting time, requiring improvement and optimization. Overall, the production efficiency is relatively lower than that of a continuous process. Utility Model Content

[0003] The technical problem to be solved by this utility model is to provide a single-furnace vacuum coating equipment that addresses the above-mentioned technical deficiencies by setting up an auxiliary chamber in conjunction with an interconnecting valve, thereby solving the problems of high energy consumption and long processing time during repeated vacuuming of the single-furnace vacuum coating equipment.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a single-furnace vacuum coating equipment, including a coating chamber, a vacuum pumping device connected to the coating chamber, an auxiliary chamber connected to the coating chamber through an interconnecting pipe, and an interconnecting valve provided in the interconnecting pipe.

[0005] To further optimize this technical solution, the auxiliary chamber is connected to the vacuum pumping equipment via an auxiliary pipe, and an auxiliary valve is installed in the auxiliary pipe.

[0006] To further optimize this technical solution, the vacuum equipment includes a primary pump group and a secondary pump group. The primary pump group and the secondary pump group are connected to the coating chamber through primary pipelines and secondary pipelines, respectively. The primary pipeline is equipped with a coarse extraction valve, the secondary pipeline is equipped with a fine extraction valve, and the coating chamber is connected to an inflation valve.

[0007] To further optimize this technical solution, the first-stage pump unit is a roughing pump, and the second-stage pump unit is a high-vacuum pump.

[0008] To further optimize this technical solution, a maintenance pump is connected to the secondary pump unit via a pipeline.

[0009] To further optimize this technical solution, the interconnect valve, the roughing valve, and the fineing valve are electrically controlled valves, and the control terminals of the interconnect valve, the roughing valve, and the fineing valve are electrically connected to the automatic control device.

[0010] To further optimize this technical solution, the volume of the auxiliary cavity is greater than or equal to the volume of the coating cavity.

[0011] Compared with the prior art, this utility model has the following advantages: 1. The auxiliary chamber is equipped with an inter-valve, which reduces energy consumption and improves operating efficiency during the repeated vacuuming process of the single-furnace vacuum coating equipment; 2. The auxiliary chamber, in conjunction with auxiliary pipes and auxiliary valves, can be evacuated first using vacuuming equipment, resulting in higher equipment utilization; 3. The inter-valve, coarse evacuation valve, and fine evacuation valve are set as electrically controlled valves, which, in conjunction with the automatic control device, achieve full-process automatic control, resulting in higher control efficiency. Attached Figure Description

[0012] Figure 1 A schematic diagram of the vacuum system in a traditional single-furnace vacuum coating equipment;

[0013] Figure 2 This is a schematic diagram of the vacuum system in a single-furnace vacuum coating equipment.

[0014] In the diagram: 1. Coating chamber; 100. Gas filling valve; 12. Interconnecting pipe; 120. Interconnecting valve; 13. Primary pipe; 130. Coarse extraction valve; 14. Secondary pipe; 140. Fine extraction valve; 2. Auxiliary chamber; 21. Auxiliary pipe; 210. Auxiliary valve; 3. Primary pump set; 30. Coarse extraction pump set; 310. Fore-stage valve; 4. Secondary pump set; 40. High vacuum pump; 5. Holding pump. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that these descriptions are exemplary only and are not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0016] It should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" used in this application to indicate orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings. They are used solely for the convenience of describing this disclosure and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0017] Combination Figure 2 As shown, a single-furnace vacuum coating equipment includes a coating chamber 1, a chamber door on one side of the coating chamber 1, a vacuum pump and an inflation valve 100 connected to the coating chamber 1, and an auxiliary chamber 2 connected to the coating chamber 1 through an interconnecting pipe 12. The volume of the auxiliary chamber 2 is greater than or equal to the volume of the coating chamber 1, and an interconnecting valve 120 is provided in the interconnecting pipe 12.

[0018] The vacuum equipment includes a primary pump group 3 and a secondary pump group 4. The primary pump group 3 is a high-vacuum pump, which in this embodiment can be a molecular pump or a diffusion pump. The secondary pump group 4 is a roughing pump, which in this embodiment can be a rotary vane pump or a Roots pump. The primary pump group 3 is connected to the coating chamber 1 through a primary pipeline 13, which is equipped with a primary valve 130. The secondary pump group 4 is connected to the coating chamber 1 through a secondary pipeline 14, which is equipped with a fine pumping valve 140.

[0019] The secondary pump set 4 is connected to the maintenance pump 5 through a pipeline. When the secondary pump set 4 is working, the maintenance pump 5 is turned on at the same time. The maintenance pump 5 can always assist in evacuating the vacuum of the secondary pump set 4. The maintenance pump 5 serves as the back pump of the secondary pump set 4 and maintains the back vacuum of the secondary pump set 4.

[0020] Interchange valve 120, primary valve 130, and fine extraction valve 140 are all electrically controlled valves. The control terminals of interchange valve 120, primary valve 130, and fine extraction valve 140 are electrically connected to an automatic control device, which can be a programmable controller.

[0021] When using, combine Figure 2As shown, an auxiliary chamber 2 is configured for vacuum pressure division in the coating chamber 1. The auxiliary chamber 2 is controllably connected to the coating chamber 1 via an interconnecting pipe 12 and an interconnecting valve 120. The larger the volume of the auxiliary chamber 2, the better the effect. The following example uses chambers of equal volume: Initially, the internal air pressure of the coating chamber 1 and the auxiliary chamber 2 is approximately one atmosphere, about 100,000 Pa. The coating chamber 1 is at standard atmospheric pressure to allow the opening of its door or cover for loading workpieces. After one coating cycle, before opening the door and the inflation valve 100, the internal pressure of the coating chamber 1 is approximately 0.1 Pa. At this point, the automatic control device opens the interconnecting valve 120, and the internal air pressure of the coating chamber 1 and the auxiliary chamber 2 quickly balances. At this time, the internal air pressure of both the coating chamber 1 and the auxiliary chamber 2 is approximately 50,000 Pa. After the air pressure balances, the interconnecting valve 120 is closed, and then the inflation valve 100 is opened to supply air to the coating chamber 1. The atmosphere is fully vented to allow the chamber door to be opened for workpiece loading. After loading, the chamber door or cover is closed. At this point, the automatic control device reopens the inter-vacuum valve 120, and the internal pressure of the coating chamber 1 and auxiliary chamber 2 quickly balances again, reaching approximately 75,000 Pa. After balancing, the inter-vacuum valve 120 is closed. Then, the primary pump group 3 and the secondary pump group 4 in the vacuum equipment normally evacuate the coating chamber 1. This furnace utilizes the pressure partial effect of the low-pressure space from the previous furnace. Subsequent furnaces in the coating chamber 1 are evacuated from a starting pressure of 75,000 Pa, and the evacuation time is also shortened. Each subsequent furnace continues this automatic cycle operation. After several batches of cyclic coating, a stable energy-saving effect is achieved, that is, the coating chamber 1 can save about 33.3% of the evacuation work per furnace, saving the energy consumption of re-evacuation and shortening the evacuation time per furnace, thus improving production efficiency.

[0022] Further optimized embodiments, combined with Figure 2As shown, auxiliary chamber 2 is also connected to the vacuum equipment via auxiliary pipe 21. Auxiliary pipe 21 contains auxiliary valve 210, which is an electrically controlled valve and electrically connected to the automatic control device. When workpieces are loaded after the coating chamber 1 is filled with gas, the vacuum equipment of ordinary coating equipment is idle. In this embodiment, the auxiliary valve 210 is opened by the automatic control device. During the workpiece loading process in coating chamber 1, the vacuum equipment first evacuates auxiliary chamber 2, raising the entire auxiliary chamber to a relatively high vacuum of 0.1 Pa. Then, the vacuum equipment stops and stands by. After the workpiece is loaded and the chamber door is closed, the interconnecting valve 120 is opened to balance the pressure between the two chambers. Under the pressure divider effect, coating chamber 1 quickly reaches a pressure of 50,000 Pa from 100,000 Pa. Then, the interconnecting valve 120 is closed, and the coating chamber 1 is evacuated normally again. This directly shortens the vacuuming time by approximately 50%, further improving production efficiency. The above-mentioned effect can be further improved by increasing the volume ratio of auxiliary chamber 2 to coating chamber 1. The larger the auxiliary chamber, the better the effect of shortening the vacuuming time of coating chamber 1. This auxiliary chamber 2 is used for both vacuum pressure division and pre-vacuuming, further improving the utilization rate of the equipment.

[0023] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within its protection scope. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

[0024] Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

Claims

1. A single-furnace vacuum coating apparatus, comprising a coating chamber (1), wherein the coating chamber (1) is connected to a vacuum pumping device, characterized in that: The coating chamber (1) is connected to an auxiliary chamber (2) via an interconnecting pipe (12), and an interconnecting valve (120) is provided in the interconnecting pipe (12); the auxiliary chamber (2) is connected to the vacuum pumping equipment via an auxiliary pipe (21), and an auxiliary valve (210) is provided in the auxiliary pipe (21).

2. The single-furnace vacuum coating equipment according to claim 1, characterized in that: The vacuum equipment includes a primary pump group (3) and a secondary pump group (4). The primary pump group (3) and the secondary pump group (4) are connected to the coating chamber (1) through a primary pipe (13) and a secondary pipe (14), respectively. A coarse extraction valve (130) is provided in the primary pipe (13), and a fine extraction valve (140) is provided in the secondary pipe (14). An inflation valve (100) is connected to the coating chamber (1).

3. The single-furnace vacuum coating equipment according to claim 2, characterized in that: The primary pump set (3) is a roughing pump, and the secondary pump set (4) is a high vacuum pump.

4. The single-furnace vacuum coating equipment according to claim 3, characterized in that: The secondary pump set (4) is connected to a maintenance pump (5) via a pipeline.

5. A single-furnace vacuum coating equipment according to claim 2, characterized in that: The interconnect valve (120), the coarse extraction valve (130), and the fine extraction valve (140) are electrically controlled valves, and the control terminals of the interconnect valve (120), the coarse extraction valve (130), and the fine extraction valve (140) are electrically connected to the automatic control device.

6. The single-furnace vacuum coating equipment according to claim 1, characterized in that: The volume of the auxiliary cavity (2) is greater than or equal to the volume of the coating cavity (1).

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