Graphene preparation carrier

Abstract

The utility model relates to the technical field of graphene preparation, and discloses a graphene preparation carrier which comprises a fixing part, two openings are oppositely formed in the fixing part in the gas conveying direction, a plurality of mounting positions suitable for placing substrates are arranged in the fixing part, and the arrangement direction of the mounting positions is perpendicular to the gas conveying direction; the carrier part is provided with a first fixing position and a second fixing position, the first fixing position is suitable for placing the fixing part in the vertical direction, the second fixing position is suitable for placing the fixing part in the horizontal direction, and according to the graphene preparation carrier, the first fixing position and the second fixing position arranged on the carrier part can support the fixing part to be vertically or horizontally placed according to specific requirements; the substrate can be arranged in parallel to the vertical or horizontal direction, so that the same carrier can adapt to different graphene growth direction requirements, the limitation that the structure of an integrated carrier needs to be independently designed according to the growth direction is avoided, the process adjustment cost is reduced, and the application flexibility in diversified growth requirement scenes is improved.

Description

Technical Field

[0001] This utility model relates to the field of graphene preparation technology, specifically to a graphene preparation carrier. Background Technology

[0002] Chemical vapor deposition (CVD), as one of the core technologies for graphene film preparation, relies on a high-temperature, closed-loop reaction system to achieve controllable synthesis of materials. This method involves the high-temperature thermal decomposition of gaseous or solid carbon sources (such as methane or ethanol), decomposing carbon source molecules into highly reactive carbon atoms or groups. These reactive species migrate to the surface of an insulating substrate under gaseous transport, where they undergo sequential physicochemical processes such as adsorption, surface diffusion, and chemical bonding, ultimately depositing to form a high-quality graphene film.

[0003] In current graphene fabrication processes, substrate support methods are mainly divided into two technical routes: free stacking and integrated carriers. The free stacking mode achieves multi-layer stacking of substrates through spacers. Although it can provide high loading flexibility and adapt to the needs of substrates of different sizes and shapes, due to the lack of mechanical fixing and restraint mechanisms, adjacent substrates are prone to relative displacement due to thermal stress or gas disturbance during high-temperature reaction, making it difficult to precisely control the substrate spacing. At the same time, the contact pressure between the spacers and the substrate surface is prone to indentation defects, which affect the uniformity and yield of graphene films.

[0004] Integrated carriers, by fixing the substrate in a specific position, suppress relative misalignment between substrates and ensure the stability of the deposition process. However, the structure of such carriers usually needs to be individually designed according to the graphene growth direction (vertical or horizontal, etc.), which limits the control of the growth direction. For example, when vertical graphene growth is required, not only must a vertically positioned reaction chamber be configured to guide the deposition of carbon active species along a vertical path, but a dedicated integrated carrier structure must also be matched to ensure that the substrate is in the optimal growth orientation. This significantly increases the cost of process adjustments and limits the application flexibility of integrated carriers in diverse growth scenarios. Utility Model Content

[0005] In view of this, the present invention provides a graphene preparation carrier to solve the problem that an integrated carrier cannot be adapted to substrates with different graphene growth directions at the same time.

[0006] This utility model provides a graphene preparation carrier, comprising:

[0007] The fastener has two openings opposite each other along the gas delivery direction. The fastener has multiple mounting positions inside, which are suitable for placing a substrate. The multiple mounting positions are arranged perpendicular to the gas delivery direction. Each mounting position is suitable for mounting one substrate, and the plane on which the substrate plate is located is parallel to the gas delivery direction.

[0008] A carrier component having a first fixing position suitable for placing the fixing member in a vertical direction and a second fixing position suitable for placing the fixing member in a horizontal direction;

[0009] When the fastener is placed in the first fixing position, the arrangement direction of the plurality of mounting positions is parallel to the horizontal direction; when the fastener is placed in the second fixing position, the arrangement direction of the plurality of mounting positions is perpendicular to the horizontal direction.

[0010] Optionally, the first fixing position and the second fixing position are connected.

[0011] Optionally, the carrier includes an opening groove, the inner wall of which forms a first fixing position suitable for placing the fixing member, and the tops of two oppositely arranged groove walls of the opening groove bend and extend horizontally in a direction away from each other to form a second fixing position suitable for placing the fixing member.

[0012] Optionally, the carrier further includes a limiting member disposed at the outer edge of the first fixed position and the second fixed position, the limiting member being adapted to restrict the movement of the fixed member along the gas conveying direction when the fixed member is placed at the first fixed position or the second fixed position.

[0013] Optionally, the carrier component further includes a positioning component, which is disposed on the plate surface of the second fixing position opposite to the fixing component, and the positioning component is adapted to overlap the internal structure of the reaction chamber.

[0014] Optionally, the carrier component is provided with multiple weight-reduction holes.

[0015] Optionally, the fixing member is a sleeve, and the sleeve forms the opening at both ends along its axial direction. When the sleeve is placed in the first fixing position or the second fixing position, the axial direction of the sleeve is parallel to the gas conveying direction.

[0016] Optionally, the sleeve includes four flat plates connected end to end in sequence. Two adjacent flat plates are arranged perpendicular to each other, and two opposing flat plates are arranged parallel to each other. A plurality of mounting positions are provided on the inner plate surface of a pair of opposing flat plates. A plurality of snap-fit ​​parts protruding from the inner plate surface are provided on each pair of opposing flat plates. The gap between two adjacent snap-fit ​​parts forms the mounting position.

[0017] Optionally, the two flat plates with the mounting positions are provided with through holes suitable for balancing the gas.

[0018] Optionally, the substrate is a square glass substrate;

[0019] And / or, the fastener is a quartz fastener, and the carrier is a quartz carrier.

[0020] Beneficial effects

[0021] The graphene fabrication carrier provided by this utility model includes a fixing member with two openings along the gas delivery direction and mounting positions inside the fixing member suitable for engaging a substrate. When the substrate is engaged in the mounting position, its surface is parallel to the gas delivery direction. Each mounting position is suitable for mounting one substrate, and the plane containing the substrate surface is parallel to the gas delivery direction. The carrier member has a first fixing position suitable for vertically placing the fixing member and a second fixing position suitable for horizontally placing the fixing member. When the fixing member is placed in the first fixing position, the surface of the substrate is parallel to the vertical direction; when the fixing member is placed in the second fixing position, the surface of the substrate is parallel to the horizontal direction. The mounting positions inside the fixing member fix the substrate, avoiding relative displacement between adjacent substrates due to thermal stress or gas disturbance in the free stacking mode; it also eliminates indentation defects caused by the contact pressure between the spacer and the substrate surface, improving the uniformity and yield of the graphene film. The first and second fixing positions of the carrier can support the vertical or horizontal placement of the fixing components according to specific needs, so that the substrate can be set parallel to the vertical or horizontal direction. This allows the same carrier to adapt to different graphene growth direction requirements, avoiding the limitation of integrated carriers needing to design structures separately according to the growth direction, reducing process adjustment costs, and improving application flexibility in diverse growth demand scenarios. Attached Figure Description

[0022] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of the fixing member in the first fixing position according to an embodiment of the present utility model;

[0024] Figure 2 This is a schematic diagram of the structure of the fixing member in the second fixing position according to an embodiment of the present utility model;

[0025] Figure 3 This is a schematic diagram of the structure of the fastener according to an embodiment of the present utility model;

[0026] Figure 4 This is a schematic diagram of the structure of the carrier component according to an embodiment of the present utility model;

[0027] Figure 5 This is a structural schematic diagram of the carrier component from another perspective, representing an embodiment of the present utility model.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1. Fasteners; 11. Flat panels; 12. Clip-on connectors;

[0030] 2. Carrier component; 21. First fixing position; 22. Second fixing position; 23. Opening groove; 24. Limiting component; 25. Positioning component; 26. Weight reduction hole; 27. Reinforcing component;

[0031] 3. Substrate. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0033] The following is combined with Figures 1 to 5 The following describes embodiments of the present invention.

[0034] According to an embodiment of the present invention, a graphene preparation carrier is provided, comprising:

[0035] Fixing member 1 has two openings opposite each other along the gas conveying direction. The fixing member 1 has multiple mounting positions suitable for placing the substrate 3 inside. The arrangement direction of the multiple mounting positions is perpendicular to the gas conveying direction. Each mounting position is suitable for mounting one substrate 3, and the plane on which the substrate 3 is located is parallel to the gas conveying direction.

[0036] The carrier 2 has a first fixing position 21 suitable for placing the fixing member 1 in a vertical direction and a second fixing position 22 suitable for placing the fixing member 1 in a horizontal direction.

[0037] When the fastener 1 is placed in the first fixing position 21, the arrangement of the multiple mounting positions is parallel to the horizontal direction; when the fastener 1 is placed in the second fixing position 22, the arrangement of the multiple mounting positions is perpendicular to the horizontal direction.

[0038] The graphene fabrication carrier provided in this embodiment uses mounting positions inside the fixing member 1 to fix the substrate 3, avoiding relative displacement of adjacent substrates 3 due to thermal stress or gas disturbance in the free stacking mode. It also eliminates indentation defects caused by the contact pressure between the spacer and the substrate 3 surface, improving the uniformity and yield of the graphene film. The first fixing position 21 and the second fixing position 22 of the carrier member 2 can support the fixing member 1 to be placed vertically or horizontally according to specific needs, allowing the substrate 3 to be set parallel to the vertical or horizontal direction. This enables the same carrier to adapt to different graphene growth directions, avoiding the limitations of integrated carriers that require separate structural design based on the growth direction, reducing process adjustment costs, and improving application flexibility in diverse growth scenarios.

[0039] Specifically, in this embodiment, substrate 3 is a square glass substrate.

[0040] As easily understood, the square structure has a regular geometric shape, which facilitates precise positioning and fixation in the mounting position of the fixture 1, ensuring the consistency and stability of the substrate 3's position in the carrier. Simultaneously, the symmetrical square structure allows the gaseous carbon source to diffuse more uniformly to the surface of the substrate 3 during chemical vapor deposition, contributing to improved uniformity of graphene film deposition. If adjustments are needed, other regular shapes of substrate 3, such as circular or rectangular, can be used. Circular substrate 3 has advantages in avoiding stress concentration at corners, while rectangular substrate 3 allows for flexible size adjustment according to the reaction chamber space to optimize the loading quantity and deposition efficiency.

[0041] Glass substrate 3, due to its stable chemical properties and smooth surface, provides a good substrate for graphene film growth, and its relatively low cost makes it suitable for large-scale production applications. Furthermore, the light transmittance of glass facilitates real-time observation of the graphene film growth process using optical methods. For special requirements, quartz substrate 3 can be selected, offering higher high-temperature resistance and chemical stability; silicon substrate 3 can also be used, as silicon has strong compatibility with semiconductor processes, facilitating subsequent integration of graphene with semiconductor devices; ceramic substrate 3 exhibits excellent mechanical strength and thermal conductivity, making it suitable for applications requiring high mechanical properties of the substrate 3.

[0042] Specifically, in this embodiment, the fixing member 1 is a quartz fixing member, and the carrier member 2 is a quartz carrier member.

[0043] It is easy to understand that quartz has extremely high high-temperature resistance, which enables it to maintain structural stability in the high-temperature closed reaction system required by chemical vapor deposition, avoiding deformation caused by temperature changes and ensuring the accuracy of the fixed position of substrate 3. Its strong chemical stability means that it hardly reacts with the gaseous carbon source and other reaction byproducts generated by high-temperature thermal decomposition, preventing contamination of graphene film growth and ensuring the purity and quality of the film. At the same time, the smooth surface of quartz material and its low impurity content can reduce wear on the surface of substrate 3 and avoid introducing defects that affect the uniformity of the graphene film.

[0044] In one optional embodiment, the fixing component 1 and the carrier component 2 can be made of ceramic material. Ceramic has good mechanical strength and wear resistance, and can maintain structural integrity after multiple uses, making it suitable for high-frequency production scenarios. Metal material is also an option, such as stainless steel and other alloy materials, which have excellent thermal conductivity, helping to conduct heat quickly and evenly, making the temperature distribution of the reaction system more uniform and improving the growth efficiency of graphene film. However, attention should be paid to anti-oxidation treatment of the metal surface to avoid contamination.

[0045] Furthermore, the first fixing position 21 and the second fixing position 22 are connected.

[0046] It is easy to understand that the first fixing position 21 and the second fixing position 22 are connected, that is, the first fixing position 21 and the second fixing position 22 partially overlap, so as to reduce the volume of the entire fixing member 1 and facilitate the removal of the carrier member 2.

[0047] Furthermore, the carrier component 2 includes an opening groove 23, the inner wall of the opening groove 23 forms a first fixing position 21 suitable for placing the fixing component 1, and the tops of the two groove walls of the opening groove 23 that are disposed opposite to each other bend and extend in a horizontal direction away from each other to form a second fixing position 22 suitable for placing the fixing component 1.

[0048] Specifically, the carrier 2 uses the inner wall of the opening groove 23 to form a first fixing position 21. The opening groove 23 is a U-shaped groove, and the tops of the two opposite groove walls of the U-shaped groove bend and extend horizontally in a direction away from each other to form a second fixing position 22. On the one hand, the inner wall of the opening groove 23 can limit the fixing member 1 in the vertical direction, ensuring that the fixing member 1 is stable and does not wobble when placed vertically, so that the substrate 3 is in the optimal position for vertical growth. On the other hand, the second fixing position 22 formed by the bending and extension of the groove wall provides a stable support for the horizontal placement of the fixing member 1, ensuring the accuracy of the position of the fixing member 1 when horizontal growth of graphene is required. Moreover, this integrated structure does not require additional components, simplifies the carrier structure, improves space utilization, and facilitates quick switching between different growth directions, reducing the complexity of process operations.

[0049] Furthermore, the carrier component 2 also includes a limiting component 24, which is disposed on the outer edge of the first fixed position 21 and the second fixed position 22. The limiting component 24 is adapted to restrict the movement of the fixed component 1 along the gas conveying direction when the fixed component 1 is placed in the first fixed position 21 or the second fixed position 22.

[0050] It is easy to understand that the limiting members 24 provided at both ends of the carrier 2 along the gas delivery direction can effectively restrict the movement of the fixing member 1 in the gas delivery direction, thereby improving the overall stability of the carrier. During the chemical vapor deposition process, high-temperature gas is prone to impacting the fixing member 1. The presence of the limiting members 24 can prevent the fixing member 1 from shifting due to gas disturbance, ensuring that the substrate 3 is always in the preset position during the deposition process, avoiding uneven growth of graphene film due to positional deviation. At the same time, it enhances process repeatability. Regardless of whether the fixing member 1 is placed vertically or horizontally, the limiting members 24 can ensure the consistency of the position of the fixing member 1, reduce product quality fluctuations caused by positional deviation of the fixing member 1, and improve the yield and production efficiency of graphene film preparation.

[0051] Specifically, in this embodiment, the limiting member 24 is a protruding snap-fit ​​structure disposed on both sides of the carrier member 2 along the gas direction. When the fixing member 1 is placed in place, the snap-fit ​​can lock the edge of the fixing member 1, restricting its movement in the gas conveying direction. The protruding snap-fit ​​limiting member 24 can be processed and formed together with the carrier member 2, and it has high structural strength. In an optional embodiment, the limiting member 24 can also be a groove-fitting limiting member 24, with a groove matching the shape of the fixing member 1 opened at the corresponding position of the fixing position. After the fixing member 1 is inserted into the groove, the side wall of the groove plays a limiting role.

[0052] Furthermore, the carrier component 2 also includes a positioning component 25, which is disposed on the plate surface of the second fixing position 22 away from the fixing component 1, and the positioning component 25 is adapted to overlap the internal structure of the reaction chamber.

[0053] It should be noted that, in this embodiment, a fixing rod with its axis parallel to the gas delivery direction is provided inside the reaction chamber, and the positioning member 25 is a rod-shaped positioning member that can be attached to the fixing rod. The rod-shaped positioning member can be accurately attached to the fixing rod. Utilizing the linear contact characteristic of the two, the carrier 2 can be quickly positioned along the gas delivery direction, ensuring that the relative positions of the fixing member 1 and the substrate 3 with respect to the gas direction are accurate. This allows carbon source molecules to be deposited on the surface of the substrate 3 along the optimal path, improving the growth quality of the graphene film.

[0054] Furthermore, the carrier component 2 is provided with multiple weight reduction holes 26.

[0055] In essence, the weight-reducing holes 26 effectively reduce the overall weight of the carrier, thereby reducing the labor intensity of operators in handling and installing the carrier during actual operation, and improving operational convenience and work efficiency. At the same time, it reduces the amount of material required for manufacturing the carrier component 2, directly reducing production costs. In the high-temperature reaction system, the weight reduction reduces the thermal inertia of the carrier, making the heating and cooling processes more rapid, which helps to shorten the process cycle and reduce energy consumption. In addition, the reasonable distribution of the weight-reducing holes 26 can also optimize the structural stress distribution of the carrier and avoid structural deformation caused by local stress concentration.

[0056] Specifically, in this embodiment, the weight-reducing hole 26 is a circular hole formed on the carrier member 2. Of course, in other embodiments, other shapes of weight-reducing holes 26 may be selected depending on the specific circumstances. Here, the specific arrangement of the weight-reducing hole 26 is not limited. Typically, the weight-reducing hole 26 is formed on two opposite walls of a U-shaped groove and on two plates extending horizontally in directions away from each other.

[0057] Furthermore, multiple reinforcing members 27 are provided on the plate surface away from the fixing member 1 at the connection between the first fixing position 21 and the second fixing position 22.

[0058] It is easy to understand that the reinforcement 27 can effectively improve the structural strength of the carrier component 2. Since stress concentration is easily generated at the bends of the tank wall due to stress, the reinforcement 27 can disperse the stress at this point, preventing the carrier component 2 from deforming or cracking under the complex working conditions of the high-temperature reaction system, and ensuring the stable bearing of the opening slot 23 on the fixing component 1; at the same time, the enhanced structural stability extends the service life of the carrier component 2, reduces the frequency of equipment maintenance and replacement, and lowers the overall production cost.

[0059] Specifically, in this embodiment, the reinforcing member 27 is a triangular reinforcing member, which is welded or bonded to the plate surface at the bend of the groove wall, utilizing the stability principle of triangles to enhance structural strength. In other embodiments, a boss-shaped reinforcing member can also be provided, which is formed by machining a boss of a certain height on the plate surface. The boss and the groove wall work together to share the force, improving the overall rigidity.

[0060] Furthermore, the fixing member 1 is a sleeve, with open ends along its axial direction. When the sleeve is placed in the first fixing position 21 or the second fixing position 22, the axial direction of the sleeve is set parallel to the gas conveying direction.

[0061] Intuitively, the open design at both ends provides a transport channel for the gaseous carbon source, improving gas diffusion efficiency and enabling the carbon source to contact the surface of the substrate 3 uniformly and efficiently, ensuring the uniformity of graphene film deposition on the entire substrate 3. On the other hand, the tubular structure of the sleeve can form a circumferential constraint on the substrate 3. Compared with the traditional fixing method, it can effectively limit the displacement of the substrate 3 during the high-temperature reaction process, enhance the stability of the substrate 3 fixation, and avoid film growth defects caused by substrate 3 shaking.

[0062] Furthermore, the sleeve includes four flat plate pieces 11 connected end to end in sequence. Two adjacent flat plate pieces 11 are arranged perpendicularly to each other, and two opposite flat plate pieces 11 are arranged parallel to each other. Multiple mounting positions are provided on the inner plate surface of a pair of opposite flat plate pieces 11.

[0063] It is easy to understand that the regular square cylindrical structure is more efficient in space utilization, closely conforming to the outline of the square glass substrate. The four vertically connected flat plates 11 provide stable support for the substrate 3 from multiple directions, enhancing the fixation of the substrate 3 within the sleeve and preventing the substrate 3 from shifting or shaking due to uneven force during the high-temperature reaction, thus ensuring the accuracy of graphene film growth. At the same time, the relatively parallel flat plates 11 provide symmetrical diffusion channels for the gaseous carbon source, which helps the gas to be evenly distributed inside the sleeve, further improving the uniformity of film deposition. Furthermore, multiple mounting positions allow for the simultaneous fixation of multiple substrates 3, increasing the load-bearing capacity of the carrier.

[0064] Furthermore, the two flat plates 11 with mounting positions are provided with through holes suitable for balancing the gas. The through holes can alleviate the gas pressure difference inside the fixing member 1, prevent the substrate 3 from being impacted by excessively high local gas pressure, reduce the risk of displacement or deformation of the substrate 3, and ensure the stability of the substrate 3 during the deposition process.

[0065] Furthermore, each of the pair of oppositely arranged flat plates 11 is provided with a plurality of snap-fit ​​pieces 12 that protrude outward along their axial direction from the inner plate surface, and the gap between two adjacent snap-fit ​​pieces 12 forms an installation position.

[0066] Specifically, the mounting position can be selected and set according to the thickness of the substrate 3.

[0067] It is easy to understand that the mounting position formed by the snap-fit ​​member 12 can provide a suitable fixing position for substrates 3 of different thicknesses. By adjusting the gap between the substrate 3 and the snap-fit ​​member, stable clamping of substrates 3 of various specifications can be achieved, enhancing the applicability of the carrier. In addition, the protruding structure of the snap-fit ​​member 12 can effectively limit the horizontal displacement of the substrate 3 during high-temperature reactions, preventing the substrate 3 from shifting due to thermal stress or gas impact, and ensuring the accuracy of graphene film growth. The mounting position can also be formed by the inward recess of the sidewall of the flat plate member 11.

[0068] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A graphene preparation carrier, characterized in that, include: The fixing member (1) has two openings opposite each other along the gas conveying direction. The fixing member (1) has multiple mounting positions suitable for placing the substrate (3) inside. The multiple mounting positions are arranged perpendicular to the gas conveying direction. One mounting position is suitable for mounting one substrate (3), and the plane on which the substrate (3) is located is parallel to the gas conveying direction. The carrier (2) has a first fixing position (21) suitable for placing the fixing member (1) in a vertical direction and a second fixing position (22) suitable for placing the fixing member (1) in a horizontal direction; When the fixing member (1) is placed in the first fixing position (21), the arrangement direction of the plurality of mounting positions is parallel to the horizontal direction; when the fixing member (1) is placed in the second fixing position (22), the arrangement direction of the plurality of mounting positions is perpendicular to the horizontal direction.

2. The graphene preparation carrier according to claim 1, characterized in that, The first fixing position (21) and the second fixing position (22) are connected.

3. The graphene preparation carrier according to claim 2, characterized in that, The carrier (2) includes an opening groove (23), the inner wall of the opening groove (23) forms a first fixing position (21) suitable for placing the fixing member (1), and the tops of the two groove walls of the opening groove (23) are bent and extended in a horizontal direction away from each other to form a second fixing position (22) suitable for placing the fixing member (1).

4. The graphene preparation carrier according to claim 3, characterized in that, The carrier (2) further includes a limiting member (24), which is disposed on the outer edge of the first fixed position (21) and the second fixed position (22). The limiting member (24) is adapted to restrict the movement of the fixed member (1) along the gas conveying direction when the fixed member (1) is placed in the first fixed position (21) or the second fixed position (22).

5. The graphene preparation carrier according to claim 4, characterized in that, The carrier component (2) further includes a positioning component (25), which is disposed on the plate surface of the second fixing position (22) away from the fixing component (1) and is adapted to be attached to the internal structure of the reaction chamber.

6. The graphene preparation carrier according to any one of claims 1-5, characterized in that, The carrier component (2) is provided with multiple weight reduction holes (26).

7. The graphene preparation carrier according to any one of claims 1-5, characterized in that, The fixing member (1) is a sleeve, and the sleeve forms the opening at both ends along its axial direction. When the sleeve is placed in the first fixing position (21) or the second fixing position (22), the axial direction of the sleeve is set parallel to the gas conveying direction.

8. The graphene preparation carrier according to claim 7, characterized in that, The sleeve includes four flat plate pieces (11) connected end to end in sequence. Two adjacent flat plate pieces (11) are arranged perpendicularly to each other, and two opposite flat plate pieces (11) are arranged parallel to each other. Multiple mounting positions are provided on the inner plate surface of a pair of opposite flat plate pieces (11). Multiple snap-fit ​​pieces (12) protruding from the inner plate surface are provided on each pair of opposite flat plate pieces (11). The gap between two adjacent snap-fit ​​pieces (12) forms the mounting position.

9. The graphene preparation carrier according to claim 8, characterized in that, The two flat plates (11) with the mounting positions are provided with through holes suitable for balancing gas.

10. The graphene fabrication carrier according to any one of claims 1-5, characterized in that, The substrate (3) is a square glass substrate; And / or, the fastener (1) is a quartz fastener, and the carrier (2) is a quartz carrier.

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