Workpiece supporting structure of chemical vapor deposition furnace

Abstract

The utility model relates to the field of sintering furnaces, in particular to a workpiece supporting structure of a chemical vapor deposition furnace, which comprises a supporting frame, a furnace body fixed on the supporting frame, a lifting mechanism arranged on the supporting frame, a lifting storage table fixed on the lifting mechanism, a first opening arranged at the bottom of the furnace body and used for the lifting storage table to go in and out, and a clamping mechanism arranged on the furnace body. The clamping mechanism comprises two first oil cylinders which are fixed to the furnace body and are in bilateral symmetry, a piston rod of each first oil cylinder extends into the furnace body, the end of each piston rod is detachably connected with a clamping frame, each clamping frame comprises an outer side plate fixedly connected with the end of the corresponding piston rod, and an inverted-U-shaped plate is fixed to the inner side face of each outer side plate. Through the arrangement of the clamping mechanism, when a workpiece is coated, the coating on each surface of the workpiece is complete and continuous, and meanwhile, the uniformity of the thickness of the coating on each coating surface is also ensured, so that the firmness of the coating is improved, and the attractiveness is also ensured.

Description

Technical Field

[0001] This utility model relates to the field of sintering furnaces, and in particular to a workpiece support structure for a chemical vapor deposition furnace. Background Technology

[0002] Chemical vapor deposition (CVD) furnaces are devices that use gaseous precursors to deposit solid materials onto the surface of a substrate through a chemical reaction. CVD technology is widely used in semiconductor manufacturing, solar cells, optoelectronic devices, and metal coatings. The core principle of CVD technology is to utilize gaseous precursors to undergo a chemical reaction on the substrate surface, generating and depositing solid materials. These precursors are typically gaseous chemical substances (such as organometallic compounds, gases, etc.), and the reaction is excited by methods such as heating, lasers, and plasma to form a thin film on the substrate surface.

[0003] When a substrate is coated in a chemical vapor deposition (CVD) furnace, a support structure is required. This inevitably leads to contact between the support structure and the substrate, and the contact area cannot be coated or film-coated, thus affecting the integrity of the coating. Patent application CN202411628609.3 discloses a workpiece support point switching device and a CVD furnace. While the workpiece support point switching device in this patent can change the position of the support point between the workpiece and the support column, exposing the original support point for secondary deposition, and can coat the support point on the workpiece, it has the following drawbacks: 1) The number of coating passes at the support point is less than the number of passes on the surface where the support point is located, resulting in a relatively thinner coating at the support point; 2) Gaps or marks may exist at the junction of the support point and the surface where the support point is located, leading to easy coating peeling and damaging the integrity, continuity, and aesthetics of the coating on that surface. Therefore, there is an urgent need for a workpiece support structure that can ensure uniform coating on each surface of the workpiece during the coating process in a chemical vapor deposition furnace. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] To address the shortcomings of existing technologies, the present invention aims to provide a workpiece support structure for a chemical vapor deposition furnace, which solves the problems existing in the prior art. Through the setting of the clamping mechanism, the present invention ensures that the coating on each surface of the workpiece is complete and continuous when coating the workpiece, while also ensuring the uniformity of the coating thickness on each coating surface, thereby increasing the coating's firmness and ensuring its aesthetics.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, this utility model provides the following technical solution: a workpiece support structure for a chemical vapor deposition furnace, including a support frame, a furnace body fixed on the support frame, a lifting mechanism on the support frame, a liftable platform fixed on the lifting mechanism, a first opening for the liftable platform to enter and exit at the bottom of the furnace body, a clamping mechanism on the furnace body, the clamping mechanism including two first hydraulic cylinders fixed on the furnace body in a left-right symmetrical manner, the piston rod of each first hydraulic cylinder extending into the interior of the furnace body, the end of the piston rod being detachably connected to a clamping frame, the clamping frame including an outer plate fixedly connected to the end of the piston rod, and an inverted U-shaped plate fixed on the inner side of the outer plate.

[0008] Preferably, the inner side of the left inverted U-shaped plate is provided with an inverted U-shaped insertion groove, and the inner side of the right inverted U-shaped plate is provided with an inverted U-shaped insertion block that matches the inverted U-shaped insertion groove.

[0009] Preferably, a support plate is fixed on the outer wall of the furnace body, the first oil cylinder is fixed on the support plate, the outer upper end of the inclined support plate is fixed to the bottom outer end of the support plate, and the inner lower end of the inclined support plate is fixed on the outer wall of the furnace body.

[0010] Preferably, the support frame includes a base, the base is connected to a top seat by several support rods, and the furnace body is fixed on the top seat.

[0011] Preferably, the lifting mechanism includes a motor fixed to the left end of the base, a first helical gear set fixed on the rotating shaft of the motor, the first helical gear set being disposed in a first protective box fixed to the base, the first protective box being fixed to the base, the first helical gear set being connected to the lower end of a first lead screw, the upper end of the first lead screw being rotatably connected to a top seat, the first lead screw being provided with a matching first nut seat, the first helical gear set being connected to the left end of a connecting shaft, the right end of the connecting shaft being connected to a second helical gear set, the second helical gear set being disposed in a second protective box fixed to the base, the second protective box being fixed to the base, the second helical gear set being connected to a second lead screw, the second lead screw being provided with a matching second nut seat, a lifting plate being fixed between the second nut seat and the first nut seat, and a liftable platform being fixed on the lifting plate.

[0012] Preferably, the liftable shelf includes a fixed column fixed to the lifting mechanism. The fixed column is hollow and has a second hydraulic cylinder inside. The piston rod of the second hydraulic cylinder passes through a limiting plate, which is fixed to the fixed column. The top seat has a second opening that matches the limiting plate. A shelf is fixed to the end of the piston rod of the second hydraulic cylinder. A first fixing frame is fixed to the bottom surface of the shelf. A second fixing frame is fixed to the limiting plate. The second fixing frame has a slot that matches the first fixing frame.

[0013] Preferably, the length of the second opening is greater than the length of the first opening.

[0014] (III) Beneficial Effects

[0015] 1. By setting up a clamping mechanism, this utility model can ensure that the coating on each surface of the workpiece is complete and continuous when coating the workpiece, while also ensuring the uniformity of the coating thickness on each surface, which increases the coating's firmness and ensures its aesthetics.

[0016] 2. By using an inverted U-shaped insertion slot and an inverted U-shaped insertion block, this utility model allows the clamping frame to adapt to workpieces within a certain length range while maintaining the same workpiece width. This makes the clamping frame more adaptable and greatly enhances the firmness and stability of workpiece clamping. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall design of this utility model.

[0018] Figure 2 This is a schematic diagram of the furnace body and clamping mechanism of this utility model.

[0019] Figure 3 This is a schematic diagram of the left and right clamping frames of this utility model.

[0020] Figure 4 This is a schematic diagram showing the addition of an inverted U-shaped insertion slot to the left clamping frame and an inverted U-shaped insertion block to the right clamping frame of this utility model.

[0021] Figure 5 This is a schematic diagram of the support frame and lifting mechanism of this utility model.

[0022] Figure 6 This is a schematic diagram of the height-adjustable storage platform of this utility model.

[0023] In the diagram: 1-Support frame, 2-Furnace body, 3-Lifting mechanism, 4-Liftable shelf, 5-First opening, 6-Clamping mechanism, 7-Oil cylinder, 8-Piston rod, 9-Clamping frame, 10-Outer side plate, 11-Inverted U-shaped plate, 12-Inverted U-shaped insertion slot, 13-Inverted U-shaped insertion block, 14-Support plate, 15-Slanted support plate, 16-Base, 17-Support rod, 18-Top seat, 19-Motor, 20-First protection box, 21-First lead screw, 22-First nut seat, 23-Connecting shaft, 24-Second protection box, 25-Second lead screw, 26-Second nut seat, 27-Lifting plate, 28-Fixing column, 29-Second oil cylinder, 30-Limiting plate, 31-Second opening, 32-Shelf, 33-First fixing frame, 34-Second fixing frame, 35-Slot. Detailed Implementation

[0024] The following will be based on the embodiments of this utility model. Figures 1-6The technical solutions in the embodiments of this utility model are clearly and completely described. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0025] This utility model provides a technical solution: a workpiece support structure for a chemical vapor deposition furnace, including a support frame 1, a furnace body 2 fixed on the support frame 1, a lifting mechanism 3 on the support frame 1, a liftable platform 4 fixed on the lifting mechanism 3, a first opening 5 at the bottom of the furnace body 2 for the liftable platform 4 to enter and exit, a clamping mechanism 6 on the furnace body 2, the clamping mechanism 6 including two first hydraulic cylinders 7 fixed on the furnace body 2 in a left-right symmetrical manner, the piston rod 8 of each first hydraulic cylinder 7 extending into the interior of the furnace body 2, the end of the piston rod 8 being detachably connected to a clamping frame 9, the clamping frame 9 including an outer plate 10 fixedly connected to the end of the piston rod 8, and an inverted U-shaped plate 11 fixed on the inner side of the outer plate 10. During operation, the lifting mechanism 3 is first activated, lowering the liftable platform 4 until it reaches the desired position and stops. The operator then places the workpiece to be coated onto the platform 4. The lifting mechanism 3 then restarts, raising the workpiece from the platform 4 until it reaches the furnace body 2 and can rise no further. At this point, the top surface of the platform 4 is level with the bottom surface of the clamping frame 9. Simultaneously, the two first hydraulic cylinders 7 are activated, extending their piston rods 8 and driving the two clamping frames 9 to move towards each other until the workpiece on the platform 4 is clamped. After the clamping frame 9 clamps the workpiece, its top surface and four sides are in contact with the inner wall of the clamping frame 9, meaning the clamping frame 9 covers and shields the top surface and four sides of the workpiece. Afterward, the platform 4 will... The workpiece is lowered a certain distance, leaving a gap between the bottom surface of the workpiece held by the clamping frame 9 and the top surface of the liftable platform 4. This exposes the bottom surface of the workpiece, which is then coated using a chemical vapor deposition furnace. After the coating is completed, the liftable platform 4 rises to support the bottom surface of the workpiece. Then, the two first hydraulic cylinders 7 are activated, and the piston rod 8 retracts, causing the clamping frame 9 to release its grip on the workpiece and return to its original position, exposing the top surface and four sides of the workpiece. The top surface and four sides of the workpiece are then coated using a chemical vapor deposition furnace. This completes the coating of each surface of the workpiece, ensuring that the coating on each surface is complete and continuous, while also guaranteeing the uniformity of the coating thickness on each surface. This increases the coating's adhesion and ensures its aesthetics. The shape of the clamping frame 9 is specifically set according to the shape of the workpiece. The shape of the clamping frame 9 can be changed to match the specific shape of the workpiece. In this application, a rectangular workpiece is used as an example. The clamping frame 9 is set to be composed of an outer plate 10 and an inverted U-shaped plate 11. In this way, when clamping the workpiece, the top surface and four sides of the workpiece can be wrapped and covered, leaving only the bottom surface exposed.

[0026] The inner side of the left inverted U-shaped plate 11 is provided with an inverted U-shaped insertion groove 12, and the inner side of the right inverted U-shaped plate 11 is provided with an inverted U-shaped insertion block 13 that matches the inverted U-shaped insertion groove 12. With this design, the clamping frame 9 can adapt to workpieces within a certain length range while keeping the width of the workpiece unchanged, making the clamping frame 9 more adaptable and greatly enhancing the firmness and stability of the workpiece clamping.

[0027] A support plate 14 is fixed to the outer wall of the furnace body 2. The first oil cylinder 7 is fixed to the support plate 14. The upper outer end of the inclined support plate 15 is fixed to the bottom outer end of the support plate 14, and the lower inner end of the inclined support plate 15 is fixed to the outer wall of the furnace body 2. The first oil cylinder 7 is stably supported and fixed by the support plate 14 and the inclined support plate 15.

[0028] The support frame 1 includes a base 16, which is connected to a top seat 18 via several support rods 17. The furnace body 2 is fixed on the top seat 18. This is the specific structure of the support frame 1, which increases its stability.

[0029] The lifting mechanism 3 includes a motor 19 fixed to the left end of the base 16. A first helical gear set is fixed on the rotating shaft of the motor 19. The first helical gear set is housed in a first protective box 20, which is fixed to the base 16. The first helical gear set is connected to the lower end of a first lead screw 21, and the upper end of the first lead screw 21 is rotatably connected to a top seat 18. A first nut seat 22 that matches the first lead screw 21 is provided on the first lead screw 21. The first helical gear set is connected to the left end of a connecting shaft 23, and a second helical gear set is connected to the right end of the connecting shaft 23. The second helical gear set is housed in a second protective box 24, which is fixed to the base 16. The second helical gear set is connected to a second lead screw 25, which has a second nut seat 26 that matches the second lead screw 25. A lifting plate 27 is fixed between the second nut seat 26 and the first nut seat 22. A liftable platform 4 is fixed on the lifting plate 27. The first and second helical gear sets are existing technologies, and they consist of two helical gears meshing perpendicularly. When the liftable platform 4 needs to be lowered to the workpiece placement position, the motor 19 starts, driving the connecting shaft 23 to rotate, which in turn drives the first helical gear set and the second helical gear set to rotate simultaneously, which in turn drives the first lead screw 21 and the second lead screw 25 to rotate simultaneously, which in turn causes the first nut seat 22 and the second nut seat 26 to descend simultaneously along the first lead screw 21 and the second lead screw 25, which in turn causes the lifting plate 27 to descend, which in turn causes the liftable platform 4 to descend. After the workpiece is placed on the liftable platform 4, the motor 19 only needs to rotate in the opposite direction to lift the workpiece into the furnace body 2.

[0030] The height-adjustable shelf 4 includes a fixed column 28 fixed to the lifting mechanism 3. The fixed column 28 is hollow and contains a second hydraulic cylinder 29. The piston rod of the second hydraulic cylinder 29 passes through a limiting plate 30, which is fixed to the fixed column 28. The top seat 18 has a second opening 31 that matches the limiting plate 30. A shelf 32 is fixed to the end of the piston rod of the second hydraulic cylinder 29. A first fixing frame 33 is fixed to the bottom surface of the shelf 32, and a second fixing frame 34 is fixed to the limiting plate 30. The second fixing frame 34 has a slot 35 that matches the first fixing frame 33. The second hydraulic cylinder 29 is used to lift and lower the shelf 32. The first fixing frame 33 and the second fixing frame 34 are designed to be interlocked, which not only provides a good limiting effect for the lifting and lowering of the shelf 32 and ensures the stability of the lifting and lowering of the shelf 32, but also provides good heat insulation and protection for the second hydraulic cylinder 29. During the process of the lifting mechanism 3 sending the workpiece into the furnace body 2, when the limiting plate 30 abuts against the bottom surface of the furnace body 2, the lifting mechanism 3 stops operating. This not only plays a good limiting role, ensuring that the workpiece is sent to the same height in the furnace body 2 each time, but also increases the heat preservation and sealing effect inside the furnace body 2.

[0031] The length of the second opening 31 is greater than the length of the first opening 5. This arrangement can increase the sealing of the bottom of the furnace body 2.

[0032] Working Principle: During operation, the lifting mechanism 3 first activates, lowering the liftable platform 4 until it reaches a suitable position and stops. The operator then places the workpiece to be coated onto the platform 4. The lifting mechanism 3 then restarts, raising the workpiece from the platform 4 until it reaches the furnace body 2 and can no longer rise. At this point, the top surface of the platform 4 is level with the bottom surface of the clamping frame 9. Simultaneously, the two first hydraulic cylinders 7 activate, extending their piston rods 8, causing the two clamping frames 9 to move towards each other until the workpiece on the platform 4 is clamped. After the clamping frame 9 clamps the workpiece, its top surface and four sides are in contact with the inner wall of the clamping frame 9. In other words, the clamping frame 9 covers and shields the top surface and four sides of the workpiece. The lifting platform then... The workpiece will descend a certain distance, creating a gap between the bottom surface of the workpiece held by the clamping frame 9 and the top surface of the liftable platform 4. This exposes the bottom surface of the workpiece, which is then coated using a chemical vapor deposition furnace. After the coating is completed, the liftable platform 4 rises to support the bottom surface of the workpiece. Then, the two first hydraulic cylinders 7 are activated, and the piston rod 8 retracts, causing the clamping frame 9 to release its grip on the workpiece and return to its original position, exposing the top surface and four sides of the workpiece. The top surface and four sides of the workpiece are then coated using a chemical vapor deposition furnace. This completes the coating of each surface of the workpiece, ensuring that the coating on each surface is complete and continuous, while also guaranteeing the uniformity of the coating thickness on each surface. This increases the coating's adhesion and ensures its aesthetics.

[0033] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A workpiece support structure for a chemical vapor deposition furnace, characterized in that, The furnace includes a support frame (1), on which a furnace body (2) is fixed. A lifting mechanism (3) is provided on the support frame (1), and a liftable platform (4) is fixed on the lifting mechanism (3). A first opening (5) for the liftable platform (4) to enter and exit is provided at the bottom of the furnace body (2). A clamping mechanism (6) is provided on the furnace body (2). The clamping mechanism (6) includes two first oil cylinders (7) fixed on the furnace body (2) and arranged symmetrically. The piston rod (8) of each first oil cylinder (7) extends into the interior of the furnace body (2). The end of the piston rod (8) is detachably connected to a clamping frame (9). The clamping frame (9) includes an outer plate (10) fixedly connected to the end of the piston rod (8). An inverted U-shaped plate (11) is fixed on the inner side of the outer plate (10).

2. The workpiece support structure for a chemical vapor deposition furnace according to claim 1, characterized in that, The inner side of the inverted U-shaped plate (11) on the left is provided with an inverted U-shaped insertion groove (12), and the inner side of the inverted U-shaped plate (11) on the right is provided with an inverted U-shaped insertion block (13) that matches the inverted U-shaped insertion groove (12).

3. The workpiece support structure for a chemical vapor deposition furnace according to claim 2, characterized in that, A support plate (14) is fixed on the outer side wall of the furnace body (2), the first oil cylinder (7) is fixed on the support plate (14), the outer upper end of the inclined support plate (15) is fixed at the bottom outer end of the support plate (14), and the inner lower end of the inclined support plate (15) is fixed on the outer side wall of the furnace body (2).

4. The workpiece support structure for a chemical vapor deposition furnace according to claim 1, characterized in that, The support frame (1) includes a base (16), which is connected to a top seat (18) by a number of support rods (17), and the furnace body (2) is fixed on the top seat (18).

5. The workpiece support structure for a chemical vapor deposition furnace according to claim 4, characterized in that, The lifting mechanism (3) includes a motor (19) fixed to the left end of the base (16). A first helical gear set is fixed on the rotating shaft of the motor (19). The first helical gear set is disposed in a first protective box (20). The first protective box (20) is fixed on the base (16). The lower end of a first lead screw (21) is connected to the first helical gear set. The upper end of the first lead screw (21) is rotatably connected to the top seat (18). A first nut seat (22) matching the first lead screw (21) is provided on the first lead screw (21). The first helical gear set is connected to... At the left end of the connecting shaft (23), the right end of the connecting shaft (23) is connected to a second helical gear set. The second helical gear set is set inside a second protective box (24). The second protective box (24) is fixed on the base (16). The second helical gear set is connected to a second lead screw (25). The second lead screw (25) is provided with a matching second nut seat (26). A lifting plate (27) is fixed between the second nut seat (26) and the first nut seat (22). The liftable platform (4) is fixed on the lifting plate (27).

6. The workpiece support structure for a chemical vapor deposition furnace according to claim 1, characterized in that, The liftable platform (4) includes a fixed column (28) fixed on the lifting mechanism (3). The fixed column (28) is hollow and has a second hydraulic cylinder (29) inside. The piston rod of the second hydraulic cylinder (29) passes through the limiting plate (30). The limiting plate (30) is fixed on the fixed column (28). The top seat (18) has a second opening (31) that matches the limiting plate (30). The end of the piston rod of the second hydraulic cylinder (29) is fixed with a platform (32). A first fixing frame (33) is fixed on the bottom surface of the platform (32). A second fixing frame (34) is fixed on the limiting plate (30). The second fixing frame (34) has a slot (35) that matches the first fixing frame (33).

7. The workpiece support structure for a chemical vapor deposition furnace according to claim 6, characterized in that, The length of the second opening (31) is greater than the length of the first opening (5).

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