Integrated combiner / demultiplexer
By etching integrated optical circuit devices on the waveguide layer, the problems of low integration and high cost of multiplexers and splitters are solved, realizing a highly integrated and low-cost optical communication device.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ACCELINK TECHNOLOGIES CO LTD
- Filing Date
- 2025-06-04
- Publication Date
- 2026-05-08
AI Technical Summary
Existing multiplexers and splitters use a lot of discrete components, which makes production and assembly complex and the overall device size large, resulting in low integration and high cost, which is not conducive to widespread use.
The substrate, lower cladding, and waveguide layer are stacked. Multiple optical path devices, including a first optical path and a second optical path, are integrated by etching planar waveguide optical paths on the waveguide layer. Optical signals are combined and decomposed using devices such as optical attenuation units, splitters, and filters, reducing the use of discrete components.
It improves the integration of multiplexers and demultiplexers, simplifies the assembly process, reduces production costs, and reduces optical path loss.
Smart Images
Figure CN224216905U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of optical communication technology, and in particular to an integrated multiplexer / demultiplexer. Background Technology
[0002] Pooled wavelength division multiplexing (WDM) is a newly proposed metropolitan area WDM technology concept. Its purpose is to pool and share the wavelengths of transmitted signals at the metropolitan aggregation and access layers of optical transport networks, enabling flexible allocation and scheduling of optical signal wavelengths. The multiplexer / demultiplexer is a key component of pooled WDM, and current key requirements are high integration and low cost; however, existing multiplexers / demultiplexers use many discrete components, resulting in complex manufacturing and assembly, and a large overall device size, which hinders the widespread adoption of multiplexers / demultiplexers.
[0003] Therefore, overcoming the shortcomings of the existing technology is an urgent problem to be solved in this technical field. Utility Model Content
[0004] The problem this invention aims to solve is how to improve the integration of multiplexers and demultiplexers while reducing costs.
[0005] In a first aspect, an integrated multiplexer / demultiplexer is provided, comprising: a substrate 1, a lower cladding layer 2, and a waveguide layer 3 stacked together, wherein:
[0006] The waveguide layer 3 is etched with a planar waveguide optical path, which includes a first optical path 4 and a second optical path 5.
[0007] The first optical path 4 includes a plurality of first input waveguides 41, a combining optical path 42, and a first output optical path 43. One end of the plurality of first input waveguides 41 extends to the end face of the waveguide layer 3, and the other end of the plurality of first input waveguides 41 is connected to one end of the first output optical path 43 through the combining optical path 42. The other end of the first output optical path 43 extends to the end face of the waveguide layer 3.
[0008] The second optical path 5 includes a second input waveguide 51, a wavelength division optical path 52, and a plurality of second output optical paths 53. One end of the second input waveguide 51 extends to the end face of the waveguide layer 3, and the other end of the second input waveguide 51 is connected to one end of the plurality of second output optical paths 53 through the wavelength division optical path 52. The other ends of the plurality of second output optical paths 53 extend to the end face of the waveguide layer 3.
[0009] Preferably, the first optical path 4 further includes a plurality of optical attenuation units 46, each of the optical attenuation units 46 being located between the corresponding first input waveguide 41 and the combining optical path 42;
[0010] One end of the optical attenuation unit 46 is connected to the corresponding first input waveguide 41, and the other end of the optical attenuation unit 46 is connected to the combining optical path 42.
[0011] Preferably, the optical multiplexing path 42 includes a plurality of first splitters 421, which are cascaded along the optical transmission direction;
[0012] The first splitter 421 includes a first trunk line 421A and at least two first branch lines 421B, wherein the first trunk line 421A is connected to the two first branch lines 421B.
[0013] The first branch 421B of the first-stage first splitter 421 is connected to the corresponding first input waveguide 41, and the first main branch 421A of the last-stage first splitter 421 is connected to the first output waveguide 43.
[0014] For the first splitter 421 other than the first-stage first splitter 421 and the last-stage first splitter 421, the first branch 421B of the corresponding first splitter 421 is connected to the first trunk 421A of the previous-stage first splitter 421, and the first trunk 421A of the corresponding first splitter 421 is connected to the first branch 421B of the next-stage first splitter 421.
[0015] Preferably, the first optical path 4 further includes a second splitter 44 and a first PD 45, wherein:
[0016] The input terminal of the second splitter 44 is connected to the multiplexing optical path 42, one of the output terminals of the second splitter 44 is connected to the first output optical path 43, and the other output terminal of the second splitter 44 is coupled to the first PD 45.
[0017] Preferably, the wavelength division optical path 52 includes a plurality of third splitters 521, which are cascaded along the optical transmission direction;
[0018] The third splitter 521 includes a second main line 521A and two second branch lines 521B, wherein the second main line 521A is connected to the two second branch lines 521B.
[0019] The second main path 521A of the first-stage third splitter 521 is connected to the second input waveguide 51, and the second branch path 521B of the last-stage third splitter 521 is connected to the corresponding second output path 53.
[0020] For the third splitters 521 other than the first-stage third splitter 521 and the last-stage third splitter 521, the second main branch 521A of the corresponding third splitter 521 is connected to the second branch 521B of the previous-stage third splitter 521, and the second branch 521B of the corresponding third splitter 521 is connected to the second main branch 521A of the next-stage third splitter 521.
[0021] Preferably, the second optical path 5 further includes a first filter 54 and a second filter 55, wherein:
[0022] The input terminal of the first filter 54 is connected to the second input waveguide 51, one of the output terminals of the first filter 54 is connected to the wavelength division optical path 52, the other output terminal of the first filter 54 is connected to the input terminal of the second filter 55, and the output terminal of the second filter 55 extends to the end face of the waveguide layer 3 and is coupled to an external receiver.
[0023] Preferably, the second optical path 5 further includes a fourth splitter 56, wherein:
[0024] The input terminal of the fourth splitter 56 is connected to one of the output terminals of the first filter 54, one of the output terminals of the fourth splitter 56 is connected to the wavelength division optical path 52, and the other output terminal of the fourth splitter 56 extends to the end face of the waveguide layer 3 and is coupled to an external receiver.
[0025] Preferably, the second optical path 5 further includes a fifth splitter 57 and a second PD 58, wherein:
[0026] The input terminal of the fifth splitter 57 is connected to one of the output terminals of the fourth splitter 56, one of the output terminals of the fifth splitter 57 is coupled to the second PD 58, and the other output terminal of the fifth splitter 57 extends to the end face of the waveguide layer 3 and is coupled to an external receiver.
[0027] Preferably, an upper cladding layer 6 is provided on the waveguide layer 3.
[0028] Preferably, the upper cladding layer 6, the waveguide layer 3, and the lower cladding layer 2 are etched with a fixing groove 7 at the same position, and the second PD58 is disposed in the fixing groove 7;
[0029] The optical path of one of the output terminals of the fifth splitter 57 extends into the fixed groove 7 and is coupled to the second PD58.
[0030] This invention provides an integrated multiplexer / demultiplexer, comprising: a substrate 1, a lower cladding layer 2, and a waveguide layer 3, wherein: the lower cladding layer 2 is disposed on the substrate 1, and the waveguide layer 3 is disposed on the lower cladding layer 2; a planar waveguide optical path is etched on the waveguide layer 3, the planar waveguide optical path including a first optical path 4 and a second optical path 5; the first optical path 4 includes multiple first input waveguides 41, a multiplexing optical path 42, and a first output optical path 43, one end of the multiple first input waveguides 41 extending to the end face of the waveguide layer 3, the multiple first input waveguides... The other end of 41 is connected to one end of the first output optical path 43 through the wave-combining optical path 42; the second optical path 5 includes a second input waveguide 51, a wave-splitting optical path 52, and multiple second output optical paths 53. One end of the second input waveguide 51 extends to the end face of the waveguide layer 3, and the other end of the second input waveguide 51 is connected to one end of multiple second output optical paths 53 through the wave-splitting optical path 52; by integrating each optical path device on the substrate 1 in the form of waveguide layer etching, the integration density is improved while the optical path loss is reduced. Attached Figure Description
[0031] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0032] Figure 1 A partial cross-sectional view of an integrated multiplexer / demultiplexer provided in an embodiment of this utility model;
[0033] Figure 2 A schematic diagram above the waveguide of an integrated combiner / splitter provided in an embodiment of this utility model;
[0034] Figure 3 A schematic diagram above the waveguide of another integrated combiner / splitter provided in this embodiment of the present invention;
[0035] Figure 4 A schematic diagram above the waveguide of another integrated combiner / splitter provided in this embodiment of the present invention;
[0036] Figure 5 A schematic diagram of the optical attenuation unit in an integrated multiplexer / demultiplexer provided in this embodiment of the present invention;
[0037] Figure 6 A schematic diagram of the multiplexing optical path in an integrated multiplexer / demultiplexer provided for an embodiment of this utility model;
[0038] Figure 7 A schematic diagram of the wavelength division multiplexer (WDM) optical path provided for an embodiment of this utility model;
[0039] Figure 8 A schematic diagram of the first filter in an integrated multiplexer / demultiplexer provided for an embodiment of this utility model;
[0040] Figure 9 A schematic diagram of the first filter in another integrated multiplexer / demultiplexer provided in this embodiment of the present invention;
[0041] Figure 10 A partial cross-sectional view of another integrated multiplexer / demultiplexer provided in this embodiment of the present invention;
[0042] The attached figures are numbered as follows:
[0043] Substrate 1; Lower cladding 2; Waveguide layer 3; First optical path 4; First input waveguide 41; Wave combiner optical path 42; First splitter 421; First trunk 421A; First branch 421B; First output optical path 43; Second splitter 44; First PD 45; Optical attenuation unit 46; Second optical path 5; Second input waveguide 51; Wave splitter optical path 52; Third splitter 521; Second trunk 521A; Second branch 521B; Second output optical path 53; First filter 54; Second filter 55; Fourth splitter 56; Fifth splitter 57; Second PD 58; Upper cladding 6; Fixing groove 7. Detailed Implementation
[0044] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.
[0045] In the description of this utility model, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this disclosure.
[0046] In the description of this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of embodiments of this disclosure, unless otherwise stated, "a plurality of" means two or more. Furthermore, for example, the description may use the prefix "A" or "B" to describe the same type of nouns as two independent entities. In this case, the features defined with "A" and "B" are used only to distinguish between similar entities and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features.
[0047] In describing some embodiments, the terms "coupled," "coupled," and "connected," and their derivative expressions, may be used. For example, the term "connected" may be used in describing some embodiments to indicate that two or more components have direct physical or electrical contact with each other. Similarly, the term "coupled" may be used in describing some embodiments to indicate that two or more components have direct physical or electrical contact. However, the terms "connected" or "coupled" may also refer to two or more components that do not have direct contact with each other but still cooperate or interact with each other, such as "optical coupling" or "wireless connection." The embodiments disclosed herein are not necessarily limited to the scope of this invention.
[0048] In the description of this utility model, "A and / or B" will be used to represent specific features. The corresponding expressions include the following three combinations: only A, only B, and a combination of A and B.
[0049] As used in this invention, “about,” “approximately,” or “approximately” includes the stated value and the average value within an acceptable range of deviation from the specified value, wherein the acceptable range of deviation is determined by a person skilled in the art taking into account the measurement under discussion and the error associated with the measurement of the specified quantity, i.e., the limitations of the measurement system.
[0050] Unless the context otherwise requires, throughout the specification and claims, the term "comprising" is interpreted as openly inclusive, meaning "including, but not limited to." In the description of the specification, terms such as "one embodiment," "some embodiments," "exemplary embodiment," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with that embodiment or example is included in at least one embodiment or example of this disclosure. The illustrative representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics mentioned may be included in any suitable manner in any one or more embodiments or examples; that is, although they may be incorporated into embodiments or examples using the above terms for reasons such as order and position, it does not limit them to be incorporated in combination by a single embodiment or example.
[0051] Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.
[0052] Example 1:
[0053] This embodiment provides an integrated multiplexer / demultiplexer, such as... Figures 1-3 As shown, it includes: a substrate 1, a lower cladding layer 2, and a waveguide layer 3 stacked together, wherein:
[0054] The waveguide layer 3 is etched with a planar waveguide optical path, which includes a first optical path 4 and a second optical path 5. The first optical path 4 includes a plurality of first input waveguides 41, a combining optical path 42, and a first output optical path 43. One end of the plurality of first input waveguides 41 extends to the end face of the waveguide layer 3, and the other end of the plurality of first input waveguides 41 is connected to one end of the first output optical path 43 through the combining optical path 42. The other end of the first output optical path 43 extends to the end face of the waveguide layer 3. The second optical path 5 includes a second input waveguide 51, a splitting optical path 52, and a plurality of second output optical paths 53. One end of the second input waveguide 51 extends to the end face of the waveguide layer 3, and the other end of the second input waveguide 51 is connected to one end of the plurality of second output optical paths 53 through the splitting optical path 52. The other end of the plurality of second output optical paths 53 extends to the end face of the waveguide layer 3.
[0055] In this embodiment, the first optical path 4 is used to implement the multiplexing function, that is, to receive optical signals from multiple external transmitters, combine the received multiple optical signals into one, and then transmit the combined optical signal to an external receiver. The second optical path 5 is used to implement the wavelength division function, that is, to receive optical signals from a single external transmitter, divide the received optical signal into multiple paths, and then transmit the wavelength division multiple optical signals to multiple external receivers. In this embodiment, an upper cladding layer 6 is provided on the waveguide layer 3. In this embodiment, a layer of silicon dioxide can be deposited on the waveguide layer 3 as the upper cladding layer 6 using the PECVD method.
[0056] It should be noted that in this embodiment, a layer of silicon dioxide can be oxidized on the substrate 1 as the lower cladding layer 2 using a wet thermal oxidation method; a waveguide layer 3 is deposited on the lower cladding layer 2 using a plasma-enhanced chemical vapor deposition method; the designed planar waveguide optical path is formed on the waveguide layer 3 using an etching technique; and a layer of silicon dioxide is deposited on the planar waveguide optical path as the upper cladding layer 6 using a PECVD method. In this embodiment, the material of the waveguide layer 3 can be silicon, silicon dioxide, silicon oxynitride, or silicon nitride.
[0057] In this embodiment, by etching the optical path on the waveguide layer 3 and realizing corresponding wave splitting and wave combining, the complex optical path is integrated on the same substrate 1, which simplifies the assembly process. Since discrete devices are not used, there is no need to couple the optical paths between discrete devices, which improves the assembly efficiency. At the same time, since the etched optical path occupies less space than discrete devices, the integration level is improved. Furthermore, since there is no need to use discrete devices, the production cost is also reduced.
[0058] Furthermore, in this embodiment, when the first optical path 4 implements the multiplexing function, it needs to attenuate the multiple optical signals received from the outside to achieve the specified multiplexing effect. Therefore, this embodiment also involves the following design:
[0059] like Figure 4 As shown, the first optical path 4 further includes a plurality of optical attenuation units 46, each of the optical attenuation units 46 being located between the corresponding first input waveguide 41 and the wave combiner optical path 42; one end of the optical attenuation unit 46 is connected to the corresponding first input waveguide 41, and the other end of the optical attenuation unit 46 is connected to the wave combiner optical path 42.
[0060] In this embodiment, an optical attenuation unit 46 is disposed between each first input waveguide 41 and the combining optical path 42; such as Figure 5 As shown, the optical attenuation unit 46 can be a 2×2 optical attenuator of a Mach-Zehnder interferometer architecture, such as... Figure 5As shown, the 2×2 optical attenuator includes two input ports and two output ports. During actual connection, the first input waveguide 41 is connected to one of the input ports, and one of the output ports of the 2×2 optical attenuator is connected to the combining optical path 42. It should be noted that when the optical attenuation unit 46 is a 2×2 optical attenuator with a Mach-Zehnder interferometer architecture, it can be directly etched onto the waveguide layer 3.
[0061] Furthermore, in this embodiment, since the wave combiner optical path 42 needs to combine multiple optical signals into one, and the structure of the wave combiner optical path 42 needs to be obtainable by etching on the waveguide layer 3, this embodiment also involves the following design:
[0062] like Figure 6 As shown, the optical multiplexing path 42 includes a plurality of first splitters 421, which are cascaded along the optical transmission direction; wherein, Figure 6 In this context, 1~N represent N incident light ports. Figure 6 The arrows in the diagram indicate the direction of optical signal transmission.
[0063] The first splitter 421 includes a first trunk line 421A and at least two first branch lines 421B, wherein the first trunk line 421A is connected to the two first branch lines 421B.
[0064] First-stage first splitter 421 (i.e. Figure 6 The first branch 421B of the multiple first splitters 421 on the right is connected to the corresponding first input waveguide 41, and the last stage first splitter 421 (i.e. Figure 6 The first trunk 421A of the multiple first splitters 421 on the left is connected to the first output optical path 43; for the first splitters 421 other than the first-level first splitter 421 and the last-level first splitter 421, the first branch 421B of the corresponding first splitter 421 is connected to the first trunk 421A of the previous-level first splitter 421, and the first trunk 421A of the corresponding first splitter 421 is connected to the first branch 421B of the next-level first splitter 421.
[0065] In the combined optical path 42, along the transmission direction of the optical signal, n first splitters 421 are arranged at the uppermost point, and the 2n first branch paths 421B of the n first splitters 421 at the uppermost point are connected to the 2n first input waveguides 41 respectively; the n first trunk paths 421A of the n first splitters 421 at the uppermost point are connected to the n first branch paths 421B of the n / 2 first splitters 421 at the lowermost point; one first splitter 421 is arranged at the lowermost point, the first trunk path 421A of the one first splitter 421 at the lowermost point is connected to the first output optical path 43, and the two first branch paths 421B of the one first splitter 421 at the lowermost point are respectively connected to the first trunk paths 421A of the two first splitters 421 at the uppermost point.
[0066] In the combined optical path 42, along the transmission direction of the optical signal, except for the n upstream first splitters 421 and the 1 downstream first splitter 421, the first trunk 421A of each of the other first splitters 421 is connected to one of the first branch 421B of the corresponding downstream first splitter 421, and the first branch 421B of each of the other first splitters 421 is connected to the first trunk 421A of the corresponding upstream first splitter 421.
[0067] Furthermore, in this embodiment, considering that monitoring the combined optical path is also required during optical path multiplexing, a separate optical path needs to be decomposed after optical signal multiplexing for detection to determine whether the optical signal of the current multiplexed optical path 42 meets the requirements. Therefore, this embodiment also involves the following design:
[0068] like Figure 4 As shown, the first optical path 4 further includes a second splitter 44 and a first PD 45, wherein: the input terminal of the second splitter 44 is connected to the multiplexing optical path 42, one of the output terminals of the second splitter 44 is connected to the first output optical path 43, and the other output terminal of the second splitter 44 is coupled to the first PD 45.
[0069] In this embodiment, grooves are etched at corresponding positions on the upper cladding 6, waveguide layer 3, and lower cladding 2, and the first PD45 is disposed in the groove. The optical path of the other output end of the second splitter 44 extends into the fixing groove 7 and is coupled to the first PD45. In this embodiment, the first PD45 can be fixed in the groove using a surface mount process. In this embodiment, the second splitter 44 can adjust the optical power ratio of the two output optical paths. The first PD45 monitors one optical signal split from the second splitter 44 to determine the compliance of the optical signal in the first optical path 4. In this embodiment, the first PD45 is a photodetector.
[0070] Furthermore, in this embodiment, for the second optical path 5, since it is necessary to wavelength divide the input single optical path, a wavelength division optical path 52 is needed to combine multiple optical signals into one. At the same time, the structure of the wavelength division optical path 52 needs to be obtainable by etching on the waveguide layer 3. Therefore, this embodiment also involves the following design:
[0071] like Figure 7 As shown, the wavelength division multiplexing optical path 52 includes a plurality of third splitters 521, which are cascaded along the optical transmission direction; wherein, Figure 7 In this context, 1~N represent N output optical ports. Figure 7 The arrows in the diagram indicate the direction of optical signal transmission.
[0072] The third splitter 521 includes a second main line 521A and two second branch lines 521B, wherein the second main line 521A is connected to the two second branch lines 521B.
[0073] The second main path 521A of the first-stage third splitter 521 is connected to the second input waveguide 51, and the second branch path 521B of the last-stage third splitter 521 is connected to the corresponding second output optical path 53. For other third splitters 521 besides the first-stage and last-stage third splitters 521, the second main path 521A of the corresponding third splitter 521 is connected to the second branch path 521B of the previous-stage third splitter 521, and the second branch path 521B of the corresponding third splitter 521 is connected to the second main path 521A of the next-stage third splitter 521.
[0074] In the wavelength division optical path 52, along the transmission direction of the optical signal, the 2n second branch paths 521B of the n downstream third splitters 521 are connected to the 2n second output optical paths 53; the n second main paths 521A of the n downstream third splitters 521 are connected to the n second branch paths 521B of the n / 2 upstream third splitters 521; the second main path 521A of the one upstream third splitter 521 is connected to the second input waveguide 51; and the two second branch paths 521B of the one upstream third splitter 521 are respectively connected to the second main paths 521A of the two downstream third splitters 521.
[0075] In the combined optical path 42, along the transmission direction of the optical signal, except for the n downstream third splitters 521 and the 1 upstream third splitter 521, the second trunk 521A of each of the other third splitters 521 is connected to one of the second branch 521B of the corresponding upstream third splitter 521, and the second branch 521B of each of the other third splitters 521 is connected to the second trunk 521A of the corresponding downstream third splitter 521.
[0076] In this embodiment, the ratio of the output optical power of each optical path can be adjusted by adjusting the corresponding third splitter 521 in the wavelength division optical path 52.
[0077] Furthermore, in the application scenario of this embodiment, since the optical signal received by the second optical path 5 from the outside is a multi-wavelength signal, it is necessary to filter the multi-wavelength signal, separate the optical signal of a specified wavelength from the multi-wavelength signal, and transmit the corresponding wavelength optical signal to different external receivers for reception. Therefore, multiple filters are needed to achieve the above effect. Thus, this embodiment also involves the following design:
[0078] like Figure 4 As shown, the second optical path 5 further includes a first filter 54 and a second filter 55, wherein: the first filter 54 is located between the wavelength division optical path 52 and the second input waveguide 51; the input end of the first filter 54 is connected to the second input waveguide 51, one of the output ends of the first filter 54 is connected to the wavelength division optical path 52, the other output end of the first filter 54 is connected to the input end of the second filter 55, and the output end of the second filter 55 extends to the end face of the waveguide layer 3 and is coupled to an external receiver.
[0079] In this embodiment, the first filter 54 is used to receive multi-wavelength signals input from an external transmitter, filter the multi-wavelength signals and divide them into λ1 optical signals and λ2 optical signals. The λ1 optical signal is transmitted to the wavelength division optical path 52, and the λ2 optical signal is transmitted to the second filter 55. The λ1 optical signal is received by the corresponding external receiver after passing through the wavelength division optical path 52. The second filter 55 is used to further filter the clutter signals in the λ2 optical signal and output it to the external receiver.
[0080] In this embodiment, both the first filter 54 and the second filter 55 can be composed of multiple MZIs; such as Figure 8As shown, both the first filter 54 and the second filter 55 include a main MZI and two sets of branch MZI groups. Each branch MZI group is composed of multiple MZIs connected in series. The main MZI includes two input terminals and two output terminals. One input terminal of the main MZI is connected to the second input waveguide 51, and the two output terminals of the main MZI are respectively connected to the two sets of branch MZI groups. In this embodiment, the filtering function of the first filter 54 and the second filter 55 for the corresponding optical signal is achieved by adjusting the phase difference between the two arms of each MZI in the main MZI and the two sets of branch MZI groups. Since a single MZI can be obtained by etching on the waveguide layer 3, the first filter 54 and the second filter 55 can be obtained by etching on the waveguide layer 3 according to a specified pattern.
[0081] Furthermore, such as Figure 9 As shown, the first filter 54 and the second filter 55 can also be implemented in the form of a micro-ring resonator. The micro-ring resonator includes one or more annular waveguide layers 3 and two linear waveguide layers 3. The one or more annular waveguide layers 3 are located between the two linear waveguide layers 3, and the annular waveguide layers 3 are coupled to each other and to the annular wave. By adjusting the coupling distance between the annular waveguide layers 3, the filtering function of the first filter 54 and the second filter 55 for the corresponding optical signals can be achieved. In this embodiment, since both the linear waveguide layer 3 and the annular waveguide layer 3 can be etched onto the waveguide layer 3 according to a specified pattern, the first filter 54 and the second filter 55 can be obtained.
[0082] Furthermore, in this embodiment, the λ1 optical signal separated by the first filter 54 needs to be distributed to other receiving devices for reception. Therefore, this embodiment also involves the following design:
[0083] like Figure 4 As shown, the second optical path 5 further includes a fourth splitter 56, wherein: the fourth splitter 56 is located on the optical path between the first filter 54 and the wavelength division optical path 52, the input terminal of the fourth splitter 56 is connected to one of the output terminals of the first filter 54, one of the output terminals of the fourth splitter 56 is connected to the wavelength division optical path 52, and the other output terminal of the fourth splitter 56 extends to the end face of the waveguide layer 3 and is coupled to an external receiver.
[0084] In this embodiment, the fourth splitter 56 can be a Y-branch element or an MMI structure. The ratio of the output optical power of the two optical signals split by the fourth splitter 56 can be adjusted according to the needs of those skilled in the art.
[0085] Furthermore, in this embodiment, considering that while performing optical path wavelength division, it is also necessary to monitor the optical path before wavelength division to determine whether the optical signal before wavelength division is compliant and whether the wavelength meets the requirements, it is necessary to separate one optical path before the optical signal is wavelength divided for detection to determine whether the current optical signal meets the requirements. Therefore, this embodiment also involves the following design:
[0086] like Figure 4 As shown, the second optical path 5 also includes a fifth splitter 57 and a second PD 58, wherein: the input terminal of the fifth splitter 57 is connected to one of the output terminals of the fourth splitter 56, one of the output terminals of the fifth splitter 57 is coupled to the second PD 58, and the other output terminal of the fifth splitter 57 extends to the end face of the waveguide layer 3 and is coupled to an external receiver.
[0087] The upper cladding layer 6, the waveguide layer 3, and the lower cladding layer 2 are etched with a fixing groove 7 at the same position, and the second PD58 is disposed in the fixing groove 7; the optical path of one of the output terminals of the fifth splitter 57 extends into the fixing groove 7 and is coupled to the second PD58.
[0088] In this embodiment, as Figure 10 As shown, fixing grooves 7 are etched at corresponding positions on the upper cladding 6, waveguide layer 3, and lower cladding 2, and the second PD58 is disposed in the fixing groove 7; the optical path of the other output end of the fifth splitter 57 extends into the fixing groove 7 and is coupled to the second PD58. In this embodiment, the second PD58 can be fixed in the fixing groove 7 by a surface mount process. In this embodiment, the fifth splitter 57 can adjust the optical power ratio of the two output optical paths, and the second PD58 monitors one optical signal split by the fifth splitter 57 to determine the compliance of the optical signal in the second optical path 5.
[0089] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. An integrated multiplexer / demultiplexer, characterized in that, include: A substrate (1), a lower cladding layer (2), and a waveguide layer (3) are stacked together, wherein: The waveguide layer (3) is etched with a planar waveguide optical path, which includes a first optical path (4) and a second optical path (5). The first optical path (4) includes a plurality of first input waveguides (41), a combining optical path (42), and a first output optical path (43). One end of the plurality of first input waveguides (41) extends to the end face of the waveguide layer (3), and the other end of the plurality of first input waveguides (41) is connected to one end of the first output optical path (43) through the combining optical path (42). The other end of the first output optical path (43) extends to the end face of the waveguide layer (3). The second optical path (5) includes a second input waveguide (51), a wavelength division optical path (52), and a plurality of second output optical paths (53). One end of the second input waveguide (51) extends to the end face of the waveguide layer (3), and the other end of the second input waveguide (51) is connected to one end of the plurality of second output optical paths (53) through the wavelength division optical path (52). The other end of the plurality of second output optical paths (53) extends to the end face of the waveguide layer (3).
2. The integrated multiplexer / demultiplexer according to claim 1, characterized in that, The first optical path (4) further includes a plurality of optical attenuation units (46), each of the optical attenuation units (46) being located between the corresponding first input waveguide (41) and the wave combiner optical path (42); One end of the optical attenuation unit (46) is connected to the corresponding first input waveguide (41), and the other end of the optical attenuation unit (46) is connected to the wave combiner optical path (42).
3. The integrated multiplexer / demultiplexer according to claim 1, characterized in that, The combined optical path (42) includes a plurality of first splitters (421), which are cascaded along the optical transmission direction; The first splitter (421) includes a first trunk line (421A) and at least two first branch lines (421B), wherein the first trunk line (421A) is connected to the two first branch lines (421B); The first branch (421B) of the first-stage first splitter (421) is connected to the corresponding first input waveguide (41), and the first main branch (421A) of the last-stage first splitter (421) is connected to the first output optical path (43). For the first splitter (421) other than the first-level first splitter (421) and the last-level first splitter (421), the first branch (421B) of the corresponding first splitter (421) is connected to the first trunk (421A) of the first splitter (421) of the previous level, and the first trunk (421A) of the corresponding first splitter (421) is connected to the first branch (421B) of the first splitter (421) of the next level.
4. The integrated multiplexer / demultiplexer according to claim 1, characterized in that, The first optical path (4) further includes a second splitter (44) and a first PD (45), wherein: The input terminal of the second splitter (44) is connected to the combined optical path (42), one of the output terminals of the second splitter (44) is connected to the first output optical path (43), and the other output terminal of the second splitter (44) is coupled to the first PD (45).
5. The integrated multiplexer / demultiplexer according to claim 1, characterized in that, The wavelength division multiplexed optical path (52) includes a plurality of third splitters (521), which are cascaded along the optical transmission direction; The third splitter (521) includes a second trunk line (521A) and two second branch lines (521B), wherein the second trunk line (521A) is connected to the two second branch lines (521B); The second main path (521A) of the first-stage third splitter (521) is connected to the second input waveguide (51), and the second branch path (521B) of the last-stage third splitter (521) is connected to the corresponding second output optical path (53). For the third splitter (521) other than the first-level third splitter (521) and the last-level third splitter (521), the second main line (521A) of the corresponding third splitter (521) is connected to the second branch line (521B) of the previous-level third splitter (521), and the second branch line (521B) of the corresponding third splitter (521) is connected to the second main line (521A) of the next-level third splitter (521).
6. The integrated multiplexer / demultiplexer according to claim 1, characterized in that, The second optical path (5) further includes a first filter (54) and a second filter (55), wherein: The input end of the first filter (54) is connected to the second input waveguide (51), one of the output ends of the first filter (54) is connected to the wavelength division optical path (52), the other output end of the first filter (54) is connected to the input end of the second filter (55), and the output end of the second filter (55) extends to the end face of the waveguide layer (3) and is coupled to an external receiver.
7. The integrated multiplexer / demultiplexer according to claim 6, characterized in that, The second optical path (5) also includes a fourth splitter (56), wherein: The input of the fourth splitter (56) is connected to one of the outputs of the first filter (54), one of the outputs of the fourth splitter (56) is connected to the wavelength division optical path (52), and the other output of the fourth splitter (56) extends to the end face of the waveguide layer (3) and is coupled to an external receiver.
8. The integrated multiplexer / demultiplexer according to claim 7, characterized in that, The second optical path (5) also includes a fifth splitter (57) and a second PD (58), wherein: The input of the fifth splitter (57) is connected to one of the outputs of the fourth splitter (56), one of the outputs of the fifth splitter (57) is coupled to the second PD (58), and the other output of the fifth splitter (57) extends to the end face of the waveguide layer (3) and is coupled to an external receiver.
9. The integrated multiplexer / demultiplexer according to claim 8, characterized in that, The waveguide layer (3) is provided with an upper cladding layer (6).
10. The integrated multiplexer / demultiplexer according to claim 9, characterized in that, The upper cladding (6), waveguide layer (3) and lower cladding (2) are etched with a fixing groove (7) at the same position, and the second PD (58) is disposed in the fixing groove (7); The optical path of one of the output terminals of the fifth splitter (57) extends into the fixed groove (7) and is coupled to the second PD (58).