Heating device suitable for large temperature range

Abstract

The utility model provides a heating device suitable for a large temperature range, which comprises an upper disc surface, a heat conduction disc, a transition heat conduction disc and an insulating layer which are sequentially arranged from top to bottom, the bottom of the upper disc surface is provided with an annular groove, the heat conduction disc is embedded in the annular groove of the upper disc surface, and a first cooling pipe and a heating wire sleeve are embedded in the heat conduction disc; the transition heat conduction disc and the insulating layer are of an annular structure and form a channel in the center, a protective pipe is inserted into the channel, and a corrugated pipe is arranged at the bottom of the insulating layer and sleeves the protective pipe; a back pressure pipe is arranged in the protective pipe, the top end of the back pressure pipe is connected with the upper disc face, and bias voltage is applied to the upper disc face through the back pressure pipe. The insulating layer comprises an insulating inner ring and an insulating outer ring, a first sealing groove is formed in the contact face of the transition heat conduction disc and the insulating inner ring, a first sealing ring is arranged in the first sealing groove, and a second cooling pipe is embedded in the position, corresponding to the first sealing groove, of the top face of the transition heat conduction disc.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, and in particular relates to a heating device suitable for a wide temperature range. Background Technology

[0002] With the diversification of process requirements for physical vapor deposition (PVD) equipment, the temperature requirements for wafer heating devices are also becoming increasingly diverse. Existing heating plates can no longer meet the wide temperature range of -15℃ to 550℃. Condensation occurs at -15℃, and the sealing layer of the heating plate is damaged when the heating temperature exceeds 350℃. Furthermore, existing heating plates are typically classified into four types: low-temperature unbiased plates, low-temperature biased plates, high-temperature unbiased plates, and high-temperature biased plates, resulting in dozens of variations depending on the plate surface and operating conditions. Non-biased dedicated heating plates exhibit abnormal phenomena such as current paths, short circuits, or arcing when biased. Heating plates cannot simultaneously accommodate both biased and unbiased requirements. Therefore, it is necessary to provide a heating device suitable for a wide temperature range to solve or at least partially solve the above problems. Utility Model Content

[0003] This invention provides a heating device suitable for a wide temperature range, meeting the usage requirements of a wide temperature range from -15℃ to 550℃.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A heating device suitable for a wide temperature range includes, from top to bottom, an upper plate, a heat-conducting plate, a transition heat-conducting plate, and an insulating layer. The bottom of the upper plate has an annular groove, and the heat-conducting plate is embedded in this groove. A first cooling pipe and a heating wire sleeve are embedded in the heat-conducting plate. Both the transition heat-conducting plate and the insulating layer are annular structures with a central channel. A protective tube is inserted into this channel. A corrugated pipe is located at the bottom of the insulating layer and is fitted over the protective pipe. A back pressure pipe is located within the protective pipe, and its top end is connected to the upper plate, applying a bias voltage to the upper plate. The insulating layer includes an inner insulating ring and an outer insulating ring. The transition heat-conducting plate has a first sealing groove on its contact surface with the inner insulating ring, and a first sealing ring is located in this groove. A second cooling pipe is embedded on the top surface of the transition heat-conducting plate corresponding to the first sealing groove.

[0006] Preferably, a heat insulation pad is provided between the heat-conducting plate and the transition heat-conducting plate, and the heat insulation pad is made of glass fiber.

[0007] Preferably, the protective tube includes an inner ceramic protective tube and an outer straight tube. The top end of the ceramic protective tube is fitted with the inner wall of the insulating inner ring, the top end of the straight tube is connected to the inner wall of the top end of the corrugated pipe, a ceramic protective tube fixing ring is provided at the bottom end of the ceramic protective tube, and a tail ring is provided at the bottom end of the straight tube, the tail ring being connected to the ceramic protective tube fixing ring.

[0008] Preferably, both the first cooling pipe and the second cooling pipe are connected to a main cooling pipe, which extends out through a protective pipe.

[0009] Preferably, an arc-shaped inner shield is provided between the outer wall of the transition heat conduction plate and the outer wall of the upper plate surface; an arc-shaped outer shield is provided at the top edge of the corrugated pipe, and the outer shield extends from the inner shield to the bottom of the upper plate surface.

[0010] Preferably, the heating wire sleeve includes an inner heating wire and an outer sleeve; the heating wire is inserted into the protective tube, fitted with an insulating sheath, and then exits through the protective tube.

[0011] Preferably, it also includes a temperature sensor, the probe of which is provided with a probe sheath, the cable of which is provided with a cable sheath, and the cable of which is connected to a plug; a mounting plate for fixing the probe of the temperature sensor is provided at the lower center of the upper plate.

[0012] Preferably, a second sealing groove is provided on the contact surface between the top end of the bellows and the insulating inner ring, and a second sealing ring is provided in the second sealing groove.

[0013] Preferably, both the inner insulating ring and the outer insulating ring are made of ceramic.

[0014] Preferably, both the straight tube and the tail ring are made of stainless steel.

[0015] Compared with the prior art, the technical solution of this utility model has beneficial effects.

[0016] For example, in heating devices suitable for a wide temperature range, the coordinated action of components such as the heat-conducting plate, the first cooling pipe and heating wire sleeve located on the heat-conducting plate, the second cooling pipe corresponding to the first sealing ring, and the heat insulation pad enables precise temperature control of key parts of the heating plate assembly. This ensures that components such as the sealing ring operate normally in high-temperature environments, extends the service life of the heating plate, and guarantees the sealing performance and stability of the overall structure. The design of the insulating outer ring and the insulating inner ring, in conjunction with the sealing ring, can reliably block the current path on the upper plate surface during the bias voltage application process, effectively preventing short circuits or arc discharges, and significantly improving the insulation reliability and safety of the heating plate assembly.

[0017] Furthermore, the reasonable connection methods and structural design between the various components, such as the connection and deformation adaptation of the bellows and the limitation of the pipe bending angle by the tail ring, ensure the structural stability of the heating plate assembly under complex working conditions and reduce the probability of failure. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a heating device applicable to a wide temperature range in an embodiment of this utility model.

[0019] Explanation of reference numerals in the attached figures:

[0020] 1-Corrugated pipe; 2-Straight pipe; 3-Ceramic protective pipe fixing ring; 4-Ceramic protective pipe; 5-Tail ring; 6-Outer protective cover; 7-Insulating outer ring; 8-Insulating inner ring; 9-Upper plate surface; 10-Inner protective cover; 11-Transition heat conduction plate; 12-Back pressure pipe; 13-Second cooling pipe; 14-First cooling pipe; 15-Heat conduction plate; 16-Heat insulation pad; 17-Heating wire sleeve; 18-Detector head sleeve; 19-Insulating sleeve; 20-Cable sleeve; 21-Mounting plate; 22-Plug; 23-First sealing ring; 24-Elastic ring; 25-Heating wire; 26-Temperature sensor; 27-Second sealing ring; 28-Cooling main pipe. Detailed Implementation

[0021] To make the objectives, features, and beneficial effects of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It is to be understood that the specific embodiments described below are merely for explaining this utility model and are not intended to limit it. Furthermore, the same or similar reference numerals may be used in the drawings to refer to the same or similar elements in different embodiments, and descriptions of the same or similar elements in different embodiments, as well as descriptions of prior art elements, features, effects, etc., may be omitted.

[0022] Figure 1 This is a schematic diagram of the structure of a heating device applicable to a wide temperature range in an embodiment of this utility model.

[0023] Reference Figure 1 This utility model provides a heating device suitable for a wide temperature range.

[0024] Specifically, the heating device applicable to a wide temperature range includes an upper plate 9, a heat-conducting plate 15, a transition heat-conducting plate 11, and an insulating layer arranged sequentially from top to bottom. The bottom of the upper plate 9 is provided with an annular groove, and the heat-conducting plate 15 is embedded in the annular groove of the upper plate 9. A first cooling pipe 14 and a heating wire sleeve 17 are embedded in the heat-conducting plate 15. The transition heat-conducting plate 11 and the insulating layer are both annular structures with a channel formed in the center. A protective tube is inserted into the channel. A corrugated pipe 1 is provided at the bottom of the insulating layer and is sleeved on the outside of the protective pipe. A back pressure pipe 12 is provided in the protective pipe, and the top end of the back pressure pipe 12 is connected to the upper plate 9. The insulating layer includes an inner insulating ring 8 and an outer insulating ring 7. The transition heat-conducting plate 11 is provided with a first sealing groove on the contact surface with the inner insulating ring 8. A first sealing ring 23 is provided in the first sealing groove. A second cooling pipe 13 is embedded on the top surface of the transition heat-conducting plate 11 corresponding to the first sealing groove.

[0025] Specifically, when the heating plate temperature reaches the limit of 550°C, the maximum temperature of the transition heat conduction plate 11 can reach 330°C. Under the cooling effect of the second cooling pipe 13, the local temperature of the first sealing ring 23 (heat resistant 250°C) can be controlled at around 220°C to ensure that the first sealing ring 23 will not fail due to high temperature.

[0026] Specifically, the upper plate 9 is made of stainless steel and has a back pressure hole in the center. Around the back pressure hole, there are three back pressure hole branches that are inclined at 45° and evenly distributed at 120°. The back pressure hole is connected to the back pressure pipe 12. When performing back pressure operation, it can disperse the gas pressure and guide the back pressure gas to the edge of the plate more quickly.

[0027] In some embodiments, a heat insulation pad 16 is provided between the heat-conducting plate 15 and the transition heat-conducting plate 11. The heat insulation pad 16 is made of glass fiber. When the heating plate is in operation, the heat insulation pad 16 reduces the thermal conductivity between the heat-conducting plate 15 and the transition heat-conducting plate 11, thereby reducing the temperature of the transition heat-conducting plate 11.

[0028] In some embodiments, the protective tube includes an inner ceramic protective tube 4 and an outer straight tube 2. The top end of the ceramic protective tube 4 is fitted with the inner wall of the insulating inner ring 8, and the top end of the straight tube 2 is connected to the inner wall of the top end of the corrugated tube 1. A ceramic protective tube fixing ring 3 is provided at the bottom end of the ceramic protective tube 4, and a tail ring 5 is provided at the bottom end of the straight tube 2. The tail ring 5 is connected to the ceramic protective tube fixing ring 3. The ceramic protective tube 4 serves as an insulating protection.

[0029] In some embodiments, both the straight tube 2 and the tail ring 5 are made of stainless steel. The straight tube 2 protects the ceramic protective tube 4, and the tail ring 5 facilitates installation and connection while limiting the bending angle of the end of the protective tube to prevent excessive bending that could cause the internal ceramic protective tube 4 to crack.

[0030] In some embodiments, the first cooling pipe 14 and the second cooling pipe 13 are both connected to the cooling main pipe 28, which extends out through a protective pipe.

[0031] Specifically, the first cooling pipe 14 and the second cooling pipe 13 are both coated with a composite coating of glass fiber and ceramic coating. This coating can not only provide heat insulation and flame retardancy in high-temperature environments, but also prevent condensation and freezing in environments as low as -20°C.

[0032] In some embodiments, an arc-shaped inner shield 10 is provided between the outer wall of the transition heat conduction plate 11 and the outer wall of the upper plate surface 9; an arc-shaped outer shield 6 is provided at the top edge of the bellows 1, and the outer shield 6 is provided outside the inner shield 10 and extends to the bottom of the upper plate surface 9; the inner shield 10 is made of stainless steel and is welded to the upper plate surface 9 and the transition heat conduction plate 11 to ensure the airtightness of the entire structure of the heating plate inside the cavity; the outer shield 6 protects the internal components and extends their service life.

[0033] In some embodiments, the heating wire sleeve 17 includes an inner heating wire 25 and an outer sleeve; the heating wire 25 is inserted into the protective tube and then fitted with an insulating sheath 19, and then passes out through the protective tube.

[0034] Specifically, the sleeve is made of brass, and the sleeve and the heat-conducting plate 15 are filled with copper powder to maximize the contact area between the sleeve and the heat-conducting plate 15, so as to achieve the best heating effect. The sleeve and the internal heating wire 25 are also filled with copper powder to ensure that the heat loss of the heating wire 25 is minimized during operation. The insulating sleeve 19 is made of ceramic and is gap-fitted with the heating wire 25 to insulate and isolate the internal and external temperature transfer.

[0035] In some embodiments, the device further includes a temperature sensor 26, the probe of which is provided with a probe sheath 18, the cable of which is provided with a cable sheath 20, and the cable of which is connected to a plug 22; a mounting plate 21 for fixing the probe of the temperature sensor 26 is provided at the lower center of the upper plate 9.

[0036] In some embodiments, a second sealing groove is provided on the contact surface between the top end of the bellows 1 and the insulating inner ring 8, and a second sealing ring 27 is provided in the second sealing groove; to further ensure the sealing effect.

[0037] Specifically, the bottom end of the bellows 1 is provided with an elastic ring 24, which is made of stainless steel. When the bottom end of the bellows 1 is connected to an external component, the elasticity of the elastic ring 24 can be used to automatically calibrate the center position.

[0038] In some embodiments, both the inner insulating ring 8 and the outer insulating ring 7 are made of ceramic. During the process of applying a bias voltage, the inner insulating ring 8 and the outer insulating ring 7 together serve as an insulating medium to block the current path on the upper disk 9 and prevent short circuits or arc discharges.

[0039] In summary, the heating device applicable to a wide temperature range provided by this utility model achieves precise temperature control of key parts of the heating plate assembly through the synergistic effect of components such as the heat-conducting plate 15, the first cooling pipe 14 and heating wire sleeve 17 disposed on the heat-conducting plate 15, the second cooling pipe 13 corresponding to the first sealing ring 23, and the heat insulation pad 16. This ensures that components such as the sealing ring operate normally in high-temperature environments, extends the service life of the heating plate, and guarantees the sealing performance and stability of the overall structure. The design of the insulating outer ring 7 and the insulating inner ring 8, in conjunction with the sealing ring, can reliably block the current path on the upper plate surface 9 during the bias voltage application process, effectively preventing short circuits or arc discharges, and significantly improving the insulation reliability and safety of the heating plate assembly.

[0040] Furthermore, the reasonable connection methods and structural design between the components, such as the connection and deformation adaptation of the bellows 1 and the limitation of the pipe bending angle by the tail ring 5, ensure the structural stability of the heating plate assembly under complex working conditions and reduce the probability of failure.

[0041] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of this utility model disclosure, even when only a single embodiment is described with respect to a particular feature. The feature examples provided in this utility model disclosure are intended to be illustrative and not limiting, unless otherwise stated. In practice, one or more technical features of the dependent claims may be combined with the technical features of the independent claims as needed and where technically feasible, and may be derived from the technical features of the respective independent claims in any suitable manner rather than solely by the specific combinations listed in the claims.

[0042] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A heating device suitable for a wide temperature range, characterized in that, The device comprises, from top to bottom, an upper plate, a heat-conducting plate, a transition heat-conducting plate, and an insulating layer. The bottom of the upper plate has an annular groove, and the heat-conducting plate is embedded in this groove. A first cooling pipe and a heating wire sleeve are embedded in the heat-conducting plate. Both the transition heat-conducting plate and the insulating layer are annular structures with a central channel. A protective tube is inserted into this channel. A corrugated pipe is located at the bottom of the insulating layer and is fitted over the protective pipe. A back pressure pipe is located within the protective pipe, and its top end is connected to the upper plate, applying a bias voltage to the upper plate. The insulating layer includes an inner insulating ring and an outer insulating ring. The transition heat-conducting plate has a first sealing groove on its contact surface with the inner insulating ring, and a first sealing ring is located in this groove. A second cooling pipe is embedded on the top surface of the transition heat-conducting plate corresponding to the first sealing groove.

2. The heating device suitable for a wide temperature range according to claim 1, characterized in that, A heat insulation pad is provided between the heat-conducting plate and the transition heat-conducting plate, and the heat insulation pad is made of glass fiber.

3. The heating device suitable for a wide temperature range according to claim 1, characterized in that, The protective tube includes an inner ceramic protective tube and an outer straight tube. The top end of the ceramic protective tube is fitted with the inner wall of the insulating inner ring, and the top end of the straight tube is connected to the inner wall of the top end of the corrugated pipe. A ceramic protective tube fixing ring is provided at the bottom end of the ceramic protective tube, and a tail ring is provided at the bottom end of the straight tube. The tail ring is connected to the ceramic protective tube fixing ring.

4. The heating device suitable for a wide temperature range according to claim 1, characterized in that, Both the first and second cooling pipes are connected to a main cooling pipe, which extends out through a protective pipe.

5. The heating device suitable for a wide temperature range according to claim 1, characterized in that, An arc-shaped inner shield is provided between the outer wall of the transition heat conduction plate and the outer wall of the upper plate surface; an arc-shaped outer shield is provided at the top edge of the corrugated pipe, and the outer shield extends from the inner shield to the bottom of the upper plate surface.

6. The heating device suitable for a wide temperature range according to claim 1, characterized in that, The heating wire sleeve includes an inner heating wire and an outer sleeve; the heating wire is inserted into the protective tube, fitted with an insulating sheath, and then exits through the protective tube.

7. The heating device suitable for a wide temperature range according to claim 1, characterized in that, It also includes a temperature sensor, the probe of which is provided with a probe sheath, the cable of which is provided with a cable sheath, and the cable of which is connected to a plug; a mounting plate for fixing the probe of the temperature sensor is provided at the center of the lower part of the upper plate.

8. The heating device suitable for a wide temperature range according to claim 1, characterized in that, A second sealing groove is provided on the contact surface between the top end of the bellows and the inner insulating ring, and a second sealing ring is provided in the second sealing groove.

9. The heating device suitable for a wide temperature range according to claim 1, characterized in that, Both the inner and outer insulating rings are made of ceramic.

10. The heating device suitable for a wide temperature range according to claim 3, characterized in that, Both the straight tube and the tail ring are made of stainless steel.

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