Workpiece cleaning device
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- BEIJING BOYU SEMICON VESSEL CRAFTWORK TECH CO LTD
- Filing Date
- 2025-04-19
- Publication Date
- 2026-05-12
AI Technical Summary
这种清洗方法耗时久、效率低
[0020] (1) The cleaning device of this utility model is equipped with a water bath, an immersion tank, a support component, and a stirring mechanism. When cleaning the vapor-deposited deposits on the workpiece, the workpiece is placed in the support component in the immersion tank. While immersing, the cleaning liquid is heated by the water bath and stirred by the stirring mechanism, which effectively improves the cleaning effect and cleaning efficiency.
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Figure CN224222176U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of workpiece cleaning technology, and in particular to a workpiece cleaning device. Background Technology
[0002] Oled vapor deposition materials include metals such as ytterbium, silver, and magnesium, as well as lithium fluoride compounds. The material is placed in a vapor deposition vessel, which is fitted with a gas distribution device. Under vacuum conditions, the material is heated to melt and evaporate through the gas distribution device, depositing onto the substrate. During this process, the vapor deposition vessel and gas distribution device may become coated with material. This material must be thoroughly cleaned before each use; otherwise, the deposition effect will be compromised.
[0003] Removing deposits from vapor deposition requires the use of specific solvents (acids, alkalis, etc.) for corrosion, while simultaneously ensuring the integrity of the vapor deposition vessel and gas distribution system. It is important to note that the vapor deposition vessel and gas distribution components are fragile and must be handled with care to prevent impacts. Therefore, most existing cleaning devices employ static immersion. This cleaning method is time-consuming and inefficient. Utility Model Content
[0004] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a workpiece cleaning device that improves the cleaning effect and thus improves the cleaning efficiency by heating and stirring.
[0005] This utility model provides a workpiece cleaning device, comprising:
[0006] A water bath, in which a heating device is fixedly installed;
[0007] An immersion tank is fixedly embedded in the water bath tank and filled with cleaning solution;
[0008] Support components are detachably installed within the immersion tank to form a multi-layer workpiece support structure within the immersion tank.
[0009] A stirring mechanism extends into the soaking tank to stir the cleaning fluid between the support structures of each workpiece layer.
[0010] Furthermore, the heating device consists of at least a plurality of electric heating tubes symmetrically distributed around the periphery of the soaking tank.
[0011] Furthermore, a support frame is provided around the inner circumference of the top of the water bath, and a large edge matching the support frame is provided around the outer circumference of the top of the soaking tank, for sealing the water bath.
[0012] Furthermore, a positioning component is provided between the support frame and the large edge; the positioning component includes a plurality of positioning grooves formed on the top surface of the support frame, and a positioning pin corresponding to each positioning groove is fixedly provided on the bottom surface of the large edge.
[0013] Furthermore, the support component includes a first bracket, a partition, and a workpiece bracket. A plurality of the partitions are arranged vertically in the soaking tank. The partitions are densely covered with through holes. The first bracket is separately arranged at the bottom of the lowest partition and between adjacent partitions. The workpiece bracket is arranged on the top surface of each partition.
[0014] Furthermore, the workpiece support has several hollowed-out placement slots, which include various different shapes and sizes.
[0015] Furthermore, the stirring mechanism includes a stirring rod extending into the soaking tank. Stirring blades are fixedly mounted on the stirring rod between adjacent partitions. Clearance grooves are provided on the partitions and workpiece support corresponding to the stirring rod and stirring blades. A movable and fixed second support is provided on the outer side of the water bath. A stirring motor, fixedly connected to the second support, is located above the soaking tank. The top end of the stirring rod is detachably fixedly connected to the output shaft of the stirring motor. A waterproof magnetic stirrer is provided at the bottom of the water bath. The stirring magnet of the waterproof magnetic stirrer is located at the bottom of the soaking tank. The rotation direction of the stirring rod is opposite to the stirring direction of the waterproof magnetic stirrer.
[0016] Furthermore, the output shaft of the stirring motor is fixedly sleeved with a connecting sleeve, and the top end of the stirring rod can be detachably inserted into the connecting sleeve and detachably fixed to the connecting sleeve by bolts.
[0017] Furthermore, the top of the soaking tank is covered with a cover plate, and the cover plate has clearance holes corresponding to the stirring rod.
[0018] Furthermore, the first bracket, partition, workpiece bracket, and cover plate are all made of corrosion-resistant materials.
[0019] Compared with the prior art, the beneficial effects of this utility model are:
[0020] (1) The cleaning device of this utility model is equipped with a water bath, an immersion tank, a support component, and a stirring mechanism. When cleaning the vapor-deposited deposits on the workpiece, the workpiece is placed in the support component in the immersion tank. While immersing, the cleaning liquid is heated by the water bath and stirred by the stirring mechanism, which effectively improves the cleaning effect and cleaning efficiency.
[0021] (2) The cleaning device of this utility model is also provided with a large edge and a cover plate. The cover plate covers the soaking tank, reducing the evaporation loss of the cleaning liquid. At the same time, it works with the large edge to form a double protection for the water bath tank, preventing the steam of the cleaning liquid from entering the water bath tank and corroding the inner wall of the water bath tank and the heating device.
[0022] It should be understood that the description in this utility model description section is not intended to limit the key or essential features of the embodiments of this utility model, nor is it intended to restrict the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description
[0023] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:
[0024] Figure 1 This is a schematic diagram of the workpiece cleaning device.
[0025] Figure 2 This is a schematic diagram of the positioning component.
[0026] The diagram labels are as follows: 1. Water bath; 2. Immersion tank; 3. Support component; 4. Stirring mechanism; 5. Positioning component; 6. Cover plate; 7. Workpiece;
[0027] 11. Heating device; 12. Support frame;
[0028] 21. Cleaning fluid; 22. Large edge;
[0029] 31. First support; 32. Partition plate; 33. Workpiece support;
[0030] 41. Stirring rod; 42. Stirring blade; 43. Waterproof magnetic stirrer; 44. Stirring magnet;
[0031] 51. Positioning groove; 52. Positioning pin. Detailed Implementation
[0032] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.
[0033] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.
[0034] Please refer to Figures 1-2 An embodiment of this utility model provides a workpiece cleaning device, comprising:
[0035] A water bath 1, in which a heating device 11 is fixedly installed;
[0036] The soaking tank 2 is fixedly embedded in the water bath tank 1 and is filled with cleaning solution 21;
[0037] Support component 3 is detachably installed in immersion tank 2 to form a multi-layer workpiece 7 support structure in immersion tank 2;
[0038] The stirring mechanism 4 extends into the soaking tank 2 to stir the cleaning fluid 21 between the support structures of each layer of workpiece 7.
[0039] In this embodiment, when cleaning the vapor-deposited deposits on the workpiece 7, the workpiece 7 and the support component 3 are first placed in the immersion tank 2 to form a multi-layered workpiece 7, which is then immersed in the cleaning solution 21. While immersing, the cleaning solution 21 is heated by the water bath 1, and then the cleaning solution 21 is stirred by the stirring mechanism 4, which effectively improves the cleaning effect and greatly improves the cleaning efficiency.
[0040] In a preferred embodiment, such as Figure 1 As shown, the heating device 11 consists of several electric heating tubes that are at least symmetrically distributed on both sides of the soaking tank 2. The temperature is set to 40-80℃, which has a good heating effect and can improve the cleaning effect of the cleaning solution 21.
[0041] In a preferred embodiment, such as Figure 1 As shown, a support frame 12 is provided around the inner circumference of the top of the water bath 1, and a large edge 22 matching the support frame 12 is provided around the outer circumference of the top of the soaking tank 2. This is used to seal the water bath 1 and prevent the steam of the cleaning liquid 21 from entering the water bath 1 and corroding the inner wall of the water bath and the heating device 11.
[0042] In a preferred embodiment, such as Figure 1 and Figure 2 As shown, a positioning component 5 is provided between the support frame 12 and the large edge 22; the positioning component 5 includes several positioning grooves 51 opened on the top surface of the support frame 12, and positioning pins 52 corresponding to the positioning grooves 51 are fixedly provided on the bottom surface of the large edge 22. The positioning component 5 is used to position the soaking tank 2, ensuring its stability.
[0043] In a preferred embodiment, such as Figure 1 As shown, the support component 3 includes a first bracket 31, a partition 32 and a workpiece bracket 33. Several partitions 32 are arranged vertically in the soaking tank 2. The partitions 32 are densely covered with through holes. The bottom of the lowest partition 32 and the adjacent partitions 32 are all separately provided with the first bracket 31. The top surface of each partition 32 is provided with a workpiece bracket 33.
[0044] In this embodiment, when placing the workpieces 7 to be cleaned, firstly, a set of first supports 31 are placed in the soaking tank 2, then a partition 32 is placed on the first supports 31, then the workpiece support 33 is placed on the partition 32, and then each workpiece 7 to be cleaned is placed on the workpiece support 33 one by one, thus completing the placement of one layer of workpieces 7; repeating the above steps completes the placement of each layer of workpieces 7, forming a multi-layer workpiece 7 cleaning structure with high cleaning efficiency.
[0045] In a preferred embodiment, such as Figure 1 As shown, the workpiece support 33 has several hollowed-out placement slots, which improves the stability of the workpiece 7 and greatly reduces the risk of damage to the workpiece 7; the placement slots include a variety of different shapes and sizes to suit a variety of workpieces 7 to be cleaned.
[0046] In a preferred embodiment, such as Figure 1 As shown, the stirring mechanism 4 includes a stirring rod 41 extending into the soaking tank 2. Stirring blades 42 are fixedly installed on the stirring rod 41 between adjacent partitions 32. The partitions 32 and the workpiece support 33 are provided with clearance grooves corresponding to the stirring rod 41 and the stirring blades 42. A movable and fixed second support is provided on the outside of the water bath tank 1. A stirring motor is fixedly connected to the second support above the soaking tank 2. The top of the stirring rod 41 is detachably fixedly connected to the output shaft of the stirring motor. A waterproof magnetic stirrer 43 is provided at the bottom of the soaking tank 2. The stirring magnet 44 of the waterproof magnetic stirrer 43 is located at the bottom of the soaking tank 2. The rotation direction of the stirring rod 41 is opposite to the stirring direction of the waterproof magnetic stirrer 43.
[0047] In this embodiment, after the workpieces 7 to be cleaned are placed, the stirring rod 41 and stirring blades 42 are passed through the clearance grooves on the support assembly 3 one by one, so that the stirring blades 42 are distributed evenly among the workpieces 7 to be cleaned in each layer; then the second support is moved so that the stirring motor is placed above the stirring rod 41, and the stirring rod 41 is fixedly connected to the output shaft of the stirring motor; then the second support is fixed, and at this time the stirring motor is started to stir the cleaning liquid 21; at the same time, the waterproof magnetic stirrer 43 is started to cooperate in stirring, and the rotation direction of the stirring rod 41 is opposite to the stirring direction of the waterproof magnetic stirrer 43, so as to avoid the formation of vortices in the cleaning liquid 21 in the soaking tank 2, which would affect the cleaning effect and effectively improve the cleaning efficiency.
[0048] The second bracket is equipped with casters at its bottom for easy movement and installation, and is locked in place by a caster lock. Preferably, to improve the stability of the second bracket, it can be secured in conjunction with other fixing structures, such as pins and pin holes pre-embedded in the ground; or bolts and fixing plates pre-embedded in the ground.
[0049] In a preferred embodiment, such as Figure 1As shown, the output shaft of the stirring motor is fixedly sleeved with a connecting sleeve, and the top end of the stirring rod 41 can be detachably inserted into the connecting sleeve and fixedly connected to the connecting sleeve by bolts, which is convenient to install and secure.
[0050] In a preferred embodiment, such as Figure 1 As shown, the top of the soaking tank 2 is covered with a cover plate 6, and the cover plate 6 has a clearance hole corresponding to the stirring rod 41.
[0051] In this embodiment, after the stirring rod 41 is inserted into the soaking tank 2, the cover plate 6 is placed over the soaking tank 2. The stirring rod 41 passes through the clearance hole and is then fixedly connected to the output shaft of the stirring motor. The cover plate 6 covers the soaking tank 2, reducing the evaporation loss of the cleaning liquid 21, and at the same time, it cooperates with the large edge 22 to form double protection for the inner wall of the water bath 1 and the heating device 11.
[0052] In a preferred embodiment, the first support 31, the partition 32, the workpiece support 33, and the cover plate 6 are all made of corrosion-resistant materials, which improves the corrosion resistance.
[0053] In the description of this specification, the terms "connection," "installation," and "fixing," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0054] In the description of this specification, the terms "one embodiment," "some embodiments," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0055] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
Claims
1. A workpiece cleaning device, characterized in that, include: A water bath (1) is provided with a heating device (11) fixed inside it; The soaking tank (2) is fixedly embedded in the water bath tank (1) and is filled with cleaning liquid (21); Support component (3) is detachably installed in the soaking tank (2) for forming a multi-layer workpiece (7) support structure in the soaking tank (2); A stirring mechanism (4) extends into the soaking tank (2) to stir the cleaning fluid (21) between the workpiece support structures of each layer.
2. The workpiece cleaning device according to claim 1, characterized in that, The heating device (11) consists of several electric heating tubes that are at least symmetrically distributed around the periphery of the soaking tank (2).
3. The workpiece cleaning apparatus according to claim 1, characterized in that, The water bath (1) has a support frame (12) around its top inner periphery, and the soaking tank (2) has a large edge (22) around its top outer periphery that matches the support frame (12), for sealing the water bath (1).
4. The workpiece cleaning apparatus according to claim 3, characterized in that, A positioning component (5) is provided between the support frame (12) and the large edge (22); the positioning component (5) includes a plurality of positioning grooves (51) opened on the top surface of the support frame (12), and the bottom surface of the large edge (22) is fixedly provided with positioning pins (52) corresponding to the positioning grooves (51).
5. The workpiece cleaning apparatus according to claim 1, characterized in that, The support component (3) includes a first bracket (31), a partition (32) and a workpiece bracket (33). A plurality of partitions (32) are arranged vertically in the soaking tank (2). The partitions (32) are densely covered with through holes. The first bracket (31) is separately arranged at the bottom of the lowest partition (32) and between adjacent partitions (32). The workpiece bracket (33) is arranged on the top surface of each partition (32).
6. The workpiece cleaning apparatus according to claim 5, characterized in that, The workpiece support (33) has several hollowed-out placement slots, which include various shapes and sizes.
7. The workpiece cleaning apparatus according to claim 5, characterized in that, The stirring mechanism (4) includes a stirring rod (41) extending into the soaking tank (2). Stirring blades (42) are fixedly arranged on the stirring rod (41) between adjacent partitions (32). The partitions (32) and the workpiece support (33) are provided with clearance grooves corresponding to the stirring rod (41) and the stirring blades (42). A movable and fixed second support is provided on the outside of the water bath (1). A stirring motor is fixedly connected to the second support above the soaking tank. The top of the stirring rod (41) is detachably fixedly connected to the output shaft of the stirring motor. A waterproof magnetic stirrer (43) is provided at the bottom of the water bath (1). The stirring magnet (44) of the waterproof magnetic stirrer (43) is located at the bottom of the soaking tank (2). The rotation direction of the stirring rod (41) is opposite to the stirring direction of the waterproof magnetic stirrer (43).
8. The workpiece cleaning apparatus according to claim 7, characterized in that, The output shaft of the stirring motor is fixedly sleeved with a connecting sleeve, and the top end of the stirring rod (41) can be detachably inserted into the connecting sleeve and fixedly connected to the connecting sleeve by bolts.
9. The workpiece cleaning apparatus according to claim 7, characterized in that, The top of the soaking tank (2) is covered with a cover plate (6), and the cover plate (6) has a clearance hole corresponding to the stirring rod (41).
10. The workpiece cleaning apparatus according to claim 9, characterized in that, The first bracket (31), partition (32), workpiece bracket (33) and cover plate (6) are all made of corrosion-resistant materials.