Crystal oscillator replacement module and evaporation device

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and one embodiment of the utility model provides a crystal oscillator replacing module which comprises a connecting frame, and a convenient-to-replace structure is arranged at the top of the connecting frame; and the structure convenient to replace comprises a sliding groove and a threaded rod, the sliding groove is formed in the top of the connecting frame, a sliding block A and a sliding block B are slidably connected into the sliding groove, a supporting plate A is fixedly connected to the top of the sliding block A, and a supporting plate B is fixedly connected to the top of the sliding block B. According to the device disclosed by the invention, the retarding mechanism is arranged, so that when a rotating block is manually rotated to drive a threaded rod to rotate clockwise, the distance between a supporting plate A and a supporting plate B can be reduced, and the speed when the rotating block is manually rotated to drive the threaded rod to rotate clockwise is slowed down through cooperation of components such as a speed reduction rod, an arc-shaped block and a telescopic spring; and the damage to the crystal oscillator caused by too fast approaching and moving speed of the support plate A and the support plate B is prevented.

Description

Technical Field

[0001] The embodiments disclosed herein relate to the field of semiconductor manufacturing technology, and more specifically, to a crystal oscillator replacement module and an evaporation apparatus. Background Technology

[0002] Crystal oscillators are derived from polyhedral quartz rods, which are first cut into shiny hexahedral rods, and then repeatedly cut and ground until the quartz rods are finally made into a bunch of thin discs.

[0003] Utility model with publication number CN211921684U discloses a crystal oscillator replacement module and a vapor deposition device. The crystal oscillator replacement module includes a probe assembly, a storage assembly, and a replacement assembly. The storage assembly includes a storage box, a workpiece tray, a crystal oscillator assembly, and a first driving component. The workpiece tray is provided with multiple storage stations for placing the crystal oscillator assembly.

[0004] The aforementioned application document describes a method where a third driving component drives the top column to continue rising relative to the clamping arm, securing the crystal oscillator assembly. A second driving component then lowers the entire replacement assembly, separating it from the storage assembly and completing the crystal oscillator assembly replacement. However, this replacement process is rather cumbersome and can easily increase the burden on operators, thus requiring improvement. Utility Model Content

[0005] To overcome the above-mentioned defects, the embodiments of this disclosure provide a crystal oscillator replacement module and a vapor deposition apparatus, which solves the technical problem that the replacement steps in the related art are relatively cumbersome and easily increase the burden on operators.

[0006] According to one aspect, at least one embodiment of the present disclosure provides a crystal oscillator replacement module, including a connecting frame, the top of which is provided with a structure for easy replacement;

[0007] The easy-to-replace structure includes a slide groove and a threaded rod. The slide groove is located at the top of the connecting frame. Slider A and slider B are slidably connected inside the slide groove. Support plate A is fixedly connected to the top of slider A, and support plate B is fixedly connected to the top of slider B. Slots are provided on the top of both support plate A and support plate B. The threaded rod passes through and is rotatably connected to the front end of the connecting frame. A rotating block is fixedly connected to the front end of the threaded rod, and a slowing mechanism is provided on the surface of the threaded rod.

[0008] For example, in a vapor deposition apparatus for a crystal oscillator replacement module provided in at least one embodiment of this disclosure, the slider A and slider B are both connected to a threaded rod by built-in threads, and the threads on slider A and slider B are in opposite directions. When the threaded rod rotates, it will drive slider A to move closer or further apart through the cooperation between the threads.

[0009] Both support plate A and support plate B are strip-shaped and have the same length. The crystal oscillator is inserted into the slot between support plate A and support plate B.

[0010] The rotating block is cylindrical in shape and has anti-slip textures on its surface. The threaded rod can be rotated by manually rotating the rotating block.

[0011] According to another aspect, at least one embodiment of this disclosure also provides a vapor deposition apparatus for a crystal oscillator replacement module, comprising: a deceleration mechanism including a deceleration rod and a groove, the rear end of the deceleration rod being fixedly connected to the front end of a connecting frame, the groove being formed on the surface of a threaded rod, a telescopic spring being provided inside the groove, and an arc-shaped block being slidably connected inside the groove via the telescopic spring.

[0012] For example, at least one embodiment of this disclosure provides a crystal oscillator replacement module, which further includes: the top of the deceleration rod is close to the bottom of the threaded rod, and the deceleration rod is made of rubber. When the threaded rod rotates, it will cause the arc-shaped block to contact the deceleration rod.

[0013] In its initial state, one-third of the arc-shaped block protrudes from the surface of the threaded rod, and the arc surface of the arc-shaped block faces counterclockwise. When the arc surface of the arc-shaped block is subjected to force, it will move into the groove.

[0014] The front end of the vapor deposition machine is equipped with a closed door, and the interior of the vapor deposition machine is equipped with a vapor deposition tank. A placement rack is fixedly connected to the top of the vapor deposition tank.

[0015] The front end of the closed door is equipped with a handle, and the closed door is made of transparent glass, allowing observation of the interior of the vapor deposition machine through the transparent glass closed door.

[0016] The bottom of the connecting frame initially abuts against the top of the placement frame. The placement frame is hollowed out, and the connecting frame is placed through the hollowed-out placement frame.

[0017] The beneficial effects of the embodiments disclosed herein are as follows:

[0018] 1. In this disclosure, by setting up a convenient replacement structure, the distance between support plate A and support plate B can be reduced to accommodate crystal oscillators of different specifications when the rotating block is manually rotated to drive the threaded rod to rotate clockwise. When the crystal oscillators need to be removed at the end of the vapor deposition, the support plate A and support plate B are separated by driving the threaded rod to rotate counterclockwise, and all crystal oscillators can be removed at once, which is convenient for replacing the next batch of crystal oscillators.

[0019] 2. In this disclosure, by setting a slowing mechanism, when the distance between support plate A and support plate B is reduced by manually rotating the rotating block to drive the threaded rod to rotate clockwise, the speed of the manually rotating block to drive the threaded rod to rotate clockwise is slowed down by the cooperation of components such as the deceleration rod, the arc block, and the telescopic spring, so as to prevent support plate A and support plate B from moving too close together and damaging the crystal oscillator. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this disclosure, the accompanying drawings used in the description of the embodiments of this disclosure will be briefly introduced below. Obviously, the drawings described below are merely some exemplary embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on the content of the exemplary embodiments of this disclosure and these drawings without any creative effort.

[0021] Figure 1 This is a three-dimensional schematic diagram of the overall structure in this disclosure;

[0022] Figure 2 This is a three-dimensional schematic diagram of the overall structure in this disclosure;

[0023] Figure 3 This is a three-dimensional schematic diagram of the overall easily replaceable mechanism structure in this disclosure;

[0024] Figure 4 This is a three-dimensional sectional view of the mechanism structure that is easy to replace as a whole in this disclosure;

[0025] Figure 5 This is a three-dimensional sectional view of the deceleration mechanism structure in this disclosure;

[0026] Figure 6 For the purposes of this disclosure Figure 5 An enlarged view of the structure of A in the diagram.

[0027] In the diagram: 1. Connecting frame; 2. Evaporation machine body; 3. Enclosed door; 4. Evaporation tank; 5. Placement rack; 7. Easy-to-replace structure; 71. Slide groove; 72. Slider A; 73. Support plate A; 74. Slider B; 75. Support plate B; 76. Threaded rod; 77. Rotating block; 78. Slot; 8. Deceleration mechanism; 81. Deceleration rod; 82. Groove; 83. Telescopic spring; 84. Arc block. Detailed Implementation

[0028] The present disclosure will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present disclosure and are not intended to limit the scope of the disclosure.

[0029] To keep the drawings concise, each drawing only schematically shows the parts relevant to the disclosure; these do not represent the actual structure of the product. Furthermore, for ease of understanding, in some drawings, only one of components with the same structure or function is schematically shown, or only one is labeled. In this document, "one" not only means "only one," but can also mean "more than one," and "several" includes "two" and "more than two."

[0030] In this document, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linkage" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this disclosure based on the specific circumstances.

[0031] In this disclosure, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0032] In the description of this embodiment, terms such as "upper," "lower," "left," and "right" are based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of description and simplification of operation, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this disclosure.

[0033] Furthermore, in the description of this application, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0034] like Figures 1-6 As shown, a crystal oscillator replacement module according to an embodiment of the present disclosure includes a connecting frame 1, the top of which is provided with a convenient replacement structure 7;

[0035] The interchangeable structure 7 includes a slide groove 71 and a threaded rod 76. The slide groove 71 is located on the top of the connecting frame 1. Slider A72 and slider B74 are slidably connected inside the slide groove 71. A support plate A73 is fixedly connected to the top of slider A72, and a support plate B75 is fixedly connected to the top of slider B74. Slots 78 are provided on the top of both support plates A73 and B75. The threaded rod 76 passes through and is rotatably connected to the front end of the connecting frame 1. A rotating block 77 is fixedly connected to the front end of the threaded rod 76, and a slowing mechanism 8 is provided on the surface of the threaded rod 76.

[0036] In some examples, sliders A72 and B74 are both connected to the threaded rod 76 via built-in threads, and the threads on slider A72 and slider B74 are in opposite directions. When the threaded rod 76 rotates, it will cause slider A72 to move closer or further apart through the engagement of the threads.

[0037] Both support plate A73 and support plate B75 are strip-shaped, and the lengths of support plate A73 and support plate B75 are equal. The crystal oscillator is inserted through the slot 78 between support plate A73 and support plate B75.

[0038] The rotating block 77 is cylindrical in shape, and its surface is provided with anti-slip texture. The threaded rod 76 can be rotated by manually rotating the rotating block 77.

[0039] For example, as shown in the figure, when installing crystal oscillators, manually rotating the rotating block 77 causes the threaded rod 76 to rotate clockwise. The clockwise rotation of the threaded rod 76 causes sliders A72 and B74 to move closer together. This movement of sliders A72 and B74 causes support plates A73 and B75 to move closer together, thereby adjusting the distance between support plates A73 and B75. Then, the crystal oscillators are inserted through the slot 78 between support plates A73 and B75. When the evaporation process is complete and the next batch of crystal oscillators needs to be replaced, manually rotating the rotating block 77 causes the threaded rod 76 to rotate counterclockwise. This counterclockwise rotation of the threaded rod 76 causes sliders A72 and B74 to move away from each other, separating support plates A73 and B75. At this point, all crystal oscillators can be removed at once, facilitating the replacement of the next batch. The overall operation is simple and time-saving.

[0040] like Figures 1-6 As shown, a deceleration mechanism 8 in another embodiment of the present disclosure is illustrated, including a deceleration mechanism 8 deceleration rod 81 and a groove 82. The rear end of the deceleration rod 81 is fixedly connected to the front end of the connecting frame 1. The groove 82 is formed on the surface of the threaded rod 76. A telescopic spring 83 is provided inside the groove 82. An arc-shaped block 84 is slidably connected inside the groove 82 through the telescopic spring 83.

[0041] In some examples, the top of the deceleration lever 81 is close to the bottom of the threaded rod 76, and the deceleration lever 81 is made of rubber. When the threaded rod 76 rotates, it will cause the arc-shaped block 84 to come into contact with the deceleration lever 81.

[0042] In its initial state, one-third of the arc-shaped block 84 protrudes from the surface of the threaded rod 76, and the arc surface of the arc-shaped block 84 faces counterclockwise. When the arc surface of the arc-shaped block 84 is subjected to force, it will move into the groove 82.

[0043] The vapor deposition machine body 2 has a closed door 3 at its front end, and a vapor deposition tank 4 is installed inside the vapor deposition machine body 2. A placement rack 5 is fixedly connected to the top of the vapor deposition tank 4.

[0044] The front end of the closed door 3 is equipped with a handle, and the closed door 3 is made of transparent glass. The interior of the vapor deposition machine 2 can be observed through the closed door 3 made of transparent glass.

[0045] In its initial state, the bottom of the connecting frame 1 is in contact with the top of the placement frame 5. The placement frame 5 is hollowed out, and the connecting frame 1 is placed through the hollowed-out placement frame 5.

[0046] For example, as shown in the figure, when the rotating block 77 is manually rotated to drive the threaded rod 76 to rotate clockwise, causing the slider A72 and slider B74 to move closer together, the clockwise rotation of the threaded rod 76 will cause the straight surface of the arc-shaped block 84 to contact the deceleration rod 81. At this time, the arc-shaped block 84 and the rubber deceleration rod 81 are squeezed together, and the deceleration rod 81 deforms, generating greater resistance to prevent the support plate A73 and support plate B75 from moving too close and damaging the crystal oscillator. When the threaded rod 76 rotates counterclockwise, the arc surface of the arc-shaped block 84 will contact the deceleration rod 81. At this time, the arc surface of the arc-shaped block 84 will move into the groove 82 when it is under force. Then, the extension spring 83 will drive the arc-shaped block 84 to pop out and return to its original position. During this process, there will not be much resistance.

[0047] It should be noted that the above embodiments are only used to illustrate the technical solutions of this disclosure and are not intended to limit it. Although this disclosure has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this disclosure without departing from the spirit and scope of the technical solutions of this disclosure, and all such modifications and substitutions should be covered within the scope of the claims of this disclosure.

Claims

1. A crystal oscillator replacement module, characterized in that, Includes a connecting frame (1), the top of which is provided with a replacement structure (7); The easy-to-replace structure (7) includes a slide groove (71) and a threaded rod (76). The slide groove (71) is opened on the top of the connecting frame (1). Slider A (72) and slider B (74) are slidably connected inside the slide groove (71). Support plate A (73) is fixedly connected to the top of slider A (72). Support plate B (75) is fixedly connected to the top of slider B (74). Slots (78) are opened on the top of support plate A (73) and support plate B (75). The threaded rod (76) passes through and is rotatably connected to the front end of the connecting frame (1). Rotating block (77) is fixedly connected to the front end of the threaded rod (76). A slowing mechanism (8) is provided on the surface of the threaded rod (76).

2. The crystal oscillator replacement module according to claim 1, characterized in that, Both slider A (72) and slider B (74) are connected to the threaded rod (76) by built-in threads, and the threads on slider A (72) and slider B (74) are in opposite directions.

3. A crystal oscillator replacement module according to claim 2, characterized in that, Both support plate A (73) and support plate B (75) are strip-shaped, and the lengths of support plate A (73) and support plate B (75) are equal.

4. A crystal oscillator replacement module according to claim 3, characterized in that, The rotating block (77) is cylindrical in shape, and the surface of the rotating block (77) is provided with anti-slip texture.

5. A crystal oscillator replacement module according to claim 4, characterized in that, The deceleration mechanism (8) includes a deceleration rod (81) and a groove (82). The rear end of the deceleration rod (81) is fixedly connected to the front end of the connecting frame (1). The groove (82) is opened on the surface of the threaded rod (76). A telescopic spring (83) is provided inside the groove (82). An arc-shaped block (84) is slidably connected inside the groove (82) through the telescopic spring (83).

6. A crystal oscillator replacement module according to claim 5, characterized in that, The top of the deceleration lever (81) is close to the bottom of the threaded rod (76), and the deceleration lever (81) is made of rubber.

7. A crystal oscillator replacement module according to claim 6, characterized in that, In its initial state, one-third of the arc-shaped block (84) protrudes from the surface of the threaded rod (76), and the arc surface of the arc-shaped block (84) faces counterclockwise.

8. A vapor deposition apparatus, comprising a crystal oscillator replacement module as described in any one of claims 1-7, characterized in that, include: Evaporation body (2), the front end of the evaporation body (2) is provided with a closed door (3), the interior of the evaporation body (2) is provided with an evaporation tank (4), and the top of the evaporation tank (4) is fixedly connected with a placement rack (5). A connecting frame (1) is located inside the vapor deposition machine body (2). The top of the connecting frame (1) is provided with a convenient replacement structure (7). In the initial state, the bottom of the connecting frame (1) is in contact with the top of the placement frame (5).

9. The vapor deposition apparatus according to claim 8, characterized in that, The front end of the closed door (3) is provided with a handle, and the material of the closed door (3) is transparent glass.

10. A vapor deposition apparatus according to claim 8, characterized in that, The placement rack (5) is hollowed out as a whole.

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