Negative pressure type helium recovery system

Abstract

The utility model discloses a negative pressure type helium recovery system, which comprises a first pipeline, a second pipeline, a third pipeline and a fourth pipeline, the negative pressure recovery unit is used for generating negative pressure and collecting helium in the first pipeline, the negative pressure recovery unit is communicated with a high-pressure tank through a compressor, and the high-pressure tank is used for filling the workpiece with helium; the helium calibration unit is used for calibrating the working helium concentration of the high-pressure tank; the helium calibration unit comprises a second pipeline internally provided with pure helium, a third pipeline internally provided with compressed air and a helium concentration instrument, the second pipeline and the third pipeline are respectively connected with the helium concentration instrument through a concentration instrument calibration valve, and the helium concentration instrument is also connected with a high-pressure tank. According to the helium recycling device, the recycling efficiency and the helium recycling efficiency are improved. And meanwhile, the working helium concentration of the high-pressure tank is calibrated through the helium calibration unit, so that the use safety is ensured.

Description

Technical Field

[0001] This utility model relates to the technical field of helium recovery systems, and in particular to a negative pressure helium recovery system. Background Technology

[0002] Helium, a rare inert gas, plays an irreplaceable role in semiconductor manufacturing, aerospace, cryogenic superconductivity, and vacuum leak detection. However, helium resources are finite and non-renewable globally, and its market price continues to rise, leading to a significant increase in the cost of industrial applications. Therefore, efficient helium recovery systems have become key equipment for various industries to reduce production costs and achieve resource recycling.

[0003] Traditional helium recovery systems are mainly designed for high-pressure helium recovery. However, in low-pressure helium recovery scenarios (such as helium leaked during leak detection or helium discharged during equipment purging), there are problems such as low recovery efficiency and poor system integration. Utility Model Content

[0004] Therefore, it is necessary to provide a negative pressure helium recovery system to address the aforementioned technical problems.

[0005] A negative pressure helium recovery system includes:

[0006] The first pipe contains helium gas to be recovered;

[0007] A negative pressure recovery unit is used to generate negative pressure and collect helium gas in the first pipeline. The negative pressure recovery unit is connected to a high-pressure tank via a compressor. The high-pressure tank is used to fill the workpiece with helium.

[0008] A helium calibration unit is used to calibrate the working helium concentration of the high-pressure tank. The helium calibration unit includes a second pipe containing pure helium, a third pipe containing compressed air, and a helium concentration meter. The second pipe and the third pipe are respectively connected to the helium concentration meter via a concentration meter calibration valve. The helium concentration meter is also connected to the high-pressure tank.

[0009] In one embodiment, the negative pressure recovery unit includes a negative pressure tank and a vacuum pump connected to each other, the negative pressure tank being connected to the first pipeline, and the outlet of the vacuum pump being connected to the compressor.

[0010] In one embodiment, a shut-off valve is provided between the negative pressure tank and the vacuum pump.

[0011] In one embodiment, the second pipeline is connected to the negative pressure tank via a helium replenishment valve.

[0012] In one embodiment, the compressor is equipped with a gas reflux valve, and the compressor is also connected to a low-pressure tank via an automatic drain valve and an oil filter.

[0013] In one embodiment, the oil filter is connected to an automatic drain valve.

[0014] In one embodiment, a detection solenoid valve is provided between the high-pressure tank and the helium concentration meter.

[0015] The aforementioned negative pressure helium recovery system utilizes a negative pressure recovery unit to generate negative pressure for rapid helium recovery, effectively improving recovery efficiency. The helium is then pressurized by a compressor and sent to a high-pressure tank for use, further enhancing helium reuse efficiency. Simultaneously, a helium calibration unit calibrates the working helium concentration in the high-pressure tank, ensuring safe operation. Furthermore, the helium calibration unit can perform calibrations for both pure and helium-free concentrations, ensuring the accuracy of the helium concentration meter at all times. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the negative pressure helium recovery system of this utility model. Detailed Implementation

[0018] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Preferred embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.

[0019] It should be noted that when a component is said to be "fixed to" another component, it can be directly attached to the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component.

[0020] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0021] See Figure 1 As shown, one embodiment of this utility model provides a negative pressure helium recovery system, which includes:

[0022] First pipe 1, containing helium gas to be recovered;

[0023] The negative pressure recovery unit 2 is used to generate negative pressure and collect helium in the first pipeline 1. The negative pressure recovery unit 2 is connected to the high pressure tank 4 via the compressor 3. The high pressure tank 4 is used to fill the workpiece with helium.

[0024] A helium calibration unit is used to calibrate the working helium concentration of the high-pressure tank 4. The helium calibration unit includes a second pipe 5 containing pure helium, a third pipe 6 containing compressed air, and a helium concentration meter 7. The second pipe 5 and the third pipe 6 are respectively connected to the helium concentration meter 7 via a concentration meter calibration valve 8. The helium concentration meter 7 is also connected to the high-pressure tank 4. Specifically, during idle periods of helium concentration detection, the helium concentration meter 7 is calibrated with both pure helium and helium-free concentrations to ensure the accuracy of the helium concentration meter 7 at all times.

[0025] The aforementioned negative pressure helium recovery system utilizes negative pressure recovery unit 2 to generate negative pressure for rapid helium recovery, effectively improving recovery efficiency. The helium is then pressurized by compressor 3 and sent to high-pressure tank 4 for use, further enhancing helium reuse efficiency. Simultaneously, a helium calibration unit calibrates the working helium concentration in high-pressure tank 4, ensuring safe operation. Furthermore, the helium calibration unit can perform calibration for both pure and helium-free concentrations, ensuring the accuracy of the helium concentration meter at all times.

[0026] It should be noted that the compressor in this application can be a high-flow-rate helium compressor, so that one recovery system can be used to power multiple helium leak detection devices.

[0027] In one embodiment of this utility model, the negative pressure recovery unit 2 includes a negative pressure tank 9 and a vacuum pump 10 connected to each other. The negative pressure tank 9 is connected to the first pipeline 1, and the outlet of the vacuum pump 10 is connected to the compressor 3. Thus, the vacuum pump 10 can generate negative pressure in the negative pressure tank 9, utilizing this negative pressure to recover helium gas. This method boasts high recovery efficiency and a fast cycle time. Traditional designs, on the other hand, require multi-stage recovery, which consumes significant cycle time.

[0028] In one embodiment of this utility model, a shut-off valve 11 is provided between the negative pressure tank 9 and the vacuum pump 10. Thus, when the negative pressure in the negative pressure tank 9 reaches a certain pressure range, the shut-off valve 11 can maintain the pressure in the negative pressure tank 9.

[0029] In one embodiment of this utility model, the second pipeline 5 is connected to the negative pressure tank 9 via a helium replenishment valve 12. Specifically, the helium replenishment valve 12 can be a two-position one-way valve. When the helium replenishment valve 12 is opened, the second pipeline 5 can replenish pure helium to the negative pressure tank 9, thereby facilitating the adjustment of the helium concentration of the entire system.

[0030] In one embodiment of this utility model, the compressor 3 is equipped with a gas reflux valve 13, which can avoid frequent start-stop of the compressor 3 and protect its service life. Furthermore, the compressor 3 is connected to the low-pressure tank 18 via an automatic drain valve 14 and an oil filter 15.

[0031] In one embodiment of this utility model, the oil filter 15 is connected to an automatic drain valve 16. The automatic drain valve 16 can automatically discharge exhaust gas and water vapor.

[0032] In one embodiment of this utility model, a detection solenoid valve 17 is provided between the high-pressure tank 4 and the helium concentration meter 7. By opening or closing the detection solenoid valve 17, the detection of the helium concentration in the high-pressure tank 4 by the helium concentration meter 7 can be controlled or stopped.

[0033] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0034] The above-described embodiments are merely illustrative of several implementations of this utility model and should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A negative pressure helium recovery system, characterized in that, include: The first pipe contains helium gas to be recovered; A negative pressure recovery unit is used to generate negative pressure and collect helium gas in the first pipeline. The negative pressure recovery unit is connected to a high-pressure tank via a compressor. The high-pressure tank is used to fill the workpiece with helium. A helium calibration unit is used to calibrate the working helium concentration of the high-pressure tank. The helium calibration unit includes a second pipe containing pure helium, a third pipe containing compressed air, and a helium concentration meter. The second pipe and the third pipe are respectively connected to the helium concentration meter via a concentration meter calibration valve. The helium concentration meter is also connected to the high-pressure tank.

2. The negative pressure helium recovery system as described in claim 1, characterized in that, The negative pressure recovery unit includes a negative pressure tank and a vacuum pump connected to each other. The negative pressure tank is connected to the first pipeline, and the outlet of the vacuum pump is connected to the compressor.

3. The negative pressure helium recovery system as described in claim 2, characterized in that, A shut-off valve is provided between the negative pressure tank and the vacuum pump.

4. The negative pressure helium recovery system as described in claim 3, characterized in that, The second pipeline is connected to the negative pressure tank via a helium replenishment valve.

5. The negative pressure helium recovery system as described in claim 1, characterized in that, The compressor is equipped with a gas reflux valve, and the compressor is also connected to a low-pressure tank via an automatic drain valve and an oil filter.

6. The negative pressure helium recovery system as described in claim 5, characterized in that, The oil filter is connected to an automatic drain valve.

7. The negative pressure helium recovery system as described in claim 1, characterized in that, A detection solenoid valve is provided between the high-pressure tank and the helium concentration meter.

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