Clamping plug supporting box for wafer inspection

Abstract

The utility model discloses a clamping plug supporting box for wafer inspection, which relates to the field of wafer manufacturing devices and comprises a first shell, a base, a mounting frame, a sliding component, a supporting component and a control panel, the top of the base is obliquely arranged towards the left side or the right side along the horizontal direction, and the mounting frame is fixedly connected to the top of the base. The first shell is of a cavity structure with openings in the two ends, the first shell is connected to the exterior of the mounting frame in a sleeving mode, the top of the first shell is obliquely arranged forwards, the clamping plug body is embedded in the opening in the top of the first shell, a plurality of limiting grooves used for containing wafers are formed in the clamping plug body, and the sliding assembly is transversely arranged in the mounting frame; the supporting assembly is fixedly connected to the top of the moving end of the sliding assembly, and the control panel is arranged outside the first shell. According to the utility model, the automatic lifting operation of the wafer is realized, and the placement stability of the wafer is improved while the edge of the wafer is effectively prevented from being polluted.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing equipment, and in particular to a cassette for wafer inspection. Background Technology

[0002] In the wet cleaning process of semiconductor wafers, wafers are typically placed in specialized cassettes for cleaning and spin-drying, and then manually removed one by one for light inspection. However, existing technology has significant drawbacks in practical applications. Operators must manually remove the wafers from the cassettes, during which the wafer edges are prone to contamination or scratches due to direct contact with tools or unstable operation, resulting in wafer defects. Furthermore, the wafers are prone to shaking during handling, causing friction against the inner wall of the cassette, further increasing the risk of contamination.

[0003] Therefore, how to provide a wafer inspection cassette that can automate wafer lifting operations, effectively avoid contamination at the wafer edges, and improve wafer placement stability has become a technical problem that urgently needs to be solved by those in the field. Utility Model Content

[0004] The purpose of this invention is to provide a wafer inspection cassette that enables automated wafer lifting, effectively preventing contamination at the wafer edges while improving wafer placement stability.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model discloses a wafer inspection cassette, comprising a first housing, a base, a mounting frame, a sliding assembly, a lifting assembly, and a control panel. The top of the base is inclined to the left or right in the horizontal direction. The mounting frame is fixedly connected to the top of the base at a first inclination angle, and the top of the mounting frame is inclined forward in the vertical direction to form a second inclination angle. The first housing is a cavity structure with openings at both ends, and the inclination angle of the top of the first housing is consistent with the second inclination angle of the top of the mounting frame. The first housing is sleeved on the outside of the mounting frame. The cassette body is embedded in the top opening of the first housing, and the cassette body is provided with multiple limiting grooves for accommodating wafers. The sliding assembly is horizontally disposed inside the mounting frame. The lifting assembly is fixedly connected to the top of the moving end of the sliding assembly. The top of the mounting frame has a clearance hole for the lifting assembly to pass through, and the bottom of the cassette body has a corresponding opening for the working end of the lifting assembly to pass through. The control panel is disposed outside the first housing, and the sliding assembly and the lifting assembly are electrically connected to the control panel.

[0007] Preferably, the base includes a first support block and a second support block, the first support block and the second support block are symmetrically fixedly connected to the bottom of the mounting frame, and the height of the first support block is greater than the height of the second support block.

[0008] Preferably, the control panel includes a display screen, buttons, and a PLC controller. The display screen and buttons are integrated on the side wall of the first housing, and the PLC controller is embedded in the inner cavity of the first housing. The display screen, buttons, sliding assembly, and lifting assembly are all electrically connected to the PLC controller.

[0009] Preferably, the sliding assembly includes a first drive motor, a reciprocating lead screw, guide rods, and a slider. The first drive motor is fixedly connected to one side of the mounting frame. One end of the reciprocating lead screw is rotatably connected to the side wall of the mounting frame, and the other end of the reciprocating lead screw passes through the side wall of the mounting frame and is fixedly connected to the power output end of the first drive motor. Two guide rods are laterally arranged in the inner cavity of the mounting frame. The slider is slidably sleeved on the guide rods and threadedly connected to the reciprocating lead screw. The lifting assembly is fixedly connected to the top of the slider. The first drive motor is electrically connected to the PLC controller.

[0010] Preferably, the side wall of the first housing has a mounting hole for accommodating the first drive motor.

[0011] Preferably, the lifting assembly includes a second housing, a second drive motor, a gear, a toothed plate, and a support plate. The interior of the second housing is a cavity structure. A limiting hole matching the shape of the toothed plate is provided on the top of the second housing. The toothed plate is slidably connected to the second housing through the limiting hole. The second drive motor is fixedly connected to one side of the second housing, and the rotating end of the second drive motor extends inward through the side wall of the second housing. The gear is fixedly connected to the rotating end of the second drive motor and is located in the inner cavity of the second housing. The gear meshes with the toothed plate for transmission. The support plate is fixedly connected to the top of the toothed plate. The second drive motor is electrically connected to the PLC controller.

[0012] Preferably, the top of the tray is configured as a concave arc shape that matches the shape of the wafer.

[0013] Compared with the prior art, the beneficial technical effects of this utility model are as follows:

[0014] 1) Through the design of the split-type cassette body and the first housing, the cassette body and the first housing can be quickly and stably installed after the wafer is cleaned and dried. Combined with the dual tilt angles of tilting to the right in the horizontal direction and tilting forward in the vertical direction, the main surface of the wafer is ensured to be suspended above the limiting groove, completely avoiding contact contamination.

[0015] 2) The automated linkage control of the sliding component and the lifting component is precisely driven by the PLC controller to drive the first drive motor and the second drive motor. Through the reciprocating lead screw and gear plate transmission, the precise positioning and non-contact lifting of the wafer are realized, which significantly reduces the risk of scratches and secondary contamination caused by manual operation.

[0016] 3) The height difference design of the base support block and the structural optimization of the mounting frame effectively suppress wafer wobbling and improve wafer pick-up stability. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings.

[0018] Figure 1 This is a schematic diagram of the overall structure of a cassette for wafer inspection according to the present invention;

[0019] Figure 2 This is a cross-sectional view of the overall structure of a cassette holder for wafer inspection according to this utility model;

[0020] Figure 3 This is a schematic diagram of the connection structure between the sliding component and the supporting component of this utility model;

[0021] Figure 4 This is a schematic diagram of the structure of the lifting component of this utility model.

[0022] Explanation of reference numerals in the attached drawings: 1. First housing; 2. Plug body; 3. Base; 31. First support block; 32. Second support block; 4. Mounting frame; 5. Sliding assembly; 51. First drive motor; 52. Reciprocating lead screw; 53. Guide rod; 54. Slider; 6. Lifting assembly; 61. Second housing; 62. Second drive motor; 63. Gear; 64. Gear plate; 65. Support plate; 7. Control panel; 71. Display screen; 72. Button; 8. Chip. Detailed Implementation

[0023] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this utility model and are not intended to limit this utility model.

[0024] like Figure 1-4As shown, a wafer inspection cartridge includes a first housing 1, a base 3, a mounting frame 4, a sliding assembly 5, a lifting assembly 6, and a control panel 7. The top of the base 3 is inclined to the left or right in the horizontal direction. The mounting frame 4 is fixedly connected to the top of the base 3 at a first inclination angle, and the top of the mounting frame 4 is inclined forward in the vertical direction to form a second inclination angle. The first housing 1 is a hollow structure with openings at both ends, and the inclination angle of the top of the first housing 1 is consistent with the second inclination angle of the top of the mounting frame 4. The first housing 1 is sleeved on the outside of the mounting frame 4. The insert body 2 is embedded in the top opening of the first housing 1, and the insert body 2 is provided with a plurality of limiting grooves for accommodating the wafer 8. The sliding component 5 is arranged laterally inside the mounting frame 4. The lifting component 6 is fixedly connected to the top of the moving end of the sliding component 5. The top of the mounting frame 4 is provided with a clearance hole for the lifting component 6 to pass through. The bottom of the insert body 2 is correspondingly provided with an opening for the working end of the lifting component 6 to pass through. The control panel 7 is located outside the first housing 1, and the sliding component 5 and the lifting component 6 are both electrically connected to the control panel 7.

[0025] Specifically, in this embodiment, after the cartridge body 2 is embedded in the top of the first housing 1, it is tilted to the right at a first tilt angle in the horizontal direction, so that after the chip 8 is placed in the limiting groove of the cartridge body 2, the chip 8 can tilt to the right under its own weight. When placing the chip 8, the user can place the chip 8 with the back side facing the right and the main side facing the left in the limiting groove of the cartridge body 2 to prevent the main side of the chip 8 from contacting the limiting groove of the cartridge body 2, thereby preventing contamination of the chip 8. At the same time, the user can also change the first tilt angle of the top of the base 3 to make the cartridge body 2 tilt to the right in the horizontal direction.

[0026] Specifically, the cartridge body 2 is tilted forward at a second tilt angle in the vertical direction to facilitate the user's observation and chip removal operation of the wafer 8.

[0027] Specifically, the cartridge body 2 and the first housing 1 adopt a separate design. The user first places the wafers 8 to be processed one by one into the limiting groove of the cartridge body 2. After the wafer loading is completed, the cartridge body 2 is independently transferred to a wet cleaning device for cleaning and spin drying. After cleaning and spin drying are completed, the cartridge body 2 carrying the wafers 8 is embedded in the top opening of the first housing 1 by a snap-fit ​​method. The bottom of the cartridge body 2 and the top of the first housing 1 are provided with a positioning protrusion and groove matching structure to ensure stable installation and ensure that the back of the wafer 8 faces the right and the main surface faces the left. At this time, the first tilt angle of the cartridge body 2 tilting to the right in the horizontal direction and the second tilt angle of the cartridge body 2 tilting forward in the vertical direction are automatically aligned. The main surface of the wafer 8 is suspended above the limiting groove to avoid contact contamination.

[0028] Specifically, the base 3 includes a first support block 31 and a second support block 32. The first support block 31 and the second support block 32 are symmetrically fixedly connected to the bottom of the mounting frame 4, and the height of the first support block 31 is greater than the height of the second support block 32.

[0029] Specifically, the control panel 7 includes a display screen 71, buttons 72, and a PLC controller. The display screen 71 and buttons 72 are integrated on the side wall of the first housing 1, and the PLC controller is embedded in the inner cavity of the first housing 1. The display screen 71, buttons 72, sliding assembly 5, and lifting assembly 6 are all electrically connected to the PLC controller.

[0030] Specifically, the sliding assembly 5 includes a first drive motor 51, a reciprocating lead screw 52, ​​a guide rod 53, and a slider 54. The first drive motor 51 is fixedly connected to one side of the mounting frame 4. One end of the reciprocating lead screw 52 is rotatably connected to the side wall of the mounting frame 4, and the other end of the reciprocating lead screw 52 passes through the side wall of the mounting frame 4 and is fixedly connected to the power output end of the first drive motor 51. The two guide rods 53 are laterally arranged in the inner cavity of the mounting frame 4. The slider 54 is slidably sleeved on the guide rods 53, and the slider 54 is threadedly connected to the reciprocating lead screw 52. The lifting assembly 6 is fixedly connected to the top of the slider 54. The first drive motor 51 is electrically connected to the PLC controller.

[0031] Specifically, the side wall of the first housing 1 is provided with a mounting hole for accommodating the first drive motor 51.

[0032] Specifically, the lifting assembly 6 includes a second housing 61, a second drive motor 62, a gear 63, a toothed plate 64, and a support plate 65. The interior of the second housing 61 is a hollow structure. A limiting hole matching the shape of the toothed plate 64 is provided on the top of the second housing 61. The toothed plate 64 is slidably connected to the second housing 61 through the limiting hole. The second drive motor 62 is fixedly connected to one side of the second housing 61, and the rotating end of the second drive motor 62 extends inward after penetrating the side wall of the second housing 61. The gear 63 is fixedly connected to the rotating end of the second drive motor 62 and is located in the inner cavity of the second housing 61. The gear 63 is meshed and driven by the toothed plate 64. The support plate 65 is fixedly connected to the top of the toothed plate 64. The second drive motor 62 is electrically connected to the PLC controller.

[0033] Specifically, the top of the tray 65 is configured as a concave arc shape that matches the shape of the wafer 8.

[0034] Specifically, the size of the tray 65 matches the size of the limiting groove inside the plug body 2.

[0035] Specifically, both the first drive motor 51 and the second drive motor 62 are stepper motors.

[0036] The usage process of this utility model is as follows:

[0037] First, the operator places the wafers 8 to be processed one by one into the limiting groove of the cartridge body 2. Then, the loaded cartridge body 2 is transferred to a wet cleaning equipment for cleaning and spin drying.

[0038] Secondly, after cleaning and drying, the cartridge body 2 is embedded in the top opening of the first housing 1 by snap-fit, and the back of the chip 8 is facing the right and the main surface is facing the left. At this time, the first tilt angle of the cartridge body 2 tilting to the right in the horizontal direction and the second tilt angle tilting forward in the vertical direction are automatically aligned. The main surface of the chip 8 is suspended above the limiting groove to avoid contact with the groove and causing contamination.

[0039] Next, the device is started by pressing button 72 on the control panel 7. The PLC controller controls the first drive motor 51 of the sliding component 5 to drive the reciprocating screw 52 to rotate according to the preset program. The slider 54 slides laterally along the guide rod 53 to the corresponding position of the target chip 8. The clearance hole at the top of the mounting frame 4 and the opening at the bottom of the plug body 2 provide a movement channel for the lifting component 6.

[0040] Then, after the slider 54 is positioned, the PLC controller starts the second drive motor 62 of the lifting assembly 6, drives the gear 63 to rotate, and through the meshing transmission with the toothed plate 64, the toothed plate 64 rises vertically along the limiting hole of the second housing 61. The support plate 65 fixed on the top of the toothed plate 64 is lifted accordingly. Its concave arc surface fits the edge of the wafer 8, and smoothly lifts the wafer 8 away from the limiting groove. The operator observes the lifting status in real time through the display screen 71. After confirming that there is no problem, the wafer 8 is taken out for light inspection.

[0041] Finally, after the light inspection is completed, the PLC controller controls the second drive motor 62 to rotate in the opposite direction, causing the tray 65 to descend and reset; the sliding assembly 5 synchronously drives the slider 54 to return to its initial position. The operator can repeat the above process to inspect the next chip 8, or remove the cassette body 2 for batch replacement.

[0042] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0043] The embodiments described above are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Various modifications and improvements made to the technical solutions of the present utility model by those skilled in the art without departing from the spirit of the present utility model should fall within the protection scope defined by the claims of the present utility model.

Claims

1. A cartridge for wafer inspection, characterized in that: The system includes a first housing (1), a base (3), a mounting frame (4), a sliding assembly (5), a lifting assembly (6), and a control panel (7). The top of the base (3) is inclined to the left or right in the horizontal direction. The mounting frame (4) is fixedly connected to the top of the base (3) at a first inclination angle, and the top of the mounting frame (4) is inclined forward in the vertical direction to form a second inclination angle. The first housing (1) is a cavity structure with openings at both ends, and the inclination angle of the top of the first housing (1) is consistent with the second inclination angle of the top of the mounting frame (4). The first housing (1) is sleeved on the outside of the mounting frame (4), and the insert body (2) is embedded in it. At the top opening of the first housing (1), and within the insert body (2), there are multiple limiting grooves for accommodating the wafer (8). The sliding component (5) is horizontally disposed inside the mounting frame (4). The lifting component (6) is fixedly connected to the top of the moving end of the sliding component (5). The top of the mounting frame (4) is provided with a clearance hole for the lifting component (6) to pass through. The bottom of the insert body (2) is correspondingly provided with an opening for the working end of the lifting component (6) to pass through. The control panel (7) is disposed outside the first housing (1), and both the sliding component (5) and the lifting component (6) are electrically connected to the control panel (7).

2. A wafer inspection cartridge according to claim 1, characterized in that: The base (3) includes a first support block (31) and a second support block (32). The first support block (31) and the second support block (32) are symmetrically fixedly connected to the bottom of the mounting frame (4), and the height of the first support block (31) is greater than the height of the second support block (32).

3. A wafer inspection cartridge according to claim 1, characterized in that: The control panel (7) includes a display screen (71), buttons (72) and a PLC controller. The display screen (71) and buttons (72) are integrated on the side wall of the first housing (1). The PLC controller is embedded in the inner cavity of the first housing (1). The display screen (71), buttons (72), sliding assembly (5), and lifting assembly (6) are all electrically connected to the PLC controller.

4. A wafer inspection cartridge according to claim 3, characterized in that: The sliding assembly (5) includes a first drive motor (51), a reciprocating screw (52), a guide rod (53), and a slider (54). The first drive motor (51) is fixedly connected to one side of the mounting frame (4). One end of the reciprocating screw (52) is rotatably connected to the side wall of the mounting frame (4), and the other end of the reciprocating screw (52) passes through the side wall of the mounting frame (4) and is fixedly connected to the power output end of the first drive motor (51). The two guide rods (53) are arranged laterally in the inner cavity of the mounting frame (4). The slider (54) is slidably sleeved on the guide rods (53) and threadedly connected to the reciprocating screw (52). The lifting assembly (6) is fixedly connected to the top of the slider (54). The first drive motor (51) is electrically connected to the PLC controller.

5. A wafer inspection cartridge according to claim 4, characterized in that: The first housing (1) has a mounting hole on its side wall for accommodating the first drive motor (51).

6. A wafer inspection cartridge according to claim 4, characterized in that: The lifting assembly (6) includes a second housing (61), a second drive motor (62), a gear (63), a toothed plate (64), and a support plate (65). The interior of the second housing (61) is a cavity structure. A limiting hole matching the shape of the toothed plate (64) is provided on the top of the second housing (61). The toothed plate (64) is slidably connected to the second housing (61) through the limiting hole. The second drive motor (62) is fixedly connected to one side of the second housing (61), and the rotating end of the second drive motor (62) extends inward after penetrating the side wall of the second housing (61). The gear (63) is fixedly connected to the rotating end of the second drive motor (62) and is located in the inner cavity of the second housing (61). The gear (63) is meshed and driven by the toothed plate (64). The support plate (65) is fixedly connected to the top of the toothed plate (64). The second drive motor (62) is electrically connected to the PLC controller.

7. A wafer inspection cartridge according to claim 6, characterized in that: The top of the tray (65) is configured as a concave arc shape that matches the shape of the wafer (8).

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