Automatic silicon wafer discharging device and silicon wafer production equipment

Abstract

The utility model provides an automatic silicon wafer blanking device and silicon wafer production equipment, the automatic silicon wafer blanking device comprises a blanking station used for accommodating a blanking basket, a material receiving station used for accommodating a material receiving basket and a wafer pushing arm, the wafer pushing arm is driven by a wafer pushing linear module, and the wafer pushing linear module is used for pushing the material receiving basket. The feeding station moves along the connecting line direction of the discharging station and the receiving station; a first basket conveying station and a second basket conveying station are arranged on the two sides of the discharging station respectively, the silicon wafer automatic discharging device comprises a basket conveying assembly, and the basket conveying assembly can convey discharging baskets between the first basket conveying station and the discharging station and between the discharging station and the second basket conveying station. Through the arrangement of the blanking station, the receiving station, the wafer pushing arm and the like, the function of automatically blanking in silicon wafer production equipment in which an inner wafer basket and an outer wafer basket are not universal is realized, the manual intervention can be reduced, the silicon wafer pollution or breakage risk caused by the manual intervention is reduced, and the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer production technology, and in particular to an automated silicon wafer feeding device and silicon wafer production equipment. Background Technology

[0002] Silicon wafer manufacturing processes include polishing, cleaning, grooving, and electroplating. Each of these processes corresponds to different silicon wafer production equipment. This equipment needs to be designed according to production process requirements and factory space planning. To make efficient use of the internal space of the equipment (increasing equipment integration to reduce the occupation of factory space) and to coordinate or avoid with other mechanical structures inside the equipment, the wafer baskets inside some silicon wafer production equipment have special dimensions or shapes in their outer contours. Therefore, they are not interchangeable with the wafer baskets used for silicon wafer transfer outside the equipment.

[0003] For example, in the cleaning process of small-sized (generally including 5-inch, 6-inch, and 8-inch) silicon wafers, the trough-type basket cleaning machine commonly used has the same number of slots and slot spacing as the external silicon wafer transfer baskets. However, the outer contour dimensions of the internal baskets are smaller, and they may have special limiting structures (such as grooves or protrusions adapted to other internal structures of the cleaning machine). These internal baskets are customized with the equipment and cannot be replaced by other baskets, nor can they be arbitrarily transferred out of the cleaning machine. Thus, when the silicon wafers need to be transferred to other production processes after cleaning, a silicon wafer handover operation occurs: the silicon wafers in the internal baskets of the cleaning machine are transferred to the external silicon wafer transfer baskets, and then the external silicon wafer transfer baskets are transferred by AGVs or robotic arms.

[0004] In traditional operation, the transfer of silicon wafers between the inner wafer basket and the outer wafer transfer basket of the cleaning machine is done manually. However, when workers handle the wafers, they are prone to contamination and breakage, and manual handling of wafers is inefficient. Utility Model Content

[0005] The purpose of this invention is to provide an automated silicon wafer feeding device and silicon wafer production equipment to solve the problems mentioned above.

[0006] The technical solution adopted by this utility model is: an automated silicon wafer unloading device, comprising:

[0007] A material unloading station used to accommodate a material unloading basket.

[0008] A receiving station used to hold a receiving basket.

[0009] The pusher arm is driven by the pusher linear module and moves along the line connecting the unloading station and the receiving station.

[0010] Preferably, a basket transfer station one and a basket transfer station two are respectively arranged on both sides of the unloading station. The automated silicon wafer unloading device includes a basket transfer assembly, which can transfer the unloading basket between the basket transfer station one and the unloading station, and between the unloading station and the basket transfer station two.

[0011] Preferably, the first basket transfer station is equipped with a rotating basket platform and a rotating motor. The rotating basket platform includes a first backboard and a second backboard that are perpendicular to each other. The output end of the rotating motor is connected to the rotating basket platform and can drive the rotating basket platform to rotate 90° around the intersection line of the first backboard and the second backboard.

[0012] Preferably, the second basket transfer station is configured with a third backboard, and the second and third backboards are respectively configured with a transfer groove with an opening facing the unloading station; the unloading station is configured with a first basket placement platform and a second basket placement platform, the first and second basket placement platforms have a basket transfer gap, and the basket transfer assembly can move within the transfer groove and the basket transfer gap.

[0013] Preferably, the basket transfer assembly includes a basket transfer linear module and a basket transfer platform. The basket transfer linear module can drive the basket transfer platform to move along the dispersion directions of the basket transfer station one, the unloading station and the basket transfer station two. The basket transfer platform is provided with a plurality of basket limiting blocks for limiting the unloading basket.

[0014] Preferably, the second backboard, the third backboard, the first basket platform, and the second basket platform are each provided with a basket limiting block 2; the basket passing assembly includes a lifting module, which is configured on the basket passing linear module and is used to lift the basket passing platform.

[0015] Preferably, the flip-up basketball stand includes a mounting plate, the mounting plate and the second backboard are respectively located on both sides of the first backboard, the mounting plate is provided with a telescopic device, the movable end of the telescopic device is connected to a basketball limiting block three, and the first backboard is provided with a through groove corresponding to the position of the basketball limiting block three.

[0016] Preferably, the pusher arm includes a first support arm and a second support arm. The first support arm connects the second support arm and the pusher linear module. The second support arm extends in the same direction as the pusher linear module, and a C-shaped push block is provided at its end facing the unloading station. The opening of the C-shaped push block faces the unloading station.

[0017] Preferably, the unloading station is equipped with a push block sensor, which is used to detect the position of the C-shaped push block.

[0018] The technical solution of this utility model also includes: a silicon wafer production equipment, wherein the silicon wafer production equipment is equipped with the above-mentioned automated silicon wafer feeding device; the silicon wafer production equipment includes at least a silicon wafer cleaning device.

[0019] The beneficial effects of this utility model are: by setting up a feeding station, a receiving station, a wafer pusher arm, etc., it realizes the function of automated feeding in silicon wafer production equipment where the inner and outer wafer baskets are not interchangeable, which can reduce manual intervention, reduce the risk of silicon wafer contamination or breakage, and improve production efficiency. Attached Figure Description

[0020] Figure 1 This is a top view of an embodiment of the present utility model;

[0021] Figure 2 This is a schematic diagram showing the distribution of the unloading station, basket transfer station one, and basket transfer station two in an embodiment of this utility model.

[0022] Figure 3 This is a structural diagram of the pusher arm in an embodiment of this utility model;

[0023] Figure 4 This is a structural diagram of the flipping basket platform in an embodiment of this utility model.

[0024] In the picture:

[0025] 1. Material unloading station; 1-1. Basket placement platform one; 1-2. Basket placement platform two; 1-3. Basket passing gap;

[0026] 2. Material receiving station;

[0027] 3. Passing station 1; 3-1. Flipping basket stand; 3-11. Backboard placement 1; 3-12. Backboard placement 2; 3-2. Flipping motor; 3-3. Mounting plate; 3-4. Telescopic device;

[0028] 4. Passing position two; 4-1. Backboard position three;

[0029] 5. Pusher arm; 5-1. Support arm one; 5-2. Support arm two; 5-3. C-shaped push block; 5-4. Connecting plate;

[0030] 6. Linear pusher module;

[0031] 7. Basketball passing assembly; 7-1. Basketball passing straight module; 7-2. Basketball passing table; 7-3. Lifting module;

[0032] 8. Push block sensor;

[0033] 9. Inverted L-shaped support rod;

[0034] 10. Conveyor slot;

[0035] 11. Basketball limit block one;

[0036] 12. Basketball limit block two;

[0037] 13. Basketball limit block three;

[0038] 14. Basketball limit block four. Detailed Implementation

[0039] The technical solutions of the embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0040] In the description of the embodiments of this utility model, it should be understood that the terms "top," "bottom," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, it should be noted that unless otherwise expressly specified and limited, the terms "set" and "connected" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication of two elements. Those skilled in the art can understand the specific meaning of the above terms in this utility model through specific circumstances.

[0041] This utility model provides an automated silicon wafer unloading device and a silicon wafer production equipment equipped with such an automated silicon wafer unloading device. The aim is to automatically transfer silicon wafers from the internal wafer baskets to the external wafer transfer baskets in silicon wafer production equipment where the internal and external wafer baskets are not interchangeable. This avoids the risks of contamination and breakage caused by manual wafer handling and improves the automation level and production efficiency of the silicon wafer production equipment. For simplicity and clarity, the structure of this technical solution is described below using a trough-type basket cleaning machine (hereinafter referred to as the cleaning machine) as an example, but this is not intended to limit the scope of protection of this technical solution. Any silicon wafer equipment containing the automated silicon wafer unloading device provided by this technical solution, where the internal and external wafer baskets are not interchangeable, should be included within the scope of protection of this technical solution.

[0042] Reference Appendix Figure 1-4 The automated silicon wafer unloading device provided in this embodiment includes the following structure: unloading station 1, receiving station 2, wafer pusher arm 5, and wafer pusher linear module 6. The wafer pusher arm 5, unloading station 1, and receiving station 2 are arranged in sequence. The wafer pusher linear module 6 is connected to the wafer pusher arm 5. The unloading station 1 is used to accommodate the unloading basket (i.e., the special wafer basket inside the cleaning machine). The receiving station 2 is used to accommodate the receiving basket (i.e., the wafer basket for silicon wafer transfer outside the cleaning machine). The wafer pusher linear module 6 can be connected to the main control system of the cleaning machine and is controlled by the main control system to drive the wafer pusher arm 5 to move along the line connecting the unloading station 1 and the receiving station 2.

[0043] After the silicon wafers are cleaned, the internal structures of the cleaning machine, such as the robotic arm, conveyor belt, and conveyor chain, place the unloading basket containing the silicon wafers in unloading station 1. The external structures of the cleaning machine, such as the AGV and robotic arm, place the receiving basket for receiving the wafers in receiving station 2. After both the unloading basket and the receiving basket are in place, the wafer pushing linear module 6 is activated, causing the wafer pushing arm 5 to push the silicon wafers in the unloading basket to the receiving basket in batches, thus realizing the automated unloading of silicon wafers.

[0044] Reference Appendix Figure 3 The pusher arm 5 includes a first support arm 5-1 and a second support arm 5-2. The first support arm 5-1 connects the second support arm 5-2 and the pusher linear module 6. The second support arm 5-2 extends in the same direction as the pusher linear module 6, and its end facing the unloading station 1 is provided with a C-shaped pusher block 5-3. The opening of the C-shaped pusher block 5-3 faces the unloading station 1. As the pusher linear module 6 drives the pusher arm 5 to move, the C-shaped pusher block 5-3 continuously approaches the unloading basket in the unloading station 1 until the C-shaped pusher block 5-3 extends into the unloading basket, gradually pushing the silicon wafer into the receiving basket. Since the opening of the C-shaped pusher 5-3 faces the unloading station 1, the C-shaped pusher 5-3 makes two-point contact with the silicon wafer. Compared with the arc-shaped pusher, its contact area with the silicon wafer is smaller, which can reduce contamination or damage to the silicon wafer. Compared with the pusher that makes single-point contact with the silicon wafer, it has more contact points with the silicon wafer, which can ensure the stability and smoothness of pushing the silicon wafer.

[0045] To minimize contamination or damage to the silicon wafer, the C-shaped pusher 5-3 is made of polyurethane and is detachably connected to the pusher arm 5. The polyurethane material effectively reduces rigid collisions with the silicon wafer, reducing the risk of fragmentation. The C-shaped pusher 5-3 can be directly connected to the second support arm 5-2, or a connecting plate 5-4 of the corresponding size to the C-shaped pusher 5-3 can be constructed on the second support arm 5-2. The connecting plate 5-4 is then connected to the C-shaped pusher 5-3 by bolts. The connecting plate 5-4 increases the contact area between the C-shaped pusher 5-3 and the pusher arm 5, improving connection stability.

[0046] To ensure proper wafer placement, a pusher sensor 8 is installed on the unloading station 1. The pusher sensor 8 can be connected to the main control system of the cleaning machine to detect the position of the C-shaped pusher 5-3. The pusher sensor 8 can be an existing sensor such as a photoelectric sensor or an infrared sensor. It can be directly installed on the unloading station 1 or suspended above the unloading station 1 via an inverted L-shaped support rod 9. When the C-shaped pusher 5-3 completely pushes the silicon wafer from the unloading basket into the receiving basket, the position of the C-shaped pusher 5-3 corresponds to that of the pusher sensor 8. The pusher sensor 8 transmits the sensing signal to the main control system, which then regulates the operation of each structure in this automated unloading device to prepare for the unloading of the next unloading basket.

[0047] To ensure the effective operation of the unloading process, the openings of the unloading basket and the receiving basket should face each other before the pusher arm 5 pushes the wafer. The receiving basket is picked up and transported by an external AGV or robotic arm, so the orientation of the receiving basket is easy to control. Before being placed at unloading station 1, the unloading basket needs to carry the silicon wafers through different stations inside the cleaning machine. To prevent the silicon wafers from slipping and falling, the opening of the unloading basket should face upwards during the silicon wafer cleaning process. Since the orientation of the unloading basket is different during silicon wafer cleaning and at unloading station 1, the unloading basket needs to be flipped.

[0048] Therefore, this embodiment also includes a basket transfer station 3 and a basket transfer assembly 7. The basket transfer assembly 7 can transfer the unloading basket between the basket transfer station 3 and the unloading station 1. The basket transfer station 3 includes a rotating basket platform 3-1 and a rotating motor 3-2. The rotating motor 3-2 can be connected to the main control system of the cleaning machine and controlled by the main control system. It is used to rotate the unloading basket located on the rotating basket platform 3-1 by 90°, so that its basket opening changes from facing upward to facing the side, and is then transferred by the basket transfer assembly 7 to the unloading station 1.

[0049] Reference Appendix Figure 4 The rotating basketball stand 3-1 includes two perpendicular backboards, 3-11 and 3-12. The output of the rotating motor 3-2 is connected to the rotating basketball stand 3-1, which can drive the rotating basketball stand 3-1 to rotate 90° around the intersection line of the backboards 3-11 and 3-12. Before the rotation, the backboard 3-11 is horizontal and the backboard 3-12 is vertical. After the rotation, the backboard 3-11 is vertical and the backboard 3-12 is horizontal. The position of the backboard 3-12 after the rotation corresponds to the unloading station 1.

[0050] The basket transfer assembly 7, which can transfer the unloading basket between basket transfer station 3 and unloading station 1, includes a basket transfer linear module 7-1 and a basket transfer platform 7-2. The basket transfer linear module 7-1 can drive the basket transfer platform 7-2 to move along the dispersing direction of basket transfer station 3 and unloading station 1. In order to enable the basket transfer platform 7-2 to contact the unloading basket and move smoothly between the basket transfer station 1-3 and the unloading station 1, this embodiment has a transfer groove 10 with an opening facing the unloading station 1 on the basket placement platform 2-3-12, and a basket placement platform 1-1 and a basket placement platform 2-2 are constructed at the unloading station 1. There is a basket transfer gap 1-3 between the basket placement platform 1-1 and the basket placement platform 2-2. The transfer groove 10 and the basket transfer gap 1-3 serve as the accommodating space for the basket transfer platform 7-2, which not only enables the basket transfer platform 7-2 to contact the unloading basket, but also enables the basket transfer platform 7-2 to move unimpeded between the basket transfer station 1-3 and the unloading station 1.

[0051] After unloading is completed, the empty unloading basket needs to be removed from unloading station 1 in a timely manner. This is to facilitate the transfer of the next unloading basket to this station for unloading, and also because the empty unloading basket needs to be transferred to other stations within the cleaning machine for quality inspection and reused for cleaning silicon wafers. To prevent the robotic arm or other structures used to transfer the unloading basket from colliding with the mechanical structures at unloading station 1, this embodiment preferably uses the basket transfer assembly 7 to remove the empty unloading basket. Therefore, this embodiment includes a basket transfer station 4, as shown in the attached diagram. Figure 2 The second basket passing station 4 and the first basket passing station 3 are located on both sides of the unloading station 1. The second basket passing station 4 is equipped with a third backboard 4-1. The third backboard 4-1, the unloading station 1, and the flipped second backboard 3-12 are distributed in a straight line. Similarly, the third backboard 4-1 is also equipped with a conveying groove 10. The direction of the conveying groove 10 is also towards the unloading station 1. That is, the openings of the conveying grooves 10 on the second backboard 3-12 and the third backboard 4-1 are opposite each other. The conveying groove 10 on the third backboard 4-1 also works in conjunction with the basket passing gap 1-3 of the unloading station 1, so that the basket passing platform 7-2 can contact the unloading basket and that the basket passing platform 7-2 can be driven by the basket passing linear module 7-1 to move unobstructed between the unloading station 1 and the second basket passing station 4, so that the basket passing assembly 7 can pass the unloading basket between the unloading station 1 and the second basket passing station 4.

[0052] To ensure the stability of the feeding basket during movement and feeding, and to guarantee the orderly progress of the feeding operation, this embodiment includes several basket limiting blocks 11 on the basket transfer platform 7-2, and basket limiting blocks 22 on the backboards 3-12, 4-1, 1-1, and 1-2. Both basket limiting blocks 11 and 22 are used to limit the feeding basket, but their distribution positions differ. Generally, to ensure the stability of the feeding basket at a certain station in the washing machine, a protruding strip (existing technology) is provided on the feeding basket, and the corresponding station in the washing machine is provided with a groove structure or block structure that engages with the protruding strip. The basket limiting blocks 11 and 22 can be located on opposite sides of the protruding strip, ensuring that the basket transfer platform 7-2 does not interfere with other basket platforms or backboards. For example, basket limiting block 11 can be located inside the upper protrusion of the feeding basket, and basket limiting block 2 12 can be located outside the upper protrusion of the feeding basket.

[0053] However, when basket limit block 11 and basket limit block 2 12 are present, the basket transfer assembly 7 cannot directly move the unloading basket laterally. Therefore, a lifting module 7-3 needs to be constructed on the basket transfer linear module 7-1, and the basket transfer platform 7-2 is placed on top of the lifting module 7-3. The lifting module 7-3 can be connected to the main control system of the washing machine. When it is necessary to transfer the unloading basket, the lifting module 7-3 is activated to raise the basket transfer platform 7-2, so that the basket transfer platform 7-2 raises the unloading basket to separate from the basket limit block 2 12. Then the basket transfer linear module 7-1 is activated to transfer the unloading basket to other basket platforms or backboards. Then the lifting module 7-3 is activated to lower the basket transfer platform 7-2, and the unloading basket is lowered and connected to the corresponding basket limit block 2 12. The lifting module 7-3 continues to lower the basket transfer platform 7-2 to a height that does not conflict with the basket platform or backboard corresponding to the unloading basket at this time, and then it is removed and reset by the basket transfer linear module 7-1.

[0054] In addition, to further improve the stability of the feeding basket, the rotating basket platform 3-1 of this embodiment is also equipped with a mounting plate 3-3. The mounting plate 3-3 and the second placement basket 3-12 are located on both sides of the first placement basket 3-11. The mounting plate 3-3 is equipped with a telescopic device 3-4. The movable end of the telescopic device 3-4 is connected to the basket limiting block 3-13. The first placement basket 3-11 is equipped with a through groove corresponding to the position of the basket limiting block 3-13. The telescopic device 3-4 can be connected to the main control system of the washing machine and is controlled by it to extend and retract. When the unloading basket is placed on the horizontal support plate 3-11, the telescopic device 3-4 extends, causing the basket limiting block 3-13 to move into the through groove and limit the unloading basket. During the 90° rotation of the flipping basket platform 3-1, the basket limiting block 2-12 on the support plate 3-12 and the basket limiting block 3-13 on the support plate 3-11 simultaneously limit the basket to ensure its rotation stability. When the support plate 2-12 is flipped to the horizontal, the telescopic device 3-4 shortens, causing the basket limiting block 3-13 to separate from the through groove, that is, to separate the limiting block 3 from the unloading basket, so that the basket transfer assembly 7 can transfer the unloading basket to the unloading station 1.

[0055] As for receiving station 2, a regular placement platform can be constructed, and a basket limiting block 4 14 can also be constructed on the placement platform to limit the receiving basket.

[0056] The aforementioned linear pusher module 6, linear basket transfer module 7-1, and lifting module 7-3 can all employ a combination of servo motors, linear guides, slide blocks, and chain drive mechanisms (or threaded drive mechanisms). Alternatively, existing equipment such as cylinders and hydraulic rods (and telescopic devices 3-4) can be used; their structures and assembly are existing technologies in this field and will not be elaborated upon here. Furthermore, some more conventional brackets and supports are also not described in detail and can be designed and configured by those skilled in the art according to actual needs.

[0057] In addition, basket sensors can be installed at basket transfer station 3, unloading station 1, basket transfer station 4, and receiving station 2 of this device. The basket sensors can still use existing sensors such as photoelectric sensors and infrared sensors to detect the position of the unloading basket and the receiving basket, ensuring the accuracy of automated unloading operations. Of course, these basket sensors can also be installed on structures such as robotic arms used to transfer the unloading basket to basket transfer station 3, or on AGV vehicles or robotic arms used to transfer the receiving basket to receiving station 2. When these basket sensors detect the unloading basket and the receiving basket, the accuracy of automated unloading operations is ensured by time signals such as the time consumed by the flipping action of the flipping motor 3-2, the response time of the basket transfer assembly 7, and the time consumed by the basket transfer.

[0058] This embodiment provides a silicon wafer production equipment, such as a silicon wafer cleaning equipment, or other silicon wafer production equipment with incompatible inner and outer wafer baskets. The silicon wafer production equipment is equipped with the aforementioned automated silicon wafer unloading device, which can automatically and efficiently complete the unloading of silicon wafers.

[0059] Compared with the prior art, the beneficial effects of this utility model include: by setting up the unloading station 1, the receiving station 2, the wafer pusher arm 5, etc., the automated unloading function is realized in silicon wafer production equipment where the inner and outer wafer baskets are not interchangeable, which can reduce manual intervention, reduce the risk of silicon wafer contamination or breakage, and improve production efficiency.

[0060] The above are preferred embodiments of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. An automated silicon wafer unloading device, characterized in that, include: A material unloading station used to accommodate a material unloading basket. A receiving station used to hold a receiving basket. The pusher arm is driven by the pusher linear module and moves along the line connecting the unloading station and the receiving station.

2. The automated silicon wafer unloading device according to claim 1, characterized in that, The unloading station has a basket transfer station one and a basket transfer station two on its two sides respectively. The automated silicon wafer unloading device includes a basket transfer assembly, which can transfer the unloading basket between the basket transfer station one and the unloading station, and between the unloading station and the basket transfer station two.

3. The automated silicon wafer unloading device according to claim 2, characterized in that, The basket passing station is equipped with a rotating basket platform and a rotating motor. The rotating basket platform includes a first backboard and a second backboard that are perpendicular to each other. The output end of the rotating motor is connected to the rotating basket platform and can drive the rotating basket platform to rotate 90° around the intersection line of the first backboard and the second backboard.

4. The automated silicon wafer unloading device according to claim 3, characterized in that, The second basket-passing station is equipped with a third backboard, and the second and third backboards are respectively equipped with a conveying groove with an opening facing the unloading station; the unloading station is equipped with a first basket-passing platform and a second basket-passing platform, and the first and second basket-passing platforms have a basket-passing gap, and the basket-passing assembly can move within the conveying groove and the basket-passing gap.

5. The automated silicon wafer unloading device according to claim 4, characterized in that, The basket transfer assembly includes a basket transfer linear module and a basket transfer platform. The basket transfer linear module can drive the basket transfer platform to move along the dispersion directions of the basket transfer station one, the unloading station and the basket transfer station two. The basket transfer platform is provided with a plurality of basket limiting blocks for limiting the position of the unloading basket.

6. The automated silicon wafer unloading device according to claim 5, characterized in that, The second backboard, the third backboard, the first basket platform, and the second basket platform are each equipped with a basket limiting block 2; the basket passing assembly includes a lifting module, which is mounted on the basket passing linear module and is used to lift the basket passing platform.

7. The automated silicon wafer unloading device according to any one of claims 3-6, characterized in that, The flip-up basketball platform includes a mounting plate, which and the second backboard are located on opposite sides of the first backboard. The mounting plate is equipped with a telescopic device, and the movable end of the telescopic device is connected to a basketball limiting block three. The first backboard is equipped with a through groove corresponding to the position of the basketball limiting block three.

8. The automated silicon wafer unloading device according to any one of claims 1-6, characterized in that, The pusher arm includes a first support arm and a second support arm. The first support arm connects the second support arm and the pusher linear module. The second support arm extends in the same direction as the pusher linear module, and a C-shaped pusher block is provided at its end facing the unloading station. The opening of the C-shaped pusher block faces the unloading station.

9. The automated silicon wafer unloading device according to claim 8, characterized in that, The unloading station is equipped with a push block sensor, which is used to detect the position of the C-shaped push block.

10. A silicon wafer manufacturing equipment, characterized in that, The silicon wafer production equipment is equipped with an automated silicon wafer unloading device as described in any one of claims 1-9; the silicon wafer production equipment includes at least a silicon wafer cleaning device.

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