Quick clamping jig for electrostatic chuck

Abstract

The utility model discloses a rapid clamping jig of an electrostatic chuck. The rapid clamping jig comprises a working table, a clamping device and a clamping device, the clamping jig base is fixedly arranged on the working table; one end of the supporting rod is fixedly arranged on the clamping jig base; the rotating base is rotationally arranged at the other end of the supporting rod, and the position and the direction of the rotating base are adjusted through rotation; and the electrostatic chuck clamp is arranged above the rotating base and is used for fixing an electrostatic chuck. The electrostatic chuck fixture can solve the problems that the electrostatic chuck fixture needs to be replaced back and forth during the installation of the electrostatic chuck, and the electrostatic chuck may be damaged during the replacement of the electrostatic chuck fixture.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and in particular to a quick clamping fixture for an electrostatic chuck. Background Technology

[0002] In the clamping and processing of electrostatic chucks, traditional clamping fixtures can only clamp a single model or size of electrostatic chuck. When it is necessary to change to a different model or size of electrostatic chuck, the electrostatic chuck fixture often needs to be changed as well. This replacement process is very cumbersome and is more likely to cause scratches, damage and contamination to the electrostatic chuck.

[0003] To reduce the occurrence of such situations and simplify the assembly process, this utility model designs a quick clamping fixture that can adapt to various models or sizes of electrostatic chucks. Within a certain range, it can adapt to and install electrostatic chucks of different models or sizes using only a fixed electrostatic chuck fixture.

[0004] The statements herein provide only background information relating to this invention and do not necessarily constitute prior art. Utility Model Content

[0005] The purpose of this invention is to provide a quick clamping fixture for electrostatic chucks, which can solve the problem of needing to change electrostatic chuck clamps back and forth during electrostatic chuck installation, and the potential damage to the electrostatic chuck during the replacement of the electrostatic chuck clamps.

[0006] To achieve the above objectives, this utility model provides a quick clamping fixture for electrostatic chucks, comprising:

[0007] Work surface;

[0008] The clamping fixture base is fixedly mounted on the worktable surface;

[0009] A support rod, one end of which is fixedly mounted on the base of the clamping fixture;

[0010] A rotating base is rotatably mounted on the other end of the support rod, and its position and orientation can be adjusted by rotation.

[0011] An electrostatic chuck clamp is positioned above the rotating base to fix the electrostatic chuck.

[0012] Optionally, the connection between the rotating base and the support rod is fixed by a ratchet positioning structure to enable the rotating base to rotate on the support rod.

[0013] Optionally, the rotating base is provided with a plurality of first mounting parts on the side facing the electrostatic chuck clamp for mounting and fixing various models of electrostatic chuck clamps;

[0014] The electrostatic chuck clamp has multiple second mounting parts on one side facing the rotating base, which are used to match and install each of the first mounting parts one by one.

[0015] Optionally, the first mounting part is a plurality of insertion holes, and the second mounting part is a plurality of protruding structures; or, the first mounting part is a plurality of protruding structures, and the second mounting part is a plurality of insertion holes; the position, size, and shape of the protruding structures can all match the insertion holes one by one.

[0016] Optionally, the electrostatic chuck clamp has multiple threaded holes on the side facing away from the rotating base to accommodate and fix electrostatic chucks of different sizes.

[0017] Optionally, the multi-turn threaded holes are distributed on the outer ring, middle ring, and inner ring of the electrostatic chuck clamp.

[0018] Optionally, the threaded holes distributed on the outer ring of the electrostatic chuck clamp are used to fix the first electrostatic chuck; the threaded holes distributed on the middle ring of the electrostatic chuck clamp are used to fix the second electrostatic chuck; and the threaded holes distributed on the inner ring of the electrostatic chuck clamp are used to fix the third electrostatic chuck.

[0019] The first electrostatic chuck is larger than the second electrostatic chuck, and the second electrostatic chuck is larger than the third electrostatic chuck.

[0020] Optionally, the installation angle of the electrostatic chuck can be adjusted by rotating the rotating base to drive the electrostatic chuck clamp to rotate.

[0021] In summary, compared with the prior art, the present invention has the following beneficial effects:

[0022] This utility model provides a quick clamping fixture for electrostatic chucks, which has the advantage of being able to accommodate electrostatic chucks of different sizes without changing the electrostatic chuck clamp. Compared with traditional electrostatic chuck installation fixtures, the installation is simpler and faster, and it avoids the bumps and contamination of the electrostatic chuck caused when changing the electrostatic chuck clamp. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of the quick-clamping fixture of this utility model;

[0024] Figure 2 This is a schematic diagram of the hole positions of the electrostatic chuck clamp of this utility model. Detailed Implementation

[0025] The following will be combined with the appendix Figures 1-2The present invention will be further described in detail through preferred embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions, only for the purpose of conveniently and clearly illustrating the embodiments of the present invention. Please refer to the accompanying drawings to make the objectives, features, and advantages of the present invention more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for the purpose of assisting those skilled in the art in understanding and reading the content disclosed in the specification, and are not intended to limit the implementation conditions of the present invention. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by the present invention, should still fall within the scope of the technical content disclosed in the present invention.

[0026] This utility model provides a quick clamping fixture for electrostatic chucks, such as... Figure 1 As shown, the quick-clamping fixture for the electrostatic chuck includes: a worktable 100; a clamping fixture base 200, fixedly mounted on the worktable 100; a support rod 500, one end of which is fixedly mounted on the clamping fixture base 200; a rotating base 300, rotatably mounted on the other end of the support rod 500, whose position and direction can be adjusted by rotation; and an electrostatic chuck clamp 400, mounted above the rotating base 300, for fixing the electrostatic chuck.

[0027] The clamping fixture base 200 has multiple fixing holes evenly arranged circumferentially to fix it to the worktable surface 100. Specifically, screws or bolts or other fasteners are inserted into the worktable surface 100 through the fixing holes to complete the fixation.

[0028] In specific embodiments of this utility model, three or four fixing holes are used.

[0029] The connection between the rotating base 300 and the support rod 500 is fixed by a ratchet positioning structure to enable the rotating base 300 to rotate on the support rod 500. Specifically, the ratchet positioning structure includes a ratchet structure and a pawl structure. A ratchet structure is provided at one end of the support rod 500 near the rotating base 300, and a pawl structure is provided on the side of the rotating base 300 near the support rod 500. During rotation, the pawl structure abuts against a tooth of the ratchet structure to achieve unidirectional rotational movement.

[0030] The rotating base 300 has a plurality of first mounting portions 301 on the side facing the electrostatic chuck clamp 400 for mounting and fixing various models of electrostatic chuck clamps 400. Preferably, the rotating base 300 is disc-shaped.

[0031] The electrostatic chuck clamp 400 has a plurality of second mounting parts 401 on the side facing the rotating base 300, which are used to match and install each of the first mounting parts 301 in a one-to-one correspondence.

[0032] In a specific embodiment of this utility model, the first mounting part 301 comprises multiple insertion holes, and the second mounting part 401 comprises multiple protruding structures. Different models of electrostatic chuck clamps 400 have protruding structures located at different positions to be inserted into matching insertion holes, thereby achieving the mounting of the electrostatic chuck clamp 400 to the rotating base 300.

[0033] In another embodiment of this utility model, the first mounting part 301 is a plurality of protruding structures, and the second mounting part 401 is a plurality of insertion holes. Different models of electrostatic chuck clamps 400 have insertion holes provided at different positions, and the protruding structures of the rotating base 300 can be inserted into these insertion holes to realize the mounting of the electrostatic chuck clamp 400 and the rotating base 300.

[0034] It should be noted that the position, size, and shape of the protruding structure can all match the insertion hole one by one.

[0035] like Figure 2 As shown, the electrostatic chuck clamp 400 has multiple threaded holes 402 on the side facing away from the rotating base 300. These threaded holes 402 are distributed on the outer ring, middle ring, and inner ring of the electrostatic chuck clamp 400 to fix electrostatic chucks of different sizes. Further, the threaded holes 402 distributed on the outer ring of the electrostatic chuck clamp 400 are used to fix a first electrostatic chuck; the threaded holes 402 distributed on the middle ring of the electrostatic chuck clamp 400 are used to fix a second electrostatic chuck; and the threaded holes 402 distributed on the inner ring of the electrostatic chuck clamp 400 are used to fix a third electrostatic chuck. The first electrostatic chuck is larger than the second electrostatic chuck, and the second electrostatic chuck is larger than the third electrostatic chuck.

[0036] In a specific embodiment of this utility model, the first electrostatic chuck is a 12-inch electrostatic chuck; the second electrostatic chuck is an 8-inch electrostatic chuck; and the third electrostatic chuck is a 4-inch electrostatic chuck.

[0037] In other embodiments of this utility model, the electrostatic chuck clamp 400 may also be provided with multiple threaded holes 402 to match and fix electrostatic chucks of different sizes.

[0038] Specifically, the position of the electrostatic chuck is adjusted according to its size and the holes to align it with the electrostatic chuck clamp 400. Then, screws are used to secure the electrostatic chuck to the clamp 400. During the installation process, the rotating base 300 is rotated to adjust the clamp 400 to a suitable angle for assembly, thereby facilitating the operator's installation of the electrostatic chuck.

[0039] Preferably, different models of electrostatic chuck clamps 400 can be installed on the rotating base to accommodate electrostatic chucks of more sizes.

[0040] In another embodiment of this utility model, when it is necessary to install electrostatic chucks of other sizes besides 4-inch, 8-inch, and 12-inch, the aforementioned model of electrostatic chuck clamp 400 can be disassembled and replaced with another model of electrostatic chuck clamp 400 to adapt to other sizes of electrostatic chucks.

[0041] In summary, the quick clamping fixture for electrostatic chucks provided by this utility model can greatly reduce the time spent on repeatedly disassembling and replacing electrostatic chuck clamps and installing electrostatic chuck clamps. That is, by adjusting the rotating base and the electrostatic chuck clamps, the installation of electrostatic chucks of various sizes can be shared.

[0042] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0043] In the description of this utility model, it should be understood that the terms "center," "height," "thickness," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0044] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0045] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0046] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A quick-clamping fixture for electrostatic chucks, characterized in that, include: Work surface (100); The clamping fixture base (200) is fixedly mounted on the worktable surface (100); A support rod (500) has one end fixedly mounted on the base (200) of the clamping fixture; A rotating base (300) is rotatably mounted at the other end of the support rod (500), and its position and direction can be adjusted by rotation; An electrostatic chuck clamp (400) is disposed above the rotating base (300) for fixing the electrostatic chuck.

2. The quick-clamping fixture for the electrostatic chuck as described in claim 1, characterized in that, The connection between the rotating base (300) and the support rod (500) is fixed by a ratchet positioning structure to enable the rotating base (300) to rotate on the support rod (500).

3. The quick-clamping fixture for the electrostatic chuck as described in claim 1, characterized in that, The rotating base (300) is provided with a plurality of first mounting parts (301) on the side facing the electrostatic chuck clamp (400) for mounting and fixing various models of electrostatic chuck clamps (400); The electrostatic chuck clamp (400) has a plurality of second mounting parts (401) on the side facing the rotating base (300) for matching and mounting one-to-one with each of the first mounting parts (301).

4. The quick-clamping fixture for the electrostatic chuck as described in claim 3, characterized in that, The first mounting part (301) has multiple insertion holes, and the second mounting part (401) has multiple protruding structures; or, the first mounting part (301) has multiple protruding structures, and the second mounting part (401) has multiple insertion holes; the position, size, and shape of the protruding structures can all match the insertion holes one by one.

5. The quick-clamping fixture for the electrostatic chuck as described in claim 1, characterized in that, The electrostatic chuck clamp (400) has multiple threaded holes (402) on the side facing away from the rotating base (300) to match and fix electrostatic chucks of different sizes.

6. The quick-clamping fixture for the electrostatic chuck as described in claim 5, characterized in that, The multi-turn threaded holes (402) are distributed on the outer ring, middle ring, and inner ring of the electrostatic chuck clamp (400).

7. The quick-clamping fixture for the electrostatic chuck as described in claim 6, characterized in that, The threaded holes (402) distributed on the outer ring of the electrostatic chuck clamp (400) are used to fix the first electrostatic chuck; the threaded holes (402) distributed on the middle ring of the electrostatic chuck clamp (400) are used to fix the second electrostatic chuck; the threaded holes (402) distributed on the inner ring of the electrostatic chuck clamp (400) are used to fix the third electrostatic chuck. The first electrostatic chuck is larger than the second electrostatic chuck, and the second electrostatic chuck is larger than the third electrostatic chuck.

8. The quick-clamping fixture for the electrostatic chuck as described in claim 1, characterized in that, By rotating the rotating base (300), the electrostatic chuck clamp (400) is rotated to adjust the installation angle of the electrostatic chuck.

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