High-precision automatic mask device based on physical vapor deposition (PVD) on TGV

Abstract

The utility model relates to a high-precision automatic masking device based on TGV upper physical vapor deposition (PVD), which comprises a lower rack and an upper rack at the top, an upper working table plate is arranged on the left side in the lower rack and the upper rack, a right platform underframe is arranged on the right side in the lower rack and the upper rack, and a lower working table plate is arranged on the right platform underframe. A right platform structure is arranged at the top of the right platform bottom frame, a left platform structure is arranged at the top of the upper working table plate, a camera frame is hung at the top of the upper rack, an upper camera is fixedly installed at the bottom of the camera frame, and a lower camera is fixedly installed at the bottom of the upper working table plate. The top of the lower rack is provided with a moving structure used for driving the upper workbench plate to slide horizontally. According to the high-precision automatic mask device based on TGV upper physical vapor deposition (PVD), the upper camera is matched with the lower camera to calibrate the upper mask plate and the lower mask plate at the top of the upper working table plate, so that the effects of efficient calibration, high precision and synchronous alignment of double-sided masks are achieved.

Description

Technical Field

[0001] This utility model relates to the fields of semiconductor manufacturing, microelectronics processing and photolithography, specifically a high-precision automated masking device based on TGV physical vapor deposition (PVD). Background Technology

[0002] In semiconductor manufacturing, many TGV glass process steps employ photolithography. The patterned "substrate" used in these steps is called a mask. Its function is to cover a selected area on the silicon wafer with an opaque pattern template, so that subsequent etching or diffusion will only affect areas outside the selected area.

[0003] In semiconductor coating production, traditional mask machines rely on manual alignment, which suffers from low efficiency and poor accuracy. Furthermore, the mask plate is prone to misalignment, leading to deviations in the coating area. Existing technologies use single CCD alignment, which cannot solve the problem of synchronous alignment of double-sided masks; or mechanically limit and fix the mask plate, which is prone to damaging brittle substrates. Therefore, a high-precision automatic masking device based on TGV physical vapor deposition (PVD) is proposed to solve the above problems. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a high-precision automatic masking device based on TGV physical vapor deposition (PVD). It has the advantages of efficient calibration, high precision, and stable mask fixing without regional displacement, and solves the problems of poor alignment effect, inability to synchronize alignment, poor fixing stability, and easy damage to brittle substrates.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a high-precision automatic masking device based on TGV physical vapor deposition (PVD), comprising a lower frame and an upper frame, wherein an upper worktable is provided on the left side inside the lower frame and the upper frame, a right platform base is provided on the right side inside the lower frame and the upper frame, a right platform structure is provided on the top of the right platform base, and a left platform structure is provided on the top of the upper worktable;

[0006] A camera frame is suspended from the top of the upper frame, an upper camera is fixedly installed at the bottom of the camera frame, a lower camera is fixedly installed at the bottom of the upper worktable, an automatic alignment platform is fixedly installed on the internal crossbeam of the lower frame at the bottom of the right platform structure, and a moving structure for driving the upper worktable to slide horizontally is provided on the top of the lower frame and behind the upper worktable.

[0007] Furthermore, a touch screen is provided on the right side of the upper frame, and baffles are provided on the left, right sides and back of the upper frame. The upper worktable is an arched frame with a notch at the top for installing the left platform structure.

[0008] Furthermore, the right platform structure includes a lower mask plate, several vacuum nozzles, two lifting cylinders, a lower magnet working plate, four linear bearings, a base plate, three lifting cylinders, and a lifting plate. The base plate is fixedly installed on the top of the automatic alignment platform. The four linear bearings are located at the four corners of the base plate. The two lifting cylinders are also located on the top of the base plate. The lifting plate is fixedly installed on the top of the four linear bearings and the top of the two lifting cylinders. The lower magnet working plate is fixedly installed on the top of the lifting plate by four fixing piles. The three lifting cylinders are located in the middle of the bottom of the lifting plate. Several vacuum nozzles are respectively located at the bottom of the lower magnet working plate. The lower mask plate is located on the top of the lower magnet working plate.

[0009] Furthermore, the top of the lower magnet working plate is provided with several limiting holes through which the vacuum nozzles can pass, and the vacuum nozzles extend through the limiting holes to the surface of the lower mask plate. The top of the lower mask plate is provided with several magnet blocks that are distributed in the same position as the vacuum nozzles.

[0010] Furthermore, the left platform structure includes a mask plate fixing frame, a second lifting cylinder, several second vacuum nozzles, an upper magnet working plate, a top plate, and an upper mask plate. The mask plate fixing frame is fixedly installed on the top of the upper worktable, the top plate is fixedly installed on the top of the mask plate fixing frame, the second lifting cylinder is fixedly installed on the top of the top plate, the upper magnet working plate is set at the bottom of the top plate via four telescopic shafts, several second vacuum nozzles are set on the top of the upper magnet working plate, and the upper mask plate is attached to the bottom of the upper magnet working plate.

[0011] Furthermore, the top of the upper mask plate is provided with magnet blocks that are positioned at the same locations as the several vacuum nozzles.

[0012] Furthermore, the moving structure includes a servo motor, a ball screw, and two linear guide rails. Two slide rails are fixedly installed on both sides of the bottom of the upper worktable. The two linear guide rails are installed on both sides of the top of the lower frame, and the four slide rails are divided into two groups and slidably installed on the two linear guide rails respectively. The servo motor is fixedly installed at one corner of the top of the lower frame. One end of the ball screw is connected to the output end of the servo motor, and the other end of the ball screw is connected to the fixed pile through a bearing.

[0013] Furthermore, a connecting block is fixed to the back of the upper worktable, and a threaded through hole is provided on the surface of the connecting block for the ball screw to pass through. The connecting block is also threadedly connected to the ball screw.

[0014] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0015] 1. This high-precision automatic masking device based on TGV physical vapor deposition (PVD) uses an upper camera and a lower camera to calibrate the upper and lower mask plates on the top of the upper worktable, thereby achieving efficient calibration, high precision, and solving the problem of synchronous alignment of double-sided masks.

[0016] 2. This high-precision automatic masking device based on TGV physical vapor deposition (PVD) uses a lifting cylinder to raise the lower mask plate and a lifting cylinder to lower the upper mask plate. At the same time, it works with a vacuum nozzle and a pair of vacuum nozzles to fix the individual pieces, so as to achieve the effect of fixing and stabilizing the brittle substrate and preventing damage. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the high-precision automatic masking device based on TGV physical vapor deposition (PVD) of this utility model;

[0018] Figure 2 This is a partial structural schematic diagram of the high-precision automatic masking device based on TGV physical vapor deposition (PVD) of this utility model;

[0019] Figure 3 This is a schematic diagram of the structure of the worktable plate of the high-precision automatic masking device based on TGV physical vapor deposition (PVD) of this utility model;

[0020] Figure 4 This is a schematic diagram of the right platform structure of the high-precision automatic masking device based on TGV physical vapor deposition (PVD) of this utility model;

[0021] Figure 5 This is a schematic diagram showing the split structure of the right and left platform structures of the high-precision automatic masking device based on TGV physical vapor deposition (PVD) of this utility model.

[0022] In the diagram: 1. Lower frame; 2. Upper frame; 3. Camera mount; 4. Upper camera; 5. Upper worktable; 6. Lower camera; 7. Right platform structure; 701. Lower mask plate; 702. Vacuum nozzle one; 703. Lifting cylinder one; 704. Lower magnet worktable; 705. Linear bearing; 706. Base plate; 707. Lifting cylinder three; 708. Lifting plate; 8. Left platform structure; 801. Mask plate fixing frame; 802. Lifting cylinder two; 803. Vacuum nozzle two; 804. Upper magnet worktable; 805. Top plate; 806. Upper mask plate; 9. Touch screen; 10. Right platform base frame; 11. Moving structure; 1101. Servo motor; 1102. Ball screw; 1103. Linear guide rail; 12. Automatic alignment platform. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Please see Figure 1-5 The high-precision automated masking device based on TGV physical vapor deposition (PVD) in this embodiment includes a lower frame 1 and an upper frame 2, which is the overall frame of the masking machine. An upper worktable 5 is provided on the left side inside the lower frame 1 and the upper frame 2, which is a mounting platform supporting the upper platform structure 8. A right platform base frame 10 is provided on the right side inside the lower frame 1 and the upper frame 2. A right platform structure 7 is provided on the top of the right platform base frame 10, and a left platform structure 8 is provided on the top of the upper worktable 5.

[0025] A camera mount 3 is suspended from the top of the upper frame 2 to fix the upper camera 4. The upper camera 4 is fixedly installed at the bottom of the camera mount 3. The lower camera 6 is fixedly installed at the bottom of the upper worktable 5, which serves to synchronize the alignment of the right platform structure 7 and the left platform structure 8. An automatic alignment platform 12 is fixedly installed on the internal crossbeam of the lower frame 1 at the bottom of the right platform structure 7. A moving structure 11 is set at the top of the lower frame 1 and behind the upper worktable 5 to drive the upper worktable 5 to slide horizontally, thereby moving the left platform structure 8 on the upper worktable 5 to the top of the right platform structure 7 for single-piece masking.

[0026] The upper frame 2 has a touch screen 9 on its right side, baffles on its left and right sides and back, and an arched frame on its upper worktable 5 with a notch at the top for mounting the left platform structure 8.

[0027] It should be noted that the baffle is used to encapsulate the outer perimeter of the upper frame 2, and the touch screen 9 can control the electrical equipment inside the mask machine.

[0028] Specifically, when TGV glass needs to be processed using a masking machine, the TGV glass can be placed on top of the right platform structure 7 first. Then, the moving structure 11 is used to move the upper worktable 5 to the top of the right platform structure 7. At the same time, the upper camera 4 on the upper frame 2 and the lower camera 6 at the bottom of the upper worktable 5 are used for calibration. After calibration, the TGV glass needs to be fixed and processed using the platform structure 7 and the left platform structure 8 at the bottom of the upper worktable 5. This achieves the effects of stability during TGV glass masking and accuracy during mask calibration.

[0029] In this embodiment, the right platform structure 7 includes a lower mask plate 701, several vacuum nozzles 702, two lifting cylinders 703, a lower magnet working plate 704, four linear bearings 705, a base plate 706, three lifting cylinders 707, and a lifting plate 708. The base plate 706 is fixedly installed on the top of the automatic alignment platform 12. The four linear bearings 705 are located at the four corners of the base plate 706. The two lifting cylinders 703 are also located on the top of the base plate 706. The lifting plate 708 is fixedly installed on the tops of the four linear bearings 705 and the tops of the two lifting cylinders 703. The lower magnet working plate 704... The lifting plate 708 is fixedly mounted on top by four fixed piles. The lifting cylinder 707 is located in the middle of the bottom of the lifting plate 708. Several vacuum nozzles 702 are respectively located at the bottom of the lower magnet working plate 704. The lower mask plate 701 is located at the top of the lower magnet working plate 704. Several limiting holes are opened on the top of the lower magnet working plate 704 for the vacuum nozzles 702 to pass through. The vacuum nozzles 702 extend through the limiting holes to the surface of the lower mask plate 701. Several magnet blocks are arranged on the top of the lower mask plate 701 in the same position as the vacuum nozzles 702.

[0030] It should be noted that the TGV glass is placed between the lower mask 701 and the upper mask 806.

[0031] Specifically, when the right platform structure 7 is needed to fix the TGV glass, the lifting plate 708 can be pushed upward by the lifting cylinder 703 under the action of the linear bearing 705, so that the lifting plate 708 can drive the lower mask plate 701 on the lower magnet working plate 704 at the top to fit with the TGV glass. Then, the vacuum nozzle 702 is used to adsorb and fix it, thereby achieving the effect of stabilizing the mask.

[0032] In this embodiment, the left platform structure 8 includes a mask plate fixing frame 801, a second lifting cylinder 802, several second vacuum nozzles 803, an upper magnet working plate 804, a top plate 805, and an upper mask plate 806. The mask plate fixing frame 801 is fixedly installed on the top of the upper worktable 5, the top plate 805 is fixedly installed on the top of the mask plate fixing frame 801, the second lifting cylinder 802 is fixedly installed on the top of the top plate 805, the upper magnet working plate 804 is set at the bottom of the top plate 805 through four telescopic shafts, several second vacuum nozzles 803 are set on the top of the upper magnet working plate 804, and the top of the upper mask plate 806 has magnet blocks distributed at the same positions as the several second vacuum nozzles 803. The upper mask plate 806 is attached to the bottom of the upper magnet working plate 804.

[0033] Specifically, when the left platform structure 8 is needed to stabilize the TGV glass, the left platform structure 8 can be moved to the bottom of the right platform structure 7 via the upper worktable plate 5. Then, the lifting cylinder 802 is used to drive the upper magnet work plate 804 to press down, thereby making the upper mask plate 806 at the bottom of the upper magnet work plate 804 fit with the lower mask plate 701 at the bottom of the right platform structure 7 to fix the TGV glass in the middle. At the same time, the vacuum nozzle 803 is used to adsorb it, thereby limiting the upper mask plate 806 and the lower mask plate 701. The fixation and stabilization effect is achieved by the vacuum nozzle 803 and the vacuum nozzle 702.

[0034] In this embodiment, the moving structure 11 includes a servo motor 1101, a ball screw 1102, and two linear guide rails 1103. Two slide rails 1104 are fixedly installed on both sides of the bottom of the upper worktable 5. The two linear guide rails 1103 are installed on both sides of the top of the lower frame 1. The four slide rails 1104 are divided into two groups and slidably installed on the two linear guide rails 1103 respectively. The servo motor 1101 is fixedly installed at one corner of the top of the lower frame 1. One end of the ball screw 1102 is connected to the output end of the servo motor 1101, and the other end of the ball screw 1102 is connected to the fixed pile through a bearing.

[0035] The upper worktable 5 has a connecting block fixed on its back, and the surface of the connecting block has a threaded through hole through which the ball screw 1102 can pass. The connecting block is also threadedly connected to the ball screw 1102.

[0036] Specifically, when it is necessary to move the upper worktable 5 to the bottom of the right platform structure 7 by moving the moving structure 11, the servo motor 1101 can drive the ball screw 1102 to rotate, thereby causing the connecting block threaded to the ball screw 1102 to move the upper worktable 5 left and right, so that the upper worktable 5 can move the left platform structure 8 to the bottom of the right platform structure 7.

[0037] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-precision automated masking apparatus based on TGV physical vapor deposition (PVD), comprising a lower frame (1) and an upper frame (2) at the top, characterized in that: The lower frame (1) and the upper frame (2) are provided with an upper worktable (5) on the left side inside, and a right platform base frame (10) is provided on the right side inside, with a right platform structure (7) on the top of the right platform base frame (10) and a left platform structure (8) on the top of the upper worktable (5). A camera frame (3) is suspended at the top of the upper frame (2), an upper camera (4) is fixedly installed at the bottom of the camera frame (3), a lower camera (6) is fixedly installed at the bottom of the upper worktable (5), an automatic alignment platform (12) is fixedly installed on the internal crossbeam of the lower frame (1) and at the bottom of the right platform structure (7), and a moving structure (11) for driving the upper worktable (5) to slide horizontally is provided at the top of the lower frame (1) and behind the upper worktable (5).

2. The high-precision automated masking device based on TGV physical vapor deposition (PVD) according to claim 1, characterized in that: The upper frame (2) is provided with a touch screen (9) on the right side. The upper frame (2) is provided with baffles on the left and right sides and the back. The upper worktable (5) is an arched frame and has a notch at the top for installing the left platform structure (8).

3. The high-precision automated masking device based on physical vapor deposition (PVD) on TGV according to claim 1, characterized in that: The right platform structure (7) includes a lower mask plate (701), several vacuum nozzles (702), two lifting cylinders (703), a lower magnet working plate (704), four linear bearings (705), a base plate (706), three lifting cylinders (707), and a lifting plate (708). The base plate (706) is fixedly installed on the top of the automatic alignment platform (12). The four linear bearings (705) are located at the four corners of the base plate (706), and the two lifting cylinders (703) are also located on the base plate (706). At the top, the lifting plate (708) is fixedly installed on the top of the four linear bearings (705) and the top of the two lifting cylinders (703). The lower magnet working plate (704) is fixedly installed on the top of the lifting plate (708) by four fixing piles. The lifting cylinder (707) is located in the middle position at the bottom of the lifting plate (708). Several vacuum nozzles (702) are respectively installed at the bottom of the lower magnet working plate (704). The lower mask plate (701) is installed on the top of the lower magnet working plate (704).

4. The high-precision automated masking device based on physical vapor deposition (PVD) on TGV according to claim 3, characterized in that: The lower magnet working plate (704) has several limiting holes on its top for the vacuum nozzles (702) to pass through, and the vacuum nozzles (702) extend through the limiting holes to the surface of the lower mask plate (701). The lower mask plate (701) has several magnet blocks on its top, which are distributed in the same position as the vacuum nozzles (702).

5. The high-precision automated masking device based on physical vapor deposition (PVD) on TGV according to claim 1, characterized in that: The left platform structure (8) includes a mask plate fixing frame (801), a second lifting cylinder (802), several second vacuum nozzles (803), an upper magnet working plate (804), a top plate (805), and an upper mask plate (806). The mask plate fixing frame (801) is fixedly installed on the top of the upper worktable (5). The top plate (805) is fixedly installed on the top of the mask plate fixing frame (801). The second lifting cylinder (802) is fixedly installed on the top of the top plate (805). The upper magnet working plate (804) is set at the bottom of the top plate (805) through four telescopic shafts. Several second vacuum nozzles (803) are set on the top of the upper magnet working plate (804). The upper mask plate (806) is attached to the bottom of the upper magnet working plate (804).

6. The high-precision automated masking device based on physical vapor deposition (PVD) on TGV according to claim 5, characterized in that: The top of the upper mask plate (806) has magnet blocks that are positioned in the same place as the several vacuum nozzles (803).

7. The high-precision automated masking device based on TGV physical vapor deposition (PVD) according to claim 1, characterized in that: The moving structure (11) includes a servo motor (1101), a ball screw (1102), and two linear guides (1103). Two slide rails (1104) are fixedly installed on both sides of the bottom of the upper worktable (5). The two linear guides (1103) are installed on both sides of the top of the lower frame (1). The four slide rails (1104) are divided into two groups and slidably installed on the two linear guides (1103). The servo motor (1101) is fixedly installed at one corner of the top of the lower frame (1). One end of the ball screw (1102) is connected to the output end of the servo motor (1101), and the other end of the ball screw (1102) is connected to the fixed pile through a bearing.

8. The high-precision automated masking device based on physical vapor deposition (PVD) on TGV according to claim 7, characterized in that: A connecting block is fixed on the back of the upper worktable (5), and a threaded through hole is provided on the surface of the connecting block for the ball screw (1102) to pass through. The connecting block is also threadedly connected to the ball screw (1102).

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