Vacuum treatment equipment

Abstract

The utility model belongs to the technical field of vacuum treatment, and discloses vacuum treatment equipment, which is characterized in that a first loading frame can load a plurality of workpieces, and the first loading frame can be integrally placed in or separated from a first cavity; the carrying mechanism is arranged in the first cavity and can carry the workpiece between the first cavity and the second cavity and selectively drive the workpiece to rotate in the workpiece carrying process. The first loading frame can be integrally placed in or separated from the first cavity, cleaning is convenient, and the workpiece conveying efficiency and the vacuum treatment yield are improved; the to-be-coated surface of the workpiece is loaded on the first loading frame towards the outside, and the carrying mechanism drives the workpiece to move and turn over, so that the to-be-coated surface of the workpiece faces the outside in the second cavity; the to-be-coated surface of the workpiece faces inwards and is loaded on the first loading frame, the carrying mechanism drives the workpiece to move, the workpiece does not need to be overturned, and the to-be-coated surface of the workpiece naturally faces outwards in the second cavity; and due to selective overturning of the carrying mechanism, the production flexibility of the vacuum treatment equipment is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum processing technology, and in particular to a vacuum processing device. Background Technology

[0002] Sputtering deposition, an important thin film preparation process, utilizes high-energy particles to bombard a target material in a vacuum environment, causing the target atoms or molecules to be sputtered onto the substrate surface and deposited to form a thin film. This technology offers advantages such as good film uniformity, strong adhesion, and controllable composition, and is widely used in optical devices, electronic components, and new energy batteries, making it one of the key technologies for achieving high-performance functional thin films. With the continuous improvement of thin film performance requirements across industries, higher demands are being placed on the structural optimization and process expansion of sputtering deposition equipment.

[0003] In existing technologies, the traditional method for substrates to enter the loading chamber or leave the unloading chamber mostly adopts a single-substrate loading mode, meaning that only one substrate can be transported at a time. This mode not only results in low overall equipment capacity, making it difficult to meet the efficiency requirements of large-scale industrial production; moreover, because the substrate mounting racks are prone to adsorbing and accumulating particulate contaminants during long-term use, the existing method of transporting substrates by single substrates makes it difficult to thoroughly clean the racks. These residual contaminants may detach and adhere to the substrate coating surface during substrate transport, affecting the uniformity of subsequent coating processes and the yield of finished products, increasing the difficulty of process stability control. Utility Model Content

[0004] The purpose of this invention is to provide a vacuum processing device that solves the problems of low efficiency and difficulty in cleaning the mounting brackets in the traditional method of substrate entering or leaving the upper and lower wafer chambers due to the single-wafer mounting mode. This invention improves the process compatibility, production efficiency, and production quality of the coating equipment.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A vacuum processing apparatus is provided, comprising:

[0007] A receiving assembly, the receiving assembly including a first chamber and a second chamber, the first chamber and the second chamber being selectively connected, and a workpiece being movable between the first chamber and the second chamber;

[0008] A loading mechanism is provided in the first chamber. The loading mechanism includes a first loading frame, which is capable of loading multiple workpieces. The first loading frame can be inserted into or removed entirely from the first chamber.

[0009] A conveying mechanism is provided in the first chamber. The conveying mechanism can convey the workpiece between the first chamber and the second chamber, and selectively drive the workpiece to rotate during the conveying process.

[0010] As an optional technical solution for vacuum processing equipment, the first chamber is provided in two parts.

[0011] As an optional technical solution for vacuum processing equipment, the loading mechanism further includes a second loading frame, which is rotatably disposed in the first chamber around its own central axis. There are multiple first loading frames, which are arranged in a circular array around the central axis of the second loading frame. The first loading frame is detachable and can rotate around its own central axis.

[0012] As an optional technical solution for vacuum processing equipment, the loading mechanism further includes a first mating component, a first receiving component, a second mating component, and a second receiving component. The first mating component and the second mating component are respectively disposed at the top and bottom of the first loading frame, and the first receiving component and the second receiving component are respectively disposed at the top and bottom of the second loading frame.

[0013] The first mating component and the second mating component are both fixedly connected to the first loading frame, the first receiving component is rotatably connected to the second loading frame, and the first mating component is drively connected to the first receiving component and is detachable.

[0014] The second receiving component is rotatably connected to the second loading frame and is drive-connected to the second mating component, and is detachable;

[0015] Alternatively, the second receiving component can be fixedly connected to the second loading frame and rotatably connected to the second mating component.

[0016] As an optional technical solution for vacuum processing equipment, the vacuum processing equipment further includes a drive mechanism, which is located at the top or bottom of the second loading frame to drive the first loading frame and the second loading frame to rotate.

[0017] As an optional technical solution for vacuum processing equipment, the loading mechanism further includes a counterweight, which is detachably mounted on the first loading frame.

[0018] As an optional technical solution for vacuum processing equipment, the conveying mechanism includes a carrier and a fixing member. The fixing member is located on the carrier, and the bottom of the workpiece is detachably connected to the fixing member. The carrier can rotate at any angle around the vertical direction to drive the workpiece to rotate at any angle.

[0019] As an optional technical solution for vacuum processing equipment, the conveying mechanism further includes a limiting member, which is disposed on the periphery of the carrier and can selectively abut against the carrier to restrict the rotation of the carrier.

[0020] As an optional technical solution for vacuum processing equipment, the conveying mechanism further includes a conveying component, which is disposed in the first chamber. The bearing component is slidably disposed on the conveying component and can extend into or out of the second chamber to drive the workpiece to move between the first chamber and the second chamber.

[0021] As an optional technical solution for vacuum processing equipment, the conveying mechanism further includes a robotic arm, which is placed on top of the first chamber. The robotic arm is detachably connected to the workpiece, and the robotic arm and the carrier can jointly clamp the workpiece to load or unload the workpiece onto the first loading frame.

[0022] The beneficial effects of this utility model are:

[0023] This application discloses a vacuum processing device, which includes a housing component, a loading mechanism, and a conveying mechanism. The housing component includes a first chamber and a second chamber, which are selectively connected, allowing workpieces to move between the first and second chambers. The loading mechanism is located in the first chamber and includes a first loading frame capable of loading multiple workpieces. The first loading frame can be inserted into or removed entirely from the first chamber. The conveying mechanism is located within the first chamber and can convey workpieces between the first and second chambers, selectively rotating the workpieces during the conveying process. The first loading rack allows for complete placement into and out of the first chamber, improving workpiece transport efficiency. Its detachable design facilitates cleaning and increases the yield of vacuum-treated workpieces. A conveying mechanism is installed between the first and second chambers. When workpieces require vacuum treatment in the first chamber, they are loaded onto the first loading rack with the coating-to-be-coated surface facing outwards. After vacuum treatment, the conveying mechanism moves and flips the workpiece so that the coating-to-be-coated surface faces outwards in the second chamber. When vacuum treatment is not required in the first chamber, the workpieces are loaded onto the first loading rack with the coating-to-be-coated surface facing inwards. The conveying mechanism moves the workpiece without flipping it, and the coating-to-be-coated surface naturally faces outwards in the second chamber. This selective flipping of the conveying mechanism enhances the production flexibility of the vacuum treatment equipment. Attached Figure Description

[0024] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0025] Figure 1 This is one of the structural schematic diagrams of the vacuum processing equipment provided in this embodiment of the utility model;

[0026] Figure 2 This is a second schematic diagram of the structure of the vacuum processing equipment provided in this embodiment of the present invention;

[0027] Figure 3 This is one of the partial structural schematic diagrams of the vacuum processing equipment provided in this embodiment of the utility model;

[0028] Figure 4 This is a schematic diagram of the structure of the first mating component provided in one embodiment of the present invention;

[0029] Figure 5 This is a schematic diagram of the structure of the first receiving element provided in one embodiment of the present invention;

[0030] Figure 6 This is a schematic diagram of the structure of the second mating component provided in one embodiment of the present invention;

[0031] Figure 7 This is a schematic diagram of the structure of the second receiving element provided in one embodiment of the present invention;

[0032] Figure 8 This is a schematic diagram of the conveying mechanism structure of the vacuum processing equipment provided in this embodiment of the utility model;

[0033] Figure 9 This is a second partial structural schematic diagram of the vacuum processing equipment provided in this embodiment of the utility model.

[0034] In the picture:

[0035] 1. Workpiece;

[0036] 100. Receiving assembly; 110. First chamber; 120. Second chamber;

[0037] 200. Loading mechanism; 210. First loading frame; 211. Sub-shaft; 212. First sub-turntable; 213. Second sub-turntable; 214. Fixing pin; 215. Clamping plate; 220. Second loading frame; 221. First main turntable; 222. Second main turntable; 230. First mating part; 231. First quick-release part; 232. Second quick-release part; 233. Positioning pin; 240. First receiving part; 241. Abutment plate; 2411. Mating hole; 24111. Guide surface; 2412. Positioning hole; 250. Second mating part; 260. Second receiving part; 261. Bearing; 262. Collar;

[0038] 300. Conveying mechanism; 310. Load-bearing component; 311. Abutment block; 320. Fixing component; 330. Conveying component; 340. Robotic arm; 350. Limiting component; 360. Driving component;

[0039] 400. Drive mechanism. Detailed Implementation

[0040] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0041] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0042] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0043] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0044] In existing technologies, the traditional method for substrates to enter the loading chamber or leave the unloading chamber mostly adopts a single-substrate loading mode, meaning that only one substrate can be transported at a time. This mode not only results in low overall equipment capacity, making it difficult to meet the efficiency requirements of large-scale industrial production; moreover, because the substrate mounting racks are prone to adsorbing and accumulating particulate contaminants during long-term use, the existing method of transporting substrates by single substrates makes it difficult to thoroughly clean the racks. These residual contaminants may detach and adhere to the substrate coating surface during substrate transport, affecting the uniformity of subsequent coating processes and the yield of finished products, increasing the difficulty of process stability control.

[0045] To address the above problems, this embodiment provides a vacuum processing device, see reference. Figures 1-3 The vacuum processing equipment includes a housing assembly 100, a loading mechanism 200, and a conveying mechanism 300.

[0046] Further, the accommodating assembly 100 includes a first chamber 110 and a second chamber 120, which are selectively connected, allowing the workpiece 1 to move between the first chamber 110 and the second chamber 120. In this embodiment, two first chambers 110 are provided. Specifically, the two first chambers 110 are respectively configured as an upper loading chamber and a lower loading chamber, and the second chamber 120 is configured as a coating chamber. The two first chambers 110 and the second chamber 120 are distributed in a triangular pattern. Specifically, the first chamber 110 can be selectively configured with a coating source or an ion treatment source. Specifically, a gate valve or valve is provided between the first chamber 110 and the second chamber 120 to ensure the independence of the first chamber 110 and the second chamber 120 and prevent mutual contamination. A gate valve or valve is provided between the first chamber 110 and the atmosphere to maintain the vacuum performance of the first chamber 110 and prevent atmospheric pollutants from contaminating the first chamber 110. It should be noted that both the first chamber 110 and the second chamber 120 are equipped with vacuum devices to change the vacuum environment of the first chamber 110 and the second chamber 120. This is existing technology and will not be described in detail here.

[0047] Furthermore, a loading mechanism 200 is disposed in the first chamber 110. The loading mechanism 200 includes a first loading frame 210, which can load multiple workpieces 1. The first loading frame 210 can be inserted into or removed entirely from the first chamber 110. By allowing the first loading frame 210 to be inserted into or removed entirely from the first chamber 110, the efficiency of workpiece 1 conveying is improved. Moreover, the detachable first loading frame 210 is easy to clean, thereby improving the vacuum processing yield of the workpieces 1.

[0048] In existing technologies, sputtering coating equipment typically includes three core functional areas: a loading chamber, a coating chamber, and a unloading chamber. During substrate transport, due to limitations in mechanical structure design and transport path requirements, the substrate must maintain an inward-facing orientation in the loading and unloading chambers to ensure that when the substrate is transported to the coating chamber via the transfer mechanism, the coating surface can be adjusted to an outward-facing state, thereby aligning with the target material inside the coating chamber for deposition. This orientation constraint leads to inefficient use of the space in the loading and unloading chambers: if a coating source is added to the loading or unloading chamber, the inward-facing substrate coating surface cannot form an effective deposition angle with the new coating source, making it difficult for the equipment to expand into multi-functional coating processes in pre-cleaning, underlayer film preparation, etc., thus restricting the equipment's process compatibility and production flexibility.

[0049] To address the aforementioned issues, this embodiment places the conveying mechanism 300 within the first chamber 110. The conveying mechanism 300 can transport the workpiece 1 between the first chamber 110 and the second chamber 120, and selectively rotate the workpiece 1 during the transport process. It should be noted that the conveying mechanism 300 can selectively rotate the workpiece 1 or not. In other embodiments, if there is no working condition requiring the workpiece 1 to rotate, the first chamber 110 can be adaptively adjusted to eliminate the need for the conveying mechanism 300. A conveying mechanism 300 is provided between the first chamber 110 and the second chamber 120. When vacuum processing of workpiece 1 is required in the first chamber 110, the workpiece 1 is loaded onto the first loading rack 210 with the coating surface facing outward. After vacuum processing, the conveying mechanism 300 moves and flips the workpiece 1 so that the coating surface of the workpiece 1 faces outward in the second chamber 120. When vacuum processing of workpiece 1 is not required in the first chamber 110, the workpiece 1 is loaded onto the first loading rack 210 with the coating surface facing inward. The conveying mechanism 300 moves the workpiece 1 without flipping it, and the coating surface of the workpiece 1 will naturally face outward in the second chamber 120. The selective flipping of the conveying mechanism 300 improves the production flexibility of the vacuum processing equipment.

[0050] It should be noted that the loading capacity of the first loading rack 210 needs to be adjusted according to the required quantity of workpieces 1 in the second chamber 120. Specifically, the loading mechanism 200 also includes a counterweight, which is detachably mounted on the first loading rack 210. When the required quantity of workpieces 1 does not match the number of loading stations on the first loading rack 210, a counterweight needs to be loaded at an empty loading station to ensure the stability and balance of the first loading rack 210. Specifically, an identifier is provided on the top of the counterweight to prevent it from being moved by the conveying mechanism 300. It should be noted that the identification of the counterweight and its ability to be recognized by the robot arm are existing technologies, and will not be elaborated here.

[0051] Specifically, the loading mechanism 200 further includes a second loading frame 220, which is rotatably disposed in the first chamber 110 about its own central axis. Multiple first loading frames 210 are arranged in a circular array around the central axis of the second loading frame 220. Each first loading frame 210 is detachable and rotatable about its own central axis. Specifically, the second loading frame 220 includes a main rotating shaft, a first main turntable 221, and a second main turntable 222. The main rotating shaft extends vertically and its two ends are respectively connected to the geometric centers of the first main turntable 221 and the second main turntable 222.

[0052] In one embodiment, the first main turntable 221 is configured as a circular disc, and the second main turntable 222 is configured as a petal-shaped disc. In another embodiment, both the first main turntable 221 and the second main turntable 222 are configured as circular discs. In yet another embodiment, both the first main turntable 221 and the second main turntable 222 are configured as petal-shaped discs. It should be noted that the number of petals on the petal-shaped disc can be adjusted according to the actual demand of the workpiece 1, and is not limited here.

[0053] Specifically, the first loading rack 210 includes a sub-rotating shaft 211, a first sub-rotating disk 212, and a second sub-rotating disk 213. The sub-rotating shaft 211 extends vertically and is rotatably connected to the first main rotating disk 221 and the second main rotating disk 222. Specifically, since the top, bottom, and non-coated surface of workpiece 1 are all provided with connection holes, the first loading rack 210 has two styles, corresponding to the workpiece 1 with the coating surface facing outward and the workpiece 1 with the coating surface facing inward, respectively. When the coating surface of workpiece 1 faces outward, the first sub-rotor 212 and the second sub-rotor 213 are spaced apart along the axial direction of the sub-rotating shaft 211, with the interval being less than the length of workpiece 1. The top surfaces of the first sub-rotor 212 and the second sub-rotor 213 are both provided with fixing pins 214 to be inserted and fixed with the connection holes on the non-coated surface of workpiece 1. When the coating surface of workpiece 1 faces inward, the first sub-rotor 212 and the second sub-rotor 213 are spaced apart along the axial direction of the sub-rotating shaft 211, with the interval being greater than the length of workpiece 1. The opposing surfaces of the first sub-rotor 212 and the second sub-rotor 213 are both provided with fixing pins 214 to be inserted and fixed with the connection holes on the top and bottom of workpiece 1.

[0054] Specifically, both the first sub-turntable 212 and the second sub-turntable 213 are designed as petal-shaped discs, each petal being further divided into smaller petals, each petal corresponding to a fixing pin 214. It should be noted that the number of petals on the petal-shaped disc can be adjusted according to the actual demand of the workpiece 1, and is not limited here.

[0055] Furthermore, the first loading frame 210 also includes clamping plates 215. There are two clamping plates 215, which are spaced apart on the sub-rotating shaft 211. The distance between the two clamping plates 215 is greater than the length of the workpiece 1, so that the clamping robot can clamp the two clamping plates 215 when the workpiece 1 is loaded on the first loading frame 210, thereby driving the first loading frame 210 to move as a whole.

[0056] Furthermore, the vacuum processing equipment also includes a drive mechanism 400, which is located at the top or bottom of the second loading frame 220 to drive the first loading frame 210 and the second loading frame 220 to rotate. The drive mechanism 400 includes a rotary motor or rotary cylinder and multiple synchronizing elements. Through the cooperation of the rotary motor and the multiple synchronizing elements, the individual rotation of the second loading frame 220 and the synchronous rotation of the multiple first loading frames 210 can be realized. It should be noted that since the drive mechanism 400 is prior art, it will not be described in detail here.

[0057] Furthermore, the loading mechanism 200 also includes a first mating member 230, a first receiving member 240, a second mating member 250, and a second receiving member 260. The first mating member 230 and the second mating member 250 are respectively disposed at the top and bottom of the first loading frame 210, and the first receiving member 240 and the second receiving member 260 are respectively disposed at the top and bottom of the second loading frame 220. The first mating member 230 and the second mating member 250 are both fixedly connected to the first loading frame 210, and the first receiving member 240 is rotatably connected to the second loading frame 220. The first mating member 230 and the first receiving member 240 are drive-connected and detachable. The second receiving member 260 can be rotatably connected to the second loading frame 220 and drive-connected to the second mating member 250 and is detachable; or the second receiving member 260 can be fixedly connected to the second loading frame 220 and rotatably connected to the second mating member 250. Specifically, the fixed connection can be integrally formed or fixedly mated, which is not limited here. Specifically, the drive mechanism 400 is connected to the first receiving member 240, thereby driving the first loading frame 210 to rotate.

[0058] In this embodiment, the second mating component 250 and the second receiving component 260 are connected by a transmission connection, and the second receiving component 260 and the second loading frame 220 are rotatably connected. (See also...) Figures 4-7 Specifically, the first mating part 230 is configured as a quick-release block, the first receiving part 240 is configured as a quick-release seat, the second mating part 250 is configured as a short shaft, and the second receiving part 260 is configured as a follower seat.

[0059] Specifically, the quick-release block is configured as a stepped shaft, including a first quick-release part 231 and a second quick-release part 232. The inner diameter of the first quick-release part 231 is larger than the inner diameter of the second quick-release part 232. The end of the second quick-release part 232 is provided with a receiving hole, and the sub-rotating shaft 211 is transitionally fitted with the receiving hole. A positioning pin 233 is provided on the connecting surface between the first quick-release part 231 and the second quick-release part 232. The quick-release seat is configured as a "C" shape, and an abutment plate 241 is provided on one side of the quick-release seat. A mating hole 2411 is opened inside the abutment plate 241, and the inner diameter of the mating hole 2411 is larger than the inner diameter of the second quick-release part 232. The outer diameters of the quick-release parts 232 are the same. The second quick-release part 232 transitionally engages with the mating hole 2411. The sidewall of the mating hole 2411 is configured as an inwardly inclined guide surface 24111, and the sidewall of the second quick-release part 232 is configured as an inclined surface with the same inclination angle. The sidewall of the mating hole 2411 guides the second quick-release part 232. The abutment plate 241 also has a guide notch extending from the mating hole 2411 to the notch of the quick-release seat. The abutment plate 241 also has a positioning hole 2412 located on the periphery of the mating hole 2411. In this embodiment, the positioning hole 2412 corresponds to the positioning pin 233, and two of each are provided.

[0060] Specifically, the short shaft is located at the bottom of the sub-rotating shaft 211, the follower seat includes a bearing 261 and a collar 262, the second main turntable 222 has an inner hole, the collar 262 is rotatably located in the inner hole, the bearing 261 is provided between the collar 262 and the side wall of the inner hole, and the short shaft and the collar 262 are transitionally fitted.

[0061] Specifically, when the first loading frame 210 needs to be installed on the second loading frame 220, the clamping robot grips the clamping plate 215 to move the first loading frame 210 closer to the second loading frame 220. The sub-rotating shaft 211 enters the quick-release bracket through the guide notch. When the positioning pin 233 corresponds to the positioning hole 2412, the first loading frame 210 is moved downwards, so that the positioning pin 233 is inserted into the positioning hole 2412. The second quick-release part 232 enters the mating hole 2411 under the guidance of the guide surface 24111, and the short shaft enters... The first loading frame 210 and the second loading frame 220 are detachably connected within the collar 262. When the first loading frame 210 needs to be unloaded from the second loading frame 220, the gripping robot moves the first loading frame 210 upward, causing the positioning pin 233 to disengage from the positioning hole 2412, the second quick-release part 232 to disengage from the mating hole 2411, and the short shaft to disengage from the collar 262. Then, the first loading frame 210 is moved out from the notch of the quick-release seat, completing the unloading of the first loading frame 210 and the second loading frame 220.

[0062] In another embodiment, the second mating member 250 and the second receiving member 260 are rotatably connected, and the second receiving member 260 and the second loading frame 220 are fixedly connected. The first mating member 230 is configured as a telescopic rotating shaft, the second mating member 250 is configured as a fixed rotating shaft, and the first receiving member 240 and the second receiving member 260 are configured as a first bushing and a second bushing. The telescopic rotating shaft is located at the top of the first loading frame 210 and corresponds to the position of the sub-rotating shaft 211. The fixed rotating shaft is located at the bottom of the first loading frame 210 and corresponds to the position of the sub-rotating shaft 211. The first bushing is rotatably mounted on the first main turntable 221, and the second bushing is fixedly mounted on the second main turntable 222. The first bushing has a first plane inside, and the side wall of the telescopic rotating shaft has a second plane. The first plane and the second plane fit together to restrict the rotation of the telescopic rotating shaft relative to the first bushing. The fixed rotating shaft is rotatably connected to the second bushing. Specifically, multiple first and second planes can be provided. Specifically, a groove extending vertically can be provided on the telescopic shaft, and a limiting block extending in a first direction can be provided inside the first bushing, with the limiting block engaging with the groove. Specifically, a ball bearing can be provided between the fixed shaft and the second bushing. Specifically, one clamping plate 215 is fixed to the telescopic shaft, and the other clamping plate 215 is fixed to the sub-shaft 211. Specifically, the sub-shaft 211 has a clearance hole in the vertical direction, and the clamping plate 215 is annular with a connecting rod extending horizontally; the connecting rod extends into the clearance hole and is welded or glued to the telescopic shaft.

[0063] When the first loading frame 210 needs to be installed on the second loading frame 220, the clamping robot grips the two clamping plates 215 to move the first loading frame 210 closer to the second loading frame 220. During this process, the telescopic shaft is driven by the clamping plates 215 to retract into the sub-shaft 211. When the first loading frame 210 needs to be moved to the installation position, the telescopic shaft corresponds to the position of the first bushing and has telescopic space, and the fixed shaft corresponds to the position of the second bushing and has accommodating space, causing the entire first loading frame 210 to move downward, allowing the fixed shaft to be inserted. In the second bushing, the gripping robot releases the gripping plate 215, causing the telescopic rotating shaft to extend out of the sub-rotating shaft 211 and insert into the first bushing, completing the detachable connection between the first loading frame 210 and the second loading frame 220. When the first loading frame 210 needs to be unloaded from the second loading frame 220, the gripping robot grips the two gripping plates 215 to drive the telescopic rotating shaft to retract into the sub-rotating shaft 211. The gripping robot drives the first loading frame 210 to move upward, causing the fixed rotating shaft to disengage from the second bushing, and then drives the first loading frame 210 to move, completing the unloading of the first loading frame 210.

[0064] In another embodiment, the second mating member 250 and the second receiving member 260 are drive-connected, and the second receiving member 260 is rotatably connected to the second loading frame 220. Specifically, both the first mating member 230 and the second mating member 250 are configured as square blocks, and both the first receiving member 240 and the second receiving member 260 are configured as "C"-shaped receiving seats. A groove is provided within the receiving seat, and two grippers are slidably disposed within the groove. The first ends of the two grippers are connected to each other by a return spring, and the second ends of both grippers face the opening of the receiving seat. The distance between the two grippers gradually decreases from the second end to the first end, i.e., the two grippers gradually thicken from the second end to the first end. Specifically, the first mating member 230 and the second mating member 250 can also be configured as triangles or trapezoids, etc. Specifically, the first mating member 230 and the second mating member 250 can also be provided with chamfered edges, i.e., limiting planes, to restrict the rotation of the first mating member 230 and the second mating member 250 relative to the receiving seat.

[0065] When the first loading frame 210 needs to be installed on the second loading frame 220, the gripping robot grips two gripping plates 215 to move the first loading frame 210 closer to the second loading frame 220. The square block enters from the opening of the receiving seat and first abuts against the second end of the two grippers. As the square block gradually penetrates deeper into the receiving seat, the distance between the second end of the two grippers gradually decreases, and the distance between the two first ends gradually increases. The return spring is gradually stretched. When the square block reaches the first end, the square block abuts against the end face of the first end of the two grippers. At this time, the position of the two grippers is fixed, and the square block is clamped due to the restoring force of the return spring, thus completing the detachable connection between the first loading frame 210 and the second loading frame 220. When the first loading frame 210 needs to leave the second loading frame 220, the gripping robot moves the first loading frame 210, causing the square block to detach from the first end and gradually approach the second end. Under the retraction of the return spring, the second ends of the two grippers gradually move away from each other and release the square block, thus completing the unloading of the first loading frame 210.

[0066] It should be noted that there are other implementation methods for loading and unloading the first loading frame 210, which will not be listed here.

[0067] Further, see Figure 8 and Figure 9 The conveying mechanism 300 includes a carrier 310 and a fixing member 320. The fixing member 320 is disposed on the carrier 310. The bottom of the workpiece 1 is detachably connected to the fixing member 320. The carrier 310 can rotate at any angle around the vertical direction to drive the workpiece 1 to rotate at any angle. Specifically, the carrier 310 is a carrier plate. The conveying mechanism 300 also includes a driving member 360, which is a rotary motor or rotary cylinder and is disposed at the bottom of the carrier plate. The driving member 360 is fixedly connected to the geometric center of the carrier plate and drives the carrier plate to rotate at any angle. Specifically, the bottom of the workpiece 1 is provided with two connecting holes. The fixing member 320 is a pin, with two pins corresponding to the positions of the two connecting holes. The pins are inserted into the connecting holes to detachably fix the carrier 310 and the workpiece 1. In this embodiment, the carrier plate is rectangular.

[0068] Specifically, the conveying mechanism 300 also includes a limiting member 350, which is disposed on the periphery of the carrier member 310. The limiting member 350 can selectively abut against the carrier member 310 to restrict the rotation of the carrier member 310. Specifically, the limiting member 350 is configured as a movable limiting rod, which can move in a direction close to or away from the carrier member 310 and abut against the side wall of the carrier plate to rigidly limit the carrier member 310 and prevent the carrier member 310 from rotating.

[0069] In one embodiment, the limiting member 350 is configured as a fixed-position limiting rod. Two corners of the carrier member 310 are provided with abutment blocks 311, and the other two corners are provided with clearance holes. When the carrier member 310 rotates, the clearance holes can avoid the position of the limiting rod, allowing the carrier member 310 to move within the rotational trajectory range of the two abutment blocks 311. It should be noted that those skilled in the art can adjust the position and number of abutment blocks 311 according to actual needs.

[0070] Furthermore, the conveying mechanism 300 also includes a conveying member 330, which is disposed in the first chamber 110. The bearing member 310 is slidably disposed on the conveying member 330 and can extend into or retract from the second chamber 120 to drive the workpiece 1 to move between the first chamber 110 and the second chamber 120. The conveying mechanism 300 also includes a robotic arm 340, which is disposed on the top of the first chamber 110. The robotic arm 340 is detachably connected to the workpiece 1, and the robotic arm 340 and the bearing member 310 can jointly clamp the workpiece 1 to load or unload the workpiece 1 onto the first loading frame 210.

[0071] Specifically, the conveying component 330 is configured as a conveying plate, and the driving component 360 is fixedly mounted on the conveying plate. In this embodiment, a slide rail is provided between the first chamber 110 and the second chamber 120, and a slider is provided at the bottom of the conveying plate. The slider cooperates with the slide rail to drive the conveying plate to move.

[0072] Specifically, the robotic arm 340 is equipped with a pin that can be inserted into the connection hole at the top of the workpiece 1. The bottom of the conveyor 330 is equipped with a lifting component. The lifting component drives the conveyor plate to rise and fall, thereby driving the bearing plate to rise and fall, so that the pin moves upward and inserts into the connection hole, and drives the workpiece 1 to be detachably connected to the robotic arm 340.

[0073] Specifically, the conveyor plate is set as a high-low plate, and the carrier 310 is fixed on the higher plate surface. When the carrier 310 moves to the bottom of the workpiece 1, the distance between the carrier 310 and the bottom of the workpiece 1 is reduced due to the high-low plate setting, thereby reducing the lifting process. Since the lifting process is reduced, the lifting component can be selected as a high-precision short-process component, which improves the accuracy of the fit between the insertion pin and the connecting hole.

[0074] It should be noted that in this embodiment, position identification components should be set at the locations where different components are mated and connected. In this embodiment, moving components should be mated with driving components. This is existing technology and will not be elaborated here.

[0075] Furthermore, this embodiment also provides a loading method for the first loading rack 210, taking four first loading racks 210 as an example, including the following steps:

[0076] Step 1: Load the first loading rack 210;

[0077] Step 2: Rotate the second loading rack 220 180° and load the second first loading rack 210;

[0078] Step 3: Rotate the second loading rack 220 by 90° and load the third first loading rack 210;

[0079] Step 4: Rotate the second loading rack 220 180° and load the fourth first loading rack 210.

[0080] Furthermore, this embodiment also provides an unloading method for the first loading rack 210, taking four first loading racks 210 as an example, including the following steps:

[0081] Step 1: Unload the first loading rack 210;

[0082] Step 2: Rotate the second loading rack 220 180° and unload the second first loading rack 210;

[0083] Step 3: Rotate the second loading rack 220 by 90° and unload the third first loading rack 210;

[0084] Step 4: Rotate the second loading rack 220 180° and unload the fourth first loading rack 210.

[0085] By employing the above loading and unloading methods, the second loading rack 220 can maintain a uniform force distribution as much as possible when loading and unloading the first loading rack 210, thus avoiding damage to the second loading rack 220 due to uneven force distribution during loading and unloading. When the number of first loading racks 210 is set to other quantities, the second loading rack 220 can be adjusted adaptively by rotating it once, which will not be elaborated here.

[0086] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A vacuum processing device, characterized in that, include: A receiving assembly (100) includes a first chamber (110) and a second chamber (120) which are selectively connected, and a workpiece (1) is movable between the first chamber (110) and the second chamber (120); A loading mechanism (200) is provided in the first chamber (110). The loading mechanism (200) includes a first loading frame (210). The first loading frame (210) is capable of loading multiple workpieces (1). The first loading frame (210) can be inserted into or removed from the first chamber (110) as a whole. A conveying mechanism (300) is provided in the first chamber (110). The conveying mechanism (300) can convey the workpiece (1) between the first chamber (110) and the second chamber (120), and selectively drive the workpiece (1) to rotate during the conveying process.

2. The vacuum processing equipment according to claim 1, characterized in that, There are two first chambers (110).

3. The vacuum processing equipment according to claim 1, characterized in that, The loading mechanism (200) further includes a second loading frame (220), which is rotatably disposed in the first chamber (110) about its own central axis. There are multiple first loading frames (210), which are arranged in a circular array about the central axis of the second loading frame (220). The first loading frame (210) is detachable and can rotate about its own central axis.

4. The vacuum processing equipment according to claim 3, characterized in that, The loading mechanism (200) further includes a first mating member (230), a first receiving member (240), a second mating member (250), and a second receiving member (260). The first mating member (230) and the second mating member (250) are respectively disposed at the top and bottom of the first loading frame (210), and the first receiving member (240) and the second receiving member (260) are respectively disposed at the top and bottom of the second loading frame (220). The first mating part (230) and the second mating part (250) are both fixedly connected to the first loading frame (210), the first receiving part (240) is rotatably connected to the second loading frame (220), and the first mating part (230) is drive-connected to the first receiving part (240) and is detachable; The second receiving member (260) is rotatably connected to the second loading frame (220) and is drive-connected to the second mating member (250) and is detachable; Alternatively, the second receiving member (260) can be fixedly connected to the second loading frame (220) and rotatably connected to the second mating member (250).

5. The vacuum processing equipment according to claim 3, characterized in that, The vacuum processing equipment also includes a drive mechanism (400), which is located at the top or bottom of the second loading frame (220) to drive the first loading frame (210) and the second loading frame (220) to rotate.

6. The vacuum processing equipment according to claim 1, characterized in that, The loading mechanism (200) also includes a counterweight, which is detachably mounted on the first loading frame (210).

7. The vacuum processing apparatus according to any one of claims 1-6, characterized in that, The conveying mechanism (300) includes a carrier (310) and a fixing member (320). The fixing member (320) is disposed on the carrier (310). The bottom of the workpiece (1) is detachably connected to the fixing member (320). The carrier (310) can rotate at any angle around the vertical direction to drive the workpiece (1) to rotate at any angle.

8. The vacuum processing equipment according to claim 7, characterized in that, The conveying mechanism (300) further includes a limiting member (350), which is disposed on the periphery of the carrier (310). The limiting member (350) can selectively abut against the carrier (310) to restrict the rotation of the carrier (310).

9. The vacuum processing equipment according to claim 7, characterized in that, The conveying mechanism (300) further includes a conveying component (330), which is disposed in the first chamber (110). The bearing component (310) is slidably disposed on the conveying component (330) and can extend into or out of the second chamber (120) to drive the workpiece (1) to move between the first chamber (110) and the second chamber (120).

10. The vacuum processing equipment according to claim 9, characterized in that, The conveying mechanism (300) further includes a robotic arm (340), which is placed on top of the first chamber (110). The robotic arm (340) is detachably connected to the workpiece (1). The robotic arm (340) and the carrier (310) can jointly clamp the workpiece (1) to load or unload the workpiece (1) onto the first loading rack (210).

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