Plasma cooling chamber spray structure for process exhaust gas removal from production equipment

Abstract

A plasma cooling chamber spray structure for removing process waste gas from production equipment allows individual or mixed process waste gases to enter a dissociation chamber of a waste gas plasma processor via separate gas pipelines. A vertical plasma body is located in the center of the dissociation chamber, which, in conjunction with the introduction of working gas nitrogen, dissociates the tail gas containing the special gas generated in the dissociation chamber at high temperature. A cooling chamber is connected to the rear end of the dissociation chamber, and the cooling chamber has an outer cylinder connected to the dissociation chamber and a short section relative to the tail end of the heating flame section of the plasma body. An inner cylinder of an outer cylinder is characterized by having multiple annularly arranged spray nozzles on the inner edge surface of the outer cylinder, each spray nozzle spraying water onto the outer edge surface of the inner cylinder to provide water cooling in addition to air cooling for the cooling chamber. Because the entire cooling chamber is cooled earlier, the dissociation of nitrogen at high temperature is reduced, thus greatly reducing the generation rate of NOx (gaseous nitrogen oxides) in the cooling chamber. Consequently, the cooling chamber can be shortened, thereby reducing the overall length and installation cost of the plasma processor.

Description

Technical Field

[0001] This utility model relates to a plasma cooling chamber structure for removing process waste gas from production equipment, and more particularly to a plasma cooling chamber spray structure for removing process waste gas from production equipment. Background Technology

[0002] Existing technologies utilize plasma dissociation structures for waste gas removal in production equipment. The semiconductor industry uses large quantities of high-concentration, high-purity, and toxic specialty gases such as perfluorinated gases and nitrogen. For over a decade, to meet environmental requirements, special treatment of exhaust gases in these specialty gas pipelines has been necessary. This has evolved from large-scale gas-heated combustion treatment machines to single-unit, one-to-one, small-batch plasma-heated treatment machines, which can also include end-of-line treatment for acid washing and rinsing. Essentially, these systems utilize high temperatures for the dissociation reaction of the specialty gases. This invention does not discuss the related chemical reaction processes but only describes the structure of the plasma processor. When individual or mixed waste gases from the process enter a dissociation chamber of the waste gas plasma processor through their respective gas pipelines, a vertical plasma body is located in the center of the dissociation chamber. This plasma body, introduced from the working gas nitrogen, generates a high-temperature reaction in the waste gas within the dissociation chamber. The exhaust gas from special gases such as perfluorochlorohydrogen is dissociated, and air is simultaneously introduced from the middle channel pipe to the top of the dissociation chamber. The top of the dissociation chamber is also the electrode fixing point of the plasma body, from which the heating flame of the plasma is emitted. Basically, to ensure uniform reaction during dissociation, the plasma body is supplied with the highest setting for dissociation. A cooling chamber is connected to the rear end of the dissociation chamber. The cooling chamber has an outer cylinder connected to the dissociation chamber and an inner cylinder shorter than the outer cylinder relative to the tail end of the heating flame section of the plasma body. A sedimentation tank is connected to the lower end of the cooling chamber. A water washing chamber (acid washing tower) is connected to the other side through the water tank. The purified gas is then exhausted. However, after long-term use and summarizing the results, it was found that the previous water washing chamber was only effective, but it always produced a high rate of NOx (gaseous nitrogen oxides) byproduct. In order to provide a product that better meets practical needs, the creator conducted research and development to solve the problems that are easy to occur in the use of existing technology. Utility Model Content

[0003] The main objective of this invention is to provide a plasma cooling chamber spray structure for removing process waste gas from production equipment. Existing technologies often include a separate, similar or even larger water washing chamber parallel to the dissociation and cooling chambers, resulting in high overall cost and space consumption, placing an economic burden on the equipment. One reason for this is the high rate of NOx byproduct generation. The actual structural reason is that the flame remains at a high temperature throughout the long cooling chamber, making the cooling chamber section many times longer than the dissociation chamber section. However, the longer the cooling chamber, the smaller the temperature change within it, making the introduced nitrogen more reactive, easier to dissociate, and more likely to combine with oxygen to form more NOx byproducts, thus accelerating production. Therefore, the optimal solution is to force cooling in the cooling section, combined with a sedimentation tank at the tail end, and to add a spray system inside the cooling chamber. The lower temperature reduces the nitrogen dissociation rate, decreases the NOx byproduct production, and allows for a shorter cooling chamber, improving environmental compliance.

[0004] To achieve the above objectives, the structure of this utility model is as follows: when the individual or mixed waste gas from the process enters a dissociation chamber of the waste gas plasma processor through various gas pipelines, a vertical plasma body is provided in the middle of the dissociation chamber to cooperate with the introduction of working gas nitrogen, and to dissociate the tail gas of the waste gas generated in the dissociation chamber with special gas at high temperature. A cooling chamber is provided at the rear end of the dissociation chamber. The cooling chamber has an outer cylinder connected to the dissociation chamber and an inner cylinder shorter than the outer cylinder relative to the tail end of the heating flame section of the plasma body. The feature is that multiple spray nozzles are arranged in a ring on the inner edge surface of the outer cylinder.

[0005] The beneficial effects of this utility model are as follows: by spraying water onto the outer edge of the inner cylinder through each spray nozzle, water cooling is provided to the cooling chamber in addition to air cooling. Since the entire cooling chamber is cooled earlier, the dissociation of nitrogen at high temperature is reduced, thus greatly reducing the generation rate of NOx gas, a byproduct of the cooling chamber. Consequently, the cooling chamber can be shortened, thereby reducing the overall length and installation cost of the plasma processor.

[0006] To enable your review committee to further understand the technology, means and effects of this utility model in order to achieve its intended purpose, a preferred and feasible embodiment is described below in detail with reference to the drawings. It is believed that the purpose, features and advantages of this utility model can be understood in depth and in detail from this embodiment. Attached Figure Description

[0007] Figure 1 This is a cross-sectional view of the present invention.

[0008] Explanation of reference numerals in the attached figures

[0009] 1. Gas pipeline; 2. Plasma processor; 3. Dissociation chamber; 4. Plasma body; 5. Cooling chamber; 50. Spray nozzle; 51. Outer cylinder; 52. Inner cylinder. Detailed Implementation

[0010] like Figure 1 As shown, this utility model discloses a plasma cooling chamber spray structure for the separation of process waste gas in a production equipment. Individual gases or mixed waste gas from the process are introduced into a dissociation chamber 3 of the waste gas plasma processor 2 via gas pipelines 1. A vertical plasma body 4 is located in the center of the dissociation chamber 3, which, in conjunction with the introduction of working gas nitrogen, dissociates the tail gas generated in the dissociation chamber 3 at high temperature to remove the special gases. A cooling chamber 5 is connected to the rear end of the dissociation chamber 3. The cooling chamber 5 has an outer cylinder 51 connected to the dissociation chamber and a plasma... The inner cylinder 52, which is shorter than the outer cylinder 51, is located at the end of the main heating flame section. Multiple spray nozzles 50 arranged in a ring are provided on the inner edge surface of the outer cylinder 51. Each spray nozzle 50 sprays water onto the outer edge surface of the inner cylinder 52, providing water cooling in addition to air cooling to the cooling chamber 5. Because the entire cooling chamber 5 is cooled earlier, the dissociation of nitrogen at high temperature is reduced, thus greatly reducing the generation rate of NOx gas, a byproduct of the cooling chamber. This also allows the cooling chamber to be shortened, thereby reducing the overall length and installation cost of the plasma processor.

[0011] In summary, this invention utilizes a specially designed spray nozzle within the cooling chamber to water-cool the chamber, thereby reducing the generation rate of NOx gas, a byproduct. This design offers significant economic benefits, reducing costs and environmental impact, and is easy to understand and implement. Therefore, it provides excellent usability and convenience, making it a completely different mechanism from existing technologies.

[0012] The above description and drawings are the preferred embodiments of the present utility model and are not intended to limit the present utility model. The scope of the present utility model shall be determined by the following patent scope. All embodiments and similar structures with similar variations to the spirit of the patent scope shall be included in the present utility model.

Claims

1. A plasma cooling chamber spray structure for removing ions from a process exhaust gas of a production facility, comprising a dissociation chamber, a cooling chamber connected to the rear end of the dissociation chamber, the cooling chamber having an outer cylinder connected to the dissociation chamber and an inner cylinder shorter than the outer cylinder and located opposite the rear end of the plasma main heating flame section, characterized in that: Multiple spray nozzles are arranged in a ring on the inner edge of the outer cylinder, with the output end of each spray nozzle facing the outer edge of the inner cylinder.

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