A material feeding device and coating equipment

Abstract

This utility model provides an auxiliary material feeding device and a coating equipment, relating to the field of coating technology. The auxiliary material feeding device includes a heating chamber, a source bottle, and a conveying pipeline; the heating chamber has a heating cavity; the source bottle is used to store auxiliary materials, and multiple source bottles are arranged on the outer wall of the heating chamber; the conveying pipeline passes through the heating chamber, and one end of the conveying pipeline is used to connect to the reaction chamber. Multiple first three-way valves are arranged on the conveying pipeline, each having a first inlet end, a second inlet end, and a first outlet end. The first inlet end and the first outlet end are respectively connected to the conveying pipeline, and the second inlet end is connected to the corresponding source bottle. The axis of the first inlet end coincides with the axis of the first outlet end. The section of the conveying pipeline containing the first three-way valve can be designed as a straight pipe, which simplifies the layout of the conveying pipeline, reduces the space occupied, and thus helps to reduce the size of the heating chamber and the heat power of the heating chamber.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and in particular to an auxiliary material feeding device and coating equipment. Background Technology

[0002] Plasma-enhanced atomic layer deposition (ALD) is an important extension of ALD technology, widely applicable to the uniform deposition of various materials (including but not limited to powders, granules, sheets, PCBs, and wafers). It combines the advantages of plasma technology, providing a more efficient and flexible solution for thin film fabrication.

[0003] In the process of depositing thin films using plasma-enhanced atomic layer deposition (PEALD), the auxiliary materials in each source bottle need to be heated and then fed into the reaction chamber in a specific order to react chemically with the main material. However, the pipes and valves arranged in the heater are complex and occupy a large space, resulting in an excessively large heater size and excessively high thermal power. Utility Model Content

[0004] In order to solve the problems existing in the prior art, the purpose of this utility model is to provide an auxiliary material feeding device.

[0005] This utility model provides the following technical solution:

[0006] An auxiliary material feeding device, comprising:

[0007] Heating chamber, the heating chamber having a heating cavity;

[0008] Source bottles, used for storing auxiliary materials, are provided in multiple manner, and the multiple source bottles are disposed on the outer wall of the heating chamber; and

[0009] A delivery pipeline is provided, which passes through the heating chamber. One end of the delivery pipeline is used to connect to the reaction chamber. Multiple first three-way valves are provided on the delivery pipeline. The first three-way valves are located inside the heating chamber and are correspondingly arranged with the source bottle. Each first three-way valve has a first inlet end, a second inlet end, and a first outlet end. The first inlet end and the first outlet end are respectively connected to the delivery pipeline. The second inlet end is connected to the corresponding source bottle. The axis of the first inlet end coincides with the axis of the first outlet end. At least two first three-way valves are arranged along the axial direction of the first inlet end.

[0010] Specifically, when the first three-way valve is closed, the first inlet end and the first outlet end are open, and the second inlet end is closed; when the first three-way valve is open, the first inlet end, the second inlet end, and the first outlet end are all open.

[0011] As a further optional solution for the auxiliary material feeding device, a first two-way valve is provided on the conveying pipeline, and the first two-way valve is connected to the first inlet end.

[0012] As a further optional feature of the auxiliary material feeding device, an inert gas source is connected to the end of the conveying pipeline away from the reaction chamber.

[0013] As a further optional solution for the auxiliary material feeding device, the source bottle is provided on both sides of the heating chamber;

[0014] The delivery pipeline includes a main delivery pipe and two branch delivery pipes. One end of the main delivery pipe is connected to the two branch delivery pipes respectively, and the other end of the main delivery pipe is used to connect to the reaction chamber. The branch delivery pipes extend along the axial direction of the first inlet end.

[0015] The first three-way valves are respectively installed on the conveying branch pipes, and the first three-way valves located on the same conveying branch pipe are respectively installed on the source bottle located on the same side of the heating chamber.

[0016] As a further optional solution for the auxiliary material feeding device, the auxiliary material feeding device also includes a sampling pipeline, one end of which is connected to the conveying pipeline, and the other end of which is used to connect to a gas analyzer.

[0017] As a further optional solution for the auxiliary material feeding device, a second three-way valve is provided on the conveying pipeline. The second three-way valve is located between the first three-way valve and the reaction chamber. The second three-way valve has a third inlet end, a second outlet end and a third outlet end. The third inlet end and the second outlet end are respectively connected to the conveying pipeline, and the third outlet end is connected to the sampling pipeline.

[0018] Specifically, when the second three-way valve is closed, the third inlet end and the second outlet end are open, and the third outlet end is closed; when the second three-way valve is open, the third inlet end, the second outlet end, and the third outlet end are all open.

[0019] As a further optional embodiment of the auxiliary material feeding device, the axis of the third inlet end and the axis of the second outlet end both coincide with the axis of the first inlet end.

[0020] As a further optional solution for the auxiliary material feeding device, a second two-way valve is provided on the conveying pipeline, and the second two-way valve is connected to the second outlet end.

[0021] As a further optional solution for the auxiliary material feeding device, the auxiliary material feeding device also includes a flow regulating valve, and the second inlet end is connected to the corresponding source bottle through the flow regulating valve.

[0022] Another objective of this invention is to provide a coating device.

[0023] This utility model provides the following technical solution:

[0024] A coating apparatus includes the aforementioned auxiliary material feeding device.

[0025] The embodiments of this utility model have the following beneficial effects:

[0026] When the above-mentioned auxiliary material feeding device is used to deliver auxiliary materials to the reaction chamber, the first three-way valve is opened, and the first inlet, second inlet, and first outlet are all open. The auxiliary materials stored in the source bottle enter the delivery pipeline through the corresponding first three-way valve and are then delivered to the reaction chamber. Conversely, when the first three-way valve is closed, the second inlet connected to the source bottle is closed, thus stopping the delivery of auxiliary materials. The first inlet and first outlet, which are always open, are connected to the delivery pipeline to ensure that the delivery pipeline remains unobstructed at the first three-way valve. Since the axes of the first inlet and first outlet coincide, and at least two first three-way valves are arranged along the axis of the first inlet, the section of the delivery pipeline containing these first three-way valves can be designed as a straight pipe. This simplifies the layout of the delivery pipeline, reduces the space occupied, and thus helps to reduce the size of the heating chamber and lower its thermal power.

[0027] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0028] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This diagram illustrates the structure of an auxiliary material feeding device according to an embodiment of the present invention.

[0030] Figure 2 This diagram illustrates the pipeline connection relationship of an auxiliary material feeding device according to an embodiment of the present invention.

[0031] Figure 3This diagram illustrates the connection relationship between the first three-way valve and other components in an auxiliary material feeding device according to an embodiment of the present invention.

[0032] Figure 4 This diagram shows a structural schematic of the first three-way valve in an auxiliary material feeding device provided by an embodiment of the present invention;

[0033] Figure 5 This diagram shows a cross-sectional view of the first three-way valve in an auxiliary material feeding device according to an embodiment of the present invention.

[0034] Figure 6 This diagram shows the internal structure of the first three-way valve in an auxiliary material feeding device according to an embodiment of the present invention.

[0035] Figure 7 This diagram illustrates the connection relationship between the second three-way valve and other components in an auxiliary material feeding device provided by an embodiment of the present invention.

[0036] Explanation of key component symbols:

[0037] 100-Heating chamber; 110-Heating cavity; 200-Source bottle; 300-Conveying pipeline; 301-Main conveying pipe; 302-Branch conveying pipe; 310-First three-way valve; 311-First inlet end; 312-Second inlet end; 313-First outlet end; 314-First flow channel; 315-Second flow channel; 316-Third flow channel; 317-Cavity; 318-Pneumatic actuator; 320-First two-way valve; 330-Second three-way valve; 331-Third inlet end; 332-Second outlet end; 333-Third outlet end; 340-Second two-way valve; 400-Flow regulating valve; 500-Feed pipe; 600-Sampling pipeline. Detailed Implementation

[0038] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0039] It should be noted that when an element is said to be "fixed" to another element, it can be directly on the other element or there may be an intervening element. When an element is said to be "connected" to another element, it can be directly connected to the other element or there may be an intervening element. Conversely, when an element is said to be "directly" on another element, there is no intervening element. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0040] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0041] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0042] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the template description is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0043] Example

[0044] Please refer to the following: Figure 1 and Figure 2 This embodiment provides an auxiliary material feeding device for use in coating equipment, including but not limited to plasma modification equipment and other atomic layer deposition equipment. The auxiliary material feeding device includes a heating chamber 100, a source bottle 200, and a delivery pipeline 300.

[0045] Specifically, the heating chamber 100 has a heating cavity 110.

[0046] Source bottle 200 is used to store auxiliary materials. Multiple source bottles 200 are provided and are located on the outer wall of heating chamber 100.

[0047] Please combine Figure 3A delivery pipeline 300 passes through the heating chamber 100, with one end of the pipeline 300 connected to the reaction chamber. Multiple first three-way valves 310 are installed on the delivery pipeline 300, located within the heating chamber 110, and corresponding to the source bottle 200. Each first three-way valve 310 has a first inlet end 311, a second inlet end 312, and a first outlet end 313. The first inlet end 311 and the first outlet end 313 are respectively connected to the delivery pipeline 300, and the second inlet end 312 is connected to the corresponding source bottle 200. The axis of the first inlet end 311 coincides with the axis of the first outlet end 313, and at least two first three-way valves 310 are arranged along the axial direction of the first inlet end 311.

[0048] When the first three-way valve 310 is closed, the first inlet end 311 and the first outlet end 313 are open, and the second inlet end 312 is closed. When the first three-way valve 310 is open, the first inlet end 311, the second inlet end 312, and the first outlet end 313 are all open.

[0049] When the above-mentioned auxiliary material feeding device is used to feed auxiliary materials into the reaction chamber, the first three-way valve 310 is opened, and the first inlet end 311, the second inlet end 312, and the first outlet end 313 are all opened. The auxiliary materials stored in the source bottle 200 enter the conveying pipeline 300 through the corresponding first three-way valve 310 and are then conveyed into the reaction chamber. Conversely, when the first three-way valve 310 is closed, the second inlet end 312 connected to the source bottle 200 is closed, thus stopping the feeding of auxiliary materials. The first inlet end 311 and the first outlet end 313, which are always kept open, are connected to the conveying pipeline 300 to ensure that the conveying pipeline 300 remains unobstructed at the first three-way valve 310. Since the axes of the first inlet end 311 and the first outlet end 313 coincide, and at least two first three-way valves 310 are arranged along the axial direction of the first inlet end 311, the section of the conveying pipeline 300 where these first three-way valves 310 are located can be designed as a straight pipe, which can simplify the arrangement of the conveying pipeline 300, reduce the space occupied, and thus help to reduce the size of the heating chamber 100 and reduce the heat power of the heating chamber 100.

[0050] It should be noted that the three-way valve has a T-shaped structure, with two of its three ports located on the same straight line, and the remaining port located on one side. When a conventional three-way valve is open, all three ports are open; when closed, one of the two ports on the same straight line is closed. In use, the openable / closable port is connected to the source bottle 200, and the other port on the same straight line and the port on one side are connected to the pipeline. Because the two ports connected to the pipeline are perpendicular to each other, regardless of how the three-way valves corresponding to each source bottle 200 are arranged, they cannot be connected sequentially through a single straight pipe. In other words, the pipeline connecting the various three-way valves inevitably uses a bent design, making the pipeline and valves complex and space-consuming.

[0051] In contrast, this utility model achieves a straight pipe design for the conveying pipeline 300 by having the second inlet end 312 on one side of the first three-way valve 310 open and close with the opening and closing of the first three-way valve 310, and by having at least two first three-way valves 310 arranged along the axial direction of the first inlet end 311, thereby simplifying the arrangement of the conveying pipeline 300.

[0052] For example, the heating chamber 100 is arranged in a cuboid shape, and the long side of the heating chamber 100 remains vertical. At the same time, the source bottle 200 is disposed on the side wall of the heating chamber 100, and the axial direction of the first inlet end 311 is parallel to the length direction of the heating chamber 100.

[0053] Please refer to the following: Figure 4 , Figure 5 and Figure 6 In some embodiments, the first three-way valve 310 is provided with a first flow channel 314, a second flow channel 315, a third flow channel 316 and a cavity 317, and a pneumatic actuator 318 is provided on the first three-way valve 310.

[0054] The first flow channel 314 extends along the axial direction of the first inlet end 311. One end of the first flow channel 314 is connected to the first inlet end 311, and the other end of the first flow channel 314 is connected to the first outlet end 313.

[0055] One end of the second flow channel 315 is connected to the first flow channel 314, and the other end of the second flow channel 315 is connected to the cavity 317. One end of the third flow channel 316 is connected to the second inlet end 312, and the other end of the third flow channel 316 is connected to the cavity 317.

[0056] In addition, the actuating end of the pneumatic actuator 318 is located inside the cavity 317.

[0057] When the first three-way valve 310 is opened, the actuating end of the pneumatic actuator 318 retracts, and the second flow channel 315 and the third flow channel 316 are interconnected through the cavity 317, thereby opening the second inlet end 312. When the first three-way valve 310 is closed, the actuating end of the pneumatic actuator 318 extends, blocking one end of the second flow channel 315 exposed in the cavity 317, thereby isolating the second flow channel 315 from the third flow channel 316, and thus closing the second inlet end 312. During this process, the first inlet end 311 and the first outlet end 313 are always connected through the first flow channel 314, remaining in an open state.

[0058] Please refer to it again. Figure 2 and Figure 3 In some embodiments, the above-mentioned auxiliary material feeding device further includes a flow regulating valve 400, and the second inlet end 312 is connected to the corresponding source bottle 200 through the flow regulating valve 400.

[0059] In use, the flow regulating valve 400 can control the flow rate of the auxiliary material in the source bottle 200 into the delivery pipeline 300. Combined with the control of the opening time of the first three-way valve 310, the amount of auxiliary material entering the reaction chamber can be precisely controlled.

[0060] For example, the flow regulating valve 400 is located inside the reaction chamber and is connected to the source bottle 200 through the feed pipe 500, which passes through the heating chamber 100.

[0061] In some embodiments, a first two-way valve 320 is provided on the delivery pipeline 300, and the first two-way valve 320 is connected to the first inlet end 311.

[0062] When the first three-way valve 310 is opened, the first inlet end 311, the second inlet end 312 and the first outlet end 313 are all opened, and the first two-way valve 320 connected to the first inlet end 311 is closed, which can prevent the auxiliary material from flowing upstream through the first inlet end 311 to the upstream conveying pipeline 300, which is conducive to the auxiliary material being conveyed more smoothly into the reaction chamber.

[0063] In some embodiments, the end of the delivery pipeline 300 away from the reaction chamber is connected to an inert gas source.

[0064] When the first three-way valve 310 is closed, the inert gas source supplies inert gas to the conveying pipeline 300 to purge the conveying pipeline 300 and remove residual auxiliary materials inside the conveying pipeline 300.

[0065] It should be noted that after the auxiliary material in each source bottle 200 enters the conveying pipeline 300, it needs to be purged with inert gas. That is, after the corresponding first three-way valve 310 is closed, the first two-way valve 320 connected to the first inlet end 311 is opened, and then purging is performed.

[0066] Please see Figure 2 In some embodiments, source bottles 200 are provided on both sides of the heating chamber 100.

[0067] Accordingly, the delivery pipeline 300 includes a main delivery pipe 301 and two delivery branch pipes 302. One end of the main delivery pipe 301 is connected to the two delivery branch pipes 302 respectively, and the other end of the main delivery pipe 301 is used to connect to the reaction chamber. The delivery branch pipes 302 extend along the axial direction of the first inlet end 311.

[0068] In addition, the first three-way valve 310 is respectively installed on the conveying branch pipe 302, and the first three-way valve 310 located on the same conveying branch pipe 302 is respectively installed on the source bottle 200 located on the same side of the heating chamber 100.

[0069] Understandably, if the number of source bottles 200 is large, and the first three-way valve 310 and the first two-way valve 320 corresponding to each source bottle 200 are arranged on the same straight line, the space occupied will be too large, which will also lead to the heating chamber 100 being too large.

[0070] Conversely, by placing each source bottle 200 on both sides of the heating chamber 100, and connecting the first three-way valve 310 and the first two-way valve 320 corresponding to the source bottles 200 on the same side in series through the same delivery branch pipe 302, the space of the heating chamber 110 can be fully utilized, and the size of the heating chamber 100 along the length direction can be reduced.

[0071] For example, there are four source bottles 200. Three of the source bottles 200 are located on one side of the heating chamber 100, and the corresponding three first three-way valves 310 are arranged along the length of the heating chamber 100. The remaining source bottle 200 is located on the other side of the heating chamber 100.

[0072] In some embodiments, the above-mentioned auxiliary material feeding device further includes a sampling pipeline 600. One end of the sampling pipeline 600 is connected to the delivery pipeline 300, and the other end of the sampling pipeline 600 is used to connect to a gas analyzer.

[0073] When the coating equipment is running, some of the auxiliary materials in the conveying pipeline 300 can enter the gas analyzer through the sampling pipeline 600. The gas analyzer detects the molecular weight of the auxiliary materials, thereby determining the amount of auxiliary materials entering the auxiliary material feeding device, which is beneficial for controlling the coating thickness of the main material.

[0074] Please refer to the following: Figure 2 and Figure 7 Furthermore, a second three-way valve 330 is provided on the delivery pipeline 300, and the second three-way valve 330 is located between the first three-way valve 310 and the reaction chamber. The second three-way valve 330 has a third inlet end 331, a second outlet end 332 and a third outlet end 333. The third inlet end 331 and the second outlet end 332 are respectively connected to the delivery pipeline 300, and the third outlet end 333 is connected to the sampling pipeline 600.

[0075] Specifically, when the second three-way valve 330 is closed, the third inlet end 331 and the second outlet end 332 are open, and the third outlet end 333 is closed. When the second three-way valve 330 is open, the third inlet end 331, the second outlet end 332, and the third outlet end 333 are all open.

[0076] When the molecular weight of the excipient in the delivery pipeline 300 is detected using a gas analyzer, the second three-way valve 330 is opened, and the third inlet end 331, the second outlet end 332, and the third outlet end 333 are all open. The excipient in the delivery pipeline 300 can enter the sampling pipeline 600 through the third outlet end 333. After the detection is completed, the second three-way valve 330 is closed, and the third outlet end 333 connected to the sampling pipeline 600 is closed, ensuring that all the excipient in the delivery pipeline 300 enters the reaction chamber.

[0077] It should be noted that the second three-way valve 330 being located between the first three-way valve 310 and the reaction chamber specifically means that the first three-way valve 310, the second three-way valve 330, and the reaction chamber are sequentially arranged in the gas flow path, and the gas flows through the first three-way valve 310, the second three-way valve 330, and the reaction chamber in sequence.

[0078] In this embodiment, the second three-way valve 330 is installed on the delivery branch pipe 302.

[0079] Furthermore, the axis of the third inlet end 331 and the axis of the second outlet end 332 both coincide with the axis of the first inlet end 311.

[0080] In other words, the second three-way valve 330 adopts the same design as the first three-way valve 310, using the port on one side as the opening and closing control port, while the two ports on the same straight line remain open at all times. The difference is that the first three-way valve 310 is a confluence valve, while the second three-way valve 330 is a diverter valve.

[0081] Therefore, the first three-way valve 310 and the second three-way valve 330, which are installed on the same conveying branch pipe 302, can be arranged along the length of the heating chamber 100, and the conveying branch pipe 302 is designed as a straight pipe to simplify the arrangement of the conveying pipeline 300.

[0082] Furthermore, a second two-way valve 340 is provided on the conveying pipeline 300, and the second two-way valve 340 is connected to the second outlet end 332.

[0083] When the second three-way valve 330 is opened, the third inlet end 331, the second outlet end 332 and the third outlet end 333 are all opened, and the second two-way valve 340 connected to the second outlet end 332 is closed. This can prevent the auxiliary material from flowing downstream to the conveying pipeline 300 through the second outlet end 332, so that all the auxiliary material in the conveying pipeline 300 enters the sampling pipeline 600 through the third outlet end 333, which is beneficial for accurately controlling the amount of auxiliary material entering the reaction chamber.

[0084] In this embodiment, the first three-way valve 310, the first two-way valve 320, the second three-way valve 330, and the second two-way valve 340 are all pneumatic diaphragm valves.

[0085] In summary, when the above-mentioned auxiliary material supply device is used to supply auxiliary materials to the reaction chamber, the first three-way valve 310 is opened, and the first inlet end 311, the second inlet end 312, and the first outlet end 313 are all open. The auxiliary materials stored in the source bottle 200 enter the delivery pipeline 300 through the corresponding first three-way valve 310 and are then transported to the reaction chamber. Conversely, when the first three-way valve 310 is closed, the second inlet end 312 connected to the source bottle 200 is closed, thus stopping the supply of auxiliary materials. The first inlet end 311 and the first outlet end 313, which are always open, are connected to the delivery pipeline 300 to ensure that the delivery pipeline 300 remains unobstructed at the first three-way valve 310. Since the axes of the first inlet end 311 and the first outlet end 313 coincide, and at least two first three-way valves 310 are arranged along the axial direction of the first inlet end 311, the section of the conveying pipeline 300 where these first three-way valves 310 are located can be designed as a straight pipe, which can simplify the arrangement of the conveying pipeline 300, reduce the space occupied, and thus help to reduce the size of the heating chamber 100 and reduce the heat power of the heating chamber 100.

[0086] This embodiment also provides a coating apparatus, including the aforementioned auxiliary material feeding device. This coating apparatus can be applied to the modification and coating of powders, the modification and coating of granules, the modification and coating of tablets, and the coating of PCBs (Printed Circuit Boards) or wafers.

[0087] In all examples shown and described herein, any specific values ​​should be interpreted as merely exemplary and not as limitations; therefore, other examples of exemplary embodiments may have different values.

[0088] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0089] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. An auxiliary material feeding device, characterized in that, include: Heating chamber, the heating chamber having a heating cavity; Source bottles, used for storing auxiliary materials, are provided in multiple manner, and the multiple source bottles are disposed on the outer wall of the heating chamber; and A delivery pipeline is provided, which passes through the heating chamber. One end of the delivery pipeline is used to connect to the reaction chamber. Multiple first three-way valves are provided on the delivery pipeline. The first three-way valves are located inside the heating chamber and are correspondingly arranged with the source bottle. Each first three-way valve has a first inlet end, a second inlet end, and a first outlet end. The first inlet end and the first outlet end are respectively connected to the delivery pipeline. The second inlet end is connected to the corresponding source bottle. The axis of the first inlet end coincides with the axis of the first outlet end. At least two first three-way valves are arranged along the axial direction of the first inlet end. Specifically, when the first three-way valve is closed, the first inlet end and the first outlet end are open, and the second inlet end is closed; when the first three-way valve is open, the first inlet end, the second inlet end, and the first outlet end are all open.

2. The auxiliary material feeding device according to claim 1, characterized in that, A first two-way valve is installed on the delivery pipeline, and the first two-way valve is connected to the first inlet end.

3. The auxiliary material feeding device according to claim 1, characterized in that, An inert gas source is connected to the end of the delivery pipeline away from the reaction chamber.

4. The auxiliary material feeding device according to claim 1, characterized in that, The source bottle is provided on both sides of the heating chamber; The delivery pipeline includes a main delivery pipe and two branch delivery pipes. One end of the main delivery pipe is connected to the two branch delivery pipes respectively, and the other end of the main delivery pipe is used to connect to the reaction chamber. The branch delivery pipes extend along the axial direction of the first inlet end. The first three-way valves are respectively installed on the conveying branch pipes, and the first three-way valves located on the same conveying branch pipe are respectively installed on the source bottle located on the same side of the heating chamber.

5. The auxiliary material feeding device according to any one of claims 1-4, characterized in that, The auxiliary material feeding device also includes a sampling pipeline, one end of which is connected to the conveying pipeline, and the other end of which is used to connect to a gas analyzer.

6. The auxiliary material feeding device according to claim 5, characterized in that, A second three-way valve is provided on the delivery pipeline. The second three-way valve is located between the first three-way valve and the reaction chamber. The second three-way valve has a third inlet end, a second outlet end and a third outlet end. The third inlet end and the second outlet end are respectively connected to the delivery pipeline, and the third outlet end is connected to the sampling pipeline. Specifically, when the second three-way valve is closed, the third inlet end and the second outlet end are open, and the third outlet end is closed; when the second three-way valve is open, the third inlet end, the second outlet end, and the third outlet end are all open.

7. The auxiliary material feeding device according to claim 6, characterized in that, The axis of the third inlet end and the axis of the second outlet end both coincide with the axis of the first inlet end.

8. The auxiliary material feeding device according to claim 6, characterized in that, A second two-way valve is installed on the delivery pipeline, and the second two-way valve is connected to the second outlet end.

9. The auxiliary material feeding device according to any one of claims 1-4, characterized in that, The auxiliary material feeding device also includes a flow regulating valve, and the second inlet end is connected to the corresponding source bottle through the flow regulating valve.

10. A coating apparatus, characterized in that, The auxiliary material feeding device includes any one of claims 1-9.

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