Photovoltaic PECVD transverse graphite boat

By designing a PECVD transverse graphite boat, the problems of easy damage and low utilization of graphite boat sheets were solved, achieving higher output and lower operating costs. The innovative design of vertical setting and extended ceramic rod connection improved the stability of the graphite boat and the material utilization rate.

CN224280443UActive Publication Date: 2026-05-26HONGXUN NEW ENERGY MATERIAL TECH (ZHEJIANG) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
HONGXUN NEW ENERGY MATERIAL TECH (ZHEJIANG) CO LTD
Filing Date
2025-04-16
Publication Date
2026-05-26

AI Technical Summary

Technical Problem

In existing technologies, the graphite boats in horizontal PECVD furnace tube equipment cannot be made long due to size limitations. They are prone to deformation and damage at high temperatures, resulting in high maintenance costs and low utilization of graphite materials.

Method used

A photovoltaic PECVD horizontal graphite boat is designed, with the boat sheet set perpendicular to the furnace tube and connected by an extended ceramic rod and electrode assembly. The edge of the boat sheet is provided with mounting holes and lugs, and the boat sheet is fixed and electrically connected by ceramic tubes and graphite blocks, which increases the stability and durability of the boat sheet.

Benefits of technology

The horizontally arranged boat structure avoids damage and deformation of the boats, increases the production of graphite boats, increases the utilization rate of graphite materials, and reduces the cost of use.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a photovoltaic PECVD (Plasma Enhanced Chemical Vapor Deposition) transverse graphite boat, which comprises a plurality of boat pieces which are arranged perpendicular to the length direction of a furnace tube, a ceramic component which is used for fixedly connecting the plurality of boat pieces, and an electrode component which is used for conductively connecting the plurality of boat pieces, the ceramic assembly comprises a lengthened ceramic rod, a ceramic tube cushioned between two adjacent boat pieces and nuts in threaded connection with the two ends of the lengthened ceramic rod, the edge of each boat piece in the plurality of boat pieces is provided with a mounting hole through which the lengthened ceramic rod can penetrate, and the electrode assembly comprises an electrode rod and a graphite block cushioned between two adjacent boat pieces. The bottom of each boat piece in the plurality of boat pieces is provided with a lug protruding out of the boat piece, and the lug is provided with a through hole for the electrode rod to pass through.
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