Damping supporting structure of single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnace supporting structures, in particular to a single crystal furnace damping supporting structure which comprises a plurality of damping assemblies, each damping assembly comprises a fixing sleeve, a connecting rod, a damping spring, a limiting sleeve and a sealing ring, and the end of the connecting rod penetrates through the fixing sleeve and is in sliding connection with the fixing sleeve; a mounting groove is formed in the top of the connecting rod in the axial direction, and the connecting rod is sleeved with the damping spring. The extension section of the damping spring is matched with the mounting groove to limit offset of the spring and improve stability, the limiting sleeve is in threaded connection with the connecting rod, the compression amount of the spring can be adjusted during mounting, the damping spring is convenient to disassemble and replace during later maintenance, and the defect that a traditional fixedly-mounted spring is difficult to replace is overcome. By means of the design, the stability of the damping spring in the using process is guaranteed, later maintenance is facilitated, and compared with a traditional damping spring installation mode, the practicability and reliability of the single crystal furnace damping supporting structure are improved.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace support structure technology, and more specifically, to a single crystal furnace vibration damping support structure. Background Technology

[0002] In the production of monocrystalline silicon, the monocrystalline furnace is the core equipment, and its operational stability directly determines the growth quality and product yield of monocrystalline silicon.

[0003] Existing single crystal furnace support structures mostly employ spring damping. The damping springs in these structures are primarily divided into two installation methods: movable and fixed. Movable damping springs are prone to spring misalignment during use, resulting in poor stability; while fixed damping springs are inconvenient to replace later. Utility Model Content

[0004] To address the aforementioned technical problems, this utility model provides a vibration damping support structure for a single crystal furnace, aiming to partially solve the problem that existing single crystal furnace support structures mostly employ spring damping. The damping springs in the spring damping structure are mainly divided into two installation methods: movable and fixed. Movable damping springs are prone to spring misalignment during use, resulting in poor stability; while fixed damping springs are inconvenient to replace later.

[0005] This utility model proposes a vibration damping support structure for a single crystal furnace, which includes multiple vibration damping components;

[0006] Each shock-absorbing component includes a fixing sleeve, a connecting rod, a shock-absorbing spring, a limiting sleeve, and a sealing ring;

[0007] The end of the connecting rod passes through the fixing sleeve and is slidably connected thereto; the top of the connecting rod is provided with an installation groove along the axial direction.

[0008] The shock-absorbing spring is sleeved on the connecting rod, and both ends of the shock-absorbing spring extend into the mounting groove to form an extension section.

[0009] The limiting sleeve is threadedly connected to the outer wall of the connecting rod;

[0010] The sealing ring is fixedly connected to the outer wall of the limiting sleeve, and the sealing ring slides in contact with the inside of the fixed sleeve.

[0011] Preferably, one end of the shock-absorbing spring abuts against the limiting sleeve, and the other end of the shock-absorbing spring abuts against the inner wall of the connecting rod.

[0012] Preferably, the support structure further includes a bracket, the inner wall of which is fixedly connected to a fixing plate, and the top four corners of the fixing plate are respectively fixedly connected to a fixing sleeve.

[0013] Preferably, a support plate is provided above the fixing plate, and positioning grooves are provided at the four corners of the bottom of the support plate, and two connecting holes are provided on the inner wall of each positioning groove.

[0014] Preferably, the outer wall of the connecting rod has a first mounting hole, the inner wall of the mounting groove has a support plate inserted into it, and the outer wall of the support plate has a third mounting hole.

[0015] Preferably, a first bolt is inserted into the first mounting hole, the first bolt passes through the third mounting hole, and the support plate and the connecting rod are fixed together by a nut.

[0016] Preferably, the top of the tray has two second mounting holes, and a second bolt is inserted into the inner wall of each second mounting hole. The end of the second bolt passes through the connecting hole and the tray and the support plate are fixed together by nuts. The tray is slidably connected to the inner wall of the positioning groove.

[0017] Preferably, the outer wall of the connecting rod is fitted with an installation sleeve, the bottom of the installation sleeve is fixedly connected to the limiting sleeve, the top of the installation sleeve is provided with a slot, and the bottom of the support plate is engaged with the slot.

[0018] The beneficial effects of this utility model, achieved through the above technical solution, are as follows:

[0019] 1. In this device, the extension of the shock-absorbing spring cooperates with the mounting groove to limit spring offset and improve stability. The limiting sleeve is threadedly connected to the connecting rod, and the spring compression can be adjusted during installation. It is also convenient to disassemble and replace the shock-absorbing spring during later maintenance, overcoming the defect of traditional fixed-installation springs that are difficult to replace. This design not only ensures the stability of the shock-absorbing spring during use, but also facilitates later maintenance. Compared with the traditional shock-absorbing spring installation method, it improves the practicality and reliability of the single crystal furnace shock-absorbing support structure.

[0020] 2. The support plate is fixedly connected to the tray plate through the positioning groove, connecting hole, second mounting hole, second bolt and nut. The positioning groove slides with the tray plate to ensure that the support plate is installed stably and can transmit vibration as it moves up and down with the tray plate. This structure effectively transmits the weight and vibration of the single crystal furnace to the shock absorption components. At the same time, it facilitates the installation and disassembly between the support plate and the tray plate, and makes it convenient to carry out overall maintenance of the shock absorption support structure.

[0021] 3. The bottom of the mounting sleeve is fixed to the limiting sleeve, and the top slot is engaged with the tray plate to further fix the position of the tray plate on the shock absorption component, enhance the connection stability between the tray plate and the shock absorption component, and prevent the tray plate from detaching from the limiting sleeve or connecting rod during vibration. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the overall structure of the support plate of this utility model;

[0024] Figure 3 This is a partial structural schematic diagram of the present invention;

[0025] Figure 4 This is a schematic diagram of the installation structure of the limiting sleeve of this utility model;

[0026] Figure 5 This is a partial disassembled structural diagram of the present invention;

[0027] Figure 6 This is a schematic diagram of the installation structure of the shock-absorbing spring of this utility model.

[0028] In the diagram: 1. Bracket; 2. Fixing plate; 3. Support plate; 4. Positioning groove; 5. Connecting hole; 6. Fixing sleeve; 7. Connecting rod; 8. Mounting groove; 9. First mounting hole; 10. Support plate; 11. Second mounting hole; 12. Third mounting hole; 13. First bolt; 14. Second bolt; 15. Shock-absorbing spring; 16. Extension section; 17. Limiting sleeve; 18. Sealing ring; 19. Mounting sleeve; 20. Slot. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0030] like Figure 4 and Figure 6 As shown, a single crystal furnace vibration damping support structure includes multiple vibration damping components; each vibration damping component includes a fixed sleeve 6, a connecting rod 7, a vibration damping spring 15, a limiting sleeve 17, and a sealing ring 18; the end of the connecting rod 7 passes through the fixed sleeve 6 and is slidably connected to it, and the top of the connecting rod 7 is provided with an installation groove 8 along the axial direction;

[0031] The shock-absorbing spring 15 is sleeved on the connecting rod 7. Both ends of the shock-absorbing spring 15 extend into the mounting groove 8 to form an extension section 16. One end of the shock-absorbing spring 15 abuts against the limiting sleeve 17, and the other end of the shock-absorbing spring 15 abuts against the inner wall of the connecting rod 7.

[0032] The limiting sleeve 17 is threaded to the outer wall of the connecting rod 7; the sealing ring 18 is fixedly connected to the outer wall of the limiting sleeve 17, and the sealing ring 18 slides in contact with the inside of the fixing sleeve 6.

[0033] The sliding connection between the fixed sleeve 6 and the connecting rod 7 provides guidance for shock absorption and prevents the connecting rod 7 from shifting. The shock-absorbing spring 15 cooperates with the mounting groove 8 through the extension section 16 to limit the spring's shift during vibration. Compared with traditional movable mounting springs, it has higher stability. The limiting sleeve 17 is threadedly connected to the connecting rod 7. The compression of the shock-absorbing spring 15 can be adjusted by rotating the limiting sleeve 17, which is convenient for installation and later spring replacement. The sealing ring 18 enhances the sealing between the fixed sleeve 6 and the connecting rod 7, preventing dust and other impurities from entering and affecting the shock absorption effect.

[0034] like Figure 1 As shown, the support structure also includes a bracket 1, with a fixing plate 2 fixedly connected to the inner wall of the bracket 1, and the four corners of the top of the fixing plate 2 are respectively fixedly connected to the fixing sleeve 6.

[0035] In this embodiment, as Figure 5 As shown, the outer wall of the connecting rod 7 has a first mounting hole 9, the inner wall of the mounting groove 8 has a support plate 10 inserted into it, and the outer wall of the support plate 10 has a third mounting hole 12.

[0036] A first bolt 13 is inserted into the first mounting hole 9. The first bolt 13 passes through the third mounting hole 12 and is used to fix the support plate 10 and the connecting rod 7 together with a nut.

[0037] The first mounting hole 9, the third mounting hole 12, the first bolt 13, and the nut enable a detachable connection between the support plate 10 and the connecting rod 7. This structure facilitates the installation and removal of the support plate 10. When maintenance or replacement of the shock-absorbing components is required, the support plate 10 and the connecting rod 7 can be quickly separated, making the operation simple and improving maintenance efficiency.

[0038] In this embodiment, as Figure 1 and Figure 2 As shown, a support plate 3 is provided above the fixed plate 2. Positioning grooves 4 are provided at the four corners of the bottom of the support plate 3. Two connecting holes 5 are provided on the inner wall of each positioning groove 4.

[0039] The top of the support plate 10 has two second mounting holes 11. The inner wall of each second mounting hole 11 is fitted with a second bolt 14. The end of the second bolt 14 passes through the connecting hole 5 and is fixed to the support plate 3 by a nut. The support plate 10 is slidably connected to the inner wall of the positioning groove 4.

[0040] The support plate 3 is fixedly connected to the support plate 10 through the positioning groove 4, the connecting hole 5, the second mounting hole 11, the second bolt 14 and the nut. The positioning groove 4 slides with the support plate 10 to ensure that the support plate 3 is installed stably and can move up and down with the support plate 10 to transmit vibration. This structure effectively transmits the weight and vibration of the single crystal furnace to the vibration damping component, while facilitating the installation and disassembly between the support plate 3 and the support plate 10, and making it convenient to carry out overall maintenance of the vibration damping support structure.

[0041] In this embodiment, as Figure 3 , Figure 4 and Figure 6 As shown, the outer wall of the connecting rod 7 is fitted with an installation sleeve 19. The bottom of the installation sleeve 19 is fixedly connected to the limiting sleeve 17. The top of the installation sleeve 19 is provided with a slot 20, and the bottom of the support plate 10 is engaged with the slot 20.

[0042] The bottom of the mounting sleeve 19 is fixed to the limiting sleeve 17, and the top slot 20 is engaged with the support plate 10 to further fix the position of the support plate 10 on the shock absorption assembly, enhance the connection stability between the support plate 10 and the shock absorption assembly, and prevent the support plate 10 from detaching from the limiting sleeve 17 or the connecting rod 7 during vibration.

[0043] The shock-absorbing spring 15 is fitted onto the connecting rod 7, so that the extension 16 of the shock-absorbing spring 15 extends into the mounting groove 8. Then, the limiting sleeve 17 is threadedly connected to the connecting rod 7. By rotating the limiting sleeve 17, the shock-absorbing spring 15 is compressed, so that one end of it abuts against the limiting sleeve 17 and the other end abuts against the inner wall of the connecting rod 7. At the same time, the sealing ring 18 slides in contact with the inside of the fixing sleeve 6, which plays a role in sealing and guiding.

[0044] Next, insert the support plate 10 into the mounting groove 8, aligning the third mounting hole 12 on the outer wall of the support plate 10 with the first mounting hole 9 on the outer wall of the connecting rod 7. Insert the first bolt 13 and secure the support plate 10 and the connecting rod 7 with a nut. Then, place the support plate 3 above the fixing plate 2, aligning the second mounting hole 11 on the top of the support plate 10 with the connecting hole 5 on the inner wall of the positioning groove 4. Insert the second bolt 14 and secure the support plate 10 and the support plate 3 with a nut. Simultaneously, the support plate 10 slides against the inner wall of the positioning groove 4, thus installing the support plate 3.

[0045] The bottom of the mounting sleeve 19 is fixedly connected to the limiting sleeve 17, and the top slot 20 is engaged with the bottom of the tray 10 to further fix the position of the tray 10.

[0046] When the single crystal furnace vibrates during operation, the vibration is transmitted to the support plate 3. The support plate 3 drives the tray 10 and the connecting rod 7 to slide up and down in the fixed sleeve 6. The damping spring 15 is compressed or extended accordingly, and absorbs the vibration energy through its own elastic deformation, reducing the vibration transmitted to the support 1, thereby achieving vibration reduction of the single crystal furnace.

[0047] The above are merely preferred embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in this utility model, based on the technical solution and inventive concept of this utility model, should be included within the scope of protection of this utility model.

Claims

1. A vibration damping support structure for a single crystal furnace, characterized in that, include: Multiple damping components, each of which includes: Fixing sleeve (6); A connecting rod (7) has its end passing through a fixing sleeve (6) and being slidably connected thereto. The top of the connecting rod (7) has an axially oriented mounting groove (8). A shock-absorbing spring (15) is sleeved on a connecting rod (7), and both ends of the shock-absorbing spring (15) extend into the mounting groove (8) to form an extension section (16). Limiting sleeve (17), the limiting sleeve (17) is threaded to the outer wall of the connecting rod (7); A sealing ring (18) is fixedly connected to the outer wall of the limiting sleeve (17), and the sealing ring (18) slides in contact with the inside of the fixing sleeve (6).

2. The vibration damping support structure for a single crystal furnace according to claim 1, characterized in that: One end of the shock-absorbing spring (15) abuts against the limiting sleeve (17), and the other end of the shock-absorbing spring (15) abuts against the inner wall of the connecting rod (7).

3. The vibration damping support structure for a single crystal furnace according to claim 2, characterized in that: It also includes a bracket (1), and a fixing plate (2) is fixedly connected to the inner wall of the bracket (1). The four corners of the top of the fixing plate (2) are respectively fixedly connected to the fixing sleeve (6).

4. The vibration damping support structure for a single crystal furnace according to claim 3, characterized in that: A support plate (3) is provided above the fixed plate (2). A positioning groove (4) is provided at each of the four corners of the bottom of the support plate (3). Two connecting holes (5) are provided on the inner wall of each positioning groove (4).

5. The vibration damping support structure for a single crystal furnace according to claim 4, characterized in that: The connecting rod (7) has a first mounting hole (9) on its outer wall, and a support plate (10) is inserted into the inner wall of the mounting groove (8). The support plate (10) has a third mounting hole (12) at the insertion end on its outer wall.

6. The vibration damping support structure for a single crystal furnace according to claim 5, characterized in that: A first bolt (13) is inserted into the first mounting hole (9). The first bolt (13) passes through the third mounting hole (12) and fixes the support plate (10) and the connecting rod (7) together with a nut.

7. The vibration damping support structure for a single crystal furnace according to claim 6, characterized in that: The top of the tray (10) has two second mounting holes (11). The inner wall of each second mounting hole (11) is fitted with a second bolt (14). The end of the second bolt (14) passes through the connecting hole (5) and the tray (10) and the support plate (3) are fixed together by nuts. The tray (10) is slidably connected to the inner wall of the positioning groove (4).

8. The vibration damping support structure for a single crystal furnace according to claim 7, characterized in that: The connecting rod (7) is fitted with an installation sleeve (19) on its outer wall. The bottom of the installation sleeve (19) is fixedly connected to the limiting sleeve (17). The top of the installation sleeve (19) is provided with a slot (20). The bottom of the support plate (10) is engaged with the slot (20).

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