A fast-response vacuum controller

Abstract

This utility model belongs to the technical field of vacuum control equipment, and in particular to a fast-response vacuum controller, including a vacuum controller housing, a vacuum controller body, a control panel, and a valve body mechanism. The vacuum controller body is disposed within the vacuum controller housing. A damping shaft is rotatably mounted on the control panel, and a strip block is radially fixedly mounted on the damping shaft. A storage groove is provided on the top side of the vacuum controller housing, and the strip block is mounted on the inner walls of the front and rear sides of the storage groove via damping hinges. The valve body mechanism is disposed within the vacuum controller housing and connected to the vacuum controller body. The valve body mechanism includes a mounting box, a U-shaped plate, two partitions, a guide and reset assembly, a transmission assembly, an electromagnet, and a magnetically made moving plate. This utility model has a reasonable design, can quickly respond to operation commands, improve execution efficiency, and optimize the operation interface to enhance ease of use and storage.

Description

Technical Field

[0001] This utility model relates to the field of vacuum control equipment technology, and in particular to a fast-response vacuum controller. Background Technology

[0002] In the field of vacuum control, traditional vacuum controllers have limitations in response speed and ease of operation, making it difficult to meet the stringent requirements of vacuum control precision and timely response in application scenarios. For example, in semiconductor manufacturing processes, as chip manufacturing processes continue to shrink, rapid and precise control of the vacuum environment is crucial. The slow response of traditional controllers can lead to process deviations and affect chip yield. In scientific research experiments, such as vacuum synthesis of materials, it is necessary to quickly adjust the vacuum level according to the reaction progress. Traditional controllers cannot execute instructions quickly enough, which may cause deviations in experimental results.

[0003] Existing vacuum controllers mostly adopt conventional control structures. After receiving operation commands, the actuators are slow to act, making it difficult to quickly change the state of the vacuum system. For example, common valve control structures rely on simple mechanical transmission, resulting in long response times that cannot adapt to rapid changes in vacuum levels. Moreover, most controllers have fixed operating interfaces, making them inconvenient for users to observe and operate. They also cannot flexibly adjust the tilt angle to suit different operators' habits, and are inconvenient to store after use, taking up valuable space.

[0004] To overcome these bottlenecks, there is an urgent need to develop a brand-new vacuum controller that can quickly respond to operation commands, improve execution efficiency, and optimize the user interface to enhance ease of use and storage. This utility model of a fast-response vacuum controller has emerged to meet this need.

[0005] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0006] The purpose of this invention is to address the shortcomings mentioned in the background section by proposing a fast-response vacuum controller.

[0007] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a fast-response vacuum controller, including a vacuum controller housing, a vacuum controller body, a control panel, and a valve body mechanism;

[0008] The main body of the vacuum controller is set inside the vacuum controller housing. A damping rotating shaft is installed on the control panel, and a strip block is radially fixed on the damping rotating shaft. A storage groove is opened on the top side of the vacuum controller housing, and the strip block is installed on the inner walls of the front and rear sides of the storage groove through a damping hinge.

[0009] The valve body mechanism is located inside the vacuum controller housing and connected to the vacuum controller body. The valve body mechanism includes a mounting box, a U-shaped plate, two partitions, a guide reset assembly, a transmission assembly, an electromagnet, and a movable plate made of magnetic material.

[0010] Both partitions are slidably mounted on the U-shaped plate and adapted to the vacuum controller body. The mounting box is fixedly mounted on one inner wall of the vacuum controller housing. The U-shaped plate is fixedly mounted on the side of the mounting box near the vacuum controller body. The electromagnet is fixedly mounted on the inner side wall of the mounting box. The moving plate is slidably mounted inside the mounting box. The guide reset assembly is located on both inner walls of the mounting box and connected to the moving plate. The transmission assembly is located on the U-shaped plate and connected to the moving plate and the two partitions.

[0011] Preferably, the transmission assembly includes two toothed plates, two toothed plates, a rotating rod, two gears, and two gears. Two toothed plates are fixedly mounted on the moving plate and arranged parallel to each other. Each of the two partition plates has a mounting groove, and toothed plates are fixedly mounted on the inner rear wall of each of the two mounting grooves. A rotating rod is rotatably mounted on the U-shaped plate, and two gears are fixedly sleeved on the rotating rod. The two gears mesh with the corresponding toothed plates, and the two gears mesh with the corresponding toothed plates.

[0012] Preferably, the diameter of gear one is smaller than the diameter of gear two.

[0013] Preferably, the guide reset assembly includes multiple guide rods and multiple reset springs. Multiple guide rods arranged in parallel to each other are fixedly installed on the inner walls of both sides of the mounting box. The multiple guide rods are slidably connected to the movable plate. Multiple reset springs are fixedly installed on the movable plate. The multiple reset springs are fixedly connected to the inner wall of one side of the mounting box.

[0014] Preferably, multiple return springs are movably sleeved on the outside of the corresponding guide rods.

[0015] Preferably, the control panel is embedded and fixedly mounted with a display screen and a control panel.

[0016] Preferably, a support plate is fixedly installed on one side of the vacuum controller body, and both partitions are slidably connected to the support plate.

[0017] The beneficial effects of this utility model are:

[0018] By designing the vacuum controller housing, main body, control panel, and valve mechanism, this invention enables rapid response and execution of operation commands. Specifically, when the electromagnet is energized, it attracts a magnetic moving plate. The moving plate, through a transmission assembly, drives two partitions to move in the direction of the moving plate. Since the diameter of gear one is smaller than that of gear two, the movement of the partitions is accelerated, improving the response speed and thus achieving rapid control of the vacuum controller main body. When the electromagnet is de-energized, the return spring pushes the moving plate to reset, thereby resetting the partitions. This achieves rapid and effective execution of action commands. Furthermore, the display screen and control panel on the control panel allow users to easily observe and operate the vacuum controller, improving ease of use. The tilt angle can be adjusted as needed to better suit the operator's needs. The storage slot, damping shaft, and strip block also facilitate quick storage of the control panel after use. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a three-dimensional structural diagram of a fast-response vacuum controller proposed in this utility model;

[0021] Figure 2 This is a schematic diagram of the structure of the vacuum controller body and valve body mechanism proposed in this utility model;

[0022] Figure 3 This is a partial cross-sectional view of the present invention.

[0023] Figure 4 This is a partial three-dimensional structural diagram of the present invention;

[0024] Figure 5 for Figure 4 A schematic diagram of the structure of part A;

[0025] Figure 6 This is a schematic diagram of the structure of the control panel, strip block, damping shaft, control panel and display screen proposed in this utility model.

[0026] In the diagram: 1. Vacuum controller housing; 11. Storage slot; 2. Control panel; 201. Strip block; 202. Damping shaft; 21. Display screen; 22. Control panel; 3. Vacuum controller body; 4. Mounting box; 41. U-shaped plate; 5. Partition plate; 51. Support plate; 6. Moving plate; 61. Electromagnet; 62. Gear plate one; 63. Gear plate two; 64. Rotating rod; 65. Gear one; 66. Gear two; 7. Return spring; 71. Guide rod. Detailed Implementation

[0027] The technical solution of this utility model will now be clearly and completely described with reference to specific embodiments. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0028] Reference Figure 1-6 A fast-response vacuum controller includes a vacuum controller housing 1, a vacuum controller body 3, a control panel 2, and a valve body mechanism;

[0029] The vacuum controller body 3 is set inside the vacuum controller housing 1. The control panel 2 is equipped with a damping rotating shaft 202, and a strip block 201 is radially fixed on the damping rotating shaft 202. The control panel 2 is embedded and fixedly equipped with a display screen 21 and a control panel 22. The top side of the vacuum controller housing 1 is provided with a storage groove, and the strip block 201 is installed on the inner walls of the front and rear sides of the storage groove 11 through a damping hinge.

[0030] The valve body mechanism is located inside the vacuum controller housing 1 and connected to the vacuum controller body 3. The valve body mechanism includes a mounting box 4, a U-shaped plate 41, two partitions 5, an electromagnet 61, and a magnetic movable plate 6.

[0031] Both partitions 5 are slidably mounted on the U-shaped plate 41 and adapted to the vacuum controller body 3. The mounting box 4 is fixedly mounted on the inner wall of one side of the vacuum controller housing 1. The U-shaped plate 41 is fixedly mounted on the side of the mounting box 4 close to the vacuum controller body 3.

[0032] Two parallel toothed plates 62 are fixedly installed on the movable plate 6. Each of the two partitions 5 has a mounting groove. A toothed plate 63 is fixedly installed on the inner rear wall of each mounting groove. A rotating rod 64 is rotatably installed on the U-shaped plate 41. Two gears 65 and two gears 66 are fixedly sleeved on the rotating rod 64. The two gears 65 mesh with the corresponding toothed plates 62, and the two gears 66 mesh with the corresponding toothed plates 63. When the electromagnet 61 attracts the movable plate 6, it can control the partitions 5 to move towards the movable plate 6, thereby enabling rapid execution of operation commands. In order to further improve the response speed of the execution action, the diameter of the gear 65 is smaller than the diameter of the gear 66.

[0033] Electromagnet 61 is fixedly installed on the inner wall of mounting box 4. Movable plate 6 is slidably installed inside mounting box 4. Multiple guide rods 71 ​​arranged in parallel are fixedly installed on the inner walls of both sides of mounting box 4. Multiple guide rods 71 ​​are slidably connected to movable plate 6. Multiple return springs 7 are fixedly installed on movable plate 6. Multiple return springs 7 are fixedly connected to the inner wall of one side of mounting box 4. They can control movable plate 6 to quickly reset when electromagnet 61 is de-energized, thereby achieving the effect of quickly and effectively executing action commands. In order to ensure the working stability of return spring 7, multiple return springs 7 are movably sleeved on the outside of the corresponding guide rod 71.

[0034] In this embodiment, a support plate 51 is fixedly installed on one side of the vacuum controller body 3, and both partitions 5 are slidably connected to the support plate 51, which can cooperate with the U-shaped plate 41 to provide stable guidance for the partitions 5.

[0035] The circuits, electronic components, and module mechanisms involved all employ existing technologies, which can be fully implemented by those skilled in the art, and need no further explanation. The content protected by this application does not involve any improvement to the software, circuits, or methods.

[0036] Working principle: In use, firstly, the operation command is input through the control panel 22 on the control panel 2. After receiving the command, the vacuum controller body 3 will control the electromagnet 61 to be energized. After being energized, the electromagnet 61 generates magnetism, attracting the magnetic moving plate 6. When the moving plate 6 moves closer to the vacuum controller body 3, it will drive the two toothed plates 62 on it to move synchronously. Since the two toothed plates 62 are respectively engaged with the two gears 65, the two gears 65 will rotate accordingly. At the same time, the two gears 65 are respectively fixedly installed with the two gears 66 on the same rotating plate. On the moving rod 64, the two gears 66 will also rotate synchronously. Since the two gears 66 mesh with the two toothed plates 63 respectively, the two toothed plates 63 will drive the two partitions 5 to move synchronously towards the moving plate 6. Since the diameter of the gear 65 is smaller than the diameter of the gear 66, according to the principle of gear transmission, the moving speed of the moving plate 6 will be less than the moving speed of the partitions 5. This allows the moving speed of the partitions 5 to be greater than the moving speed of the moving plate 6, thereby effectively improving the response speed and realizing rapid control of the vacuum controller body 3.

[0037] When it is necessary to reset the partition 5, simply de-energize the electromagnet 61. At this time, the electromagnet 61 loses its magnetism and no longer attracts the moving plate 6. Under the elastic force of the reset spring 7, the moving plate 6 quickly moves to the side away from the vacuum controller body 3 and resets. At the same time, it drives the two toothed plates 62 to reset, the two gears 65 to rotate in the opposite direction, and the two gears 66 to rotate in the opposite direction synchronously, thereby driving the two partitions 5 to reset quickly. In addition, the display screen 21 on the control panel 2 can display the operating status and parameter information of the vacuum controller, which makes it convenient for users to observe and understand the working status of the vacuum controller. The cooperation of the strip block 201 and the damping shaft 202 facilitates the tilt adjustment of the control panel 2 and the storage operation during use.

[0038] The above provides a detailed description of a fast-response vacuum controller provided by this utility model. Specific embodiments have been used to illustrate the principles and implementation methods of this utility model. The descriptions of these embodiments are merely for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that those skilled in the art can make various improvements and modifications to this utility model without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A fast-response vacuum controller, characterized in that, It includes a vacuum controller housing (1), a vacuum controller body (3), a control panel (2), and a valve body mechanism; The vacuum controller body (3) is set inside the vacuum controller housing (1). The control panel (2) is equipped with a damping rotating shaft (202) and a strip block (201) is radially fixed on the damping rotating shaft (202). The top side of the vacuum controller housing (1) is provided with a storage groove (11) and the strip block (201) is installed on the inner walls of the front and rear sides of the storage groove (11) through a damping hinge. The valve body mechanism is located inside the vacuum controller housing (1) and connected to the vacuum controller body (3). The valve body mechanism includes a mounting box (4), a U-shaped plate (41), two partitions (5), a guide reset assembly, a transmission assembly, an electromagnet (61), and a magnetic moving plate (6). Both partitions (5) are slidably mounted on the U-shaped plate (41) and adapted to the vacuum controller body (3). The mounting box (4) is fixedly mounted on one side of the inner wall of the vacuum controller housing (1). The U-shaped plate (41) is fixedly mounted on the side of the mounting box (4) close to the vacuum controller body (3). The electromagnet (61) is fixedly mounted on the inner side wall of the mounting box (4). The moving plate (6) is slidably mounted inside the mounting box (4). The guide reset assembly is set on both sides of the inner wall of the mounting box (4) and connected to the moving plate (6). The transmission assembly is set on the U-shaped plate (41) and connected to the moving plate (6) and the two partitions (5).

2. The fast-response vacuum controller according to claim 1, characterized in that: The transmission assembly includes two toothed plates (62), two toothed plates (63), a rotating rod (64), two gears (65) and two gears (66). Two toothed plates (62) arranged in parallel are fixedly installed on the moving plate (6). Mounting grooves are provided on both partitions (5). Toothed plates (63) are fixedly installed on the inner rear side of both mounting grooves. A rotating rod (64) is rotatably installed on the U-shaped plate (41). Two gears (65) and two gears (66) are fixedly sleeved on the rotating rod (64). The two gears (65) mesh with the corresponding toothed plates (62) respectively, and the two gears (66) mesh with the corresponding toothed plates (63) respectively.

3. A fast-response vacuum controller according to claim 2, characterized in that: The diameter of gear one (65) is smaller than the diameter of gear two (66).

4. A fast-response vacuum controller according to claim 1, characterized in that: The guide reset assembly includes multiple guide rods (71) and multiple reset springs (7). Multiple guide rods (71) arranged in parallel are fixedly installed on the inner walls of both sides of the mounting box (4). The multiple guide rods (71) are slidably connected to the moving plate (6). Multiple reset springs (7) are fixedly installed on the moving plate (6). The multiple reset springs (7) are fixedly connected to the inner wall of one side of the mounting box (4).

5. A fast-response vacuum controller according to claim 1, characterized in that: Multiple return springs (7) are respectively movably sleeved on the outside of the corresponding guide rod (71).

6. A fast-response vacuum controller according to claim 1, characterized in that: The control panel (2) is embedded and fixedly mounted with a display screen (21) and a control panel (22).

7. A fast-response vacuum controller according to claim 1, characterized in that: A support plate (51) is fixedly installed on one side of the vacuum controller body (3), and both partitions (5) are slidably connected to the support plate (51).

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