Electrostatic chuck multi-zone temperature measurement device

Abstract

This utility model discloses a multi-zone temperature measurement device for an electrostatic chuck, comprising: a positioning component disposed below the electrostatic chuck, the positioning component having a cavity; a gas heating assembly disposed below the electrostatic chuck; an upper steel platform disposed above the electrostatic chuck, the upper steel platform being connected to the positioning component; and a plurality of thermometers disposed above the upper steel platform, the ends of the thermometers passing through the opening and contacting different areas of the upper surface of the electrostatic chuck. This utility model effectively eliminates the risk of leakage in the traditional electric heating process, ensuring operator safety and the stability of the production environment; it eliminates the need to design dedicated heating structures for different models of electrostatic chucks, significantly improving the compatibility and versatility of the testing device and reducing manufacturing costs; and it accurately measures the temperature of multiple zones, providing reliable data support for evaluating the performance of the electrostatic chuck.

Description

Technical Field

[0001] This invention relates to the field of temperature and thermal conductivity testing technology for electrostatic chucks, specifically to a multi-zone temperature measurement device for electrostatic chucks. Background Technology

[0002] In semiconductor wafer fabrication, the temperature control accuracy of the electrostatic chuck plays a decisive role in ensuring wafer processing yield. Especially in high-temperature, high-vacuum, and plasma environments, maintaining the temperature uniformity of the electrostatic chuck becomes a key factor in ensuring wafer processing quality. Therefore, it is necessary to regularly test the temperature and thermal conductivity of the electrostatic chuck. This is of paramount importance for timely assessment of the chuck's operational status, thereby ensuring the stability and reliability of wafer processing.

[0003] Traditional electrostatic chuck temperature measurement devices mostly employ electric heating methods, such as the common resistance wire heating technology. This traditional heating method has several insurmountable drawbacks: Firstly, different models of electrostatic chucks require specially designed customized heating structures, which not only significantly reduces the compatibility of the testing equipment but also substantially increases maintenance costs. Secondly, there is a risk of electric leakage during electric heating, especially in high-temperature operating environments. This leakage hazard could potentially lead to serious safety accidents, posing a threat to the personal safety of operators and the entire processing and production environment. Utility Model Content

[0004] The purpose of this invention is to provide a multi-zone temperature measurement device for electrostatic chucks, which aims to solve the problems of traditional electrostatic chuck temperature measurement devices that require customized design of heating structures for different models of electrostatic chucks and the risk of leakage in electric heating testing methods.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution:

[0006] An electrostatic chuck multi-zone temperature measurement device includes:

[0007] A positioning element is disposed below the electrostatic chuck to support the electrostatic chuck. The positioning element has a cavity inside and an exhaust port communicating with the cavity.

[0008] A gas heating component is disposed below the electrostatic chuck, which introduces high-temperature gas into the cavity of the positioning member to heat the electrostatic chuck.

[0009] An upper steel platform is disposed above the electrostatic chuck, the upper steel platform is connected to the positioning component, and the upper steel platform is provided with an opening;

[0010] Several thermometers are arranged above the upper steel platform, and the ends of the thermometers pass through the opening and contact different areas of the upper surface of the electrostatic chuck.

[0011] An exhaust assembly, one end of which is connected to the exhaust port.

[0012] Preferably, the positioning element includes:

[0013] Base;

[0014] The lower steel platform is located above the base and connected to the upper steel platform. The cavity is located inside the lower steel platform. The upper surface of the lower steel platform is in contact with the lower surface of the electrostatic chuck. Several air inlets are provided at the bottom or on one side of the lower steel platform.

[0015] Preferably, the positioning element further includes:

[0016] A sealing gasket is disposed on the lower steel platform and is disposed corresponding to the electrostatic chuck.

[0017] Preferably, an electromagnet is provided on the upper surface of the lower steel platform. The electromagnet is connected to an external power source, and when energized, it connects the lower steel platform and the upper steel platform.

[0018] Preferably, the gas heating assembly includes:

[0019] Several valves are installed on the upper surface of the base, and the air inlet ends of the valves are connected in parallel to an external heat source.

[0020] Several high-temperature blowing steel pipes are provided, with their inlet ends connected to several valves in a corresponding manner, and their outlet ends extending through several inlets into the cavity.

[0021] Preferably, the gas heating assembly further includes:

[0022] Several pressure gauges are connected one-to-one between the outlet ends of several valves and the inlet ends of several high-temperature blowing steel pipes.

[0023] Preferably, the outlet ends of several high-temperature blowing steel pipes are evenly arranged in the cavity, and the outlet ends of several high-temperature blowing steel pipes are all set vertically upward.

[0024] Preferably, the exhaust assembly includes an exhaust pipe, one end of which is connected to the exhaust port, and the other end of which is located outside the positioning member.

[0025] Preferred options also include:

[0026] Support columns are installed on the upper steel platform;

[0027] A top plate is mounted on the support column. The top plate has several through holes corresponding to several thermometers. The top ends of several thermometers are mounted on the top plate, and the lower ends of several thermometers pass through the through holes.

[0028] Preferably, a plurality of the thermometers are evenly arranged, and each thermometer includes:

[0029] A probe fixing rod passes through one of the aforementioned through holes;

[0030] A display is located on the top plate, and the display is connected to the top end of the probe fixing rod;

[0031] An elastic fixing block is disposed below the probe fixing rod and connected to the end of the probe fixing rod;

[0032] A temperature probe contact is disposed below the elastic fixing block. The upper surface of the temperature probe contact is connected to the lower end of the elastic rubber fixing block, and the lower surface of the temperature probe contact is in contact with the upper surface of the electrostatic chuck.

[0033] Compared with the prior art, the present invention has the following beneficial effects:

[0034] This utility model provides a multi-zone temperature measurement device for electrostatic chucks. By using high-temperature gas heating instead of traditional resistance wire heating, it effectively eliminates the risk of leakage in the traditional electric heating process, significantly improving the operational safety of the equipment in high-temperature environments and ensuring the safety of operators and the stability of the production environment. The device uses a high-temperature blowing steel pipe to heat the electrostatic chuck, eliminating the need for designing dedicated heating structures for different models of electrostatic chucks. This significantly improves the compatibility and versatility of the testing device, saving on the customized resistance elements and complex circuits required by traditional electric heating, thus reducing manufacturing costs. The external heat source can be replaced independently, reducing equipment downtime for maintenance. Several thermometers contact different areas of the electrostatic chuck's surface through multiple probe contacts, enabling accurate measurement of multi-zone temperatures and providing reliable data support for evaluating the performance of the electrostatic chuck. Attached Figure Description

[0035] To more clearly illustrate the technical solution of this utility model, the accompanying drawings used in the description will be briefly introduced below. Obviously, the drawings in the following description are three embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1A schematic diagram of the structure of an electrostatic chuck multi-zone temperature measuring device provided in an embodiment of this utility model;

[0037] Figure 2 A side view of an electrostatic chuck multi-zone temperature measuring device provided in an embodiment of this utility model;

[0038] Figure 3 A schematic diagram of the base and lower steel platform structure provided in one embodiment of this utility model;

[0039] Figure 4 This is a schematic diagram of a temperature measuring instrument provided in one embodiment of the present invention.

[0040] Explanation of reference numerals in the attached diagram: 1-Base, 2-Lower steel platform, 3-Valve, 4-High-temperature gas inlet steel pipe, 5-Pressure gauge, 6-High-temperature blowing steel pipe, 7-Sealing gasket, 8-Heat insulation cotton, 9-Electrostatic chuck, 10-Heat insulation silicone gasket ring, 11-Upper steel platform, 12-Support column, 13-Top plate, 14-Thermometer, 141-Display, 142-Probe fixing rod, 143-Elastic fixing block, 144-Thermometric probe contact, 15-Electromagnet, 16-Exhaust port, 17-Exhaust pipe. Detailed Implementation

[0041] The following is in conjunction with the appendix Figure 1-4 The following detailed description of the electrostatic chuck multi-zone temperature measuring device proposed in this utility model further illustrates its specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions, used only to facilitate and clearly illustrate the purpose of the embodiments of this utility model. Please refer to the accompanying drawings to make the purpose, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only used to complement the content disclosed in the specification, for those skilled in the art to understand and read, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and purposes achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0042] Given that traditional electrostatic chuck temperature measurement devices require customized heating structures for different models of electrostatic chucks, and that electric heating testing methods pose a risk of leakage, these issues need to be addressed.

[0043] refer to Figure 1 and Figure 2As shown, this embodiment provides an electrostatic chuck multi-zone temperature measuring device, including: a positioning component, a gas heating component, an upper steel platform 11, several temperature measuring instruments 14, and an exhaust component. A positioning component is positioned below the electrostatic chuck 9 to support it. The positioning component has a cavity and an exhaust port 16 communicating with the cavity. A gas heating assembly is positioned below the electrostatic chuck 9 to introduce high-temperature gas into the cavity of the positioning component to heat the electrostatic chuck 9. An upper steel platform 11 is positioned above the electrostatic chuck 9 and connected to the positioning component. The upper steel platform 11 has an opening and is used to restrict and fix the electrostatic chuck 9, ensuring the sealing of the cavity of the lower steel platform 2 below the electrostatic chuck 9. Several thermometers 14 are positioned above the upper steel platform 11, with their ends passing through the opening and contacting different areas of the upper surface of the electrostatic chuck 9. An exhaust assembly has one end connected to the exhaust port 16.

[0044] refer to Figure 3 As shown, the positioning component in this embodiment includes a base 1 and a lower steel platform 2. The lower steel platform 2 is disposed above the base 1 and is connected to the upper steel platform 11. The cavity is formed within the lower steel platform 2. The upper surface of the lower steel platform 2 is in contact with the lower surface of the electrostatic chuck 9. Several air inlets are respectively provided on the bottom or one side of the lower steel platform 2. In one embodiment, the air inlets are located at the bottom of the side wall of the lower steel platform 2. (Refer to...) Figure 3 As shown.

[0045] Continue to refer to Figure 3 As shown, the positioning component in this embodiment further includes a sealing gasket 7, which is disposed on the lower steel platform 2 and corresponding to the electrostatic chuck 9. In this embodiment, the sealing gasket 7 is a sealing rubber gasket, which is bonded to the lower steel platform 2. The upper surface of the sealing rubber gasket is in close contact with the lower surface of the electrostatic chuck 9 to ensure the seal between the lower steel platform 2 and the electrostatic chuck 9.

[0046] Continue to refer to Figure 2 As shown, in this embodiment, an electromagnet 15 is provided on the upper surface of the lower steel platform 2. The electromagnet 15 is connected to an external power source. After the electromagnet 15 is energized, it connects the lower steel platform 2 and the upper steel platform 11.

[0047] refer to Figure 3As shown, the cavity of the lower steel platform 2 is equipped with heat-insulating cotton 8 for heat insulation to prevent the gas blown out by the high-temperature blowing steel pipe 6 from contacting the lower steel platform 2. The upper steel platform 11 above the electrostatic chuck 9 is fixed by an electromagnet 15 fixed to the upper end of the lower steel platform 2, thereby fixing the electrostatic chuck 9 to the upper end of the lower steel platform 2.

[0048] Continue to refer to Figure 3 As shown, the gas heating assembly in this embodiment includes: a plurality of valves 3, a plurality of pressure gauges 5, and a plurality of high-temperature blowing steel pipes 6, each corresponding to a specific valve. The plurality of valves 3 are all disposed on the upper surface of the base 1. The inlet ends of the plurality of valves 3 are connected in parallel and then connected to an external heat source. In one embodiment, the plurality of valves 3 are symmetrically disposed on both sides of the lower steel platform 2. The inlet ends of the plurality of valves 3 are connected in parallel and then connected to a high-temperature gas inlet steel pipe 4, which is connected to an external heat source. The plurality of pressure gauges 5 are disposed corresponding to the outlet ends of the plurality of valves 3. The outlet ends of the plurality of pressure gauges 5 are connected corresponding to the plurality of high-temperature blowing steel pipes 6. The pressure gauges 5 are used to display the pressure of the gas exiting the corresponding valve 3. The inlet ends of the plurality of high-temperature blowing steel pipes 6 are respectively connected corresponding to the outlet ends of the plurality of pressure gauges 5. The outlet ends of the plurality of high-temperature blowing steel pipes 6 extend through the plurality of inlets into the cavity.

[0049] In this embodiment, the outlet ends of several high-temperature blowing steel pipes 6 are evenly arranged in the cavity, and the outlet ends of several high-temperature blowing steel pipes 6 are all set vertically upward.

[0050] After the high-temperature gas is connected to an external heat source via the inlet steel pipe 4, the heat source is regulated by valve 3 and blown into the lower steel platform 2 through the high-temperature blowing steel pipe 6. This allows the hot gas blown out by the high-temperature blowing steel pipe 6 to heat the electrostatic chuck 9, solving the leakage problem that occurs when the electrostatic chuck 9 uses resistance wire heating. Furthermore, it eliminates the need to design dedicated heating structures for different models of electrostatic chuck 9, significantly improving the equipment's versatility and saving on the customized resistance elements and complex circuits required by traditional electric heating, thus reducing manufacturing costs. The external heat source can be replaced independently, reducing equipment downtime for maintenance.

[0051] Continue to refer to Figure 3 As shown, the exhaust assembly in this embodiment includes an exhaust pipe 17, one end of which is connected to the exhaust port 16, and the other end of the exhaust pipe 17 is located outside the positioning member. The sealing rubber gasket bonded to the upper surface of the lower steel platform 2 is tightly connected to the lower surface of the electrostatic chuck 9, thereby facilitating the heating of the electrostatic chuck 9 by the gas blown out by the high-temperature blowing steel pipe 6 before being discharged through the exhaust port 16 and the exhaust pipe 17.

[0052] refer to Figure 2As shown, the electrostatic chuck multi-zone temperature measuring device in this embodiment further includes a support column 12 and a top plate 13. The support column 12 is disposed on the upper steel platform 11; the top plate 13 is disposed on the support column 12, and the top plate 13 has a plurality of through holes corresponding one-to-one with a plurality of the thermometers 14. The top ends of the plurality of thermometers 14 are disposed on the top plate 13, and the lower ends of the plurality of thermometers 14 pass through the through holes respectively.

[0053] refer to Figure 4 As shown, in this embodiment, several thermometers 14 are evenly arranged, and each thermometer 14 includes: a probe fixing rod 142, which passes through a through hole; a display 141, which is located on the top plate 13 and connected to the top end of the probe fixing rod 142; an elastic fixing block 143, which is disposed below the probe fixing rod 142 and connected to the end of the probe fixing rod 142; and a temperature probe contact piece 144, which is disposed below the elastic fixing block 143, with the upper surface of the temperature probe contact piece 144 connected to the lower end of the elastic rubber fixing block, and the lower surface of the temperature probe contact piece 144 in contact with the upper surface of the electrostatic chuck 9. Because the elastic rubber fixing block can undergo elastic deformation when compressed, it facilitates the contact between the temperature probe contact piece 144 and the upper surface of the electrostatic chuck 9.

[0054] In this embodiment, the heat-insulating silicone gasket ring 10 provided between the electrostatic chuck 9 and the upper steel platform 11 protects the electrostatic chuck 9 when the upper steel platform 11 applies pressure to it, thus preventing damage to the surface of the electrostatic chuck 9 when it is positioned by the positioning component. The temperature measuring instrument 14 fixed to the upper steel platform 11 by the support column 12 and the top plate 13 is used to measure the temperature of different areas on the upper surface of the electrostatic chuck 9.

[0055] In this embodiment, the working principle of the multi-zone temperature measurement device for the electrostatic chuck is as follows: After the high-temperature gas is connected to an external heat source through the high-temperature gas inlet pipe 4, the heat source is regulated by the valve 3 and then blown into the cavity of the lower steel platform 2 through the high-temperature blowing steel pipe 6. The outlet ends of the high-temperature blowing steel pipe 6 are all vertically upward, so that the hot air blown out by the high-temperature blowing steel pipe 6 heats the electrostatic chuck 9. After the electromagnet 15 is energized, the upper steel platform 11 above the electrostatic chuck 9 is fixed by the electromagnet 15 fixed at the upper end of the lower steel platform 2, thereby fixing the electrostatic chuck 9 to the upper end of the lower steel platform 2. The sealing rubber gasket bonded to the upper surface of the lower steel platform 2 is tightly attached to the lower surface of the electrostatic chuck 9. The gas blown from the high-temperature blowing steel pipe 6 heats the electrostatic chuck 9 before being discharged through the exhaust port 16 and exhaust pipe 17. The heat insulation cotton 8 fixed on the inner surface of the lower steel platform 2 prevents the gas blown from the high-temperature blowing steel pipe 6 from contacting the lower steel platform 2. At the same time, the heat insulation silicone gasket ring 10 set between the electrostatic chuck 9 and the upper steel platform 11 protects the electrostatic chuck 9 when the upper steel platform 11 applies pressure to it, preventing damage to the surface of the electrostatic chuck 9 when it is positioned by the positioning component. The temperature measuring instrument 14 fixed to the upper steel platform 11 through the support column 12 and the top plate 13 measures the temperature of different areas on the upper surface of the electrostatic chuck 9.

[0056] In summary, this embodiment provides a multi-zone temperature measurement device for electrostatic chucks. By using high-temperature gas heating instead of traditional resistance wire heating, it effectively eliminates the risk of leakage in the traditional electric heating process, significantly improving the operational safety of the equipment in high-temperature environments and ensuring the safety of operators and the stability of the production environment. Using a high-temperature blowing steel pipe to heat the electrostatic chuck eliminates the need for designing dedicated heating structures for different models of electrostatic chucks, significantly improving the compatibility and versatility of the testing device. It also eliminates the need for customized resistance elements and complex circuits required by traditional electric heating, reducing manufacturing costs. The external heat source can be replaced independently, reducing equipment downtime for maintenance. Several thermometers, through multiple probe contacts, contact different areas of the electrostatic chuck's surface, enabling accurate measurement of multi-zone temperatures and providing reliable data support for evaluating the performance of the electrostatic chuck.

[0057] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0058] In the description of this utility model, it should be understood that the terms "center," "height," "thickness," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0059] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0060] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0061] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. An electrostatic chuck multi-zone temperature measurement device, comprising: include: A positioning element is disposed below the electrostatic chuck to support the electrostatic chuck. The positioning element has a cavity inside and an exhaust port communicating with the cavity. A gas heating component is disposed below the electrostatic chuck, which introduces high-temperature gas into the cavity of the positioning member to heat the electrostatic chuck. An upper steel platform is disposed above the electrostatic chuck, the upper steel platform is connected to the positioning component, and the upper steel platform is provided with an opening; Several temperature measuring instruments are arranged above the upper steel platform, and the ends of the several temperature measuring instruments pass through the opening and contact different areas of the upper surface of the electrostatic chuck. An exhaust assembly, one end of which is connected to the exhaust port.

2. The electrostatic chuck multi-zone temperature measurement apparatus of claim 1, wherein, The positioning element includes: Base; The lower steel platform is located above the base and connected to the upper steel platform. The cavity is located inside the lower steel platform. The upper surface of the lower steel platform is in contact with the lower surface of the electrostatic chuck. Several air inlets are provided at the bottom or on one side of the lower steel platform.

3. The electrostatic chuck multi-zone temperature measurement apparatus of claim 2, wherein, The positioning element also includes: A sealing gasket is disposed on the lower steel platform and is disposed corresponding to the electrostatic chuck.

4. The electrostatic chuck multi-zone temperature measurement device of claim 2, wherein, An electromagnet is provided on the upper surface of the lower steel platform. The electromagnet is connected to an external power source. When the electromagnet is energized, it connects the lower steel platform and the upper steel platform.

5. The electrostatic chuck multi-zone temperature measurement device of claim 2, wherein, The gas heating assembly includes: Several valves are installed on the upper surface of the base, and the air inlet ends of the valves are connected in parallel to an external heat source. Several high-temperature blowing steel pipes are provided, with their inlet ends connected to several valves in a corresponding manner, and their outlet ends extending through several inlets into the cavity.

6. The electrostatic chuck multi-zone temperature measurement apparatus of claim 5, wherein, The gas heating assembly further includes: Several pressure gauges are connected one-to-one between the outlet ends of several valves and the inlet ends of several high-temperature blowing steel pipes.

7. The electrostatic chuck multi-zone temperature measurement device of claim 5, wherein, The outlet ends of several high-temperature blowing steel pipes are evenly arranged in the cavity, and the outlet ends of several high-temperature blowing steel pipes are all set vertically upward.

8. The electrostatic chuck multi-zone temperature measurement device of claim 1, wherein, The exhaust assembly includes an exhaust pipe, one end of which is connected to the exhaust port, and the other end of which is located outside the positioning member.

9. The electrostatic chuck multi-zone temperature measuring device as described in claim 1, characterized in that, Also includes: Support columns are installed on the upper steel platform; A top plate is mounted on the support column. The top plate has several through holes corresponding to several thermometers. The top ends of several thermometers are mounted on the top plate, and the lower ends of several thermometers pass through the through holes.

10. The electrostatic chuck multi-zone temperature measuring device as described in claim 9, characterized in that, Several thermometers are evenly arranged, and each thermometer includes: A probe fixing rod passes through one of the aforementioned through holes; A display is located on the top plate, and the display is connected to the top end of the probe fixing rod; An elastic fixing block is disposed below the probe fixing rod and connected to the end of the probe fixing rod; A temperature probe contact is disposed below the elastic fixing block. The upper surface of the temperature probe contact is connected to the lower end of the elastic fixing block, and the lower surface of the temperature probe contact is in contact with the upper surface of the electrostatic chuck.

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