Chlorosilane waste liquid treatment device
By combining heating and absorption mechanisms, the explosion risk and pollution problems in the treatment of chlorosilane waste liquid are solved, achieving a safe and environmentally friendly treatment effect for chlorosilane.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- INNER MONGOLIA TONGWEI HIGH PURITY CRYSTAL SILICON CO LTD
- Filing Date
- 2025-05-14
- Publication Date
- 2026-05-29
Smart Images
Figure CN224298936U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of polycrystalline silicon technology, specifically to a chlorosilane waste liquid treatment device. Background Technology
[0002] Currently, in the polysilicon industry, the remaining low-boiling-point chlorosilanes (mainly trichlorosilane and dichlorosilane) are typically treated by hydrolysis during maintenance and testing. However, the hydrolysis reaction of chlorosilanes is quite violent, producing a large amount of hydrogen gas and releasing a lot of heat, which can easily lead to an explosion. Furthermore, the generated HCl gas pollutes the surrounding environment. Utility Model Content
[0003] The purpose of this invention is to develop a chlorosilane wastewater treatment device that treats chlorosilane wastewater in a relatively mild manner and avoids flash explosions.
[0004] This utility model is achieved through the following technical solution:
[0005] A chlorosilane wastewater treatment device, comprising:
[0006] Heating mechanism;
[0007] The purging mechanism and the absorption mechanism are respectively connected to the heating mechanism;
[0008] The heating mechanism includes a heating base with a heating box on it; the purging mechanism includes a purging pipe connected to the heating box with a regulating valve on it; and the absorption mechanism includes a first absorption tank connected to the heating box with hydrogen fluoride inside.
[0009] Optionally, the heating base is provided with a heating groove adapted to the heating box, and the heating groove is filled with heating elements.
[0010] Optionally, the heating element may be a heating wire, a heating rod, or a heating plate.
[0011] Optionally, the top of the heating box has a sloping structure, the lower part of the heating box sidewall at the higher end of the top of the heating box is connected to the purging mechanism, and the lower part of the heating box sidewall at the lower end of the top of the heating box is connected to the absorption mechanism.
[0012] Optionally, a pressure relief valve is provided at the higher end of the top of the heating box.
[0013] Optionally, the first absorption tank is provided with a first absorption pipe and a first exhaust pipe. The inner end of the first absorption pipe is located near the bottom of the first absorption tank, and the outer end of the first absorption pipe is located outside the first absorption tank and communicates with the side wall of the heating box at the lower end of the top of the heating box. The inner end of the first exhaust pipe is located near the top of the first absorption tank, and the outer end of the first exhaust pipe is located outside the first absorption tank.
[0014] Optionally, the absorption mechanism further includes a second absorption tank, which contains a second absorption pipe and a second exhaust pipe. The inner end of the second absorption pipe is located near the bottom of the second absorption tank, and the outer end of the second absorption pipe is located outside the second absorption tank and connected to the first exhaust pipe. The inner end of the second exhaust pipe is located near the top of the second absorption tank, and the outer end of the second exhaust pipe is located outside the second absorption tank and connected to a ventilation device.
[0015] Optionally, both the bottom of the first and second absorption tubes are connected to a gas dispersing component.
[0016] Optionally, the gas dispersing assembly includes an annular gas dispersing ring, which is connected to a first absorption tube or a second absorption tube, and the top of the gas dispersing ring is covered with multiple air holes.
[0017] Optionally, the air holes of the air diffuser ring are arranged at an angle in the same circumferential direction.
[0018] The beneficial effects of this utility model are:
[0019] This invention uses heating to convert chlorosilanes into a gaseous state, which is then carried into the absorption mechanism by nitrogen or an inert gas. The reaction of gaseous chlorosilanes into the hydrogen fluoride solution is relatively mild, avoiding flash explosions and other phenomena. Furthermore, the hydrogen chloride produced in the reaction is absorbed by the absorption mechanism, preventing environmental pollution. The top of the heating chamber is sloped, with the air inlet of the purging mechanism located at the higher end of the slope, and the lower end connected to the absorption mechanism. This allows the purging airflow to better propel the chlorosilane gas towards the absorption mechanism. A gas dispersion component breaks the gas into numerous tiny bubbles that enter the absorption liquid, improving the absorption efficiency of the chlorosilane and hydrogen chloride gases. Attached Figure Description
[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0021] Figure 1 This is a structural diagram of the present utility model;
[0022] Figure 2 This is a structural diagram of the absorption mechanism.
[0023] Reference numerals in the attached diagram: 1. Heating base; 2. Heating box; 3. Pressure relief valve; 4. Purge pipe; 5. Regulating valve; 6. First absorption tank; 7. Second absorption tank; 8. First absorption pipe; 9. First exhaust pipe; 10. Second absorption pipe; 11. Second exhaust pipe; 12. Dispersing ring; 13. Air hole. Detailed Implementation
[0024] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the invention. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.
[0025] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.
[0026] In this invention, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0027] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.
[0028] like Figure 1 and Figure 2 As shown, this utility model discloses a chlorosilane waste liquid treatment device, including a heating mechanism, a purging mechanism and an absorption mechanism. The heating mechanism heats the chlorosilane waste liquid, causing the chlorosilane to become gaseous. The purging mechanism blows nitrogen or inert gas into the heating mechanism, and the gaseous chlorosilane enters the absorption mechanism with the airflow, so that the chlorosilane is absorbed.
[0029] The heating mechanism includes a heating base 1, a heating groove on the heating base 1, a heating box 2 with a suitable shape inside the heating groove, and heating elements that provide heat source are distributed on the inner wall of the heating groove. The heating elements can be heating wires, heating rods or heating plates, etc.
[0030] The top of the heating box 2 has a sloping structure, and a pressure relief valve 3 is provided at the higher end of the top of the heating box 2.
[0031] The purging mechanism includes a purging pipe 4, which is connected to the side wall of the heating chamber 2 at the lower part of the upper part of the heating chamber 2, so that the airflow enters the heating chamber 2 and flows to the inner wall of the upper part of the heating chamber 2. The purging pipe 4 is equipped with a regulating valve 5, which controls the airflow rate of the purging mechanism entering the heating chamber 2.
[0032] The absorption mechanism includes a first absorption tank 6 and a second absorption tank 7 connected in sequence, and the airflow in the heating box 2 passes through the first absorption tank 6 and the second absorption tank 7 in sequence.
[0033] The first absorption tank 6 is provided with a first absorption pipe 8 and a first exhaust pipe 9. The inner end of the first absorption pipe 8 is located near the bottom of the first absorption tank 6, and the outer end of the first absorption pipe 8 is located outside the first absorption tank 6 and communicates with the side wall of the heating box 2 at the lower part of the top of the heating box 2. The inner end of the first exhaust pipe 9 is located near the top of the first absorption tank 6, and the outer end of the first exhaust pipe 9 is located outside the first absorption tank 6.
[0034] The second absorption tank 7 is provided with a second absorption pipe 10 and a second exhaust pipe 11. The inner end of the second absorption pipe 10 is located near the bottom of the second absorption tank 7, and the outer end of the second absorption pipe 10 is located outside the second absorption tank 7 and is connected to the first exhaust pipe 9. The inner end of the second exhaust pipe 11 is located near the top of the second absorption tank 7, and the outer end of the second exhaust pipe 11 is located outside the second absorption tank 7 and is connected to a ventilation device to achieve external discharge.
[0035] Both the bottom of the first absorption tube 8 and the second absorption tube 10 are connected to a gas dispersing component, which allows the airflow to be evenly dispersed into the liquid. The gas dispersing component includes a circular gas dispersing ring 12, which is connected to the first absorption tube 8 or the second absorption tube 10. The top of the gas dispersing ring 12 is covered with a plurality of air holes 13, which are evenly arranged and are inclined in the same circumferential direction of the gas dispersing ring 12, that is, the axial direction of the air holes 13 is not perpendicular.
[0036] The first absorption tank 6 contains a hydrogen fluoride solution that covers the inner end of the first absorption tube 8, and the second absorption tank 7 contains a water or alkaline solution that covers the inner end of the second absorption tube 10.
[0037] Liquid low-boiling chlorosilane waste liquid is heated by heating base 1 in heating box 2 to a temperature of about 80°C. Nitrogen or inert gas is introduced into heating box 2 through purge pipe 4 via regulating valve 5, and then sequentially enters first absorption tank 6 and second absorption tank 7 from heating box 2. The chlorosilane in the waste liquid in heating box 2 is heated and turns into gaseous chlorosilane, which is carried out of heating box 2 by nitrogen or inert gas and enters first absorption tank 6. In first absorption tank 6, chlorosilane and hydrogen chloride are absorbed by hydrogen fluoride. The gas flow then enters second absorption tank 7. Hydrogen chloride that may be present in the gas flow is absorbed by water or alkaline solution in second absorption tank 7. Finally, the gas is discharged through ventilation device.
[0038] This invention uses heating to convert chlorosilanes into a gaseous state, which is then carried into the absorption mechanism by nitrogen or an inert gas. The reaction of gaseous chlorosilanes into the hydrogen fluoride solution is relatively mild, avoiding flash explosions and other phenomena. Furthermore, the hydrogen chloride produced in the reaction is also absorbed by the absorption mechanism, preventing environmental pollution. The top of the heating chamber 2 is designed with an inlet for the purging mechanism at the higher part of the inlet, while the lower part of the inlet connects to the absorption mechanism. This allows the purging airflow to better propel the chlorosilane gas towards the absorption mechanism. A gas dispersion component breaks the gas into numerous tiny bubbles that enter the absorption liquid, improving the absorption efficiency of the absorption liquid for both chlorosilanes and hydrogen chloride gases.
[0039] The above embodiments are merely preferred embodiments of this utility model and are not intended to limit the technical solutions of this utility model. Any technical solution that can be implemented based on the above embodiments without creative effort should be considered to fall within the scope of protection of this utility model patent.
Claims
1. A chlorosilane waste liquid treatment device, characterized in that, include: Heating mechanism; The purging mechanism and the absorption mechanism are respectively connected to the heating mechanism; The heating mechanism includes a heating base with a heating box on it; the purging mechanism includes a purging pipe connected to the heating box with a regulating valve on it; and the absorption mechanism includes a first absorption tank connected to the heating box with hydrogen fluoride inside.
2. The chlorosilane wastewater treatment device according to claim 1, characterized in that, The heating base is equipped with a heating groove adapted to the heating box, and the heating groove is filled with heating elements.
3. The chlorosilane waste liquid treatment device according to claim 2, characterized in that, The heating element can be a heating wire, a heating rod, or a heating plate.
4. The chlorosilane wastewater treatment device according to claim 1, characterized in that, The top of the heating box has a sloping structure. The lower part of the heating box sidewall at the higher end of the top of the heating box is connected to the purging mechanism, and the lower part of the heating box sidewall at the lower end of the top of the heating box is connected to the absorption mechanism.
5. The chlorosilane wastewater treatment device according to claim 4, characterized in that, A pressure relief valve is provided at the higher end of the top of the heating box.
6. The chlorosilane waste liquid treatment device according to claim 4, characterized in that, The first absorption tank is provided with a first absorption pipe and a first exhaust pipe. The inner end of the first absorption pipe is located near the bottom of the first absorption tank, and the outer end of the first absorption pipe is located outside the first absorption tank and communicates with the side wall of the heating box at the lower end of the top of the heating box. The inner end of the first exhaust pipe is located near the top of the first absorption tank, and the outer end of the first exhaust pipe is located outside the first absorption tank.
7. The chlorosilane wastewater treatment device according to claim 6, characterized in that, The absorption mechanism further includes a second absorption tank, which contains a second absorption pipe and a second exhaust pipe. The inner end of the second absorption pipe is located near the bottom of the second absorption tank, and the outer end of the second absorption pipe is located outside the second absorption tank and connected to the first exhaust pipe. The inner end of the second exhaust pipe is located near the top of the second absorption tank, and the outer end of the second exhaust pipe is located outside the second absorption tank and connected to a ventilation device.
8. The chlorosilane waste liquid treatment device according to claim 7, characterized in that, Both the first and second absorption tubes are connected to a gas dispersing component at their bottoms.
9. The chlorosilane waste liquid treatment device according to claim 8, characterized in that, The gas dispersing assembly includes a circular gas dispersing ring, which is connected to a first absorption tube or a second absorption tube, and the top of the gas dispersing ring is covered with multiple air holes.
10. The chlorosilane wastewater treatment device according to claim 9, characterized in that, The air holes in the air dispersing ring are arranged at an angle along the same circumferential direction.