A slicing device

Abstract

The utility model provides a kind of slicing device, belong to silicon wafer production and manufacture, slicing device includes slicing mechanism, extracting piece mechanism and conveying mechanism, wherein slicing mechanism is set in the upstream of extracting piece mechanism feed, water is sprayed from side edge to sheet material;Extracting piece mechanism uses the way of suction piece and arc-shaped transfer to convert the vertical state sheet material into horizontal transport sheet material;Conveying mechanism is horizontally connected to the discharge end of extracting piece mechanism, and adopts multistage conveying structure to convey horizontal state sheet material.The scheme integrates push piece, slicing, suction piece lifting and horizontal conveying, can be well sliced by side edge blowing liquid and push piece, and the vertical sheet material can be stably converted into horizontally arranged sheet material by suction piece lifting, so as to stably connect and horizontally convey with subsequent mechanism, ensure slicing yield, and can flexibly control conveying rate, ensure process beat, improve work efficiency, facilitate in the detection and production and processing field of silicon wafer and other sheet material popularization and application.

Description

Technical Field

[0001] This utility model belongs to the field of silicon wafer manufacturing, and specifically relates to a wafer slicing device. Background Technology

[0002] In the manufacturing process of photovoltaic silicon wafers, after the silicon wafers are slicing, they need to be cleaned and inserted. Before the silicon wafers are inserted, they need to be slicing and transported. This process has problems such as poor slicing, stacking, difficulty in loading, and chipping. Therefore, it is necessary to design a new type of silicon wafer slicing device. Summary of the Invention

[0003] In order to overcome the shortcomings of the prior art, the present invention provides a segmentation device that can solve the above problems.

[0004] A sheet-splitting device includes a sheet-splitting mechanism, a sheet-drawing mechanism, and a conveying mechanism. The sheet-splitting mechanism is located upstream of the sheet-drawing mechanism and sprays water onto the sheet from the side. The sheet-drawing mechanism uses a sheet-suction and arc-shaped transfer method to convert the vertically positioned sheet into a horizontally transportable sheet. The conveying mechanism is horizontally adjacent to the discharge end of the sheet-drawing mechanism and uses a multi-stage conveying structure to transport the horizontally positioned sheet.

[0005] Furthermore, the segmentation mechanism includes a side spray mounting plate, a side spray adjustment assembly, and a side spray pipe; the side spray pipe is mounted on the side spray mounting plate, and the spray angle of the side spray pipe is adjusted by the side spray adjustment assembly.

[0006] Furthermore, the sheet extraction mechanism includes a vertical bearing guide assembly, a water-absorbing plate assembly, a lifting belt assembly, and an arc-shaped climbing assembly; wherein, the lifting belt assembly is disposed above the vertical bearing guide assembly, the water-absorbing plate assembly is embedded in the lower middle part of the lifting belt assembly, the lower end of the arc-shaped climbing assembly is adjacent to the top of the lifting belt assembly, and the top end of the arc-shaped climbing assembly horizontally outputs the sheet after lifting and climbing.

[0007] Furthermore, the vertical bearing guide assembly includes a small wheel mounting component and multiple sets of rust-proof wheels. The multiple sets of rust-proof wheels are mounted side by side on the same plane on the small wheel mounting component, and the vertical bearing guide assembly supports the multiple sets of rust-proof wheels in a vertical arrangement.

[0008] Furthermore, the water-absorbing plate assembly includes a water-absorbing plate, on which air source holes, air extraction holes, and belt avoidance guide grooves are formed; wherein, the air extraction holes and belt avoidance guide grooves are formed on the front side of the water-absorbing plate.

[0009] Furthermore, the lifting belt assembly includes a lifting back plate, lifting pulleys, a lifting belt, a lifting bearing housing, and a lifting drive unit; two sets of lifting pulleys are installed to the upper and lower ends of the lifting back plate through the lifting bearing housing, the lifting belt is installed to the lifting pulleys, and the lifting drive unit drives the lifting belt to move, thereby lifting the vertical sheet material.

[0010] Furthermore, the arc-shaped climbing component includes a crescent-shaped guide, a climbing belt, climbing side support plates, climbing pulleys, and a climbing drive module; two climbing pulleys are disposed at both ends of the crescent-shaped guide, and two climbing side support plates are supported on both sides of the climbing pulleys and the crescent-shaped guide; the climbing belt is sleeved on the crescent-shaped guide through the climbing pulleys and is driven by the climbing drive module.

[0011] Furthermore, the sheet extraction mechanism also includes an auxiliary climbing component, which includes a flat-head nozzle and a climbing auxiliary guide wheel assembly. The flat-head nozzle and the climbing auxiliary guide wheel assembly are installed at the lower feeding point of the arc-shaped climbing component through an auxiliary climbing bracket assembly. The flat-head nozzle sprays obliquely upward toward the arc-shaped surface of the arc-shaped climbing component, which facilitates the sheet extraction by climbing.

[0012] Furthermore, the sheet extraction mechanism also includes a horizontal receiving group, which is disposed at the discharge end of the arc-shaped climbing assembly. The horizontal receiving group uses a pulley or bearing mechanism to receive the sheet material output from the discharge end of the arc-shaped climbing assembly.

[0013] Furthermore, the multi-stage conveying structure of the conveying mechanism increases speed step by step from front to back, including a fragment detection module, a thickness detection module, a foreign material rejection module, a receiving box, and an air blowing module arranged along the segmented conveying line; the fragment detection module and the thickness detection module are arranged upstream of the foreign material rejection module, the receiving box is arranged downstream of the foreign material rejection module, and the air blowing module is arranged upstream and / or downstream of the foreign material rejection module.

[0014] Furthermore, the slicing device also includes a slicing driving water tank, which includes a slicing water tank body, a silicon wafer driving module, a wafer pusher guide head, a roller guide rail assembly, a filter drainage module, and a water tank inlet pipe assembly; wherein the wafer pusher guide head is connected to the end of the silicon wafer driving module and is disposed close to the center of the bottom of the slicing water tank body; the roller guide rail assembly is arranged on both sides of the bottom of the slicing water tank body; the filter drainage module is disposed at the bottom of the slicing water tank body, and the water tank inlet pipe assembly is disposed on the peripheral wall of the slicing water tank body.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows: The slitting device of this application integrates wafer pushing, slitting, wafer suction lifting and horizontal conveying. By using side blowing liquid in conjunction with wafer pushing, it can slitting effectively. By using wafer suction lifting, it can stably transform vertical wafers into horizontally arranged wafers, thereby ensuring stable connection and horizontal conveying with subsequent mechanisms, guaranteeing the slitting yield, and allowing flexible control of the conveying speed, ensuring process cycle time, improving work efficiency, and facilitating its promotion and application in the field of silicon wafer and other wafer testing and production processing. Attached Figure Description

[0016] Figure 1 A schematic diagram illustrating an example of a slicer device;

[0017] Figure 2 This is a schematic diagram of the segmentation mechanism;

[0018] Figure 3 This is a schematic diagram of the sheet extraction mechanism;

[0019] Figure 4 This is a schematic diagram of the vertical bearing guide assembly;

[0020] Figure 5 This is a schematic diagram of the water absorption plate assembly;

[0021] Figure 6 and Figure 7 A schematic diagram for lifting the belt assembly;

[0022] Figure 8 and Figure 9 This is a schematic diagram of the arc-shaped ramp component;

[0023] Figure 10 A schematic diagram of the ramp-climbing component;

[0024] Figure 11 This is a schematic diagram of the slicing device, which includes a conveying mechanism.

[0025] Figure 12 This is a schematic diagram of a segmented drive water tank;

[0026] Figure 13 A schematic diagram showing the insertion mechanism at the end of the slicing device.

[0027] In the picture,

[0028] 100. Segmentation mechanism; 110. Side spray mounting plate; 120. Side spray adjustment assembly; 130. Side spray pipe;

[0029] 200. Slicing mechanism;

[0030] 210. Vertical bearing guide assembly; 211. Small wheel mounting component; 212. Rust-proof wheel;

[0031] 220. Water absorption plate assembly; 221. Water absorption plate; 222. Air source hole; 223. Air extraction hole; 224. Belt avoidance guide groove;

[0032] 230. Lifting belt assembly; 231. Lifting back plate; 232. Lifting pulley; 233. Lifting belt; 234. Lifting bearing housing; 235. Lifting drive unit; 236. Belt support block; 237. Lifting mounting components;

[0033] 240. Arc-shaped climbing component; 241. Crescent-shaped guide; 242. Climbing belt; 243. Climbing side support plate; 244. Climbing belt pulley; 245. Climbing drive module; 246. Climbing tension roller; 247. Belt idler pulley;

[0034] 250. Auxiliary climbing assembly; 251. Flat-head nozzle; 252. Climbing auxiliary guide wheel assembly; 253. Auxiliary climbing bracket assembly; 254. Climbing sheet sensor;

[0035] 260. Horizontal guide group;

[0036] 300. Conveying mechanism; 310. Segmented transmission line; 320. Fragment detection module; 330. Thickness detection module; 340. Foreign material rejection module; 350. Receiving box; 360. Air blowing module;

[0037] 400. Segmented drive water tank; 410. Segmented water tank body; 420. Silicon wafer drive module; 430. Wafer pusher guide head; 440. Roller guide rail assembly; 450. Filter drainage module; 460. Water tank inlet pipe assembly; 470. Segmented overflow baffle; 480. Water level sensor;

[0038] 500. Insertion mechanism. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0040] A slicing device, see Figures 1-13The sheet-splitting device includes a sheet-splitting mechanism 100, a sheet-drawing mechanism 200, and a conveying mechanism 300. The sheet-splitting mechanism 100 is located upstream of the sheet-drawing mechanism 200 and sprays water towards the sheet from the side. The sheet-drawing mechanism 200 uses a sheet-suction and arc-shaped transfer method to convert the vertical sheet into a horizontally transportable sheet. The conveying mechanism 300 is horizontally adjacent to the discharge end of the sheet-drawing mechanism 200 and uses a multi-stage conveying structure to transport the horizontally transported sheet.

[0041] The segmentation mechanism 100 includes a side spray mounting plate 110, a side spray adjustment component 120, and a side spray pipe 130; the side spray pipe 130 is mounted on the side spray mounting plate 110, and the spray angle of the side spray pipe 130 is adjusted by the side spray adjustment component 120.

[0042] For a specific example, see Figure 2 Two side spray pipes 130 are mounted opposite each other at both ends of the side spray mounting plate 110. One end of the hollow tube of each side spray pipe 130 is sealed, and the open end is connected to external high-pressure water. Multiple spray holes or spray grooves are formed on the outer circumference of the hollow tube. In this example, four parallel elongated grooves are formed, with the two in the middle being longer and the two on the outermost sides being shorter. Alternatively, multiple rows of spray holes can be used. The outer circumference of the hollow tube cross-section is circular, but it can also be polygonal. The side spray adjustment assembly 120 includes a spray pipe adapter and an arc-shaped groove adapter, used to mount the two side spray pipes 130 opposite each other at both ends of the side spray mounting plate 110.

[0043] See Figures 3-10 The sheet extraction mechanism 200 includes a vertical bearing guide assembly 210, a water-absorbing plate assembly 220, a lifting belt assembly 230, and an arc-shaped climbing assembly 240. Arrangement: The lifting belt assembly 230 is positioned above the vertical bearing guide assembly 210; the water-absorbing plate assembly 220 is embedded in the lower middle part of the lifting belt assembly 230; the lower end of the arc-shaped climbing assembly 240 is adjacent to the top of the lifting belt assembly 230; and the top end of the arc-shaped climbing assembly 240 horizontally outputs the lifted and climbed sheet.

[0044] The vertical bearing guide assembly 210 includes a small wheel mounting component 211 and multiple sets of rust-proof wheels 212. The multiple sets of rust-proof wheels 212 are mounted side by side on the small wheel mounting component 211 on the same plane, and the vertical bearing guide assembly 210 supports the multiple sets of rust-proof wheels 212 in a vertical arrangement.

[0045] Among them, the small wheel mounting component 211 adopts a small wheel mounting plate structure with multiple small wheel mounting seats, and the rust-proof wheel 212 adopts plastic bearings, ceramic bearings, etc., and multiple rust-proof wheels 212 are coaxially spaced on each small wheel mounting seat.

[0046] The back of the small wheel mounting part 211 is mounted to the side spray mounting plate 110 of the segmentation mechanism 100.

[0047] The water-absorbing plate assembly 220 includes a water-absorbing plate 221, on which an air source hole 222, an air extraction hole 223, and a belt avoidance guide groove 224 are provided; wherein the air extraction hole 223 and the belt avoidance guide groove 224 are provided on the front side of the water-absorbing plate 221.

[0048] The air source hole 222 can be opened on any surface of the water-absorbing plate 221, as long as it is suitable for the installation environment. A water-absorbing plate mounting hole is opened on the back of the water-absorbing plate 221 for installing the water-absorbing plate 221 to the lower middle part of the lifting belt assembly 230. The water-absorbing plate 221 can be a single piece or a multi-piece combination structure.

[0049] The lifting belt assembly 230 includes a lifting back plate 231, lifting pulleys 232, a lifting belt 233, a lifting bearing seat 234, and a lifting drive unit 235. The two sets of lifting pulleys 232 are installed at the upper and lower ends of the lifting back plate 231 through the lifting bearing seat 234. The lifting belt 233 is installed on the lifting pulleys 232. The lifting drive unit 235 drives the lifting belt 233 to move, thereby lifting the vertical sheet material.

[0050] Furthermore, a belt support block 236 is provided in the middle of the lifting back plate 231, on which a belt guide groove is provided.

[0051] Furthermore, the lifting belt assembly 230 is mounted to the side fixing plate of the sheet-drawing mechanism 200 via the lifting mounting member 237. In a specific example, the lifting mounting member 237 is a mounting shaft, with both ends fixedly connected to the side fixing plates on both sides via flanges. The shaft section of the mounting shaft is connected to the back of the lifting back plate 231, thereby supporting the entire lifting belt assembly 230.

[0052] Sheet lifting principle: The water absorption plate assembly 220 is installed in the lower middle part of the lifting back plate 231, providing an adsorption force to pull the sheet towards the lifting belt 233. The lifting belt 233 moves upward, thereby lifting the adsorbed sheet.

[0053] The arc-shaped climbing component 240 includes a crescent-shaped guide 241, a climbing belt 242, a climbing side support plate 243, a climbing belt pulley 244, and a climbing drive module 245.

[0054] Two climbing pulleys 244 are disposed at both ends of the crescent-shaped guide 241, and two climbing side support plates 243 are supported on both sides of the climbing pulleys 244 and the crescent-shaped guide 241; the climbing belt 242 is sleeved on the crescent-shaped guide 241 through the climbing pulleys 244, and drives the climbing pulleys 244 through the climbing drive module 245.

[0055] The arc-shaped climbing assembly 240 also includes a climbing tension roller 246 and a belt idler 247. The climbing tension roller 246 and the belt idler 247 are disposed on the concave surface of the crescent-shaped guide 241, and its arc-shaped convex surface is the sheet abutting conveying surface.

[0056] In a specific example, one or both ends of the climbing tensioning roller 246 are provided with an adjustable installation position structure, such as a grooved adjustment plate or a height adjustment nut assembly, to adjust the tension of the climbing belt 242.

[0057] Referring to the attached diagram, the climbing tensioning roller 246 adopts a smooth wheel and shaft structure, while the two belt idler pulleys 247 adopt grooved pulleys with multiple guide grooves opened longitudinally side by side.

[0058] Furthermore, both the climbing drive module 245 and the lifting drive unit 235 adopt a motor and synchronous belt structure to ensure the stability of the segmentation and extraction.

[0059] Furthermore, the sheet extraction mechanism 200 also includes an auxiliary climbing component 250, which includes a flat nozzle 251 and a climbing auxiliary guide wheel assembly 252. The flat nozzle 251 and the climbing auxiliary guide wheel assembly 252 are installed at the lower feeding position of the arc-shaped climbing component 240 through an auxiliary climbing bracket assembly 253. The flat nozzle 251 sprays obliquely upward toward the arc-shaped surface of the arc-shaped climbing component 240 to facilitate sheet extraction by climbing.

[0060] Furthermore, the auxiliary climbing assembly 250 also includes a climbing sheet sensor 254 for sensing the presence or absence of material.

[0061] The sheet extraction mechanism 200 further includes a horizontal receiving group 260, which is disposed at the discharge end of the arc-shaped climbing assembly 240. The horizontal receiving group 260 uses a pulley or bearing mechanism to receive the sheet material output from the discharge end of the arc-shaped climbing assembly 240.

[0062] See Figure 11 The multi-stage conveying structure of the conveying mechanism 300 increases speed step by step from front to back, including a fragment detection module 320, a thickness detection module 330, a foreign material rejection module 340, a receiving box 350, and an air blowing module 360 ​​arranged along the segmented conveying line 310; the fragment detection module 320 and the thickness detection module 330 are arranged upstream of the foreign material rejection module 340, the receiving box 350 is arranged downstream of the foreign material rejection module 340; and the air blowing module 360 ​​is arranged upstream and / or downstream of the foreign material rejection module 340.

[0063] See Figure 12The slicing device also includes a slicing drive water tank 400, which includes a slicing water tank body 410, a silicon wafer drive module 420, a wafer pusher guide head 430, a roller guide rail assembly 440, a filter drainage module 450, and a water tank inlet pipe assembly 460. The wafer pusher guide head 430 is connected to the end of the silicon wafer drive module 420 and is positioned close to the center of the bottom of the slicing water tank body 410. The roller guide rail assembly 440 is arranged on both sides of the bottom of the slicing water tank body 410. The filter drainage module 450 is located at the bottom of the slicing water tank body 410, and the water tank inlet pipe assembly 460 is located on the peripheral wall of the slicing water tank body 410.

[0064] Furthermore, the segmented drive water tank 400 also includes a segmented overflow baffle 470 and a water level indicator 480; the segmented overflow baffle 470 is disposed on the inner side of the peripheral wall of the segmented water tank body 410 and is used to control the overflow level; the water level indicator 480 is disposed on the inner side of the peripheral wall of the segmented water tank body 410 and is used to monitor the water level in the water tank.

[0065] The silicon wafer driving module 420 includes a driver, a driving rail, and a driving adapter. The driver and driving rail are motor slide rail assemblies or linear motor assemblies. The driving adapter is arranged in an inverted U-shape, with one end of its bottom located near the bottom of the water tank and connected to the pusher guide head 430. The pusher guide head 430 directly contacts the silicon wafer in the basket, thereby pushing the silicon wafer in the basket to move forward controllably along the roller guide rail assembly 440 through the silicon wafer driving module 420.

[0066] See Figure 13 Downstream of the wafer slicing device, at the end of the conveying mechanism 300, a wafer insertion mechanism 500 is also provided, including a transfer mounting plate, a transverse module, a lifting module, and a clamping basket. The clamping basket is mounted on the lifting module, the lifting module is mounted on the transverse module, and the transverse module is mounted on the side of the transfer mounting plate. The clamping basket is driven to move along a U-shaped path on the side of the transfer mounting plate, realizing the cyclical transfer of empty basket supply and full basket exit. When the empty basket moves to the end of the conveying mechanism 300, it moves upward step by step, and the upward movement rhythm is synchronized with the silicon wafer conveying rhythm of the conveying mechanism 300, thereby realizing the layer-by-layer wafer insertion of the basket.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A slicing device, characterized in that: The sheet-splitting device includes a sheet-splitting mechanism (100), a sheet-drawing mechanism (200), and a conveying mechanism (300). The sheet-splitting mechanism (100) is located upstream of the sheet-drawing mechanism (200) and sprays water towards the sheet from the side. The sheet-drawing mechanism (200) uses a sheet-suction and arc-shaped transfer method to convert the vertical sheet into a horizontally transportable sheet. The conveying mechanism (300) is horizontally adjacent to the discharge end of the sheet-drawing mechanism (200) and uses a multi-stage conveying structure to transport the horizontally transported sheet.

2. The slicing device according to claim 1, characterized in that: The segmentation mechanism (100) includes a side spray mounting plate (110), a side spray adjustment assembly (120), and a side spray pipe (130); the side spray pipe (130) is mounted on the side spray mounting plate (110), and the spray angle of the side spray pipe (130) is adjusted by the side spray adjustment assembly (120).

3. The slicing device according to claim 1, characterized in that: The sheet extraction mechanism (200) includes a vertical bearing guide assembly (210), a water absorption plate assembly (220), a lifting belt assembly (230), and an arc-shaped climbing assembly (240); wherein, the lifting belt assembly (230) is disposed above the vertical bearing guide assembly (210), the water absorption plate assembly (220) is embedded in the lower middle part of the lifting belt assembly (230), the lower end of the arc-shaped climbing assembly (240) is adjacent to the top of the lifting belt assembly (230), and the top end of the arc-shaped climbing assembly (240) outputs the sheet after lifting and climbing horizontally.

4. The slicing device according to claim 3, characterized in that: The vertical bearing guide assembly (210) includes a small wheel mounting part (211) and multiple sets of rust-proof wheels (212). The multiple sets of rust-proof wheels (212) are mounted side by side on the small wheel mounting part (211) on the same plane, and the vertical bearing guide assembly (210) supports the multiple sets of rust-proof wheels (212) to be arranged vertically.

5. The slicing device according to claim 3, characterized in that: The water-absorbing plate assembly (220) includes a water-absorbing plate (221), on which an air source hole (222), an air extraction hole (223), and a belt avoidance guide groove (224) are provided; wherein, the air extraction hole (223) and the belt avoidance guide groove (224) are provided on the front side of the water-absorbing plate (221).

6. The slicing device according to claim 3, characterized in that: The lifting belt assembly (230) includes a lifting back plate (231), lifting pulleys (232), lifting belts (233), lifting bearing seats (234), and a lifting drive unit (235). Two sets of lifting pulleys (232) are installed to the upper and lower ends of the lifting back plate (231) through the lifting bearing seats (234). The lifting belts (233) are installed to the lifting pulleys (232). The lifting drive unit (235) drives the lifting belts (233) to move, thereby lifting the vertical sheet material.

7. The slicing device according to claim 3, characterized in that: The arc-shaped climbing assembly (240) includes a crescent-shaped guide (241), a climbing belt (242), a climbing side support plate (243), a climbing belt pulley (244), and a climbing drive module (245); Two climbing pulleys (244) are disposed at both ends of the crescent-shaped guide (241), and two climbing side support plates (243) are supported on both sides of the climbing pulleys (244) and the crescent-shaped guide (241); the climbing belt (242) is sleeved on the crescent-shaped guide (241) through the climbing pulleys (244) and drives the climbing pulleys (244) through the climbing drive module (245).

8. The slicing device according to claim 3, characterized in that: The sheet extraction mechanism (200) also includes an auxiliary climbing assembly (250), which includes a flat nozzle (251) and a climbing auxiliary guide wheel assembly (252). The flat nozzle (251) and the climbing auxiliary guide wheel assembly (252) are installed at the lower feeding position of the arc-shaped climbing assembly (240) through an auxiliary climbing bracket assembly (253). The flat nozzle (251) sprays obliquely upward toward the arc-shaped surface of the arc-shaped climbing assembly (240) to facilitate sheet extraction by climbing.

9. The slicing device according to claim 1, characterized in that: The multi-stage conveying structure of the conveying mechanism (300) increases speed step by step from front to back, including a fragment detection module (320), a thickness detection module (330), a foreign material rejection module (340), a receiving box (350), and an air blowing module (360) arranged along the segmented transmission line (310); the fragment detection module (320) and the thickness detection module (330) are arranged upstream of the foreign material rejection module (340), the receiving box (350) is arranged downstream of the foreign material rejection module (340), and the air blowing module (360) is arranged upstream and / or downstream of the foreign material rejection module (340).

10. The slicing device according to claim 1, characterized in that: The slicing device further includes a slicing drive water tank (400), which includes a slicing water tank body (410), a silicon wafer drive module (420), a wafer pusher guide head (430), a roller guide rail assembly (440), a filter drainage module (450), and a water tank inlet pipe assembly (460). The wafer pusher guide head (430) is connected to the end of the silicon wafer drive module (420) and is located close to the middle of the bottom of the slicing water tank body (410). The roller guide rail assembly (440) is arranged on both sides of the bottom of the slicing water tank body (410). The filter drainage module (450) is located at the bottom of the slicing water tank body (410), and the water tank inlet pipe assembly (460) is located on the peripheral wall of the slicing water tank body (410).

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