A rotating mirror laser thinning apparatus

By using automated design and dynamic mirror rotation technology in the rotating mirror laser thinning equipment, the problems of low automation and cell deformation in existing laser thinning technologies have been solved, achieving a highly efficient and stable laser thinning process and ensuring product quality and precision.

CN224322521UActive Publication Date: 2026-06-05JIANGSU CHUANGYING SOLAR ENERGY TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202521057103.1
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-05-27
Publication Date
2026-06-05
Estimated Expiration
2035-05-27

AI Technical Summary

Technical Problem

Existing laser thinning technology has low automation and low efficiency. During the thinning process, the solar cells suffer from deformation and resonance problems caused by thermal expansion, and the thinning effect is not good, which affects product quality.

Method used

The rotating mirror laser thinning equipment includes a feeding conveyor line, an unloading conveyor line, a laser processing component, a transfer component, and a correction mechanism. It utilizes a dynamic rotating mirror for dynamic laser processing, avoiding thermal expansion and resonance, and achieving fully automated conveying and inspection.

Benefits of technology

It improves work efficiency, avoids cell deformation problems, ensures high-quality and high-precision thinning effect, and has high stability and yield.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides a kind of mirror rotating laser thinning equipment, comprising: feeding conveying line;Discharging conveying line;Laser processing component;Laser processing component includes laser, first reflector being set along laser beam emission direction, diaphragm, second reflector, beam expander, laser beam shaper, dynamic mirror rotating, field lens;First transfer component, first transfer component is located between first transfer station and second transfer station;Second transfer component.The utility model degree of automation is high, work efficiency is high, laser thinning effect is good, effectively avoid the deformation problem and resonance problem caused by thermal expansion of battery piece in processing process.
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Description

Technical Field

[0001] This utility model relates to the field of laser processing technology, and in particular to a rotating mirror laser thinning device. Background Technology

[0002] Laser thinning is a surface-thinning process for products, typically using a laser system to act on the surface of the workpiece. However, this method is relatively slow. It utilizes laser energy to process materials, primarily to reduce their thickness. In laser thinning, the laser beam irradiates the material surface, causing rapid localized melting, vaporization, or chemical modification, thereby achieving material thinning. However, existing thinning technologies have the following drawbacks:

[0003] 1. Low degree of automation in matching, resulting in low work efficiency;

[0004] 2. Using a laser galvanometer to thin the solar cells, there are deformation and resonance problems caused by thermal expansion during the thinning process;

[0005] 3. Poor thinning effect affects product quality. Utility Model Content

[0006] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a rotating mirror laser thinning device, which has a high degree of automation, high working efficiency, good laser thinning effect, and effectively avoids deformation and resonance problems caused by thermal expansion of the battery cells during processing.

[0007] The embodiments of this utility model are achieved through the following technical solutions:

[0008] A rotating mirror laser thinning device, comprising:

[0009] The feeding conveyor line is provided with a feeding station, a first alignment station, a first inspection station, and a first transfer station in sequence along the conveying direction of the feeding conveyor line; the feeding station, the first alignment station, and the first inspection station are respectively provided with a feeding mechanism, a first alignment mechanism, and a first inspection mechanism.

[0010] The unloading conveyor line is provided with a second transfer station, a second inspection station, a second alignment station, and an unloading station in sequence along the conveying direction of the unloading conveyor line; the second inspection station, the second alignment station, and the unloading station are respectively provided with a second inspection mechanism, a second alignment mechanism, and an unloading mechanism in sequence; the loading conveyor line is arranged parallel to the unloading conveyor line and in the opposite conveying direction.

[0011] A laser processing assembly, with a laser processing position and a processing position corresponding to its lower part; the laser processing assembly includes a laser, a first reflecting mirror arranged along the laser beam emission direction, an aperture, a second reflecting mirror, a beam expander, a laser beam shaper, a dynamic rotating mirror, and a field mirror;

[0012] A first transfer assembly is located between the first transfer station and the second transfer station. The first transfer assembly includes a first turntable, a first adsorption swing arm, and a second adsorption swing arm. The first turntable causes the first adsorption swing arm and the second adsorption swing arm to rotate, so as to realize the switching of materials between the first transfer station, the processing station, and the second transfer station.

[0013] The second transfer assembly includes a second turntable, a first receiving arm, and a second receiving arm; the second turntable causes the first receiving arm and the second receiving arm to rotate, so as to switch the material between the processing position and the laser processing position.

[0014] According to a preferred embodiment, the dynamic rotating mirror includes a plurality of multifaceted prisms connected to driving components to realize laser dynamic processing of materials.

[0015] According to a preferred embodiment, the dynamic rotating mirror includes an X-axis multifaceted prism connected to an X-axis motor, a Y-axis multifaceted prism connected to a Y-axis motor, and a Z-axis multifaceted prism connected to a Z-axis motor, so as to dynamically adjust the angle at which the laser beam is incident on the field mirror.

[0016] According to a preferred embodiment, the power output end of the X-axis motor is connected to the X-axis multifaceted prism to drive the X-axis multifaceted prism to rotate around the power output end of the X-axis motor as the axis of rotation.

[0017] The power output end of the Y-axis motor is connected to the Y-axis multifaceted prism, so as to drive the Y-axis multifaceted prism to rotate around the power output end of the Y-axis motor as the axis of rotation;

[0018] The power output end of the Z-axis motor is connected to the Z-axis multifaceted prism, so as to drive the Z-axis multifaceted prism to rotate around the power output end of the Z-axis motor.

[0019] According to a preferred embodiment, both the loading conveyor line and the unloading conveyor line include a plurality of feeding belt units;

[0020] The first correction mechanism further includes two first correction units and a first cache unit located between the two first correction units;

[0021] The second correction mechanism further includes two second correction units and a second cache unit located between the two second correction units.

[0022] According to a preferred embodiment, both the first buffer unit and the second buffer unit include a buffer lifting frame that can be raised and lowered and a plurality of buffer bars. The buffer lifting frame allows materials and a feeding belt unit to pass through, and the plurality of buffer bars are disposed on the inner wall of the buffer lifting frame. The distance between two adjacent buffer bars is greater than the height of the material.

[0023] According to a preferred embodiment, both the first correction unit and the second correction unit include two correction arms and a correction drive unit that causes the two correction arms to move closer to or further away from the material. Several correction guide wheels are provided on the opposite side of the two correction arms.

[0024] According to a preferred embodiment, both the first adsorption swing arm and the second adsorption swing arm include a swing arm unit and a suction cup unit, wherein the suction cup unit is disposed at the end of the corresponding swing arm unit.

[0025] Both the first receiving arm and the second receiving arm include a material arm unit and a material receiving tray unit, with the material receiving tray unit located at the end of the material arm unit.

[0026] According to a preferred embodiment, the included angle between the first adsorption swing arm and the second adsorption swing arm is 90 degrees.

[0027] The length extension lines of the first receiving arm and the length extension lines of the second receiving arm are on the same straight line.

[0028] According to a preferred embodiment, both the feeding mechanism and the unloading mechanism are provided with a horizontally movable material rack and an unloading unit. The unloading unit moves the material on the material rack to the feeding belt unit or moves the material on the feeding belt unit to the material rack.

[0029] The technical solution of this utility model embodiment has at least the following advantages and beneficial effects:

[0030] This invention features a high degree of automation, with fully automated conveying and inspection, alignment, loading of products to be processed, and unloading of finished products, resulting in high work efficiency. Furthermore, the laser processing component equipped with a dynamic rotating mirror can perform dynamic laser thinning on half-cell or full-cell solar cells, avoiding deformation and resonance problems caused by thermal expansion. This achieves high product quality, operational stability, high efficiency, high thinning precision, and high yield. Attached Figure Description

[0031] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 A three-dimensional structural diagram of the rotating mirror laser thinning device provided in this embodiment of the utility model;

[0033] Figure 2 A top view of the rotating mirror laser thinning device provided in this embodiment of the utility model;

[0034] Figure 3 A partial top view of the rotating mirror laser thinning device provided in this embodiment of the utility model;

[0035] Figure 4 This is a schematic diagram of the feeding mechanism provided in an embodiment of the present utility model;

[0036] Figure 5 A schematic diagram of the structure of the first cache unit provided in an embodiment of this utility model;

[0037] Figure 6 A schematic diagram illustrating the structural principle of the dynamic rotating mirror provided in this embodiment of the utility model;

[0038] Figure 7 A schematic diagram illustrating the structural principle of the laser processing component provided in this embodiment of the present invention.

[0039] Icons: 1. Feeding mechanism; 2. First alignment mechanism; 3. First detection mechanism; 4. Feeding conveyor line; 5. Unloading conveyor line; 6. Second detection mechanism; 7. Second alignment mechanism; 8. First turntable; 9. First adsorption swing arm; 10. Second adsorption swing arm; 11. Second turntable; 12. First receiving arm; 13. Second receiving arm; 14. X-axis motor; 15. X-axis multifaceted prism; 16. Y-axis motor; 17. Y-axis multifaceted prism; 18. Z-axis motor; 19. Z-axis multifaceted prism; 20. Laser; 21. 22. First reflecting mirror; 23. Aperture; 24. Second reflecting mirror; 25. Beam expander; 26. Laser beam shaper; 27. Field mirror; 28. First buffer unit; 29. ​​Second buffer unit; 30. Buffer bar; 31. Buffer lifting frame; 32. Alignment arm; 33. Alignment guide wheel; 34. Swing arm unit; 35. Suction cup unit; 36. Material rack; 37. Unloading unit; 38. Waiting position; 39. Laser processing position; 40. Unloading mechanism; 41. First transfer station; 42. Second transfer station; 43. Dynamic rotating mirror. Detailed Implementation

[0040] To better understand and implement this invention, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings.

[0041] In the description of this utility model, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0042] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0043] Example

[0044] Please refer to Figures 1 to 7A rotating mirror laser thinning device includes: a feeding conveyor line 4, along which a feeding station, a first alignment station, a first inspection station, and a first transfer station 40 are sequentially arranged; the feeding station, the first alignment station, and the first inspection station are respectively equipped with a feeding mechanism 1, a first alignment mechanism 2, and a first inspection mechanism 3; a discharging conveyor line 5, along which a second transfer station 41, a second inspection station, a second alignment station, and a discharging station are sequentially arranged; the second inspection station, the second alignment station, and the discharging station are respectively equipped with a second inspection mechanism 6, a second alignment mechanism 7, and a discharging mechanism 39; the feeding conveyor line 4 and the discharging conveyor line 5 are arranged parallel to each other and in opposite directions; a laser processing component, below which are a laser processing position 38 and a waiting position 37; the laser processing component includes a laser... The laser beam includes: a laser beam shaper 20, a first reflector 21, an aperture 22, a second reflector 23, a beam expander 24, a laser beam shaper 25, a dynamic rotating mirror 42, and a field mirror 26, all arranged along the laser beam emission direction; a first transfer assembly located between a first transfer station 40 and a second transfer station 41, comprising a first turntable 8, a first adsorption swing arm 9, and a second adsorption swing arm 10; the first turntable 8 causes the first adsorption swing arm 9 and the second adsorption swing arm 10 to rotate, thereby enabling the material to switch between the first transfer station 40, the processing station 37, and the second transfer station 41; and a second transfer assembly comprising a second turntable 11, a first receiving arm 12, and a second receiving arm 13; the second turntable 11 causes the first receiving arm 12 and the second receiving arm 13 to rotate, thereby enabling the material to switch between the processing station 37 and the laser processing station 38.

[0045] Preferably, the dynamic rotating mirror 42 includes several multifaceted prisms connected to driving components to achieve dynamic laser processing of materials.

[0046] Preferably, the dynamic rotating mirror 42 includes an X-axis multifaceted prism 15 connected to an X-axis motor 14, a Y-axis multifaceted prism 17 connected to a Y-axis motor 16, and a Z-axis multifaceted prism 19 connected to a Z-axis motor 18, so as to dynamically adjust the angle of the laser beam incident field mirror 26.

[0047] Preferably, the power output end of the X-axis motor 14 is connected to the X-axis multifaceted prism 15 so as to drive the X-axis multifaceted prism 15 to rotate around the power output end of the X-axis motor 14.

[0048] The power output end of the Y-axis motor 16 is connected to the Y-axis multifaceted prism 17 so as to drive the Y-axis multifaceted prism 17 to rotate around the power output end of the Y-axis motor 16.

[0049] The power output end of the Z-axis motor 18 is connected to the Z-axis multifaceted prism 19 to drive the Z-axis multifaceted prism 19 to rotate around the power output end of the Z-axis motor 18.

[0050] Preferably, both the feeding conveyor line 4 and the unloading conveyor line 5 include several feeding belt units;

[0051] The first correction mechanism 2 also includes two first correction units and a first cache unit 27 located between the two first correction units;

[0052] The second correction mechanism 7 also includes two second correction units and a second cache unit 28 located between the two second correction units.

[0053] Preferably, both the first buffer unit 27 and the second buffer unit 28 include a buffer lifting frame 30 that can be raised and lowered and a plurality of buffer bars 29. The buffer lifting frame 30 allows materials and the feeding belt unit to pass through, and the plurality of buffer bars 29 are disposed on the inner wall of the buffer lifting frame 30, with the distance between two adjacent buffer bars 29 being greater than the height of the material.

[0054] Preferably, both the first and second correction units include two correction arms 31 and a correction drive unit that causes the two correction arms 31 to move closer to or further away from the material. Several correction guide wheels 32 are provided on the opposite side of each of the two correction arms 31.

[0055] Preferably, both the first adsorption swing arm 9 and the second adsorption swing arm 10 include a swing arm unit 33 and a suction cup unit 34, with the suction cup unit 34 disposed at the end of the corresponding swing arm unit 33.

[0056] The first receiving arm 12 and the second receiving arm 13 both include a material arm unit and a receiving tray unit, with the receiving tray unit located at the end of the material arm unit.

[0057] Preferably, the angle between the first adsorption swing arm 9 and the second adsorption swing arm 10 is 90 degrees;

[0058] The length extension line of the first receiving arm 12 and the length extension line between the second receiving arm 13 are on the same straight line.

[0059] Preferably, both the feeding mechanism 1 and the unloading mechanism 39 are provided with a horizontally movable material rack 35 and an unloading unit 36. The unloading unit 36 ​​moves the material on the material rack 35 to the feeding belt unit or moves the material on the feeding belt unit to the material rack 35.

[0060] The working principle of this utility model:

[0061] In this embodiment, the feeding mechanism 1 transfers the battery cells from the material rack 35 to the feeding conveyor line 4 via the unloading unit 36. The unloading unit 36, as shown... Figure 1As can be seen, the feeding lifting structure and the feeding adsorption structure are used. The unloading unit 36 ​​adsorbs the battery cells of the material rack 35 through the feeding adsorption structure. The material rack 35 has a feeding horizontal movement structure, which can control the horizontal movement of the material rack 35, thereby avoiding the feeding conveyor line 4. When the material rack 35 is far away from the feeding belt unit of the feeding conveyor line 4, the unloading unit 36 ​​drives the battery cells to the feeding belt unit on the feeding conveyor line 4 through the lifting structure, and then transports them from front to back.

[0062] On the feeding conveyor line 4, the battery cells first fall into the feeding station and are then conveyed to the first buffer unit 27. The first buffer unit 27 can control the buffer lifting frame 30 to move up and down, thereby causing the battery cells passing between two adjacent buffer bars 29 to rise. Since the width of the battery cells is greater than the width of the feeding belt unit, the buffer bars 29 are set on the inner wall of the buffer lifting frame 30 and close to both sides of the feeding belt unit. The ends of the battery cells that extend beyond the feeding belt unit can pass through the space between the adjacent buffer bars 29. When the buffer bars 29 move up and down, they can cause the battery cells to detach from the feeding belt unit and be stored in the first buffer unit 27. Similarly, the principle of the second buffer unit 28 is the same, and will not be repeated here.

[0063] The first alignment mechanism 2 is located behind the first buffer unit 27. The battery cells that do not need to be buffered will be transported to the alignment station below the first alignment mechanism 2. The two alignment arms 31 of the first alignment mechanism 2 are close to each other or far apart from each other. Each alignment arm 31 is rotatably equipped with an alignment guide wheel 32. The alignment arm 31 and the alignment guide wheel 32 can guide the battery cells to move to the center position of the feeding belt unit to ensure the normal progress of subsequent processing.

[0064] The first inspection mechanism 3 is located behind the first correction mechanism 2. The first inspection mechanism 3 can inspect the corrected battery cells. The first inspection mechanism 3 can detect microcracks in the battery cells. Battery cells that fail the inspection can be removed by the rejection mechanism. The rejection mechanism can be composed of a mechanical clamping arm and a suction cup, which are not shown in the view in this embodiment.

[0065] The feeding conveyor line 4 transports the battery cells (located at the inspection station) inspected by the first inspection mechanism 3 to the first transfer station 40. In this embodiment, the first transfer station 40 has two positions for placing and transferring battery cells. In this embodiment, the first adsorption swing arm 9 is provided with one swing arm unit 33 and two suction cup units 34. Similarly, the second adsorption swing arm 10 is provided with one swing arm unit 33 and two suction cups. The first receiving arm 12 and the second receiving arm 13 are on the same horizontal plane and perpendicular to each other. When the first turntable 8 rotates counterclockwise by 90 degrees, the two battery cells on the first transfer station 40 are adsorbed by the two suction cups and transferred to the processing position 37. The processing position 37 corresponds to two receiving plate units. Each arm unit corresponds to two receiving plate units. In this embodiment, the two arm units are on the same horizontal plane and on the same straight line. The tilt angle or included angle between the two arm units can be set according to the specific situation. Similarly, the included angle between the first adsorption swing arm 9 and the second adsorption swing arm 10 can be set according to the specific actual needs.

[0066] like Figure 3 As shown, the unloading conveyor line 5 is located on one side of the loading conveyor line 4, and the second transfer station 41 is located on the other side of the first turntable 8 opposite to the first transfer station 40. Therefore, when the first turntable 8 rotates, when the first adsorption arm 9 is located at the processing position 37, the second adsorption arm 10 is located at the second transfer station 41. The first turntable 8 can rotate 90 degrees to transfer the battery cell at the processing position 37 to the second transfer station 41 at the same time as transferring the battery cell at the first transfer station 40 to the processing position 37. The processing position 37 can be equipped with a detection or dust removal unit or a positioning unit for further detection of the battery cell. When the second turntable 11 rotates, the battery cell at the processing position 37 and the battery cell at the laser processing position 38 below the laser processing component are switched to each other, and the processed battery cell and the battery cell to be processed are converted to each other.

[0067] Similarly, after processing, the battery cells are transferred to the second transfer station 41. The conveying direction of the unloading conveyor line 5 is opposite to that of the loading conveyor line 4. Figure 3 The components are conveyed sequentially from back to front. First, they are inspected by the second inspection mechanism 6. The second inspection mechanism 6 can be set as an AOI inspection unit. In this embodiment, the second inspection mechanism 6 can be set either in front of or behind the second correction mechanism 7. Similarly, the first inspection mechanism 3 can also be set as an AOI inspection unit. The first inspection mechanism 3 can be set either in front of or behind the first correction mechanism 2.

[0068] In this embodiment, the second correction mechanism 7 is the same as the first correction mechanism 2. Similarly, the feeding mechanism 1 and the unloading mechanism 39 are the same.

[0069] Laser 20 outputs a laser beam, which sequentially passes through a first reflecting mirror 21, an aperture 22, a second reflecting mirror 23, a beam expander 24, a laser beam shaper 25, a dynamic rotating mirror 42, and a field mirror 26, finally exiting onto the working surface of the solar cell. For example... Figure 6 As shown, A is the laser beam, and B is the working surface of the battery cell. The arrows above the X-axis motor 14 indicate the listed rotational directions, and the arrows to the left of the Y-axis motor 16 indicate the listed rotational directions.

[0070] When thinning workpieces, a laser rotating mirror is considered for surface thinning. When using a laser beam to thin the workpiece surface, the speed of the laser beam's movement along the plane must be adjusted to match the speed of the platform or turntable. If the laser rotating mirror moves too fast, it can easily cause thinning gaps in certain paths, leading to inconsistent thinning results for the solar cells and affecting the overall thinning effect. In this embodiment, a dynamic rotating mirror 42 is selected. The power output of the X-axis motor 14 can be connected to the facet of the X-axis multifaceted prism 15, the power output of the Y-axis motor 16 can be connected to the facet of the Y-axis multifaceted prism 17, and the power output of the Z-axis motor 18 can be connected to the facet of the Z-axis multifaceted prism 19. This allows for adjustment of the laser beam's output speed and path, preventing thinning gaps caused by excessive speed or mismatched displacement. The X-axis polyhedron 15, Y-axis polyhedron 17, and Z-axis polyhedron 19 can be selected from a combination of hexahedrons, octahedrons, and hexagonal prisms, depending on the actual situation; for example, X-axis polyhedron 15 and Y-axis polyhedron 17 are hexahedrons, and Z-axis polyhedron 19 is an octahedron. Alternatively, all three polyhedrons can be octahedrons.

[0071] In this embodiment, thinning is achieved using an ultrafast laser beam with a wavelength of 266-540nm and a power of 10-1000W. The X-axis multifaceted prism 15, Y-axis multifaceted prism 17, and Z-axis multifaceted prism 19 are all octagonal prisms forming an eight-faceted high-speed rotating mirror for thinning. The maximum rotating speed can reach 900m / s. The laser processing area is less than 280*280mm, covering all commercially available battery cell sizes, including half-cell and full-cell sizes, ensuring the accuracy of battery processing efficiency improvements and enabling large-angle continuous scanning (such as 360° circular scanning). The field mirror 26 is model F330. Using this focal length, the laser beam deflects at a speed of 350m / s, with an efficiency more than 5 times that of the galvanometer mirror, achieving a thinning accuracy of 5μm.

[0072] In this embodiment, the non-finger area can be irradiated with a laser to damage the PSG (phosphosilicate glass, an oxide layer formed by phosphorus diffusion on the silicon wafer surface). The semi-finished product is then cleaned with an alkali. Since the PSG in the finger area remains unaffected, the polypolymer is effectively protected. In the laser-irradiated area, the PSG is damaged and cannot be effectively protected. The polypolymer is etched away, and the etched area has no parasitic absorption, effectively increasing current and efficiency. Simultaneously, by reducing the width, the adverse effects on lateral transport are reduced. The non-finger and finger areas are the surface areas of the battery, with the battery surface area referring to the current surface area of ​​the battery cell.

[0073] In this embodiment, the solar cells can be crystalline silicon solar cells, including PERC, TOPCON, HJT, and XBC solar cells. The processing size is not limited to half cells and full cells, ranging from 156*156 to 230*230. The main size of half cells is 182*91 to 210*105. Solar cells of other sizes and specifications can also be used.

[0074] In this embodiment, rectangular or stripe light spots can be set, or customized according to application needs. The smallest light spot ranges from 35*35um to 500*200um, and the largest rectangular light spot can reach 700*700um. The laser 20 can be a green laser with a wavelength between 500-570nm, or an ultraviolet or infrared laser. This device is compatible with pulsed or continuous lasers, and also with laser 20 beam splitting schemes. The laser 20 has power feedback functionality and can be used for laser thinning, laser modification, and laser film opening processes from PERC, TOPCON, HJT, and XBC. Compared to galvanometers, the dynamic rotating mirror 42 is more stable in ultra-high-speed scenarios, avoiding resonance problems. Furthermore, it features high reliability and long lifespan, no complex electronic control system, low failure rate, and strong durability. High-quality bearings and dynamic balancing design can withstand long-term high-speed operation, making it suitable for continuous industrial operation.

[0075] The mirror materials (such as gold plating or silicon-based) of the X-axis multifaceted prism 15, Y-axis multifaceted prism 17, and Z-axis multifaceted prism 19 can be optimized for different wavelengths (ultraviolet, visible, and infrared), and are not limited to specific wavelengths or polarization states compared to acousto-optic modulators (AOM) or electro-optic modulators (EOM).

[0076] The eighth innovation of this device is that the laser solution has low latency and high synchronization, and stable mechanical inertia: after the rotation speed is constant, the scanning path and time are highly predictable, and it is easy to synchronize with external signals (such as pulsed lasers), making it suitable for applications with high timing accuracy requirements (such as ultrafast laser pulse control).

[0077] The ninth innovation of this device is that the high-speed rotating mirror laser thinning system has high power tolerance and thermal management advantages: the mirror material (such as copper and silicon) has good heat dissipation and can withstand high-power lasers (kilowatt level). It is suitable for industrial cutting, modification, film opening, thinning, scribing, welding and other scenarios. Compared with galvanometers, there is no deformation problem caused by thermal expansion.

[0078] The technical means disclosed in this utility model are not limited to those disclosed in the above embodiments, but also include technical solutions composed of any combination of the above technical features. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications are also considered within the scope of protection of this utility model.

Claims

1. A rotating mirror laser thinning device, characterized in that, include: The feeding conveyor line is provided with a feeding station, a first alignment station, a first inspection station, and a first transfer station in sequence along the conveying direction of the feeding conveyor line; the feeding station, the first alignment station, and the first inspection station are respectively provided with a feeding mechanism, a first alignment mechanism, and a first inspection mechanism. The unloading conveyor line is provided with a second transfer station, a second inspection station, a second alignment station, and an unloading station in sequence along the conveying direction of the unloading conveyor line; the second inspection station, the second alignment station, and the unloading station are respectively provided with a second inspection mechanism, a second alignment mechanism, and an unloading mechanism in sequence; the loading conveyor line is arranged parallel to the unloading conveyor line and in the opposite conveying direction. A laser processing assembly, with a laser processing position and a processing position corresponding to its lower part; the laser processing assembly includes a laser, a first reflecting mirror arranged along the laser beam emission direction, an aperture, a second reflecting mirror, a beam expander, a laser beam shaper, a dynamic rotating mirror, and a field mirror; A first transfer assembly is located between the first transfer station and the second transfer station. The first transfer assembly includes a first turntable, a first adsorption swing arm, and a second adsorption swing arm. The first turntable causes the first adsorption swing arm and the second adsorption swing arm to rotate, so as to realize the switching of materials between the first transfer station, the processing station, and the second transfer station. The second transfer assembly includes a second turntable, a first receiving arm, and a second receiving arm; the second turntable causes the first receiving arm and the second receiving arm to rotate, so as to switch the material between the processing position and the laser processing position.

2. The rotating mirror laser thinning device according to claim 1, characterized in that, The dynamic rotating mirror includes several multifaceted prisms connected to driving components to achieve dynamic laser processing of materials.

3. The rotating mirror laser thinning device according to claim 2, characterized in that, The dynamic rotating mirror includes an X-axis multifaceted prism connected to an X-axis motor, a Y-axis multifaceted prism connected to a Y-axis motor, and a Z-axis multifaceted prism connected to a Z-axis motor, to dynamically adjust the angle at which the laser beam is incident on the field mirror.

4. The rotating mirror laser thinning device according to claim 3, characterized in that, The power output end of the X-axis motor is connected to the X-axis multifaceted prism, so as to drive the X-axis multifaceted prism to rotate around the power output end of the X-axis motor. The power output end of the Y-axis motor is connected to the Y-axis multifaceted prism, so as to drive the Y-axis multifaceted prism to rotate around the power output end of the Y-axis motor as the axis of rotation; The power output end of the Z-axis motor is connected to the Z-axis multifaceted prism, so as to drive the Z-axis multifaceted prism to rotate around the power output end of the Z-axis motor.

5. The rotating mirror laser thinning device according to claim 1, characterized in that, Both the loading conveyor line and the unloading conveyor line include several feeding belt units; The first correction mechanism further includes two first correction units and a first cache unit located between the two first correction units; The second correction mechanism further includes two second correction units and a second cache unit located between the two second correction units.

6. The rotating mirror laser thinning device according to claim 5, characterized in that, Both the first buffer unit and the second buffer unit include a buffer lifting frame that can be raised and lowered and a plurality of buffer bars. The buffer lifting frame allows materials and the feeding belt unit to pass through. The plurality of buffer bars are disposed on the inner wall of the buffer lifting frame, and the distance between two adjacent buffer bars is greater than the height of the material.

7. The rotating mirror laser thinning device according to claim 6, characterized in that, Both the first and second correction units include two correction arms and a correction drive unit that causes the two correction arms to move closer to or further away from the material. Several correction guide wheels are provided on the opposite side of the two correction arms.

8. The rotating mirror laser thinning device according to claim 1, characterized in that, Both the first and second adsorption swing arms include a swing arm unit and a suction cup unit, with the suction cup unit disposed at the end of the corresponding swing arm unit. Both the first receiving arm and the second receiving arm include a material arm unit and a material receiving tray unit, with the material receiving tray unit located at the end of the material arm unit.

9. The rotating mirror laser thinning device according to claim 8, characterized in that, The angle between the first adsorption swing arm and the second adsorption swing arm is 90 degrees; The length extension lines of the first receiving arm and the length extension lines of the second receiving arm are on the same straight line.

10. The rotating mirror laser thinning device according to claim 5, characterized in that, Both the feeding mechanism and the unloading mechanism are equipped with a horizontally movable material rack and an unloading unit. The unloading unit moves the material on the material rack to the feeding belt unit or moves the material on the feeding belt unit to the material rack.