Up and down line carrier plate detection system and carrier plate storage device

Abstract

The application relates to an upper and lower line carrier plate detection system and a carrier plate storage device. The carrier plate storage device comprises a storage cabinet and a plurality of first moving mechanisms. The storage cabinet is provided with a storage space and a taking and placing opening in communication with the storage space, and the taking and placing opening is located on the side of the storage cabinet. The plurality of first moving mechanisms are sequentially connected to the storage cabinet along the height direction of the storage cabinet. Each first moving mechanism can support a carrier plate, and the first moving mechanism can drive the carrier plate to move outwards through the taking and placing opening or into the storage space. The carrier plate is placed in the interior of the storage cabinet or moved outwards from the interior of the storage cabinet, manual operation is not required, the degree of automation is high, the safety performance can be improved, and the time cost and the labor cost can be reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and in particular to an on / off board inspection system and a board storage device. Background Technology

[0002] The lifespan of solar cells decreases during use, and they usually need to be coated with PVD (Physical Vapor Deposition) equipment to improve their lifespan.

[0003] In related technologies, the PVD coating equipment uses metal carrier plates. Before the carrier plate is uploaded to the main unit, its dimensions need to be inspected and its compliance with requirements needs to be determined. Specifically, the carrier plate is manually moved from the storage cabinet to a manual trolley, which is then manually pushed to the inspection platform. The carrier plate is then lifted onto the inspection platform, and its dimensions, including levelness, length, width, height, and sub-carrier frame, are manually measured. After the measurements are completed, the carrier plate is again lifted onto the manual trolley and transported to the main unit interface, where it is finally uploaded to the main unit.

[0004] However, during carrier board replacement, manual measurement of the carrier board is required to ensure its proper functioning after it is put into service. This method of loading and unloading carrier boards has the following drawbacks: ① Carrier boards involve heavy handling: The carrier boards themselves are made entirely of metal, and their weight varies depending on the conditions, ranging from 50KG to 120KG. Careless handling during transport could lead to a carrier board falling and causing a safety accident; ② Time cost: It takes more than 30 minutes for the carrier board to be loaded from the storage cabinet to the main unit, resulting in a high time cost; ③ Labor cost: Moving the carrier board requires 4 or more people, resulting in a high labor cost. It may even cause physical deformation of the small sub-carrier board frame, making the carrier board unusable and requiring it to be returned to the factory for repair. Utility Model Content

[0005] Therefore, it is necessary to overcome the shortcomings of the existing technology and provide an on-line and off-line carrier board detection system and carrier board storage device, which can improve safety performance and reduce time and labor costs.

[0006] A carrier plate storage device, the carrier plate storage device comprising:

[0007] A storage cabinet, wherein the storage cabinet has a storage space and an access port communicating with the storage space, the access port being located on the side of the storage cabinet, and

[0008] Multiple first moving mechanisms are sequentially connected to the storage cabinet along the height direction of the storage cabinet. Each first moving mechanism can support a carrier plate and can drive the carrier plate to move outward or into the storage space through the pick-and-place port.

[0009] In one embodiment, the first moving mechanism includes a first power mechanism and two first moving components. The first power mechanism is connected to the storage cabinet and connected to the first moving components. The first power mechanism is used to drive the first moving components to move. The two first moving components are connected to the storage cabinet and are located on opposite sides of the retrieval port. The two first moving components are used to support opposite sides of the carrier plate. When the first moving components move, they can move the carrier plate out of or into the storage space.

[0010] In one embodiment, the first moving component includes a first drive wheel; the first drive wheel is rotatably connected to the storage cabinet, and the first drive wheel can extend into a groove of the carrier plate and abut against the groove wall; the first power mechanism is used to drive the first drive wheel to rotate.

[0011] In one embodiment, the first power mechanism includes a first motor, and the first moving component further includes a first rotating shaft, one end of which is connected to the first transmission wheel, and the other end of which is connected to the first motor.

[0012] The first transmission wheel is configured as a plurality of the first transmission wheels, which are arranged sequentially along the depth direction of the storage cabinet. The first rotating shaft is configured as a plurality of the first rotating shafts, which are connected one-to-one with the plurality of first transmission wheels.

[0013] A board loading / unloading detection system, the board loading / unloading detection system includes the aforementioned board storage device, and also includes a board handling device and a board detection device.

[0014] The carrier plate handling device is used to carry and transport the carrier plate;

[0015] The carrier plate testing device includes a support platform and a testing device disposed above the support platform. The support platform is used to support the carrier plate, and the testing device can test the carrier plate on the support platform.

[0016] In one embodiment, the carrier plate handling device includes a transfer mechanism, a lifting mechanism, a support portion, and a second moving mechanism; the transfer mechanism is connected to the lifting mechanism, and the transfer mechanism can drive the lifting mechanism, the support portion, and the second moving mechanism to a target position; the lifting mechanism is connected to the support portion, and the lifting mechanism is used to adjust the height of the support portion; the support portion is used to support the carrier plate, and the second moving mechanism is connected to the support portion, and the second moving mechanism can move the carrier plate, so that the carrier plate is transferred between the support portion and the storage cabinet, the main unit interface, or the support platform.

[0017] In one embodiment, the second moving mechanism includes a second power mechanism and two second moving components. The second power mechanism is connected to the support portion and connected to the second moving components. The second power mechanism is used to drive the second moving components to move. The two second moving components are connected to the support portion and are arranged at a distance from each other. The two second moving components are respectively used to support the opposite sides of the carrier plate. When the second moving components move, they can drive the carrier plate to move out of or into the support portion.

[0018] In one embodiment, the carrier plate detection device further includes a third moving mechanism; the third moving mechanism is disposed on the support platform, and the third moving mechanism is capable of moving the carrier plate from the carrier plate transport device to the support platform, and capable of moving the carrier plate on the support platform to the carrier plate transport device.

[0019] In one embodiment, the third moving mechanism includes a third power mechanism and two third moving components. The third power mechanism is connected to the support platform and connected to the third moving components. The third power mechanism is used to drive the third moving components to move. The two third moving components are connected to the support platform and are arranged at a distance from each other. The two third moving components are respectively used to support the opposite sides of the carrier plate. When the third moving components move, they can drive the carrier plate to move out of or into the support platform.

[0020] In one embodiment, the carrier plate detection device further includes a fourth moving mechanism, which is electrically connected to the detection device and connected to the support platform. The fourth moving mechanism can drive the detection device to move.

[0021] The aforementioned onboard carrier detection system and carrier storage device, when carriers need to be placed in the storage cabinet, utilize a carrier transport device to sequentially raise and lower each carrier to a position corresponding to the height of each first moving mechanism. The first moving mechanism then drives the corresponding carrier to move into the storage space for storage, thus automatically storing multiple carriers without manual operation. When carriers need to be removed from the storage cabinet, the first moving mechanism drives the carrier to move, allowing the carriers inside the storage space to be moved outward through the retrieval port. Each layer of carriers can be removed by the first moving mechanism without manual operation. Therefore, the solution of this application can realize the placement of carriers inside or removal from the storage cabinet without manual operation, achieving a high degree of automation, improving safety performance, and reducing time and labor costs. Attached Figure Description

[0022] Figure 1 This is a structural diagram of a carrier plate storage device according to an embodiment of this application.

[0023] Figure 2 This is a side view of a carrier plate handling device according to an embodiment of this application.

[0024] Figure 3 This is a top view of a carrier plate handling device according to an embodiment of this application.

[0025] Figure 4 This is a structural diagram of a carrier plate testing device according to an embodiment of this application.

[0026] 10. Carrier plate storage device; 11. Storage cabinet; 111. Storage space; 112. Retrieval port; 12. First moving mechanism; 121. First power mechanism; 122. First moving component; 1221. First transmission wheel; 1222. First rotating shaft; 1223. Coupling; 20. Carrier plate handling device; 21. Transfer mechanism; 22. Lifting mechanism; 23. Support part; 24. Second moving mechanism; 241. Second power mechanism; 242. Second moving component; 2421. Second transmission wheel; 243. Second synchronous transmission component; 30. Carrier plate detection device; 31. Support platform; 32. Detection device; 33. Third moving mechanism; 331. Third power mechanism; 332. Third moving component; 3321. Third transmission wheel; 333. Third synchronous transmission component; 34. Fourth moving mechanism; 40. Carrier plate; 41. Groove. Detailed Implementation

[0027] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0028] See Figure 1 , Figure 1 This diagram illustrates the structure of a carrier plate storage device 10 according to an embodiment of this application. The carrier plate storage device 10 includes a storage cabinet 11 and a plurality of first moving mechanisms 12. The storage cabinet 11 has a storage space 111 and a retrieval port 112 communicating with the storage space 111. The retrieval port 112 is located on the side of the storage cabinet 11. The plurality of first moving mechanisms 12 are sequentially connected to the storage cabinet 11 along its height direction. Each first moving mechanism 12 can support a carrier plate 40, and the first moving mechanism 12 can move the carrier plate 40 outward or into the storage space 111 through the retrieval port 112.

[0029] It should be noted that, in the height direction, as... Figure 1 The arrow h in the figure indicates the vertical direction when the storage cabinet 11 is placed on the workbench or the ground.

[0030] The aforementioned carrier plate storage device 10, when it is necessary to place carrier plates 40 into the storage cabinet 11, is driven by the carrier plate handling device 20 to sequentially raise and lower each carrier plate 40 to a position corresponding to the height of each first moving mechanism 12. The first moving mechanism 12 drives the corresponding carrier plate 40 to move into the storage space 111 for storage, thereby achieving automatic storage of multiple carrier plates 40 without manual operation. When it is necessary to remove the carrier plates 40 from the storage cabinet 11 for use, the first moving mechanism 12 drives the carrier plates 40 to move, allowing the carrier plates 40 inside the storage space 111 to be moved outward through the retrieval port 112. Each layer of carrier plates 40 can be moved out by the first moving mechanism 12 without manual operation. As can be seen, no manual operation is required during the process of placing the carrier plates 40 into or removing them from the storage cabinet 11. Therefore, the carrier plate storage device 10 of this application has a high degree of automation, which can improve safety performance and reduce time and labor costs.

[0031] Please see Figure 1In one embodiment, the first moving mechanism 12 includes a first power mechanism 121 and two first moving components 122. The first power mechanism 121 is connected to the storage cabinet 11 and is connected to the first moving components 122, and is used to drive the first moving components 122 to move. The two first moving components 122 are connected to the storage cabinet 11 and are located on opposite sides of the retrieval port 112. The two first moving components 122 are used to support opposite sides of the carrier plate 40. When the first moving components 122 move, they can move the carrier plate 40 out or into the storage space 111. Thus, the opposite sides of the carrier plate 40 are supported by the two first moving components 122 of the first moving mechanism 12, which can stably support the carrier plate 40. Driven by the first power mechanism 121, the carrier plate 40 can be stably moved out or into the storage space 111.

[0032] For any one of the first moving mechanisms 12, the number of first power mechanisms 121 is not limited; it can be one or two. When there is one first power mechanism 121, it is connected to any one of the first moving components 122. In this way, the first power mechanism 121 drives one of the first moving components 122 to move, while the other first moving component 122 supports the carrier plate 40. When there are two first power mechanisms 121, they are connected to the two first moving components 122 respectively. The two first power mechanisms 121 work synchronously, thereby enabling the carrier plate 40 to be stably moved out of or into the storage space 111.

[0033] The first power mechanism 121 includes, but is not limited to, various power mechanisms such as motors, cylinders or hydraulic cylinders. It can be flexibly adjusted and set according to actual needs, as long as it can provide power to the first moving component 122 so that the first moving component 122 can move and drive the carrier plate 40 to move out of or into the storage space 111.

[0034] Optionally, the first moving component 122 may be configured as one or more drive wheels, which support the carrier plate 40 and drive the drive wheels to rotate, thereby moving the carrier plate 40 out of or into the storage space 111.

[0035] Optionally, the first moving component 122 can also be configured as a transmission belt or transmission chain, which supports the carrier plate 40 and moves back and forth to move the carrier plate 40 out of or into the storage space 111.

[0036] The carrier plate 40 has grooves 41 on opposite sides, with the openings of the two grooves 41 facing away from each other. Specifically, the carrier plate 40 has C-shaped steel on opposite sides, and the grooves 41 are formed on the C-shaped steel. In some specific embodiments, the first moving component 122 includes a first drive wheel 1221. The first drive wheel 1221 is rotatably connected to the storage cabinet 11, and the first drive wheel 1221 can extend into the groove 41 of the carrier plate 40 and abut against the groove wall of the groove 41. The first power mechanism 121 is used to drive the first drive wheel 1221 to rotate. Thus, the first power mechanism 121 drives the first drive wheel 1221 to rotate, and because the wheel surface of the first drive wheel 1221 abuts against the groove wall of the groove 41, it can not only support the carrier plate 40, but also move the carrier plate 40 out of or into the storage space 111.

[0037] Based on the aforementioned embodiments, the first power mechanism 121 includes a first motor, and the first moving component 122 further includes a first rotating shaft 1222. One end of the first rotating shaft 1222 is connected to the first transmission wheel 1221, and the other end of the first rotating shaft 1222 is connected to the first motor. Thus, when the first motor rotates, the first motor drives the first rotating shaft 1222 to rotate, and the first rotating shaft 1222 drives the first transmission wheel 1221 to rotate.

[0038] Optionally, multiple first drive wheels 1221 are provided. These multiple first drive wheels 1221 are arranged sequentially along the depth direction of the storage cabinet 11, and multiple first rotating shafts 1222 are provided, each connected to one of the multiple first drive wheels 1221. In this way, either side of the carrier plate 40 is supported by multiple first drive wheels 1221, resulting in high support stability and enabling stable movement outwards or into the storage space 111.

[0039] The depth direction refers to the direction perpendicular to the side where the pick-up and drop-off port 112 is located.

[0040] Based on the aforementioned embodiments, the first moving mechanism 12 further includes a first synchronous transmission member. The first synchronous transmission member is disposed between the first moving component 122 and the first power mechanism 121. Multiple first rotating shafts 1222 are all connected to the first synchronous transmission member, and the first synchronous transmission member is connected to the first power mechanism 121.

[0041] Optionally, the first synchronous transmission component is a transmission belt, and multiple first rotating shafts 1222 are connected to the transmission belt. When the transmission belt rotates, it can drive each first rotating shaft 1222 to rotate synchronously.

[0042] Optionally, the first moving mechanism 12 further includes a coupling 1223. The coupling 1223 is disposed between the first power mechanism 121 and the first synchronous transmission member.

[0043] Based on the aforementioned embodiments, the first motor is, for example, located outside the storage cabinet 11. Compared to placing the first motor inside the storage cabinet 11, placing the first motor outside the storage cabinet 11 does not occupy the storage space 111, thereby allowing the volume of the storage space 111 to be reduced accordingly.

[0044] The first rotating shaft 1222 is rotatably mounted on the side wall of the storage cabinet 11. Thus, the first transmission wheel 1221 is indirectly rotatably mounted on the side wall of the storage cabinet 11.

[0045] Please see Figures 1 to 4 In one embodiment, another embodiment of this application provides an on / off board detection system. The on / off board detection system includes the board storage device 10 of any of the above embodiments, and further includes a board handling device 20 and a board detection device 30. The board handling device 20 is used to carry and transport the board 40. The board detection device 30 includes a support platform 31 and a detection device 32 disposed above the support platform 31. The support platform 31 is used to support the board 40. The detection device 32 can detect the board 40 on the support platform 31. The detection device 32 can be an image capturing device, specifically, for example, a camera or video camera; the detection device 32 can also be an ultrasonic measuring device or an infrared measuring device, etc., and can be flexibly adjusted and set according to actual needs.

[0046] The aforementioned on-line and off-line carrier plate detection system has several advantages. First, it includes a carrier plate storage device 10, and the technical benefits are derived from this device, including its own beneficial effects, which will not be elaborated further here. Second, it includes a carrier plate handling device 20, which can move to the pick-up / drop-off port 112, the main unit interface, or the support platform 31 to facilitate the transfer of the carrier plate 40 between the carrier plate handling device 20 and the storage cabinet 11, the main unit interface, or the support platform 31. This system is highly automated, eliminates the need for manual handling, and reduces labor costs. Furthermore, the carrier plate detection device 30 also includes a detection device 32, which can automatically detect various dimensions of the carrier plate 40, such as its levelness, length, width, height, and the frame of the sub-carrier plate 40, eliminating the need for manual measurement, reducing labor costs, and improving detection accuracy.

[0047] In one embodiment, the carrier plate handling device 20 includes a transfer mechanism 21, a lifting mechanism 22, a support portion 23, and a second moving mechanism 24. The transfer mechanism 21 is connected to the lifting mechanism 22 and can move the lifting mechanism 22, the support portion 23, and the second moving mechanism 24 to a target position. The lifting mechanism 22 is connected to the support portion 23 and is used to adjust the height of the support portion 23. The support portion 23 is used to support the carrier plate 40, and the second moving mechanism 24 is connected to the support portion 23 and can move the carrier plate 40, so that the carrier plate 40 can be transferred between the support portion 23 and the storage cabinet 11, the main unit interface, or the support platform 31.

[0048] Optionally, the transfer mechanism 21 may include, but is not limited to, rollers, wheels, or tracks. When the transfer mechanism 21 is in operation, it can drive the lifting mechanism 22, the support 23, and the second moving mechanism 24 to the target position, specifically, to the pick-up / placement port 112, the main unit interface, or the support platform 31.

[0049] Optionally, the lifting mechanism 22 may include, but is not limited to, various structural forms such as cylinders, hydraulic cylinders, or motor screws.

[0050] Since the carrier plate handling device 20 includes a transfer mechanism 21, a lifting mechanism 22, a support part 23 and a second moving mechanism 24, during operation, the lifting mechanism 22 can adjust the height position of the support part 23 so that the height position of the support part 23 matches the pick-up and put-out position of the storage cabinet 11, the main unit interface or the support platform 31, thereby facilitating the transfer of the carrier plate 40 between the support part 23 and the storage cabinet 11, the main unit interface or the support platform 31 without the need for manual handling.

[0051] To more clearly demonstrate the transfer action of the carrier plate 40 between the carrier plate transport device 20 and the storage cabinet 11, the main unit interface, or the support platform 31, this embodiment will specifically take the removal of the carrier plate 40 from the storage cabinet 11 by the carrier plate transport device 20 as an example:

[0052] The lifting mechanism 22 adjusts the height of the support 23 so that it matches the height of the carrier plate 40 to be retrieved, and the first moving mechanism 12 and the second moving mechanism 24 are aligned. The first moving mechanism 12 moves the carrier plate 40 out of the storage space 111 through the pick-and-place port 112 and moves it to the second moving mechanism 24. The second moving mechanism 24 then moves the carrier plate 40 onto the support 23. Thus, the lifting mechanism 22 facilitates the connection of carrier plates 40 on different layers of the storage cabinet 11, enabling the transfer of the carrier plate 40 between the storage cabinet 11 and the carrier plate handling device 20.

[0053] The actions of the carrier plate transport device 20 in moving the carrier plate 40 into the storage space 111, the main unit interface, or the support platform 31 are similar and will not be described in detail here.

[0054] It should be noted that the specific structural form of the second moving mechanism 24 can be set with reference to the specific structure of the first moving mechanism 12.

[0055] In one embodiment, the second moving mechanism 24 includes a second power mechanism 241 and two second moving components 242. The second power mechanism 241 is connected to the support portion 23 and is connected to the second moving components 242, and is used to drive the second moving components 242 to move. The two second moving components 242 are connected to the support portion 23 and are arranged relatively apart. The two second moving components 242 are respectively used to support the opposite sides of the carrier plate 40. When the second moving components 242 move, they can move the carrier plate 40 out of or into the support portion 23. In this way, the opposite sides of the carrier plate 40 are supported by the two second moving components 242 of the second moving mechanism 24, which can stably support the carrier plate 40. Driven by the second power mechanism 241, the carrier plate 40 can be stably moved out of or into the support portion 23.

[0056] In some specific embodiments, the second moving component 242 includes a second drive wheel 2421. The second drive wheel 2421 is rotatably connected to the support portion 23, and the second drive wheel 2421 can extend into the groove 41 of the carrier plate 40 and abut against the groove wall of the groove 41. The second power mechanism 241 is used to drive the second drive wheel 2421 to rotate. Thus, the second power mechanism 241 drives the second drive wheel 2421 to rotate, and because the wheel surface of the second drive wheel 2421 abuts against the groove wall of the groove 41, it can not only support the carrier plate 40, but also move the carrier plate 40 out of or into the support portion 23.

[0057] Based on the aforementioned embodiments, the second moving mechanism 24 further includes a second synchronous transmission member 243. The second synchronous transmission member 243 is disposed between the second moving component 242 and the second power mechanism 241. Multiple second rotating shafts are connected to the second synchronous transmission member 243, which is connected to the second power mechanism 241.

[0058] In one embodiment, the carrier plate detection device 30 further includes a third moving mechanism 33. The third moving mechanism 33 is disposed on the support platform 31. The third moving mechanism 33 can move the carrier plate 40 from the carrier plate transport device 20 to the support platform 31, and can also move the carrier plate 40 on the support platform 31 to the carrier plate transport device 20. Thus, under the action of the third moving mechanism 33, in cooperation with the second moving mechanism 24, the transfer of the carrier plate 40 between the support platform 31 and the support section 23 can be easily realized.

[0059] It should be noted that the specific structural form of the third moving mechanism 33 can be set with reference to the specific structure of the first moving mechanism 12.

[0060] In one embodiment, the third moving mechanism 33 includes a third power mechanism 331 and two third moving components 332. The third power mechanism 331 is connected to the support platform 31 and is connected to the third moving components 332, and is used to drive the third moving components 332 to move. The two third moving components 332 are connected to the support platform 31 and are arranged relatively apart. The two third moving components 332 are respectively used to support the opposite sides of the carrier plate 40. When the third moving components 332 move, they can move the carrier plate 40 out of or into the support platform 31. In this way, the opposite sides of the carrier plate 40 are supported by the two third moving components 332 of the third moving mechanism 33, which can stably support the carrier plate 40. Driven by the third power mechanism 331, the carrier plate 40 can be stably moved out of or into the support platform 31.

[0061] In some specific embodiments, the third moving component 332 includes a third drive wheel 3321. The third drive wheel 3321 is rotatably connected to the support platform 31, and can extend into the groove 41 of the carrier plate 40 and abut against the groove wall of the groove 41. The third power mechanism 331 is used to drive the third drive wheel 3321 to rotate. Thus, the third power mechanism 331 drives the third drive wheel 3321 to rotate, and because the wheel surface abuts against the groove wall of the groove 41, the third drive wheel 3321 can not only support the carrier plate 40, but also move the carrier plate 40 out of or into the support platform 31.

[0062] Based on the aforementioned embodiments, the third moving mechanism 33 further includes a third synchronous transmission member 333. The third synchronous transmission member 333 is disposed between the third moving component 332 and the third power mechanism 331. Multiple third rotating shafts are connected to the third synchronous transmission member 333, and the third synchronous transmission member 333 is connected to the third power mechanism 331.

[0063] Please see Figures 1 to 4 In one embodiment, the carrier plate detection device 30 further includes a fourth moving mechanism 34, which is electrically connected to the detection device 32 and connected to the support platform 31. The fourth moving mechanism 34 can drive the detection device 32 to move.

[0064] Optionally, the fourth moving mechanism 34 may be, but is not limited to, a three-axis moving mechanism or a six-axis moving mechanism, specifically...

[0065] In some embodiments, the on / off carrier board detection system further includes a controller, and the first moving mechanism 12, the second moving mechanism 24, the third moving mechanism 33, the fourth moving mechanism 34, and the detection device 32 are all electrically connected to the controller. Thus, under the control of the controller, the first moving mechanism 12, the second moving mechanism 24, the third moving mechanism 33, the fourth moving mechanism 34, and the detection device 32 work in coordination, achieving a high degree of automation, eliminating the need for manual operation, and reducing labor costs.

[0066] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0067] Furthermore, where the terms "first" and "second" appear, these terms are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0068] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0069] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0070] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0071] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0072] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A carrier plate storage device (10), characterized in that, The carrier plate storage device (10) includes: A storage cabinet (11) is provided with a storage space (111) and a retrieval opening (112) communicating with the storage space (111). The retrieval opening (112) is located on the side of the storage cabinet (11). Multiple first moving mechanisms (12) are sequentially connected to the storage cabinet (11) along the height direction of the storage cabinet (11). Each first moving mechanism (12) can support a carrier plate (40). The first moving mechanism (12) can drive the carrier plate (40) to move outward or into the storage space (111) through the pick-up and drop-off port (112).

2. The carrier plate storage device (10) according to claim 1, characterized in that, The first moving mechanism (12) includes a first power mechanism (121) and two first moving components (122). The first power mechanism (121) is connected to the storage cabinet (11) and connected to the first moving components (122). The first power mechanism (121) is used to drive the first moving components (122) to move. The two first moving components (122) are connected to the storage cabinet (11) and are located on opposite sides of the take-out port (112). The two first moving components (122) are used to support opposite sides of the carrier plate (40). When the first moving components (122) move, they can drive the carrier plate (40) to move out of or into the storage space (111).

3. The carrier plate storage device (10) according to claim 2, characterized in that, The first moving component (122) includes a first drive wheel (1221); the first drive wheel (1221) is rotatably connected to the storage cabinet (11), and the first drive wheel (1221) can extend into the groove (41) of the carrier plate (40) and abut against the groove wall of the groove (41); the first power mechanism (121) is used to drive the first drive wheel (1221) to rotate.

4. The carrier plate storage device (10) according to claim 3, characterized in that, The first power mechanism (121) includes a first motor, and the first moving component (122) further includes a first rotating shaft (1222). One end of the first rotating shaft (1222) is connected to the first transmission wheel (1221), and the other end of the first rotating shaft (1222) is connected to the first motor. The first transmission wheel (1221) is configured as a plurality of the first transmission wheels (1221), which are arranged sequentially along the depth direction of the storage cabinet (11). The first rotating shaft (1222) is configured as a plurality of the first rotating shafts (1222), which are connected one-to-one with the plurality of first transmission wheels (1221).

5. A system for detecting the loading and unloading of carrier boards, characterized in that, The onboard and offboard detection system includes a carrier storage device (10) as described in any one of claims 1 to 4, and further includes a carrier transport device (20) and a carrier detection device (30); The carrier plate handling device (20) is used to carry and transport the carrier plate (40); The carrier plate detection device (30) includes a support platform (31) and a detection device (32) disposed above the support platform (31). The support platform (31) is used to support the carrier plate (40), and the detection device (32) can detect the carrier plate (40) on the support platform (31).

6. The on / off line carrier board detection system according to claim 5, characterized in that, The carrier plate handling device (20) includes a transfer mechanism (21), a lifting mechanism (22), a support part (23), and a second moving mechanism (24). The transfer mechanism (21) is connected to the lifting mechanism (22), and the transfer mechanism (21) can drive the lifting mechanism (22), the support part (23), and the second moving mechanism (24) to move to the target position. The lifting mechanism (22) is connected to the support part (23), and the lifting mechanism (22) is used to adjust the height of the support part (23). The support part (23) is used to support the carrier plate (40), and the second moving mechanism (24) is connected to the support part (23). The second moving mechanism (24) can move the carrier plate (40) so that the carrier plate (40) can be transferred between the support part (23) and the storage cabinet (11), the main unit interface, or the support platform (31).

7. The on / off line carrier board detection system according to claim 6, characterized in that, The second moving mechanism (24) includes a second power mechanism (241) and two second moving components (242). The second power mechanism (241) is connected to the support part (23) and the second moving components (242) are connected to each other. The second power mechanism (241) is used to drive the second moving components (242) to move. The two second moving components (242) are connected to the support part (23) and are arranged at a distance from each other. The two second moving components (242) are respectively used to support the opposite sides of the carrier plate (40). When the second moving components (242) move, they can drive the carrier plate (40) to move out of or into the support part (23).

8. The on / off line carrier board detection system according to claim 5, characterized in that, The carrier plate detection device (30) further includes a third moving mechanism (33); the third moving mechanism (33) is disposed on the support platform (31), and the third moving mechanism (33) can move the carrier plate (40) from the carrier plate transport device (20) to the support platform (31), and can move the carrier plate (40) on the support platform (31) to the carrier plate transport device (20).

9. The on / off line carrier board detection system according to claim 8, characterized in that, The third moving mechanism (33) includes a third power mechanism (331) and two third moving components (332). The third power mechanism (331) is connected to the support platform (31) and connected to the third moving components (332). The third power mechanism (331) is used to drive the third moving components (332) to move. The two third moving components (332) are connected to the support platform (31) and are arranged at a distance from each other. The two third moving components (332) are respectively used to support the opposite sides of the carrier plate (40). When the third moving components (332) move, they can drive the carrier plate (40) to move out of or into the support platform (31).

10. The on / off line carrier board detection system according to claim 8, characterized in that, The carrier plate detection device (30) further includes a fourth moving mechanism (34), which is electrically connected to the detection device (32) and connected to the support platform (31). The fourth moving mechanism (34) can drive the detection device (32) to move.

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