Vacuum coating device capable of quickly switching target material

Abstract

The utility model discloses a vacuum coating device of quick switching target material belongs to vacuum coating technical field, including vacuum coating box, still includes adjustable conductive component, the vacuum coating box is connected with the adjustable conductive component for switching different target material and carries out the coating, adjustable conductive component includes fixed conductive component, guide component and support conductive component, fixed conductive component is connected with vacuum coating box and guide component, guide component and support conductive component are connected. Through above -mentioned mode, the utility model realizes the vacuum coating of quick replacement target material without opening vacuum coating box, can realize continuous coating, avoids opening vacuum coating box to cause the pollution in vacuum coating box to vacuum coating box, shortens production time.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a vacuum coating device that can quickly switch target materials. Background Technology

[0002] Vacuum coating refers to a method of forming a thin film on the surface of a workpiece by heating a target material in a high vacuum environment.

[0003] Chinese patent CN208414532U discloses a crucible mounting mechanism for a vacuum coating machine, including a vacuum chamber. The bottom of the vacuum chamber is provided with a connecting rod, the top of the connecting rod is fixedly mounted with a first mounting seat, the top of the first mounting seat is provided with a second mounting seat, the top of the second mounting seat is fixedly mounted with a crucible, the bottom of the second mounting seat is fixedly mounted with two positioning pins, and the top of the first mounting seat has two positioning grooves.

[0004] However, the crucible mounting mechanism of the aforementioned vacuum coating machine requires opening the vacuum chamber to replace the target material during coating, which may cause contamination inside the vacuum chamber and reduce work efficiency.

[0005] Based on this, the present invention designs a vacuum coating device that can quickly switch target materials to solve the above problems. Utility Model Content

[0006] In view of the above-mentioned shortcomings of the existing technology, the present invention provides a vacuum coating device that can quickly switch target materials.

[0007] To achieve the above objectives, this utility model provides the following technical solution:

[0008] A vacuum coating apparatus capable of rapidly switching target materials includes a vacuum coating chamber and an adjustable conductive component. The adjustable conductive component for switching between different target materials for coating is connected to the vacuum coating chamber. The adjustable conductive component includes a fixed conductive component, a guide component, and a supporting conductive component. The fixed conductive component is connected to the vacuum coating chamber and the guide component. The guide component and the supporting conductive component are connected.

[0009] Furthermore, the fixed conductive assembly includes a second conductive block, a second conductive post, a C-shaped frame, a mounting bracket, a first T-shaped guide block, a conductive copper busbar, a second T-shaped guide block, and a third conductive post. Two sets of C-shaped frames are fixedly connected to the side wall of the mounting bracket. The top of the C-shaped frame is connected to the third conductive post through an insulating ring. The top of the third conductive post is fixedly connected to the second T-shaped guide block. The top of the second T-shaped guide block is fixedly connected to the conductive copper busbar. The side wall of the conductive copper busbar is fixedly connected to the first T-shaped guide block. The upper end of the first T-shaped guide block is fixedly connected to the second conductive post. The second conductive post is fixedly connected to the lower end of the vacuum coating chamber. The upper end of the second conductive post is fixedly connected to the second conductive block, which is located inside the vacuum coating chamber. The C-shaped frame is connected to the guide assembly.

[0010] Furthermore, a heating element is fixedly connected to the side wall of the second conductive block, and a crucible is fixedly connected to the heating element; one end of the heating element is fixedly connected to the first conductive post, and the lower end of the first conductive post is fixedly connected to the first conductive block, which is fixedly connected to the inner bottom of the vacuum coating chamber; the lower end of the first conductive block passes through the vacuum coating chamber and is also fixedly connected to a first T-shaped guide block.

[0011] Furthermore, the guiding assembly includes a cylinder, guide rods, and a connecting disc; the bottom of the C-shaped frame is fixedly connected to the cylinder, and multiple sets of guide rods are fixedly connected between the inner top and inner bottom of the C-shaped frame. The guide rods are slidably connected to the connecting disc through insulating rings, and the connecting disc is fixedly connected to the driving end of the cylinder through insulating rings; the connecting disc is connected to the supporting conductive assembly.

[0012] Furthermore, multiple sets of guide rods are distributed in an equally spaced circular array between the C-shaped frames.

[0013] Furthermore, the supporting conductive component includes a third T-shaped guide block, a third conductive block, a support column, a support block, and a fourth conductive column; the upper end of the connecting disc is fixedly connected to multiple sets of support columns, the upper end of the support column is fixedly connected to a support block, the upper end of the support block is fixedly connected to a third T-shaped guide block, the upper end of the third T-shaped guide block is fixedly connected to a fourth conductive column, the upper end of the fourth conductive column is fixedly connected to the third conductive block, and the third conductive block is located directly below the third conductive column.

[0014] Furthermore, the first T-shaped guide block, the second T-shaped guide block, and the third T-shaped guide block are made of copper.

[0015] Furthermore, the first T-shaped guide block at the lower end of the first conductive block is electrically connected to the positive terminal of the transformer; the third T-shaped guide block is electrically connected to the negative terminal of the transformer.

[0016] Compared with the prior art, the advantages of this utility model are as follows: 1. When using this utility model, different target materials are placed in different crucibles. When a corresponding target material is needed for coating, the cylinder of the adjustable conductive component connected to the crucible of the corresponding target material is activated. The driving end of the cylinder drives the connecting disc to move upward along the guide rod, causing the support column to move upward along the support block and the third T-shaped guide block. The third T-shaped guide block drives the fourth conductive column and the third conductive block to move upward until they contact the third conductive column. At this time, the negative terminal of the transformer is connected to the third conductive block through the third T-shaped guide block, the fourth conductive column and the third conductive block; the positive terminal of the transformer is connected through the first T-shaped guide block, the first conductive block, the first conductive column, the heating element, the second conductive block, the second conductive column and the first T-shaped guide block. The circuit is formed by connecting the target material, the conductive copper busbar, the second T-shaped guide block, and the third conductive post. The corresponding heating element heats the target material in the crucible for vacuum coating. When it is necessary to switch to another target material for vacuum coating, simply start the cylinder connected to the crucible containing the corresponding target material and close the other cylinders to heat the crucible containing the corresponding target material. This allows for quick target material replacement without opening the vacuum coating chamber, enabling continuous coating and avoiding contamination inside the vacuum coating chamber by opening it, thus shortening production time. Multiple sets of adjustable conductive components can also be set according to actual production needs, and different targets can be placed on the crucibles of the adjustable conductive components for vacuum coating. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This invention relates to a three-dimensional vacuum coating device capable of rapidly switching target materials. Figure 1 ;

[0019] Figure 2 This invention relates to a three-dimensional vacuum coating device capable of rapidly switching target materials. Figure 2 ;

[0020] Figure 3 This invention relates to a three-dimensional vacuum coating device capable of rapidly switching target materials. Figure 3 ;

[0021] Figure 4 The three-dimensional representation of the adjustable conductive component of this utility model Figure 1 ;

[0022] Figure 5The three-dimensional representation of the adjustable conductive component of this utility model Figure 2 .

[0023] The labels in the diagram represent:

[0024] 1. Vacuum coating chamber; 2. Heating element; 3. Crucible; 4. First conductive block; 5. First conductive post; 6. Adjustable conductive assembly; 61. Second conductive block; 62. Second conductive post; 63. C-shaped frame; 64. Cylinder; 65. Mounting bracket; 66. First T-shaped guide block; 67. Guide rod; 68. Conductive copper busbar; 69. Second T-shaped guide block; 610. Third conductive post; 611. Third T-shaped guide block; 612. Third conductive block; 613. Support post; 614. Connecting disc; 615. Support block; 616. Fourth conductive post. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0026] Example 1: In some embodiments, please refer to the accompanying drawings. Figures 1-5 A vacuum coating apparatus capable of rapidly switching target materials includes a vacuum coating chamber 1; an adjustable conductive component 6 for switching between different target materials for coating is connected to the vacuum coating chamber 1; the adjustable conductive component 6 includes a fixed conductive component, a guide component, and a supporting conductive component; the fixed conductive component is connected to the vacuum coating chamber 1 and the guide component; the guide component and the supporting conductive component are connected.

[0027] The fixed conductive assembly includes a second conductive block 61, a second conductive post 62, a C-shaped frame 63, a mounting frame 65, a first T-shaped guide block 66, a conductive copper busbar 68, a second T-shaped guide block 69, and a third conductive post 610. Two sets of C-shaped frames 63 are fixedly connected to the side wall of the mounting frame 65. The top of the C-shaped frame 63 is connected to the third conductive post 610 through an insulating ring. The top of the third conductive post 610 is fixedly connected to the second T-shaped guide block 69. The top of the second T-shaped guide block 69 is fixedly connected to the conductive copper busbar 68. The side wall of the conductive copper busbar 68 is fixedly connected to the first T-shaped guide block 66. The upper end of the first T-shaped guide block 66 is fixedly connected to the second conductive post 62. The second conductive post 62 is fixedly connected to the lower end of the vacuum coating chamber 1. The upper end of the second conductive post 62 is fixedly connected to the second conductive block 61, which is located inside the vacuum coating chamber 1. The C-shaped frame 63 is connected to the guide assembly.

[0028] A heating element 2 is fixedly connected to the side wall of the second conductive block 61, and a crucible 3 is fixedly connected to the heating element 2. One end of the heating element 2 is fixedly connected to the first conductive post 5, and the lower end of the first conductive post 5 is fixedly connected to the first conductive block 4. The first conductive block 4 is fixedly connected to the inner bottom of the vacuum coating box 1. The lower end of the first conductive block 4 passes through the vacuum coating box 1 and is also fixedly connected to the first T-shaped guide block 66. The first T-shaped guide block 66 at the lower end of the first conductive block 4 is electrically connected to the positive terminal of the transformer.

[0029] The guiding assembly includes a cylinder 64, guide rods 67, and a connecting disc 614; the bottom of the C-shaped frame 63 is fixedly connected to the cylinder 64, and multiple sets of guide rods 67 are fixedly connected between the inner top and inner bottom of the C-shaped frame 63. The guide rods 67 are slidably connected to the connecting disc 614 through insulating rings, and the connecting disc 614 is fixedly connected to the driving end of the cylinder 64 through insulating rings; the connecting disc 614 is connected to the supporting conductive assembly.

[0030] Multiple sets of guide rods 67 are distributed in an equally spaced circular array between the C-shaped frames 63;

[0031] The supporting conductive assembly includes a third T-shaped guide block 611, a third conductive block 612, a support column 613, a support block 615, and a fourth conductive column 616; the upper end of the connecting disc 614 is fixedly connected to multiple sets of support columns 613, the upper end of the support column 613 is fixedly connected to a support block 615, the upper end of the support block 615 is fixedly connected to a third T-shaped guide block 611, the upper end of the third T-shaped guide block 611 is fixedly connected to a fourth conductive column 616, the upper end of the fourth conductive column 616 is fixedly connected to a third conductive block 612, and the third conductive block 612 is located directly below the third conductive column 610;

[0032] The third T-shaped guide block 611 is electrically connected to the negative terminal of the transformer;

[0033] The first T-shaped guide block 66, the second T-shaped guide block 69, and the third T-shaped guide block 611 are copper blocks;

[0034] In use, this invention places different targets in different crucibles 3. When a corresponding target is needed for coating, the cylinder 64 of the adjustable conductive component 6 connected to the crucible 3 of the corresponding target is activated. The driving end of the cylinder 64 drives the connecting disc 614 to move upward along the guide rod 67, causing the support column 613 to move upward along the support block 615 and the third T-shaped guide block 611. The third T-shaped guide block 611 drives the fourth conductive column 616 and the third conductive block 612 to move upward until they contact the third conductive column 610. At this time, the negative terminal of the transformer is connected to the third conductive block 612 through the third T-shaped guide block 611, the fourth conductive column 616, and the third conductive block 612; the positive terminal of the transformer is connected through the first T-shaped guide block 66, the first conductive block 4, the first conductive column 5, the heating element 2, the second conductive block 61, the second conductive column 62, and the first... The T-shaped guide block 66, conductive copper busbar 68, second T-shaped guide block 69, and third conductive post 610 are connected to form a closed circuit. The corresponding heating element 2 starts to heat the target material in the crucible 3 to perform vacuum coating. When it is necessary to switch to another target material for vacuum coating, simply start the cylinder 64 connected to the crucible 3 containing the corresponding target material and close the other cylinders 64 to heat the crucible 3 containing the corresponding target material. This allows for quick target material replacement for vacuum coating without opening the vacuum coating chamber 1, enabling continuous coating and avoiding contamination inside the vacuum coating chamber 1 caused by opening it, thus shortening production time. Multiple sets of adjustable conductive components 6 can also be set according to actual production needs, and different targets can be placed on the crucible 3 of the adjustable conductive components 6 for vacuum coating.

[0035] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A vacuum coating apparatus capable of rapidly switching target materials, comprising a vacuum coating chamber (1), characterized in that: It also includes an adjustable conductive component (6); the vacuum coating chamber (1) is connected to an adjustable conductive component (6) for switching different target materials for coating; the adjustable conductive component (6) includes a fixed conductive component, a guide component and a supporting conductive component; the fixed conductive component is connected to the vacuum coating chamber (1) and the guide component; the guide component and the supporting conductive component are connected.

2. The vacuum coating apparatus with rapidly switchable target material according to claim 1, characterized in that, The fixed conductive assembly includes a second conductive block (61), a second conductive post (62), a C-shaped frame (63), a mounting bracket (65), a first T-shaped guide block (66), a conductive copper busbar (68), a second T-shaped guide block (69), and a third conductive post (610). Two sets of C-shaped frames (63) are fixedly connected to the side wall of the mounting bracket (65). The top of the C-shaped frame (63) is connected to the third conductive post (610) through an insulating ring. The top of the third conductive post (610) is fixedly connected to the second T-shaped guide block (69). The top of the two T-shaped guide blocks (69) is fixedly connected to a conductive copper busbar (68), the side wall of the conductive copper busbar (68) is fixedly connected to the first T-shaped guide block (66), the upper end of the first T-shaped guide block (66) is fixedly connected to a second conductive post (62), the second conductive post (62) is fixedly connected to the lower end of the vacuum coating chamber (1), the upper end of the second conductive post (62) is fixedly connected to a second conductive block (61), and the second conductive block (61) is located inside the vacuum coating chamber (1); the C-shaped frame (63) is connected to the guide assembly.

3. The vacuum coating apparatus with rapidly switchable target materials according to claim 2, characterized in that, A heating element (2) is fixedly connected to the side wall of the second conductive block (61), and a crucible (3) is fixedly connected to the heating element (2); one end of the heating element (2) is fixedly connected to the first conductive post (5), and the lower end of the first conductive post (5) is fixedly connected to the first conductive block (4), and the first conductive block (4) is fixedly connected to the inner bottom of the vacuum coating box (1); the lower end of the first conductive block (4) is also fixedly connected to the first T-shaped guide block (66) after passing through the vacuum coating box (1).

4. The vacuum coating apparatus with rapidly switchable target materials according to claim 3, characterized in that, The guiding assembly includes a cylinder (64), a guide rod (67), and a connecting disc (614); the bottom of the C-shaped frame (63) is fixedly connected to the cylinder (64), and multiple sets of guide rods (67) are fixedly connected between the inner top and inner bottom of the C-shaped frame (63). The guide rods (67) are slidably connected to the connecting disc (614) through an insulating ring, and the connecting disc (614) is fixedly connected to the driving end of the cylinder (64) through an insulating ring; the connecting disc (614) is connected to the supporting conductive assembly.

5. The vacuum coating apparatus with rapidly switchable target materials according to claim 4, characterized in that, Multiple sets of guide rods (67) are distributed in an equally spaced circular array between the C-shaped frame (63).

6. The vacuum coating apparatus with rapidly switchable target material according to claim 5, characterized in that, The supporting conductive assembly includes a third T-shaped guide block (611), a third conductive block (612), a support column (613), a support block (615), and a fourth conductive column (616). The upper end of the connecting disc (614) is fixedly connected to multiple sets of support columns (613). The upper end of the support column (613) is fixedly connected to the support block (615). The upper end of the support block (615) is fixedly connected to the third T-shaped guide block (611). The upper end of the third T-shaped guide block (611) is fixedly connected to the fourth conductive column (616). The upper end of the fourth conductive column (616) is fixedly connected to the third conductive block (612). The third conductive block (612) is located directly below the third conductive column (610).

7. The vacuum coating apparatus with rapidly switchable target material according to claim 6, characterized in that, The first T-shaped guide block (66), the second T-shaped guide block (69), and the third T-shaped guide block (611) are copper blocks.

8. The vacuum coating apparatus for rapidly switching target materials according to claim 7, characterized in that, The first T-shaped guide block (66) at the lower end of the first conductive block (4) is electrically connected to the positive terminal of the transformer; the third T-shaped guide block (611) is electrically connected to the negative terminal of the transformer.

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