Carrier and processing apparatus

Abstract

The application provides a carrier and a processing device, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problem that silicon wafers are prone to wrap plating when the cross sections are passivated. The carrier comprises a carrier main body, the carrier main body has a containing space, the top of the carrier main body has an opening communicating with the containing space, the cross section of the sheet material faces the opening, and the side wall of the carrier main body arranged in the second direction has at least one guide structure extending in the first direction; a clamping plate assembly has a clamping plate main body and a moving structure connected with each other, the clamping plate main body is arranged in the containing space, at least part of the moving structure can extend into the guide structure, and the clamping plate main body can abut against the first surface of the first sheet material. Through the structure, the first surface and the second surface of the adjacent sheet materials can be tightly attached together, so that target material particles are difficult to enter between the first surface and the second surface of the adjacent sheet materials when magnetron sputtering is performed, and the wrap plating phenomenon is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a carrier and processing equipment. Background Technology

[0002] With the development of photovoltaic cell manufacturing technology, more and more whole silicon wafers need to be cut into halves. Cutting whole silicon wafers into halves can reduce power loss, improve photoelectric conversion efficiency, reduce hot spot risk, enhance shading tolerance, improve space adaptability, and reduce silicon waste. After cutting whole silicon wafers into halves, the cross-section of the silicon wafer will affect the performance of the half wafer. Therefore, the cross-section of the silicon wafer needs to be passivated to reduce surface defects, reduce the surface recombination rate, improve minority carrier lifetime, and increase open-circuit voltage.

[0003] Among related technologies, various processes can passivate the cross-section of a half-silicon wafer, such as plasma-enhanced chemical vapor deposition (PECVD), atomic layer deposition (ALD), and physical vapor deposition (PVD). When using magnetron sputtering for cross-section passivation, the target particles not only contact the cross-section of the half-silicon wafer but also its front and back sides. This makes it easy for plating snagging to occur on the front and back sides of the half-silicon wafer, reducing its photoelectric conversion efficiency. Utility Model Content

[0004] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a carrier and processing equipment.

[0005] In a first aspect, one embodiment of this application provides a carrier, comprising: a carrier body having a receiving space configured to receive a plurality of sheet materials arranged sequentially along a first direction; the top of the carrier body having an opening communicating with the receiving space; when the receiving space receives sheet materials, the cross-section of the sheet materials faces the opening; a sidewall of the carrier body provided in a second direction having at least one guide structure extending along the first direction; and a clamping plate assembly having a clamping plate body and a movable structure interconnected thereto; the clamping plate body being disposed in the receiving space; at least a portion of the movable structure being able to extend into the guide structure and be able to move along the extending direction of the guide structure; and when the receiving space receives sheet materials, the clamping plate body being able to abut against a first surface of the first sheet material.

[0006] In some embodiments, the sidewall of the vehicle body is provided with a through hole, which extends in a first direction to form a slide as a guide structure; the side of the clamp body near the sidewall is provided with at least one protrusion as a moving structure.

[0007] In some embodiments, the clamping plate assembly has a first end and a second end disposed opposite to each other along a second direction. The first end of the clamping plate assembly has at least two protrusions, and the second end of the clamping plate assembly has at least two protrusions. The carrier body has a first end and a second end along a second direction. The sidewall of the first end of the carrier body has at least two slides arranged sequentially along a third direction, which intersects the first and second directions. The sidewall of the second end of the carrier body has at least two slides arranged sequentially along a third direction. The protrusions of the first end of the clamping plate assembly extend into the slides of the sidewall of the first end of the carrier body, and the protrusions of the second end of the clamping plate assembly extend into the slides of the sidewall of the second end of the carrier body.

[0008] In some embodiments, the clamp body and the protrusion are detachably connected.

[0009] In some embodiments, the vehicle body has at least one through hole extending along a first direction; wherein, the clamping plate assembly further includes: at least one threaded member connected to the clamping plate body, the threaded member passing through the through hole; at least one first nut disposed between the vehicle body and the clamping plate body, the first nut abutting against the vehicle body, and the first nut being threaded to the threaded member.

[0010] In some embodiments, the clamp assembly further includes: at least one second nut disposed on the side of the carrier body away from the clamp body, the second nut being screwed to a screw connector and abutting against the carrier body; and / or, the number of screw connectors is at least two, the number of first nuts is at least two, the clamp body has a vertical symmetry plane, and at least two screw connectors are symmetrically arranged relative to the vertical symmetry plane.

[0011] In some embodiments, the clamp assembly further includes at least one elastic element connected between the screw and the clamp body.

[0012] In some embodiments, the clamping plate assembly has a first end and a second end disposed opposite to each other along a second direction. The first end of the clamping plate assembly has at least one protrusion, and the second end of the clamping plate assembly has at least one protrusion. The carrier body includes: a first side plate; a second side plate disposed adjacent to and connected to the first side plate, the second side plate having a slide rail, and the protrusion of the first end of the clamping plate assembly extending into the slide rail of the second side plate; a third side plate disposed opposite to the second side plate in a second direction and connected to the first side plate, the third side plate having a slide rail, and the protrusion of the second end of the clamping plate assembly extending into the slide rail of the third side plate; a fourth side plate disposed opposite to the first side plate in a first direction and connected to the second and third side plates, the bottom of the fourth side plate having an observation port; and a bottom plate connected to the first, second, third, and fourth side plates. The first, second, third, fourth, and bottom plates together form an accommodating space.

[0013] In a second aspect, one embodiment of this application provides a processing apparatus, including: a process chamber having a process cavity, wherein a magnetron sputtering coating device is disposed in the process cavity, the magnetron sputtering coating device being configured to perform magnetron sputtering coating on the cross-section of a sheet material; and a carrier as described in the first aspect, disposed in the process cavity, the carrier being configured to carry the sheet material.

[0014] In some embodiments, the processing apparatus further includes: a carrier plate disposed in the process chamber and configured to carry a carrier, the carrier plate having at least one receiving opening; wherein the carrier further includes: a support member connected to the carrier body of the carrier, the carrier body passing through the receiving opening, the support member being able to contact the upper surface of the carrier plate so that the carrier plate supports the carrier through the support member.

[0015] The carrier and processing equipment proposed in this application embodiment allow the clamping plate body to abut against the first surface of the first sheet material in the accommodating space. This allows multiple sheet materials to be clamped between the carrier body and the clamping plate body by a side wall of the carrier body, making the first and second surfaces of adjacent sheet materials tightly adhered together. Therefore, during magnetron sputtering deposition, target particles are less likely to enter between the first and second surfaces of adjacent sheet materials and deposit on the first and second surfaces (the first sheet material can be used as a waste sheet to protect the first surface of the second sheet material, and the last sheet material can be used as a waste sheet to protect the second surface of the penultimate sheet material). This reduces the phenomenon of plating around the first and second surfaces of the sheet materials, improves the cross-sectional passivation quality of the sheet materials, and thus improves the photoelectric conversion efficiency of the sheet materials. By extending at least part of the moving structure into the guide structure, the guide structure can support the clamping plate assembly and guide the clamping plate assembly, facilitating the clamping plate assembly to clamp the sheet materials. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a structural schematic of a vehicle provided in an exemplary embodiment of this application.

[0018] Figure 2 The diagram shown is a structural schematic of a carrier carrying sheet material provided in an exemplary embodiment of this application.

[0019] Figure 3 The diagram shown is a structural schematic of a clamping plate assembly provided in an exemplary embodiment of this application.

[0020] Figure 4 The diagram shown is a structural schematic of the vehicle body and support members provided in an exemplary embodiment of this application.

[0021] Figure 5 The image shown is a top view of a vehicle provided in an exemplary embodiment of this application.

[0022] Figure 6 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.

[0023] Figure label:

[0024] 100. Vehicle; 110. Vehicle body; 111. Opening; 112. Slide; 113. First end of vehicle body; 114. Second end of vehicle body; 115. Through hole; 116. First side plate; 117. Second side plate; 118. Third side plate; 119. Fourth side plate; 1191. Base plate; 1192. Observation port; 120. Clamping plate assembly; 121. Clamping plate body; 1211. Vertical symmetry plane; 122. Protrusion. ; 123, First end of clamping plate assembly; 124, Second end of clamping plate assembly; 125, Threaded connector; 1251, Second threaded part; 1252, Connecting part; 126, First nut; 127, Second nut; 128, Elastic element; 130, Support element; 200, Sheet material; 210, First surface; 220, Cross-section; 300, Processing equipment; 310, Process cavity; 311, Magnetron sputtering coating device; 320, Carrier plate. Detailed Implementation

[0025] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0026] Figure 1 The diagram shown is a structural schematic of a vehicle provided in an exemplary embodiment of this application. Figure 2 The diagram shown is a schematic representation of a carrier for carrying sheet material according to an exemplary embodiment of this application. Figure 3 The diagram shown is a structural schematic of a clamping plate assembly provided in an exemplary embodiment of this application.

[0027] like Figures 1-3 As shown, this application embodiment provides a carrier 100 configured to accommodate sheet material 200. The sheet material 200 has a first surface 210 and a second surface disposed opposite each other in a first direction, and a cross-section 220 adjacent to the first surface 210 and the second surface. The first surface 210 and the second surface of the adjacent sheet material 200 are in contact. The carrier 100 includes a carrier body 110 and a clamping plate assembly 120. The carrier body 110 has a receiving space configured to accommodate a plurality of sheet materials 200 arranged sequentially along a first direction (such as the X direction in the figure). The top of the carrier body 110 has an opening 111 communicating with the receiving space. When the receiving space accommodates the sheet material 200, the cross-section 220 of the sheet material 200 faces the opening 111. The sidewall of the carrier body 110 disposed in a second direction (such as the Y direction in the figure) has at least one guide structure extending along the first direction. The second direction intersects the first direction. The clamp assembly 120 has a clamp body 121 and a movable structure connected to each other. The clamp body 121 is disposed in the receiving space. At least part of the movable structure can extend into the guide structure and can move along the extension direction of the guide structure. When the receiving space receives the sheet material 200, the clamp body 121 can abut against the first surface 210 of the first sheet material 200.

[0028] For example, the second direction is perpendicular to the first direction.

[0029] For example, the shape of the clamp body 121 is a plate-like structure.

[0030] For example, the sheet material 200 may be a silicon wafer (specifically, a half-wafer after being split from a whole silicon wafer), a glass substrate, or a wafer.

[0031] For example, if a whole silicon wafer has four chamfers, then a half silicon wafer obtained by laser cutting the whole silicon wafer has two chamfers, and the side of the half silicon wafer away from the two chamfers is a cross-section 220.

[0032] In the above embodiment, the clamping plate body 121 can abut against the first surface 210 of the first sheet material 200 in the accommodating space, thereby clamping multiple sheet materials 200 with one side wall of the carrier body 110 and the clamping plate body 121, so that the first surface 210 and the second surface of adjacent sheet materials 200 are tightly attached together. Thus, during magnetron sputtering coating, target particles are less likely to enter between the first surface 210 and the second surface of adjacent sheet materials 200 and deposit on the first surface 210 and the second surface (the first sheet material 200 can be used as a waste sheet to protect the first surface 210 of the second sheet material 200, and the last sheet material 200 can be used as a waste sheet to protect the second surface of the penultimate sheet material 200). This reduces the phenomenon of coating around the first surface 210 and the second surface of the sheet material 200, improves the cross-sectional passivation quality of the sheet material 200, and thus improves the photoelectric conversion efficiency of the sheet material 200. By extending at least a portion of the movable structure into the guide structure, the guide structure can support the clamp assembly 120 and guide the clamp assembly 120 to facilitate pushing the clamp assembly 120 to clamp the sheet material 200.

[0033] In some embodiments, such as Figures 1-3 As shown, the side wall of the vehicle body 110 is provided with a through hole, which extends in the first direction to form a slide 112 as a guide structure. The clamp body 121 is provided with at least one protrusion 122 on the side near the side wall as a moving structure.

[0034] For example, the protrusion 122 includes a sliding part, which is cylindrical in shape. The arcuate surface of the cylinder is in line contact with the slide rail 112, thereby reducing the friction between the protrusion 122 and the slide rail 112.

[0035] In the above embodiments, by providing through holes and protrusions 122, the through holes can support the clamping plate assembly 120 and guide the clamping plate assembly 120. Furthermore, the structure is simple, easy to manufacture, and has a low cost.

[0036] In addition to the above embodiments, the embodiments of this application also provide the following guiding structures and moving structures.

[0037] In some embodiments, the guide structure includes a chute disposed on the inner sidewall of the carrier body 110, and the moving structure includes a protrusion 122 connected to the side of the clamp body 121 near the inner sidewall. The protrusion 122 extends into the chute and is capable of sliding along the chute.

[0038] In some embodiments, the guide structure includes a groove disposed on the inner sidewall of the carrier body 110, and the moving structure includes a slider connected to the side of the clamp body 121 near the inner sidewall, and the slider is capable of sliding along the groove.

[0039] In some embodiments, the guiding structure includes a guide rail disposed on the inner sidewall of the carrier body 110, and the moving structure includes a roller rotatably connected to the side of the clamp body 121 near the inner sidewall, and the roller is capable of rolling along the guide rail.

[0040] In some embodiments, the guiding structure includes a guide rail disposed on the inner sidewall of the carrier body 110, and the moving structure includes a slider connected to the side of the clamp body 121 near the inner sidewall, and the slider is capable of sliding along the guide rail.

[0041] Figure 4 The diagram shown is a structural schematic of the vehicle body and support members provided in an exemplary embodiment of this application.

[0042] In some embodiments, such as Figure 3 and Figure 4 As shown, the clamping plate assembly 120 has a first end 123 and a second end 124 disposed opposite to each other along a second direction. The first end 123 of the clamping plate assembly 120 has at least two protrusions 122, and the second end 124 of the clamping plate assembly 120 has at least two protrusions 122. The vehicle body 110 has a first end 113 and a second end 114 along a second direction. The sidewall of the first end 113 of the vehicle body 110 has at least two slide rails 112 arranged sequentially along a third direction (as shown in the figure, the Z direction). The third direction intersects the first direction and the second direction. The sidewall of the second end 114 of the vehicle body 110 has at least two slide rails 112 arranged sequentially along the third direction. The protrusion 122 of the first end 123 of the clamping plate assembly 120 extends into the slide 112 of the side wall of the first end 113 of the vehicle body 110, and the protrusion 122 of the second end 124 of the clamping plate assembly 120 extends into the slide 112 of the side wall of the second end 114 of the vehicle body 110.

[0043] For example, the second direction is perpendicular to the first direction, and the third direction is perpendicular to both the first and second directions.

[0044] For example, the protrusions 122 are provided in a one-to-one correspondence with the slides 112, and each protrusion 122 extends into the corresponding slide 112.

[0045] For example, the clamp body 121 extends along a second direction and has a first end and a second end disposed opposite to each other in the second direction. The first end of the clamp body 121 is connected to at least two protrusions 122, and the second end of the clamp body 121 is connected to at least two protrusions 122.

[0046] In the above embodiments, by providing protrusions 122 at both ends of the clamping plate assembly 120 and slide rails 112 at both ends of the carrier body 110, the carrier body 110 can support the clamping plate assembly 120 from both sides, making the clamping plate assembly 120 less prone to tilting. By providing at least two protrusions 122 at each end of the clamping plate assembly 120 and at least two slide rails 112 arranged sequentially along a third direction at each end of the carrier body 110, the possibility of the clamping plate assembly 120 tilting can be further reduced.

[0047] In some embodiments, the clamp body 121 and the protrusion 122 are detachably connected.

[0048] For example, the clamp body 121 and the protrusion 122 are connected in a convex-concave fit. For example, if the clamp body 121 has a groove, the protrusion 122 can be inserted into the groove.

[0049] For example, the clamp body 121 has a threaded hole, and the protrusion 122 has threads, which can be screwed into the threads of the threaded hole. Further, the protrusion 122 includes a first threaded portion and a sliding portion that are connected to each other, the sliding portion extending into the slide rail 112, and the first threaded portion having threads.

[0050] In the above embodiments, by making the clamp body 121 detachably connected to the protrusion 122, it is convenient to remove the clamp assembly 120 from the carrier body 110. For example, when removing the clamp assembly 120, the protrusion 122 in the slide 112 can be removed from the clamp body 121 first, and then the clamp body 121 can be taken out from the receiving space.

[0051] Figure 5 The image shown is a top view of a vehicle provided in an exemplary embodiment of this application.

[0052] In some embodiments, such as Figures 1-5 As shown, the carrier body 110 has at least one through hole 115 extending along a first direction. The clamping plate assembly 120 further includes at least one threaded connector 125 and at least one first nut 126. The at least one threaded connector 125 is connected to the clamping plate body 121 and passes through the through hole 115. The at least one first nut 126 is disposed between the carrier body 110 and the clamping plate body 121, abutting against the carrier body 110, and is threaded to the threaded connector 125.

[0053] For example, the screw connector 125 can be directly connected to the clamp body 121 or indirectly (e.g., connected through other connectors).

[0054] For example, the screw connector 125 is a screw, bolt, or stud.

[0055] For example, the screw connector 125 is provided in a one-to-one correspondence with the first nut 126, and each first nut 126 is screwed to the corresponding screw connector 125.

[0056] In the above embodiments, by adjusting the position of the screw connector 125 relative to the through hole 115 in the first direction, the position of the clamping plate body 121 and / or the magnitude of the thrust applied by the clamping plate body 121 to the sheet material 200 can be adjusted, so that the clamping plate body 121 can clamp the sheet material 200 with appropriate force. By setting the first nut 126, the position of the screw connector 125 can be fixed, thereby preventing the clamping plate body 121 from moving during the process.

[0057] In some embodiments, such as Figure 1 , Figure 2 and Figure 5 As shown, the clamp assembly 120 further includes at least one second nut 127, which is disposed on the side of the carrier body 110 away from the clamp body 121. The second nut 127 is screwed to the screw connector 125 and abuts against the carrier body 110.

[0058] For example, the screw connector 125 is provided in a one-to-one correspondence with the second nut 127, and each second nut 127 is screwed to the corresponding screw connector 125.

[0059] In the above embodiments, by providing a second nut 127, the screw connector 125 can be further tightened, thereby preventing the clamp body 121 from moving during the process.

[0060] In some embodiments, such as Figure 5 As shown, there are at least two screw connectors 125 and at least two first nuts 126 (each first nut 126 is screwed to a corresponding screw connector 125). The clamping plate body 121 has a vertical symmetry plane 1211, and at least two screw connectors 125 are symmetrically arranged with respect to the vertical symmetry plane 1211.

[0061] For example, there are two screw connectors 125.

[0062] For example, there are at least two second nuts 127, each second nut 127 being screwed to a corresponding screw connector 125.

[0063] In the above embodiments, by symmetrically arranging at least two screw connectors 125, the thrust can be applied to the clamp body 121 more evenly, making the clamp body 121 less prone to tilting and shaking.

[0064] In some embodiments, the clamp assembly 120 further includes at least one elastic element 128 connected between the screwed member 125 and the clamp body 121.

[0065] For example, the elastic element 128 includes a spring or a rubber block.

[0066] For example, the elastic element 128 is welded to the clamp body 121.

[0067] For example, such as Figure 3 As shown, the screw connector 125 includes a second screw portion 1251 and a connecting portion 1252 connected to each other. The second screw portion 1251 has threads, and a first nut 126 and / or a second nut 127 are screwed into the threads of the second screw portion 1251. The connecting portion 1252 is connected to the elastic member 128.

[0068] In the above embodiments, by providing the elastic element 128, the force applied by the screw 125 can be buffered, so that the clamp body 121 can squeeze the sheet material 200 with a smaller impact force, thereby reducing the risk of the sheet material 200 breaking.

[0069] In some embodiments, such as Figure 3 As shown, the clamp assembly 120 has a first end 123 and a second end 124 disposed opposite to each other along a second direction. The first end 123 of the clamp assembly 120 has at least one protrusion 122, and the second end 124 of the clamp assembly 120 also has at least one protrusion 122. Figure 4 As shown, the vehicle body 110 includes: a first side plate 116, a second side plate 117, a third side plate 118, a fourth side plate 119, and a base plate 1191. The second side plate 117 is adjacent to and connected to the first side plate 116. The second side plate 117 has a slide rail 112, and a protrusion 122 of the first end 123 of the clamping plate assembly 120 extends into the slide rail 112 of the second side plate 117. The third side plate 118 is disposed opposite to the second side plate 117 in a second direction and is connected to the first side plate 116. The third side plate 118 also has a slide rail 112, and a protrusion 122 of the second end 124 of the clamping plate assembly 120 extends into the slide rail 112 of the third side plate 118. The fourth side plate 119 is disposed opposite to the first side plate 116 in a first direction and is connected to both the second side plate 117 and the third side plate 118. The base plate 1191 is connected to the first side plate 116, the second side plate 117, the third side plate 118, and the fourth side plate 119. The first side plate 116, the second side plate 117, the third side plate 118, the fourth side plate 119, and the base plate 1191 together form an accommodating space.

[0070] For example, the fourth side plate 119 has a through hole 115, and when the sheet material 200 is received in the receiving space, the sheet material 200 is clamped by the clamping body 121 and the first side plate 116.

[0071] In the above embodiments, the vehicle body 110 with this structure is simple in structure and easy to manufacture.

[0072] In some embodiments, the bottom of the fourth side plate 119 has an observation port 1192.

[0073] In the above embodiment, by providing the observation port 1192, the situation inside the containment space can be observed, and if the sheet material 200 breaks, the fragments can be cleaned up through the observation port 1192.

[0074] In some embodiments, such as Figure 3 As shown, the cross-sectional shape of the clamp body 121 in the second direction and the third direction is a rounded rectangle, and the third direction intersects the second direction and the first direction.

[0075] For example, the second direction is perpendicular to the first direction, and the third direction is perpendicular to both the first and second directions.

[0076] In the above embodiments, by making the clamp body 121 have a smooth surface instead of a sharp outer contour (such as an angular structure), damage to the sheet material 200 can be avoided by the edge area of ​​the clamp body 121 in contact with the sheet material 200, and the friction between the clamp body 121 and the carrier body 110 can be reduced, so that the clamp assembly 120 can move more smoothly when adjusting the position of the clamp assembly 120.

[0077] Figure 6 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.

[0078] Based on the same concept, such as Figure 6 As shown in the illustration, this application also provides a processing apparatus 300, which includes a process chamber 310 and a carrier 100 as described in the above embodiments. The process chamber 310 has a process cavity, in which a magnetron sputtering coating device 311 is disposed. The magnetron sputtering coating device 311 is configured to perform magnetron sputtering coating on the cross-section 220 of the sheet material 200. The carrier 100 is disposed in the process cavity and is configured to support the sheet material 200.

[0079] In related technologies, PECVD and ALD technologies are frequently used for cross-sectional passivation of sheet materials 200. However, these two technologies have the following drawbacks. When using ALD technology for coating, firstly, because the precursor is composed of small gas molecules, it easily enters between adjacent sheet materials 200, easily leading to a coating-around phenomenon (causing the first surface 210 and the second surface of the sheet material 200 to also be coated), affecting photoelectric conversion efficiency; secondly, ALD technology is based on a self-limiting chemical reaction between the precursor and the surface of the sheet material 200, depositing only one atomic layer at a time, resulting in a relatively slow overall deposition rate and low production efficiency. In large-scale production, it may take a long time to complete the coating passivation, increasing production and time costs; thirdly, ALD equipment requires precise control of parameters such as gas flow rate, reaction time, and temperature to achieve atomic-level precision deposition. This makes the equipment structure complex, increases manufacturing costs, and requires professional technicians and incurs high expenses for maintenance and upkeep. When using PECVD technology for coating, firstly, the reactive gas can easily enter between adjacent sheet materials 200, which can easily lead to coating around the sheet material 200 (causing the first surface 210 and the second surface of the sheet material 200 to also be coated), affecting the photoelectric conversion efficiency; secondly, PECVD technology uses the energy of plasma to activate the reactive gas, and the high-energy particles in the plasma may bombard the surface of the sheet material 200, causing damage to the lattice structure of the sheet material 200 surface, increasing surface defects and minority carrier recombination centers, and affecting the performance of the battery; thirdly, although the deposition rate of PECVD is relatively fast, in some cases, the quality and stability of the film may not be as good as other coating methods, such as the film uniformity and density being less than ideal, or problems such as film delamination easily occurring in subsequent processes.

[0080] The magnetron sputtering coating method used in the above embodiments has the following advantages.

[0081] Compared with ALD technology, firstly, it can generate a complete passivation film in one go, with a faster deposition rate, and can complete cross-sectional passivation in a shorter time, improving production efficiency and meeting the high capacity requirements of industrial production; secondly, PVD equipment (magnetron sputtering coating equipment) has a simpler structure and relatively lower cost than ALD equipment; thirdly, in magnetron sputtering coating equipment, target particles typically move from top to bottom to the sheet material 200, and are deposited on the cross-section 220 of the sheet material 200 by colliding with it. The film layer has a tight adhesion and high density. Furthermore, since multiple sheet materials 200 are placed vertically in the carrier 100 and arranged sequentially along the first direction, even if the target particles enter between adjacent sheet materials 200, they are unlikely to collide with and deposit on the first surface 210 or the second surface due to their vertical movement. Therefore, there are fewer instances of coating around the target material.

[0082] Compared to PECVD technology, firstly, the adhesion between the film deposited by PECVD and the sheet material 200 may be affected by the surface properties of the sheet material 200, potentially resulting in insufficient adhesion. PVD equipment, on the other hand, deposits materials onto the sheet material 200 through a physical method, offering better compatibility with various materials and enabling the formation of robust coatings on the cross-sections 220 of different materials. Secondly, PVD technology can deposit a variety of metals, alloys, and compounds. For materials that are difficult to deposit through chemical reactions, PVD can achieve deposition through physical methods, while PECVD technology primarily relies on physical methods. Third, in typical magnetron sputtering coating equipment, target particles move from top to bottom to the sheet material 200 and are deposited on the cross-section 220 of the sheet material 200 by impacting it. The film layer has a tight adhesion and high density. Furthermore, since multiple sheet materials 200 are placed vertically in the carrier 100 and arranged sequentially along the first direction, even if the target particles enter between adjacent sheet materials 200, they are unlikely to impact and deposit on the first surface 210 or the second surface due to the vertical movement of the target particles. Therefore, the phenomenon of coating around the target material is less common.

[0083] In some embodiments, such as Figure 1 and Figure 6 As shown, the processing equipment 300 further includes a carrier plate 320. The carrier plate 320 is disposed in the process chamber and configured to support the carrier 100. The carrier plate 320 has at least one receiving opening. The carrier 100 further includes a support member 130, which is connected to the carrier body 110 of the carrier 100. The carrier body 110 passes through the receiving opening. The support member 130 can contact the upper surface of the carrier plate 320 so that the carrier plate 320 supports the carrier 100 through the support member 130.

[0084] For example, there are two support members 130, one support member 130 is connected to the first end 113 (such as the second side plate 117) of the vehicle body 110, and the other support member 130 is connected to the second end 114 (such as the third side plate 118) of the vehicle body 110.

[0085] For example, the support 130 can also be grasped by a transport device (such as a robot, mechanical gripper, etc.) to realize the transport of the vehicle 100.

[0086] In the above embodiments, by providing a receiving opening on the carrier plate 320 and having the carrier body 110 pass through the receiving opening, it is possible to prevent the carrier plate 320 from shifting during the transportation of the carrier 100 and during the coating process of the sheet material 200.

[0087] In practical applications, the sheet material 200 can be fed into the process chamber through the following steps.

[0088] The first step involves stably placing the sheet material 200 within the receiving space of the carrier body 110, ensuring that the cross-section 220 of the sheet material 200 faces the opening 111, and maintaining a uniform height for all sheet materials 200 to guarantee the uniformity and accuracy of the coating. The base plate 1191 may be provided with a suitable groove or slot to tightly conform to the contour of the sheet material 200. During placement, the sheet material 200 is fully embedded in the groove or slot to prevent displacement or tilting.

[0089] The second step is to gently fix the sheet material 200 with the clamp assembly 120 and make the clamp body 121 tightly adhere to the sheet material 200 to ensure that the sheet material 200 does not shake during the coating process.

[0090] Third, steadily lift the carrier 100 with both hands and place it on the carrier plate 320, so that the carrier body 110 passes through the receiving opening and the support member 130 contacts the upper surface of the carrier plate 320. Alternatively, the carrier 100 can be picked up and placed by a robot or other transportation device.

[0091] The fourth step is to transport the carrier 100 to the process chamber via the carrier plate 320.

[0092] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0093] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0094] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0095] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0096] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A vehicle, characterized in that, The carrier is configured to accommodate sheet material having a first surface and a second surface disposed opposite each other in a first direction, and cross-sections adjacent to the first surface and the second surface, wherein the first surface and the second surface of the adjacent sheet material are in contact, and the carrier includes: The vehicle body has a receiving space configured to receive a plurality of sheet materials arranged sequentially along a first direction. The top of the vehicle body has an opening communicating with the receiving space. When the sheet materials are received in the receiving space, the cross-section of the sheet materials faces the opening. The sidewall of the vehicle body provided in a second direction has at least one guide structure extending along the first direction. The second direction intersects the first direction. A clamping assembly having a clamping body and a movable structure connected to each other, the clamping body being disposed in the receiving space, at least a portion of the movable structure being able to extend into the guide structure and be movable along the extending direction of the guide structure, wherein when the receiving space receives the sheet material, the clamping body is able to abut against the first surface of the first sheet material.

2. The vehicle according to claim 1, characterized in that, The side wall of the vehicle body is provided with a through hole, and the through hole extends in the first direction to form a slide, which serves as the guide structure. The clamp body has at least one protrusion on the side near the side wall to serve as the movable structure.

3. The vehicle according to claim 2, characterized in that, The clamping plate assembly has a first end and a second end disposed opposite to each other along the second direction. The first end of the clamping plate assembly has at least two protrusions, and the second end of the clamping plate assembly has at least two protrusions. The vehicle body has a first end and a second end along the second direction. The side wall of the first end of the vehicle body has at least two slides arranged sequentially along a third direction, which intersects the first direction and the second direction. The side wall of the second end of the vehicle body has at least two slides arranged sequentially along the third direction. Wherein, the protrusion at the first end of the clamping plate assembly extends into the slide rail of the side wall of the first end of the vehicle body, and the protrusion at the second end of the clamping plate assembly extends into the slide rail of the side wall of the second end of the vehicle body.

4. The vehicle according to claim 2 or 3, characterized in that, The main body of the clamping plate is detachably connected to the protrusion.

5. The vehicle according to any one of claims 1 to 3, characterized in that, The vehicle body has at least one through hole extending along the first direction; The clamping plate assembly further includes: At least one screwed connector is connected to the main body of the clamping plate, and the screwed connector passes through the through hole; At least one first nut is disposed between the vehicle body and the clamp body, the first nut abuts against the vehicle body, and the first nut is screwed to the screw connector.

6. The vehicle according to claim 5, characterized in that, The clamping plate assembly also includes: At least one second nut is disposed on the side of the vehicle body away from the clamp body, the second nut is screwed to the screw connector and abuts against the vehicle body; And / or, The number of the screw connectors is at least two, the number of the first nuts is at least two, the clamp body has a vertical symmetry plane, and at least two of the screw connectors are symmetrically arranged with respect to the vertical symmetry plane.

7. The vehicle according to claim 6, characterized in that, The clamping plate assembly also includes: At least one elastic element is provided, which is connected between the screwed member and the clamp body.

8. The vehicle according to claim 2 or 3, characterized in that, The clamping plate assembly has a first end and a second end disposed opposite to each other along the second direction. The first end of the clamping plate assembly has at least one of the protrusions, and the second end of the clamping plate assembly has at least one of the protrusions. The vehicle body includes: First side panel; The second side plate is disposed adjacent to and connected to the first side plate, and the second side plate has the slide rail. The protrusion at the first end of the clamping plate assembly extends into the slide rail of the second side plate. A third side plate is disposed opposite to the second side plate in the second direction and connected to the first side plate. The third side plate has the slide rail, and the protrusion at the second end of the clamping plate assembly extends into the slide rail of the third side plate. The fourth side plate is disposed opposite to the first side plate in the first direction and is connected to the second side plate and the third side plate. The bottom of the fourth side plate has an observation port. The base plate is connected to the first side plate, the second side plate, the third side plate, and the fourth side plate; The first side plate, the second side plate, the third side plate, the fourth side plate, and the bottom plate together form the accommodating space.

9. A processing device, characterized in that, include: The process chamber has a process cavity, and the process cavity is equipped with a magnetron sputtering coating device, which is configured to perform magnetron sputtering coating on the cross-section of a sheet material. At least one carrier according to any one of claims 1 to 8 is disposed in the process chamber, the carrier being configured to carry the sheet material.

10. The processing equipment according to claim 9, characterized in that, Also includes: A carrier plate, disposed in the process chamber, is configured to carry the carrier, and the carrier plate has at least one receiving opening; The vehicle also includes: A support member is connected to the vehicle body of the vehicle, the vehicle body passing through the receiving opening, and the support member is able to contact the upper surface of the carrier plate so that the carrier plate supports the vehicle through the support member.

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