An in-line vacuum sintering furnace

Abstract

This utility model relates to the field of vacuum sintering furnace technology, and discloses an online vacuum sintering furnace, comprising a first gate valve, a second gate valve, a vacuum chamber, a lower heating tube, a heating plate, multiple gas tubes, and a gas plate. The first gate valve is located at the inlet end of the vacuum chamber, and the second gate valve is located at the outlet end of the vacuum chamber. The heating plate is disposed inside the vacuum chamber. The gas plate is located on the opposite side of the top of the upper cavity of the vacuum chamber. The lower heating tube is disposed inside the lower cavity of the vacuum chamber. One end of each gas tube is located inside the vacuum furnace, and the other end of each gas tube is located on the gas plate. This design offers low cost and improves the atmosphere uniformity of the vacuum furnace.

Description

Technical Field

[0001] This utility model relates to the field of vacuum sintering furnace technology, and in particular to an online vacuum sintering furnace. Background Technology

[0002] Vacuum gate valves are used to isolate vacuum pipelines and block airflow; they are important vacuum components. Semiconductor chip packaging requires a vacuum environment, typically achieved using a vacuum reflow oven. Existing vacuum reflow ovens have multiple temperature zones: a preheating zone, a soldering zone, and a cooling zone. The preheating zone uses nitrogen protection, but is not a completely oxygen-free environment; the soldering zone is a vacuum environment. After soldering, the door connecting the soldering and cooling zones opens, allowing the chip to move from the soldering zone to the cooling zone. Simultaneously, the door connecting the soldering and preheating zones opens, sending the preheated chip into the soldering zone for soldering. This means that the doors to the soldering zone must open simultaneously between the completion of one soldering cycle and the start of the next, disrupting the vacuum environment of the soldering zone. Furthermore, existing vacuum sintering furnaces are costly and have low atmosphere uniformity. Summary of the Invention

[0003] This invention provides an online vacuum sintering furnace to solve the problems of high cost and low atmosphere uniformity in existing online vacuum sintering furnaces.

[0004] This utility model provides an online vacuum sintering furnace, including a first gate valve, a second gate valve, a vacuum chamber, a lower heating tube, a heating plate, multiple gas tubes, and a gas plate; the first gate valve is provided at the inlet end of the vacuum chamber, the second gate valve is provided at the outlet end of the vacuum chamber, the heating plate is provided inside the vacuum chamber, the gas plate is provided on the opposite side of the top of the upper cavity of the vacuum chamber, the lower heating tube is provided inside the lower cavity of the vacuum chamber, one end of the gas tube is provided inside the vacuum chamber, and the other end of the gas tube is provided on the gas plate.

[0005] The online vacuum sintering furnace according to this utility model further includes a positive pressure plate and a locking mechanism; the positive pressure plate is symmetrically arranged on the top of the upper cavity of the vacuum chamber, and the locking mechanism is arranged at both ends of the positive pressure plate.

[0006] According to the online vacuum sintering furnace of this utility model, the vacuum chamber further includes a lower chamber and a lifting mechanism. The lower chamber is disposed below the upper chamber and forms a sealed vacuum chamber, and the lifting mechanism is disposed below the lower chamber.

[0007] According to the online vacuum sintering furnace of this utility model, a power wheel and a guide wheel are provided on both sides of the lower cavity.

[0008] According to the online vacuum sintering furnace of this utility model, a transmission mechanism is provided on both sides of the lower cavity, and the transmission mechanism drives the power wheel. The transmission mechanism is a gear, belt or chain.

[0009] According to the online vacuum sintering furnace of this utility model, the lower cavity further includes a lower cavity frame, at least one limiting mechanism, and a heat dissipation water tank; the limiting mechanism is provided on both sides inside the lower cavity frame, and the heat dissipation water tank is provided around the outside of the lower cavity frame.

[0010] The online vacuum sintering furnace according to this utility model also includes a stop mechanism, which is provided below the outlet end of the lower cavity.

[0011] According to the online vacuum sintering furnace of this utility model, the upper cavity further includes an observation mechanism, an observation mechanism mounting plate, and an observation window; the observation window and the observation mechanism mounting plate are provided on the top of the upper cavity, and the observation mechanism is mounted on the observation mechanism mounting plate.

[0012] According to the online vacuum sintering furnace of this utility model, the vacuum chamber is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece preheating stage, welding stage, and cooling stage.

[0013] The uniform arrangement of nitrogen plates and multiple nitrogen pipes improves the atmosphere uniformity of the vacuum furnace, such as in formic acid or nitrogen atmospheres. It achieves three-dimensional nitrogen scavenging within the furnace space, avoiding dead zones caused by a single inlet. Especially for processes in formic acid environments, it prevents the accumulation of formic acid decomposition products, ensuring that all workpieces are in a consistent protective atmosphere, thus improving product quality uniformity.

[0014] Independent nitrogen gas plates can control the flow rate in different zones via valves, adapting to the varying needs of nitrogen flow rate at different process stages.

[0015] The symmetrical positive pressure plate and handwheel locking improve the sealing reliability, ensure that the contact surface between the upper and lower chambers is subjected to uniform force, and avoid deformation or leakage of the sealing surface caused by single-point or asymmetrical compression, thereby stabilizing the vacuum degree inside the furnace and maintaining a slight positive pressure. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the main structure of an online formic acid vacuum furnace;

[0018] Figure 2 This is a three-dimensional structural diagram of a vacuum cavity;

[0019] Figure 3 This is a magnified view of the structure of part A.

[0020] Figure 4 This is a cross-sectional view and structural schematic diagram of a vacuum cavity;

[0021] Figure 5 This is a three-dimensional structural diagram of the lower cavity;

[0022] Reference numerals: 1. First slide gate valve; 2. Second slide gate valve; 3. Vacuum chamber; 4. Stop mechanism; 31. Lifting mechanism; 32. Upper chamber; 33. Lower chamber; 321. Gas plate; 322. Observation mechanism mounting plate; 323. Positive pressure plate; 324. Upper heating tube; 325. Observation window; 331. Heating plate; 332. Lower chamber frame; 333. Cooling water tank; 334. Limiting mechanism; 335. Power wheel; 336. Guide wheel; 337. Handwheel; 338. Lower heating tube. Detailed Implementation

[0023] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0024] In the description of the embodiments of this utility model, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0025] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.

[0026] In this embodiment of the utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0027] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0028] The following is combined Figure 1-5 This invention describes an online vacuum sintering furnace according to an embodiment of the present invention, comprising a first baffle valve 1, a second baffle valve 2, a vacuum chamber 3, a lower heating tube 338, a heating plate 331, multiple gas tubes, and a gas plate 321. The gas plate 321 is preferably filled with nitrogen or formic acid. The first baffle valve 1 is located at the inlet end of the vacuum chamber 3, and the second baffle valve 2 is located at the outlet end of the vacuum chamber 3. The heating plate 331 is disposed inside the vacuum chamber 3. The gas plate 321 is disposed on the opposite side of the top of the upper chamber 32 of the vacuum chamber 3. The lower heating tube 338 is disposed inside the lower chamber 33 of the vacuum chamber 3. One end of each gas tube is disposed inside the vacuum chamber 3, and the other end is disposed on the gas plate 321. The upper heating tube 324 is disposed inside the upper chamber 32.

[0029] In some embodiments, the system further includes a positive pressure plate 323 and a locking mechanism 337; the locking mechanism 337 is preferably a handwheel, the positive pressure plate 323 is symmetrically arranged on the top of the upper cavity 32 of the vacuum cavity 3, and the locking mechanism 337 is arranged at both ends of the positive pressure plate 323.

[0030] In some embodiments, the vacuum chamber 3 further includes a lower chamber 33 and a lifting mechanism 31. The lower chamber 33 is disposed below the upper chamber 32 and forms a sealed vacuum chamber 3, and the lifting mechanism 31 is disposed below the lower chamber 33.

[0031] In some embodiments, a power wheel 335 and a guide wheel 336 are provided on both sides inside the lower cavity 33.

[0032] In some embodiments, a transmission mechanism is provided on both sides of the lower cavity 33, and the transmission mechanism drives the power wheel 335. The transmission mechanism is a gear, belt or chain.

[0033] In some embodiments, the lower cavity 33 further includes a lower cavity frame 332, at least one limiting mechanism 334, and a heat dissipation water tank 333; the limiting mechanism 334 is provided on both sides inside the lower cavity frame 332, and the heat dissipation water tank 333 is provided around the outside of the lower cavity frame 332.

[0034] In some embodiments, a stop mechanism 4 is also included, which is disposed below the outlet end of the lower cavity 33.

[0035] In some embodiments, the upper cavity 32 further includes an observation mechanism, an observation mechanism mounting plate 322, and an observation window 325; the top of the upper cavity 32 is provided with an observation window 325 and an observation mechanism mounting plate 322, and the observation mechanism is disposed on the observation mechanism mounting plate 322.

[0036] In some embodiments, the vacuum chamber 3 is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece preheating stage, the welding stage, and the cooling stage.

[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. An online vacuum sintering furnace, characterized in that, It includes a first gate valve, a second gate valve, a vacuum chamber, a lower heating tube, a heating plate, multiple gas tubes, and a gas plate; the first gate valve is provided at the inlet end of the vacuum chamber, the second gate valve is provided at the outlet end of the vacuum chamber, the heating plate is provided inside the vacuum chamber, the gas plate is provided on the opposite side of the top of the upper cavity of the vacuum chamber, the lower heating tube is provided inside the lower cavity of the vacuum chamber, one end of the gas tube is provided inside the vacuum chamber, and the other end of the gas tube is provided on the gas plate.

2. The online vacuum sintering furnace according to claim 1, characterized in that, It also includes a positive pressure plate and a locking mechanism; the positive pressure plate is symmetrically arranged at the top of the upper cavity of the vacuum cavity, and the locking mechanism is arranged at both ends of the positive pressure plate.

3. The online vacuum sintering furnace according to claim 1, characterized in that, The vacuum chamber also includes a lower chamber and a lifting mechanism. The lower chamber is located below the upper chamber and forms a sealed vacuum chamber. The lifting mechanism is located below the lower chamber.

4. The online vacuum sintering furnace according to claim 3, characterized in that, The lower cavity has a power wheel and a guide wheel on both sides.

5. The online vacuum sintering furnace according to claim 4, characterized in that, The lower cavity is provided with a transmission mechanism on both sides of its exterior. The transmission mechanism drives the power wheel. The transmission mechanism is a gear, belt or chain.

6. The online vacuum sintering furnace according to claim 3, characterized in that, The lower cavity also includes a lower cavity frame, at least one limiting mechanism, and a heat dissipation water tank; the limiting mechanism is provided on both sides inside the lower cavity frame, and the heat dissipation water tank is provided around the outside of the lower cavity frame.

7. The online vacuum sintering furnace according to claim 3, characterized in that, It also includes a stop mechanism, which is provided below the outlet end of the lower cavity.

8. The online vacuum sintering furnace according to claim 1, characterized in that, The upper cavity also includes an observation mechanism, an observation mechanism mounting plate, and an observation window; the observation window and the observation mechanism mounting plate are provided on the top of the upper cavity, and the observation mechanism is mounted on the observation mechanism mounting plate.

9. The online vacuum sintering furnace according to claim 1, characterized in that, The vacuum chamber is used to provide a vacuum environment, an inert gas environment, or a reducing gas environment during the workpiece preheating, welding, and cooling stages.

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