Holding jig

Abstract

This invention provides a new holding jig that can securely hold a hob cutter inside a vacuum chamber and suppress wear on the rake face caused by plasma. [Solution] A holding jig for holding a hob cutter, which is cylindrical in shape and has a cutting blade with a rake face formed along its axial direction on its outer circumference, in a vacuum vessel that generates plasma, comprising: a columnar pole member through which the hob cutter is inserted; a pair of flange members inserted into the pole member so as to sandwich the hob cutter from both sides along its axial direction; a mask plate attached to the pair of flange members to cover the rake face and protect it from the plasma; and a fixing mechanism for fixing the pair of flange members to the pole member while the mask plate is positioned relative to the rake face.

Description

Technical Field

[0001] The present invention relates to a holding jig for holding a hob cutter inside a vacuum vessel.

Background Art

[0002] Conventionally, by applying a coating treatment to the surface of a base material made of tool steel or cemented carbide, in addition to the inherent properties of the base material, properties such as wear resistance and heat resistance are further imparted. There are so-called coated tools or coated tools. As such tools are used, the coating formed on the surface wears or peels off, reaching the end of its life. Conventionally, such used tools are often discarded without being reused as they are, but in recent years, the coating on the surface of used tools is carefully removed (demembraned) and then recoated to be recycled.

[0003] As a device for removing the coating on the surface of a tool using plasma, for example, the coating removal device shown in Patent Document 1 is known. This coating removal device firmly holds and fixes the tool, which is the object to be processed, using a dedicated holding jig on a disk-shaped stage installed inside a vacuum vessel, introduces argon gas into the vacuum vessel, and generates inductively coupled plasma in the vacuum chamber by an antenna installed outside the vacuum vessel, and applies a bias voltage to the stage to make positive ions in the plasma incident on the coating on the surface of the drill for demembraning.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] When removing coatings from hob cutters using plasma treatment with the coating removal device described above, the heavily worn rake face is repolished as a pretreatment before the plasma treatment. Therefore, during plasma treatment, the rake face is in a state where the base material is exposed, and the rake face is preferentially worn down.

[0006] The present invention was made to solve these problems, and its main objective is to provide a new holding jig that can securely hold a hob cutter in a vacuum chamber and suppress wear of the rake face due to plasma. [Means for solving the problem]

[0007] In other words, the holding jig according to the present invention is a holding jig for holding a hob cutter, which is cylindrical in shape and has a cutting blade with a rake face formed along its axial direction on its outer circumference, in a vacuum vessel that generates plasma, and is characterized by comprising: a columnar pole member through which the hob cutter is inserted; a pair of flange members inserted into the pole member so as to sandwich the hob cutter from both sides along its axial direction; a mask plate attached to the pair of flange members to cover the rake face and protect it from the plasma; and a fixing mechanism for fixing the pair of flange members to the pole member while the mask plate is positioned relative to the rake face.

[0008] With this configuration, the hob cutter inserted through the pole member is sandwiched between flange members on both sides and fixed with a fixing mechanism, thereby securely fixing the hob cutter inside the vacuum chamber. Moreover, since the flange member to which the mask plate is attached can be fixed to the pole member while the mask plate is positioned relative to the rake face, misalignment of the mask plate relative to the rake face can be prevented, and wear of the rake face due to plasma can be suppressed.

[0009] Furthermore, a specific embodiment of the holding jig is one in which the fixing mechanism comprises a through-screw hole formed from the outer circumferential surface to the inner circumferential surface of the flange member, and a screw member attached to the through-screw hole, and the flange member is fixed to the pole member by rotating the screw member in a screwing motion and pressing its tip against the outer surface of the pole member. In this way, the flange member can be firmly brought into contact with the pole member by screwing in the screw member, effectively preventing misalignment of the mask plate relative to the rake face and more effectively suppressing wear on the rake face.

[0010] Furthermore, the holding jig has a keyway formed on the inner circumferential surface of the hob cutter that extends along the axial direction, a projection corresponding to the keyway formed on the outer surface of the pole member that extends along the axial direction, and a recessed groove corresponding to the projection formed on the inner circumferential surface of the flange member that extends along the axial direction, preferably with the width of the recessed groove being wider than the width of the keyway. In this way, the flange member has a greater rotational margin than the hob cutter. By inserting the hob cutter and flange member into the pole member and attaching the mask plate to the flange member, the flange member can be rotated to firmly press the mask plate against the rake face. By fixing the flange member to the pole member in this state, the gap between the mask plate and the rake face can be minimized, further suppressing wear on the rake face.

[0011] Furthermore, in a specific embodiment of the holding jig, it is preferable that the flange member is inserted into the pole member with the position of the groove aligned with the position of the protrusion, and the through screw hole is formed to intersect the protrusion, and the flange member is fixed to the pole member by rotating the screw member to screw it in and pressing its tip against the side surface of the protrusion. In this way, the flange member can be rotated by screwing in the screw member, which allows the mask plate to be tightly pressed against the rake face, further reducing the gap between the mask plate and the rake face.

[0012] Furthermore, the holding jig has a pair of flanges into which slits are formed along the axial direction into which the ends of the mask plate are inserted, and it is preferable that a plurality of such slits are formed along the circumferential direction. In this way, by attaching multiple mask plates to a pair of holding jigs, the multiple scooping surfaces of the hob cutter can be shielded together.

[0013] Furthermore, it is preferable that the holding jig includes a covering portion of the mask plate that is formed to match the shape of the scooping surface. In this way, the shape of the mask plate and the rake face match, allowing the rake face and cutting edge to be shielded while the flank face is fully exposed to the plasma. This effectively suppresses wear on the rake face and cutting edge while thoroughly removing the coating from the flank face. [Effects of the Invention]

[0014] According to the present invention configured in this manner, it is possible to provide a new holding jig that can securely hold a hob cutter in a vacuum container and suppress wear of the rake face due to plasma. [Brief explanation of the drawing]

[0015] [Figure 1] A schematic diagram showing the configuration of a coating removal device according to one embodiment of the present invention. [Figure 2] This diagram schematically shows the configuration of the hob cutter, which is the workpiece to be processed in this embodiment. [Figure 3] This diagram schematically shows the state in which the hob cutter is held using the holding jig of the same embodiment. [Figure 4] This diagram schematically shows the state of the holding jig of the same embodiment before assembly. [Figure 5] A diagram for explaining the shapes of the mask plate of the holding jig and the rake face of the hob cutter according to the same embodiment. [Figure 6] A plan view of the hob cutter held by the holding jig according to the same embodiment as viewed axially. [Figure 7] A cross-sectional view of the hob cutter held by the holding jig according to the same embodiment. [Figure 8] A cross-sectional view showing the configuration of the fixing mechanism of the holding jig according to the same embodiment. [Figure 9] A diagram schematically showing a state in which a hob cutter is held using a holding jig of another embodiment. [Figure 10] A diagram schematically showing a state before assembly of the holding jig according to the same embodiment. [Figure 11] A plan view of the hob cutter held by the holding jig according to the same embodiment as viewed axially. [Figure 12] A cross-sectional view of the hob cutter held by the holding jig according to the same embodiment. [Figure 13] A cross-sectional view showing the configuration of the fixing mechanism of the holding jig according to the same embodiment. [Figure 14] A diagram schematically showing a state in which a hob cutter is held using a holding jig of another embodiment. [Figure 15] A diagram schematically showing a state before assembly of the holding jig according to the same embodiment. [Figure 16] A plan view of the hob cutter held by the holding jig according to the same embodiment as viewed axially. [Figure 17] A cross-sectional view of the hob cutter held by the holding jig according to the same embodiment. [Figure 18] A cross-sectional view showing the configuration of the fixing mechanism of the holding jig according to the same embodiment.

Mode for Carrying Out the Invention

[0016] Hereinafter, a holding jig 100 according to an embodiment of the present invention will be described with reference to the drawings.

[0017] <Device Configuration> The holding jig 100 of this embodiment is used in a coating removal device 300 that removes a coating formed on the surface of a hob cutter 200 by plasma treatment using inductively coupled plasma.

[0018] Specifically, as shown in Figure 1, the coating removal apparatus 300 comprises a vacuum vessel V forming a processing chamber S into which a gas is introduced and which is evacuated by vacuum, an antenna A provided outside the vacuum vessel V, and a high-frequency power supply P1 for applying high frequency to antenna A. In this configuration, by applying high frequency from the high-frequency power supply P1 to antenna A, a high-frequency current flows through antenna A, an induced electric field is generated inside the vacuum vessel V, and an inductively coupled plasma is produced. In this embodiment, the plasma source is composed of antenna A and the high-frequency power supply P1 for applying high frequency to it.

[0019] First, let me explain the hob cutter 200, which is the target of the plasma treatment. The Hob Cutter 200 is what is known as a coated tool or coated tool, and it has a coating (also called a coating film) formed on the surface of a base material made of tool steel or cemented carbide, for example.

[0020] The hob cutter 200 is a general type, as shown in Figure 2, and has a cylindrical shape with a cutting blade CE on its outer circumference that has a rake face RF formed along its axial direction. In the hob cutter 200 of this embodiment, the rake face RF is formed to be substantially parallel to the axial direction and substantially parallel to the radial direction. Multiple rows of these cutting blades CE are provided at intervals along the rotational direction of the hob cutter 200. A mounting hole MH for attachment to a hob shaft is formed in the center of the hob cutter 200 along its axial direction. This mounting hole is a through hole formed from the top surface to the bottom surface of the hob cutter 200. A keyway KW is formed straight along the axial direction on the inner circumferential surface of the hob cutter 200 to prevent displacement in the rotational direction after attachment to the hob shaft.

[0021] Next, we will describe the various parts of the coating removal device 300. As shown in Figure 1, antenna A is positioned to face the side wall of the vacuum vessel V. In this embodiment, two antennas A are provided facing each of a pair of opposing side walls of the vacuum vessel V, but the number of antennas A is not limited to one or three or more. In this embodiment, antenna A is rod-shaped and is positioned vertically along the axial direction (up and down direction) of the vacuum vessel V.

[0022] Antenna A has one end, the feed end, connected to a high-frequency power supply P1 via a matching circuit C, and the other end, the termination end, is directly grounded. The termination end may also be grounded via a capacitor or coil.

[0023] The high-frequency power supply P1 can supply high-frequency current to antenna A via a matching circuit C. The high-frequency frequency is, for example, a common 13.56 MHz, but is not limited to this and may be changed as appropriate.

[0024] The coating removal device 300 has a magnetic field transmission window W that allows the magnetic field generated from antenna A to pass through. Specifically, the coating removal device 300 is equipped with a dielectric plate that closes an opening formed in the wall of the vacuum container V from the outside of the vacuum container V, and this dielectric plate forms the magnetic field transmission window W.

[0025] The coating removal device 300 is equipped with a turntable R near the lower wall of the vacuum chamber V for rotating the hob cutter 200, which is the object to be processed, inside the vacuum chamber V. Multiple hob cutters 200 are set on the upper surface of the turntable R. The coating removal device 300 is also equipped with a bias power supply P2 for applying a bias voltage to the turntable R. The bias voltage is, for example, a negative DC voltage, but is not limited to this. This bias voltage allows control of the energy of positive ions in the plasma when they are incident on the coating on the surface of the hob cutter 200, thereby controlling the coating removal speed.

[0026] With this configuration, when a high frequency is applied from the high-frequency power supply P1 to antenna A, the high-frequency magnetic field generated from antenna A passes through the magnetic field transmission window W and is formed (supplied) inside the vacuum vessel V. This generates an induced electric field in the space inside the vacuum vessel V, creating an inductively coupled plasma. Then, by applying a bias voltage to the rotating table R, positive ions in the plasma are incident on the coating on the surface of the hob cutter 200, thereby removing the coating formed on the surface of the hob cutter 200.

[0027] In this embodiment, the hob cutter 200 is installed and held inside the vacuum container V (specifically on the upper surface of the rotating table R) using a dedicated holding jig 100.

[0028] Specifically, as shown in Figures 3 to 8, the holding jig 100 comprises a columnar pole member 1 through which the hob cutter 200 is inserted, a pair of flange members 2 inserted through the pole member 1 and sandwiching the hob cutter 200 from both sides along the axial direction, and a mask plate 3 attached to the pair of flange members 2 and covering the rake face RF to protect it from plasma. Using this holding jig 100, the hob cutter 200 is held in the vacuum vessel V with its axial direction aligned with the vertical direction.

[0029] The pole member 1 has a circular cross-section, and its outer diameter is approximately the same as the inner diameter of the hob cutter 200. The pole member 1 is set upright on the upper surface of the turntable R.

[0030] The flange member 2 is roughly disc-shaped, and a mounting hole 21 for attaching it to the pole member 1 is formed in its center along the axial direction. The inner diameter of the mounting hole 21 is approximately the same as the outer diameter of the pole member 1.

[0031] The flange member 2 is composed of multiple parts with different outer diameters, and in this embodiment, it is composed of a large-diameter section 2A with a relatively larger diameter and a small-diameter section 2B with a relatively smaller diameter. Both the large-diameter section 2A and the small-diameter section 2B are disc-shaped and are formed integrally and continuously along the axial direction. The pair of flange members 2 are inserted into the pole member 1 so that their large-diameter sections 2A face each other. The surface of the large-diameter section 2A functions as a pressing surface 22 that presses the end face SU of the hob cutter 200 in the axial direction, and the hob cutter 200 is pressed from both sides in the axial direction by the respective pressing surfaces 22 of the pair of large-diameter sections 2A.

[0032] A slit 2s is formed on the circumferential surface 23 of each flange member 2, into which the end portion 31 of the mask plate 3 is inserted. This slit 2s is formed on the circumferential surface 23 of the large-diameter portion 2A of the flange member 2, parallel to the axial direction, and having a constant depth in the radial direction. Multiple slits 2s are formed at approximately equal intervals along the circumferential direction. The spacing between each slit 2s is the same as the spacing between each rake face RF formed on the hob cutter 200.

[0033] As shown in Figure 5, the mask plate 3 is a long, plate-like structure with a certain thickness, and is mounted so as to straddle the pair of flange members 2. Both ends 31 of the mask plate 3 are inserted into the respective slits 2s of the pair of flange members 2 and are fixed in place by a mounting mechanism 4, which will be described later. A shielding portion 32 is formed in the central region of the mask plate 3 in the longitudinal direction, which shields the rake face RF. The plate surface of this shielding portion 32 functions as a shielding surface and has approximately the same dimensions and shape as the rake face RF.

[0034] The holding jig 100 also includes a mounting mechanism 4 for attaching the mask plate 3 to a pair of flange members 2. This mounting mechanism 4 consists of bolt holes formed in the circumferential surface 23 and bolts that are screwed into the bolt holes and move back and forth. The bolt holes have one end opening to the circumferential surface 23 and the other end opening to the slit 2s, and are formed to be perpendicular to the axial direction and torsion with respect to the axial direction. The mask plate 3 can be fixed by inserting the end 31 of the mask plate 3 into the slit 2s plate and then screwing the bolts into the bolt holes and pressing them against the surface of the end 31 of the mask plate 3. The mounting mechanism 4 is provided corresponding to each of the multiple slits 2s.

[0035] The holding jig 100 is equipped with a fixing mechanism 5 that fixes a pair of flange members 2 to the pole member 1 while the mask plate 3 is positioned relative to the scoop surface RF.

[0036] This fixing mechanism 5 comprises a through-screw hole 51 formed from the outer circumferential surface 23 to the inner circumferential surface of the flange member 2 (specifically the small-diameter portion 2B), and a screw member 52 attached to the through-screw hole 51. By rotating the screw member 52 to screw it in and pressing its tip against the outer surface 1s of the pole member 1, the flange member 2 is fixed to the pole member 1. In this embodiment, the through-screw hole 51 is formed to extend straight along the radial direction. Such a fixing mechanism 5 is provided on both of the pair of flange members 2.

[0037] By rotating the pair of flange members 2 to which the mask plate 3 is attached relative to the hob cutter 200, and with the shielding surface of the mask plate 3 in contact with the scoop face RF, the screw member 52 of the fixing mechanism 5 is screwed in and brought into contact with the outer surface 1s of the pole member 1, thereby fixing the pair of flange members 2 to the pole member 1 while positioning the mask plate 3 with respect to the scoop face RF.

[0038] <Effects of this embodiment> With the holding jig 100 of this embodiment configured in this way, the hob cutter 200 inserted through the pole member 1 is sandwiched between the flange members 2 from both sides and fixed with the fixing mechanism 5, thereby securely fixing the hob cutter 200 inside the vacuum chamber. Moreover, since the flange member 2 to which the mask plate 3 is attached can be fixed to the pole member 1 while the mask plate 3 is positioned relative to the rake face RF, misalignment of the mask plate 3 relative to the rake face RF is prevented, and wear of the rake face RF due to plasma can be suppressed.

[0039] <Other modified embodiments> However, the present invention is not limited to the embodiments described above.

[0040] For example, in other embodiments of the holding jig 100, as shown in Figures 9 to 13, a projection 1p corresponding to the keyway KW of the hob cutter 200 may be formed along the axial direction on the outer surface 1s of the pole member 1. Furthermore, a groove 2v corresponding to the projection 1p of the pole member 1 may be formed along the axial direction on the inner circumferential surface of the flange member 2. The hob cutter 200 may be inserted into the pole member 1 with its keyway KW aligned with the projection 1p, and the flange member 2 may be inserted into the pole member 1 with its groove 2v aligned with the projection 1p.

[0041] In this case, it is preferable that the groove 2v formed in the flange member 2 is wider than the keyway KW of the hob cutter 200. That is, it is preferable that the width of the groove 2v is set such that the flange member 2 has a greater rotational margin than the hob cutter 200 when inserted through the pole member 1.

[0042] Furthermore, in the holding jig 100 of the above embodiment, the through-screw hole 51 provided in the fixing mechanism 5 was formed to extend straight along the radial direction, but this is not limited to this. In the holding jig 100 of other embodiments, as shown in Figures 14 to 18, the through-screw hole 51 provided in the fixing mechanism 5 may be formed to be perpendicular to the axial direction and to be twisted with respect to the axial direction. More specifically, when the flange member 2 is inserted into the pole member 1 with its groove 2v aligned with the protrusion 1p, the through-screw hole 51 may be formed to intersect the protrusion 1p of the pole member 1. More specifically, the through-screw hole 51 may be formed so that one end opens to the circumferential surface 23 of the flange member 2 (specifically the small diameter portion 2B) and the other end opens to the groove 2v.

[0043] In a holding member with this configuration, the hob cutter 200 and a pair of flange members 2 are inserted into the pole member 1 to set the mask plate 3. When the screw member 52 of the fixing mechanism 5 is screwed in in this state, the tip of the screw member 52 comes into contact with the side surface of the protrusion 1p of the pole member 1, causing the pair of flange members 2 and the mask plate 3 to rotate, and the shielding surface of the mask plate 3 is pressed against the scoop face RF.

[0044] Furthermore, although the holding jig 100 in the above embodiment held one hob cutter 200, it is not limited to this, and may hold multiple hob cutters 200 connected to the pole member 1 together. This can improve the productivity of film removal.

[0045] Furthermore, it goes without saying that the present invention is not limited to the embodiments described above, and various modifications are possible without departing from its spirit. [Explanation of Symbols]

[0046] V...Vacuum container 100... Holding fixture 1. Pole component 2. Flange member 2s ···Slit 3 ···Mask board 5...Fixing mechanism 200... Hob cutter RF ···Scoop surface

Claims

1. A holding jig for holding a hob cutter, which has a cylindrical shape and a cutting blade with a rake face formed along its axial direction on its outer circumference, within a vacuum chamber that generates plasma, A columnar pole member through which the hob cutter is inserted, A pair of flange members are inserted into the pole member so as to sandwich the hob cutter from both sides along the axial direction, A mask plate attached to the pair of flange members, covering the scoop surface and protecting it from the plasma, A holding jig comprising a fixing mechanism for fixing the pair of flange members to the pole member while the mask plate is positioned with respect to the scooping surface.

2. The aforementioned fixing mechanism The through-screw hole formed extending from the outer circumferential surface to the inner circumferential surface of the flange member, The system comprises a screw member attached to the aforementioned through-hole, The holding jig according to claim 1, wherein the flange member is fixed to the pole member by rotating the screw member so as to screw it in and pressing its tip against the outer surface of the pole member.

3. A keyway extending along the axial direction is formed on the inner circumferential surface of the hob cutter. A projection corresponding to the keyway is formed along the axial direction on the outer surface of the pole member. A groove corresponding to the protrusion is formed along the axial direction on the inner circumferential surface of the flange member. The retaining jig according to claim 2, wherein the width of the groove is wider than the width of the keyway.

4. With the flange member inserted into the pole member such that the position of the groove aligns with the position of the protrusion, the through-screw hole is formed to intersect the protrusion. The retaining jig according to claim 3, wherein the flange member is fixed to the pole member by rotating the screw member so as to screw it in and pressing its tip against the side surface of the protrusion.

5. The pair of flanges have slits formed along the axial direction into which the ends of the mask plate are inserted. The holding jig according to claim 1, wherein a plurality of slits are formed along the circumferential direction.

6. The holding jig according to claim 5, wherein the mask plate has a covering portion formed to match the shape of the scooping surface.

Images