A shutter mounting structure and a coating equipment

Abstract

This utility model provides a mask mounting structure and coating equipment, belonging to the technical field of semiconductor manufacturing equipment. The mask mounting structure includes: multiple mask parts, which are spliced ​​together to form a circumferentially closed mask; a first buckle, which is disposed on the outer side of the mask parts and has a downwardly protruding engagement protrusion; and a second buckle, which is an insulating structure and disposed on the side wall of a vacuum chamber and has an upwardly protruding engagement protrusion. The mask parts are engaged downwards with the engagement protrusions via the engagement protrusions. By using multiple mask parts spliced ​​together to form a circumferential mask, the volume of each mask part is greatly reduced, facilitating production and reducing production costs. Simultaneously, the use of the first and second buckles for engagement of the mask parts facilitates disassembly and installation, reducing the difficulty of assembly and disassembly.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a mask mounting structure and coating equipment. Background Technology

[0002] Magnetron sputtering, as a highly efficient thin film deposition technology, is widely used in vacuum coating industries such as semiconductors and photovoltaics. Magnetron sputtering works by the interaction of an electric field and a magnetic field. Electrons, accelerated by the electric field, collide with argon atoms as they fly towards the substrate, ionizing into a large number of argon ions and electrons. The electrons then fly towards the substrate. The argon ions, accelerated by the electric field, bombard the target material, sputtering out a large number of target atoms and ions, which are then deposited on the substrate to form a film.

[0003] In the coating environment, target ions adhere to surrounding objects, accumulating over time. When adhesion weakens, large clumps detach, contaminating the coating environment. Existing technologies address this by placing removable baffles around the coating environment of the vacuum chamber, replacing them periodically. These baffles undergo surface roughening treatments such as sandblasting, aluminum spraying, surface embossing, and machining to improve adhesion. However, in these existing technologies, the baffles are integral structures, resulting in high manufacturing costs and complex assembly / disassembly. Utility Model Content

[0004] The present invention aims to at least solve one of the aforementioned technical problems existing in the prior art. To this end, in a first aspect, the present invention provides a shield mounting structure that can solve the problems of high processing costs and difficult assembly / disassembly of integrated structures.

[0005] Secondly, this utility model provides a coating equipment that applies the above-mentioned shielding mounting structure.

[0006] The cover mounting structure according to the first aspect of the present invention includes:

[0007] Multiple baffle sections are joined together to form a circumferentially closed baffle.

[0008] A first buckle is provided on the outer side of the cover plate portion, and the first buckle is provided with a downwardly protruding fastening protrusion;

[0009] The second latch is an insulating structure and is disposed on the side wall of the vacuum chamber. The second latch is provided with an upwardly protruding latching protrusion.

[0010] The cover portion is engaged downwards with the engaging protrusion via the fastening protrusion.

[0011] The shield mounting structure according to the embodiment of this utility model has at least the following beneficial effects:

[0012] The baffle mounting structure in this embodiment uses multiple baffle sections spliced ​​together to form a ring of baffles. The volume of each baffle section is greatly reduced, which facilitates manufacturing and reduces production costs. At the same time, the baffle sections are connected by a first buckle and a second buckle, which facilitates disassembly and installation and reduces the difficulty of assembly and disassembly.

[0013] According to some embodiments of the present invention, the first buckle is provided with a plurality of the fastening protrusions along the vertical direction, and the second buckle is provided with a plurality of the engaging protrusions corresponding to the fastening protrusions.

[0014] According to some embodiments of this utility model, along the vertical direction, a space is provided between two adjacent snap-fit ​​protrusions for the snap-fit ​​protrusion to enter and exit.

[0015] According to some embodiments of this utility model, an installation screw is provided between the tops of the first buckle and the second buckle.

[0016] According to some embodiments of this utility model, the height of the cover portion is higher than that of the mounting screw.

[0017] According to some embodiments of the present invention, the cover plate portion is provided with an embedding recess, and the first buckle is at least partially embedded in the embedding recess.

[0018] According to some embodiments of the present invention, the plurality of shielding parts include a plurality of side shields and a plurality of corner shields. The corner shields are located between two adjacent side shields and are spliced ​​together to form the shields. The corner shields and the side shields are respectively connected to the vacuum cavity.

[0019] According to some embodiments of the present invention, the shield mounting structure further includes a corner insulating part, the corner insulating part is disposed on the side wall of the vacuum cavity, the corner shield is connected to the corner insulating part, the side shield is provided with the first buckle, and the second buckle is engaged through the first buckle.

[0020] According to some embodiments of this utility model, the fitting gap between the side cover and the corner cover is t, the fitting length between the side cover and the corner cover along the length direction of the side cover is s, and the cover installation structure satisfies s / t>10.

[0021] The coating apparatus according to a second aspect of the present invention includes the shield mounting structure of any of the above embodiments.

[0022] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and some of these additional aspects and advantages will become apparent from the description or may be learned by practice of the invention. Attached Figure Description

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0024] Figure 1 This is a schematic diagram of an overall structure of the shield mounting structure in this utility model;

[0025] Figure 2 This is a schematic diagram illustrating one arrangement of the first buckle, the second buckle, and the corner insulating part in this utility model;

[0026] Figure 3 This is a schematic diagram showing one connection of the first buckle and the second buckle in this utility model;

[0027] Figure 4 This is a schematic diagram of one structure of the first buckle in this utility model;

[0028] Figure 5 This is a schematic diagram of the corner shield and corner insulation part in this utility model;

[0029] Figure 6 This is a schematic diagram showing the splicing relationship between the corner shield and the side shield in this utility model. Detailed Implementation

[0030] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0031] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0032] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0033] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0034] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0035] Reference Figures 1 to 6 This utility model provides a baffle mounting structure, including multiple baffle portions, a first snap fastener 300, and a second snap fastener 400. The multiple baffle portions can be circumferentially spliced ​​to form a closed baffle. The first snap fastener 300 is mounted on the outer side of the baffle portion and has a downwardly protruding engagement protrusion 301. The second snap fastener 400 is mounted on the side wall of the vacuum chamber and has an upwardly protruding engagement protrusion 401. The engagement protrusion 401 and the snap fastener 301 are mutually matched, so that the baffle portion is engaged downwardly by the engagement protrusion 301 and the engagement protrusion 401, thereby being detachably mounted into the vacuum chamber. The second snap fastener 400 is an insulating structure to maintain insulation between the baffle portion and the vacuum chamber.

[0036] It is understandable that the baffle mounting structure in this embodiment uses multiple baffle parts spliced ​​together to form a ring baffle, greatly reducing the volume of each baffle part, facilitating production and processing, and reducing production costs. At the same time, the baffle parts are engaged using the first buckle 300 and the second buckle 400, which facilitates disassembly and installation and reduces the difficulty of disassembly and assembly.

[0037] The baffles can be spliced ​​together to form a ring of baffles by connecting vacuum chambers without fixing them to each other, or they can be spliced ​​together by fixing them to each other.

[0038] Combination Figures 2 to 4In some embodiments of this utility model, the first buckle 300 is provided with a plurality of engaging protrusions 301 in the vertical direction, and the second buckle 400 is provided with a plurality of engaging protrusions 401 corresponding to the engaging protrusions 301. During installation, the cover portion engages with the engaging protrusions 401 through the plurality of engaging protrusions 301, which can improve the connection strength in the height direction, thereby improving the installation stability of the cover portion. Especially when the cover portion has a certain height, the design of providing a plurality of engaging protrusions 301 at the top and bottom can effectively support the weight of the cover portion and improve the installation stability.

[0039] Combination Figure 2 As shown, in some embodiments of this utility model, a space is provided between two adjacent snap-fit ​​protrusions 401 in the vertical direction for the fastening protrusion 301 to enter and exit. During installation, first, the cover part is placed into the vacuum chamber, the fastening protrusion 301 on the first snap-fit ​​300 is aligned with the space above the snap-fit ​​protrusion 401 on the second snap-fit ​​400, and then the cover part is brought close to the second snap-fit ​​400 so that the fastening protrusion 301 enters above the snap-fit ​​protrusion 401. As the cover part is lowered, the snap-fit ​​protrusion 401 and the fastening protrusion 301 snap into each other, completing the snap-fit ​​installation.

[0040] Combination Figure 2 In some embodiments of this utility model, the fastening protrusion 301 protrudes from the side of the first buckle 300 away from the cover plate, and the upper and lower surfaces of the fastening protrusion 301 have a downward inclined angle, forming an overall downward inclined protruding structure. The snap-fit ​​protrusion 401 protrudes from the side of the second buckle 400 near the cover plate, and the upper and lower surfaces of the snap-fit ​​protrusion 401 have an upward inclined angle, the same as the inclined angle of the fastening protrusion 301.

[0041] During installation, the first clip 300 automatically positions and engages with the second clip 400 via the angle of the engaging protrusion 301 and the engaging protrusion 401. Furthermore, under the influence of gravity and guided by the angle, the engagement between the two clips becomes even more secure. During disassembly, simply lift the cover upwards. When the engaging protrusion 301 abuts against the engaging protrusion 401, it will naturally move away from the second clip 400 under the influence of the angle, thus disengaging and allowing the cover to be easily removed.

[0042] To improve installation stability, in some embodiments of this invention, a mounting screw is provided between the tops of the first snap-fit ​​300 and the second snap-fit ​​400. After the first snap-fit ​​300 and the second snap-fit ​​400 are engaged, the mounting screw is passed through their tops for connection and fixation.

[0043] It is understandable that the first latch 300 and the second latch 400 engage vertically, and the engaging protrusion 301 on the first latch 300 engages with the engaging protrusion 401 on the second latch 400. Therefore, during installation, the first latch 300 moves downwards to engage with the second latch 400. For this, refer to... Figure 3 The upper end of the first latch 300 is provided with a first mounting platform 302, and the upper end of the second latch 400 is provided with a second mounting platform 402. When the latching protrusion 301 engages with the latching protrusion 401, the first mounting platform 302 abuts against the upper end of the second mounting platform 402. The mounting screw passes through the first mounting platform 302 and the second mounting platform 402. This structural design facilitates the installation and removal of the mounting screw.

[0044] Considering the limited structural strength of the insulating material, the second buckle 400 is embedded in the first metal reinforcement on the second mounting platform 402, and the mounting screw passes through the first mounting platform 302 and is connected to the first metal reinforcement, so as to avoid fatigue damage to the threaded hole.

[0045] Combination Figure 3 and Figure 4 In some embodiments of this utility model, the height of the cover plate is higher than that of the mounting screw, so that when the mounting screw is installed on the first mounting platform 302 and the second mounting platform 402, it is concealed on the outside of the cover plate, thus preventing the mounting screw from being coated and affecting disassembly and assembly. In practical applications, it is only necessary to control the installation height of the first buckle 300 to ensure that the mounting screw is concealed on the outside of the cover plate.

[0046] Combination Figure 3 and Figure 4 In some embodiments of this utility model, the cover plate portion is provided with an embedding recess, and the first buckle 300 is partially embedded in the embedding recess. It is understood that, due to the limited thickness of the cover plate portion and the first buckle 300, the length of the screw connection is limited when the two are fixed together by screws. In this embodiment, by providing an embedding recess on the cover plate portion and inserting the first buckle 300 into the embedding recess, the weight of the cover plate portion can be effectively transferred to the first buckle 300 through a convex-concave fit, thereby improving the connection strength and installation stability.

[0047] Furthermore, the first buckle 300 preferably adopts a metal structure, and through the above-mentioned embedding design, the structural strength of the cover portion can also be enhanced by the first buckle 300.

[0048] Combination Figure 1 As shown, in some embodiments of this utility model, the cover plate is provided with a plurality of first buckles 300 along the length direction. During installation, the plurality of first buckles 300 are used to engage with the plurality of second buckles 400, which can effectively improve the installation stability.

[0049] Reference Figure 1 In some embodiments of this utility model, the multiple baffle portions include four side baffles 100 and four corner baffles 200. Specifically, the four side baffles 100 are arranged in a rectangular pattern, and the four corner baffles 200 are distributed at the apex positions between two adjacent side baffles 100, together forming a ring of baffles. In this embodiment, there is an overlapping area between the side baffles 100 and the corner baffles 200 along the length direction of the side baffles 100. The corner baffles 200 and the side baffles 100 are respectively connected to the vacuum cavity, but are not connected or fixed to each other.

[0050] The structural design of this embodiment uses four side panels 100 and four corner panels 200 to form a ring of panels, facilitating production and processing. Furthermore, the installation method using the first clip 300 and the second clip 400 eliminates the need for connections or fixations between the side panels 100 and between the side panels 100 and the corner panels 200. During assembly and disassembly, the side panels 100 and corner panels 200 can be removed and installed individually, effectively reducing the difficulty of assembly and disassembly.

[0051] Considering that the corner baffle 200 is located at a corner, has a relatively small volume, and is lighter than the side baffle 100, therefore, refer to Figure 1 and Figure 5 In some embodiments of this utility model, the shield mounting structure further includes a corner insulating part 500, which is disposed on the side wall of the vacuum cavity, and the corner shield 200 is connected to the corner insulating part 500.

[0052] With the structural configuration of this embodiment, the corner shield 200 is directly connected to the corner insulating part 500 on the vacuum chamber for installation and fixation, which helps to simplify the structural design and improve the convenience of disassembly and assembly.

[0053] In contrast, the side panel 100 is provided with a first buckle 300, and the second buckle 400 is engaged through the first buckle 300.

[0054] In this embodiment, the side cover 100 is installed using the first buckle 300, and the corner cover 200 is installed using the corner insulating part 500, making disassembly and assembly more flexible.

[0055] If the corner baffle 200 and the side baffle 100 are attached in such a way that the corner baffle 200 is attached to the side baffle 100 from the inside, the side baffle 100 is installed into the vacuum chamber first, and then the corner baffle 200 is installed so that the corner baffle 200 is attached to the inside of the side baffle 100.

[0056] If the corner shield 200 and the side shield 100 are attached in such a way that the side shield 100 is attached to the inner side of the corner shield 200, the corner shield 200 is installed and fixed first, and then the side shield 100 is installed so that the side shield 100 is attached to the inner side of the corner shield 200.

[0057] Combination Figure 1 , Figure 5 and Figure 6 As shown, in some embodiments of this utility model, a third mounting platform 201 protrudes from the outer side of the corner shield 200, and the corner insulating part 500 is made of insulating material and is directly mounted on the vacuum chamber. The corner shield 200 abuts against the upper end of the corner insulating part 500 via the third mounting platform 201 and is fixed downwards with screws. Using the structural configuration of this embodiment, the weight of the corner shield 200 is transferred to the corner insulating part 500 via the third mounting platform 201, which improves the stability of the installation.

[0058] Considering that the corner shield 200 needs to be disassembled and reassembled, and that the structural strength of ordinary insulating materials is limited, a second metal reinforcing member is embedded in the area of ​​the corner insulation part 500 corresponding to the third mounting platform 201. The third mounting platform 201 is connected to the second metal reinforcing member with screws to avoid fatigue damage to the threaded holes. At the same time, the second metal reinforcing member also improves the structural strength and rigidity of the corner insulation part 500.

[0059] Combination Figure 5 and Figure 6 As shown, in some embodiments of this utility model, the corner shield 200 includes a main body and two splicing parts 202, with an arc surface on the inner side of the main body. The two splicing parts 202 are arranged at a 90° angle on both sides of the main body, and there is a gap between the splicing parts 202 and the inner side of the main body, thereby forming a step. The side shield 100 is attached to the inner side of the splicing part 202, and the step is used to keep the inner sides of the side shield 100 and the corner shield 200 relatively flush.

[0060] With the structural configuration of this embodiment, the corner shield 200 is spliced ​​from the outside of the side shield 100. By setting the splicing part 202, the coverage area between the corner shield 200 and the side shield 100 can be effectively increased, which can alleviate or even prevent the occurrence of plating around.

[0061] Combination Figure 6 In some embodiments of this utility model, the fitting gap between the side shield 100 and the corner shield 200 is t, the fitting length between the side shield 100 and the corner shield 200 along the length direction of the side shield 100 is s, and the shield mounting structure satisfies s / t>10.

[0062] Based on the structural design of the aforementioned embodiments, the bonding gap t is the end face distance between the splicing part 202 and the side shield 100, and the bonding length s is the length of the side shield 100 and the end face of the splicing part 202 relative to each other along the length direction of the side shield 100. This embodiment, by setting the ratio between the two, can effectively prevent coating particles from diffracting out from the gap between the corner shield 200 and the side shield 100.

[0063] Reference Figures 1 to 6 In some embodiments of this utility model, the baffle mounting structure includes four corner baffles 200, four side baffles 100, a first snap fastener 300, a second snap fastener 400, and a corner insulating portion 500. The corner insulating portions 500 are installed at the four corners of the vacuum chamber, and the second snap fasteners 400 are installed on the four side walls of the vacuum chamber. A total of 12 second snap fasteners 400 are provided, with 3 evenly distributed on each side wall of the vacuum chamber. Each second snap fastener 400 includes a second mounting platform 402 and two snap-fit ​​protrusions 401 from top to bottom, with the second mounting platform 402 and the two snap-fit ​​protrusions 401 spaced apart. The upper and lower surfaces of the snap-fit ​​protrusions 401 have an upward tilt angle, causing the snap-fit ​​protrusions 401 to extend upwards at an inclined angle. A third mounting platform 201 is provided on the outer side of the corner baffles 200. By abutting the third mounting platform 201 against the corner insulating portion 500 and fixing it with screws, it can be detachably installed at the four corners of the vacuum chamber. A splicing portion 202 is provided on each side of the corner baffle 200 along the sidewall direction of the vacuum cavity, forming a step between the splicing portion 202 and the inner side of the corner baffle 200. Three first latches 300 are provided on the outer side of the side baffle 100, and the positions of the three first latches 300 match those of the second latches 400. Each first latch 300 includes, from top to bottom, a first mounting platform 302 and two engaging protrusions 301, which are spaced apart. The upper and lower surfaces of the engaging protrusions 301 have a downward tilt angle, causing the engaging protrusions 301 to extend downwards at an angle. The tilt angle of the engaging protrusions 301 is equal to the tilt angle of the engaging protrusions 401. The side baffle 100 engages the second latches 400 downwards via the three first latches 300 and is fixed by screws passing through the first mounting platform 302 and the second mounting platform 402. The side panel 100 covers the splicing part 202 on both sides along its length and is close to the step position of the corner panel 200.

[0064] In this embodiment, the side shield 100 and corner shield 200 together form a ring of shields to protect the vacuum chamber. The side shield 100 and corner shield 200 are individually connected to the vacuum chamber, ensuring installation stability while facilitating easy assembly and disassembly, thus offering high operability.

[0065] This utility model also proposes a coating device, including the mask mounting structure of any of the above embodiments. It is understood that the coating device of this embodiment, by applying the above-described mask mounting structure, can effectively reduce production and processing costs and improve ease of assembly and disassembly.

[0066] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. A shutter mounting structure characterized by comprising: include: Multiple baffle sections are joined together to form a circumferentially closed baffle. A first buckle is provided on the outer side of the cover plate portion, and the first buckle is provided with a downwardly protruding fastening protrusion; The second latch is an insulating structure and is disposed on the side wall of the vacuum chamber. The second latch is provided with an upwardly protruding latching protrusion. The cover portion is engaged downwards with the engaging protrusion via the fastening protrusion.

2. The baffle mounting structure according to claim 1, characterized in that, The first buckle has a plurality of engagement protrusions along the vertical direction, and the second buckle has a plurality of locking protrusions corresponding to the engagement protrusions.

3. The baffle mounting structure according to claim 2, characterized in that, Along the vertical direction, there is a space between two adjacent snap-fit ​​protrusions for the snap-fit ​​protrusion to move in and out.

4. The baffle mounting structure according to claim 1, characterized in that, An mounting screw is provided between the tops of the first clip and the second clip.

5. The baffle mounting structure according to claim 4, characterized in that, The height of the cover portion is higher than that of the mounting screw.

6. The baffle mounting structure according to claim 1, characterized in that, The cover plate is provided with an embedding recess, and the first buckle is at least partially embedded in the embedding recess.

7. The baffle mounting structure according to claim 1, characterized in that, The plurality of baffles includes a plurality of side baffles and a plurality of corner baffles. The corner baffles are located between two adjacent side baffles and are spliced ​​together to form the baffles. The corner baffles and the side baffles are respectively connected to the vacuum cavity.

8. The baffle mounting structure according to claim 7, characterized in that, The shield mounting structure also includes a corner insulating part, which is disposed on the side wall of the vacuum cavity. The corner shield is connected to the corner insulating part, and the side shield is provided with the first buckle and the second buckle is engaged through the first buckle.

9. The baffle mounting structure according to claim 7, characterized in that, The fitting gap between the side panel and the corner panel is t, and the fitting length between the side panel and the corner panel along the length direction of the side panel is s. The panel mounting structure satisfies s / t > 10.

10. A coating apparatus, characterized in that, Includes the shield mounting structure as described in any one of claims 1 to 9.

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