A fixing device for end face processing of a silicon rod

Abstract

The utility model relates to the technical field of semiconductor material processing, and disclose a kind of for silicon rod end face processing fixing device, including first fixture box, hinge and second fixture box, the first fixture box outer surface is equipped with first slot, the first slot is equipped with same multiple, the first fixture box outer surface is equipped with first clamping groove and second clamping groove, the first clamping groove and second clamping groove are penetrated multiple the first slot, the first fixture box outer surface is fixedly installed with extension block.This for silicon rod end face processing fixing device, when placing silicon rod body, according to the diameter size of silicon rod suitable first slot and second slot combination are selected, for the silicon rod of larger diameter, select larger distance slot, for the silicon rod of smaller diameter, select smaller distance slot, the design of decreasing equidistance distribution greatly improves the versatility of fixing device, can adapt to different diameter specifications silicon rod, without replacing different fixture, reduce the production cost and the time of replacing fixture, improve production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material processing technology, specifically to a fixing device for processing the end face of a silicon rod. Background Technology

[0002] In the semiconductor industry, silicon rods are an important raw material for manufacturing semiconductor devices such as chips. The processing quality of the silicon rod end face directly affects subsequent processes such as slicing and grinding, as well as the performance of the final semiconductor product. With the continuous development of semiconductor technology, the requirements for the processing precision of silicon rod end faces are increasing. In high-end chip manufacturing, the flatness of the silicon rod end face needs to be controlled within a very small tolerance range to ensure the consistency of the electrical and physical properties of the chip.

[0003] During processing, the stability of the single crystal is directly related to the length yield of the entire single crystal silicon rod, and the length yield of the single crystal silicon rod is related to the number of wafers that can be cut from the entire annular silicon rod. This is crucial for reducing costs and improving processing yield.

[0004] For example, Chinese utility model patent CN221212338U discloses a fixing device for processing annular single crystal silicon rods. This fixing device uses a clamping frame and limiting bolts to fix the single crystal silicon rod, ensuring the stability and integrity of the single crystal during processing, reducing edge chipping of the single crystal product, thereby effectively reducing the loss of effective length of large-diameter single crystal silicon rods and improving the length yield of annular single crystal silicon rod cutting.

[0005] In summary, existing clamping solutions for processing toroidal single-crystal silicon rods generally only allow clamping of silicon rods with a specific diameter, failing to effectively clamp rods of different diameters, resulting in poor overall device versatility. This necessitates changing different clamps during the processing of toroidal single-crystal silicon rods, leading to increased production costs and longer clamping time, thus impacting production efficiency. Summary of the Invention

[0006] To address the problem of poor universality in existing fixing solutions for processing ring-shaped single-crystal silicon rods, the purpose of this invention is to provide a fixing device for processing the end face of silicon rods, so as to effectively clamp silicon rods of different diameters.

[0007] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0008] A fixing device for processing the end face of a silicon rod includes a first clamp box, a hinge, and a second clamp box. The outer surface of the first clamp box has a first slot, and multiple identical first slots are provided. The outer surface of the first clamp box also has a first groove and a second groove, which penetrate through the multiple first slots. An extension block is fixedly installed on the outer surface of the first clamp box. A second clamp box is fixedly installed at the other end of the hinge. The inner surface of the second clamp box has a second slot and a third slot. A positioning block and a positioning rail are fixedly installed on the outer surface of the second clamp box. A second positioning hole is formed through the outer surface of the positioning block. A silicon rod body is disposed on the inner surface of the first and second slots.

[0009] Preferably, the extension block and the positioning block correspond to each other, and the outer surfaces of the extension block and the positioning block are threadedly connected with positioning bolts that penetrate the extension block and extend to the outer surface of the positioning block.

[0010] The above technical solution involves placing the silicon rod body in the first and second slots, then closing the second fixture box to align the extension block with the positioning block. Next, the positioning bolt is passed through the extension block and screwed into the positioning block, and the positioning bolt is gradually tightened. The positioning bolt can tightly connect the first and second fixture boxes together, ensuring the structural stability of the entire fixing device when processing the silicon rod end face.

[0011] Preferably, there are multiple first slots and second slots, and the multiple first slots and second slots are distributed at equal intervals in a decreasing manner.

[0012] Through the above technical solution, when placing the silicon rod body, a suitable combination of the first slot and the second slot is selected according to the diameter of the silicon rod. For silicon rods with larger diameters, slots with larger spacing are selected, and for silicon rods with smaller diameters, slots with smaller spacing are selected. The decreasing equidistant distribution design greatly improves the versatility of the fixing device, which can adapt to silicon rods of different diameters. There is no need to change different clamps, which reduces production costs and clamp replacement time, and improves production efficiency.

[0013] Preferably, the inner surfaces of the first and second slots are threaded with a first latch, and the inner surface of the third slot is threaded with a second latch. The first latch passes through multiple first slots, and the second latch passes through multiple third slots.

[0014] Through the above technical solution, the first and second clamps can precisely limit the silicon rod from different directions, preventing the silicon rod from shifting axially or radially during processing. The tightness of the clamps can be flexibly adjusted to meet the fixing requirements of silicon rods of different sizes, and a stable fixing state can be maintained during processing to ensure the accuracy and consistency of silicon rod end face processing.

[0015] Preferably, there are multiple identical first card slots, first card latches, second card slots, third slots, and second card latches, and the multiple first card slots, first card latches, second card slots, third slots, and second card latches are equidistantly distributed.

[0016] Through the above technical solution, by designing multiple first slots, first latches, second slots, third slots, and second latches, the silicon rod body can be limited from multiple first slots, second slots, and third slots when it is fixed, thereby improving its stability during clamping.

[0017] Preferably, the outer surface of the first clamp box is provided with a first positioning hole, and the outer surface of the positioning rail is provided with a third positioning hole.

[0018] Through the above technical solution, when the fixing device is installed on the processing equipment, the first positioning hole and the third positioning hole are used to cooperate with the positioning pin or other positioning components on the processing equipment to make the fixing device accurately positioned in the processing position. When it is used in conjunction with automated processing equipment, the control system can accurately identify and position the fixing device.

[0019] Preferably, a hinge is fixedly installed on the outer surface of the first clamp box, and a second clamp box is rotatably installed on the first clamp box via the hinge.

[0020] The above technical solution, which connects the first fixture box and the second fixture box with a hinge, allows for selection of whether the first fixture box and the second fixture box are stacked or laid flat during processing, adapting to different processing conditions and improving the versatility of the overall device.

[0021] Preferably, the silicon rod body is adapted to the first slot and the second slot, and the silicon rod body is located on the outer surface of the first slot and the second slot.

[0022] The above technical solution allows for the selection of a first slot and a second slot that match the diameter of the silicon rod. The silicon rod is then placed smoothly into the slot. When processing is required at both ends, the ends can be exposed. When processing the middle part of the silicon rod body, the fixing device can be installed on both sides. This improves the versatility of the overall device and facilitates its widespread use.

[0023] Compared with the prior art, the device for fixing the end face of silicon rods provided by this utility model has the following advantages:

[0024] 1. This device for fixing silicon rod end face processing allows for the selection of a suitable combination of first and second slots based on the diameter of the silicon rod when placing the silicon rod body. For silicon rods with larger diameters, slots with larger spacing are selected, while for silicon rods with smaller diameters, slots with smaller spacing are selected. The decreasing equidistant distribution design greatly improves the versatility of the fixing device, enabling it to adapt to silicon rods of different diameters without the need to change different fixtures, thus reducing production costs and fixture replacement time, and improving production efficiency.

[0025] 2. This device for fixing the end face of silicon rods features a hinged design that connects the first and second clamping boxes. During processing, the first and second clamping boxes can be stacked or laid flat to adapt to different processing conditions and improve the versatility of the overall device. Based on the diameter of the silicon rod, the first and second slots are selected to match it, and the silicon rod is placed smoothly into the slots. When processing the two ends, the ends can be exposed. When processing the middle part of the silicon rod, the fixing device can be installed on both sides, which improves the versatility of the overall device and facilitates its widespread use.

[0026] 3. This device for fixing silicon rod end face processing has a first and a second clamp that can precisely limit the silicon rod from different directions, preventing axial or radial displacement of the silicon rod during processing. The clamp tightness can be flexibly adjusted to meet the fixing requirements of silicon rods of different sizes, and it can maintain a stable fixing state during processing, ensuring the accuracy and consistency of silicon rod end face processing. Attached Figure Description

[0027] Figure 1 This is a three-dimensional structural diagram of the first state of the device for fixing the end face of a silicon rod in this utility model;

[0028] Figure 2 This is a three-dimensional structural diagram of the second state of the device for fixing the end face of a silicon rod in this utility model;

[0029] Figure 3 This is a schematic diagram of the disassembled structure of the first and second locking bolts in this utility model;

[0030] Figure 4 This is a schematic diagram of the second card slot and the third card slot installation structure in this utility model;

[0031] Figure 5 This is a half-sectional view of the first clamp box and the second clamp box in this utility model;

[0032] Figure 6 This is a schematic diagram of the combined structure of the first clamp box and the second clamp box in this utility model.

[0033] The components are: 1. First clamp box; 2. First slot; 3. First card slot; 4. First latch; 5. First positioning hole; 6. Extension block; 7. Positioning bolt; 8. Hinge; 9. Second card slot; 10. Second clamp box; 11. Second slot; 12. Positioning block; 13. Second positioning hole; 14. Positioning rail; 15. Third positioning hole; 16. Third slot; 17. Second latch; 18. Silicon rod body. Detailed Implementation

[0034] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0035] Example 1:

[0036] like Figure 1-6 As shown, the fixing device for silicon rod end face processing provided in this example mainly includes a first clamp box 1, a hinge 8, and a second clamp box 10.

[0037] The first clamp box 1 has a first slot 2 on its outer surface, and multiple first slots 2 are provided. The first clamp box 1 also has a first slot 3 and a second slot 9 on its outer surface, with the first slot 3 and the second slot 9 penetrating through the multiple first slots 2. An extension block 6 is fixedly installed on the outer surface of the first clamp box 1. A second clamp box 10 is fixedly installed on the other end of the hinge 8. A second slot 11 and a third slot 16 are provided through the inner surface of the second clamp box 10. A positioning block 12 and a positioning rail 14 are fixedly installed on the outer surface of the second clamp box 10. A second positioning hole 13 is provided through the outer surface of the positioning block 12. A silicon rod body 18 is provided on the inner surface of the first slot 2 and the second slot 11.

[0038] Furthermore, combined Figure 3 , Figure 4 as well as Figure 6 As shown, in this example, the extension block 6 and the positioning block 12 correspond to each other, and the outer surfaces of the extension block 6 and the positioning block 12 are threadedly connected with positioning bolts 7 that penetrate the extension block 6 and extend to the outer surface of the positioning block 12.

[0039] With this setup, the silicon rod body 18 is placed in the first slot 2 and the second slot 11, and then the second clamp box 10 is closed so that the extension block 6 is aligned with the positioning block 12. Next, the positioning bolt 7 is passed through the extension block 6 and screwed into the positioning block 12. The positioning bolt 7 is gradually tightened. The positioning bolt 7 can tightly connect the first clamp box 1 and the second clamp box 10 together, ensuring the structural stability of the entire fixing device when processing the silicon rod end face.

[0040] Furthermore, in this example, there are multiple first slots 2 and second slots 11, and the multiple first slots 2 and second slots 11 are distributed in a decreasing equidistant manner.

[0041] With this configuration, when placing the silicon rod body 18, the appropriate combination of the first slot 2 and the second slot 11 is selected according to the diameter of the silicon rod. For silicon rods with larger diameters, slots with larger spacing are selected, and for silicon rods with smaller diameters, slots with smaller spacing are selected. The decreasing equidistant distribution design greatly improves the versatility of the fixing device, which can adapt to silicon rods of different diameters without the need to change different clamps, reducing production costs and clamp replacement time, and improving production efficiency.

[0042] Furthermore, in this example, the inner surfaces of the first slot 3 and the second slot 9 are threadedly connected to the first bolt 4, and the inner surface of the third slot 16 is threadedly connected to the second bolt 17. The first bolt 4 passes through multiple first slots 2, and the second bolt 17 passes through multiple third slots 16.

[0043] With this configuration, the first clamp 4 and the second clamp 17 can precisely limit the silicon rod from different directions, preventing axial or radial displacement of the silicon rod during processing. The tightness of the clamps can be flexibly adjusted to meet the fixing requirements of silicon rods of different sizes, and a stable fixing state can be maintained during processing to ensure the accuracy and consistency of silicon rod end face processing.

[0044] Example 2:

[0045] This example further presents an optimized solution for the silicon rod end face processing and fixing device given in Embodiment 1.

[0046] based on Figures 1 to 5 As shown, in this example, multiple identical first slots 3, first latches 4, second slots 9, third slots 16, and second latches 17 are provided, and these multiple first slots 3, first latches 4, second slots 9, third slots 16, and second latches 17 are equidistantly distributed. This arrangement, through the design of multiple first slots 3, first latches 4, second slots 9, third slots 16, and second latches 17, allows for the limitation of the silicon rod body 18 from multiple first slots 3, second slots 9, and third slots 16 when fixing it, thereby improving its stability during clamping.

[0047] Further, see Figure 1 , Figures 4 to 6 In this example, a first positioning hole 5 is provided on the outer surface of the first fixture box 1, and a third positioning hole 15 is provided on the outer surface of the positioning rail 14.

[0048] With this configuration, when the fixing device is installed on the processing equipment, the first positioning hole 5 and the third positioning hole 15 cooperate with the positioning pins or other positioning components on the processing equipment to accurately position the fixing device at the processing position. When used with automated processing equipment, this makes it convenient for the control system to accurately identify and position the fixing device.

[0049] Further, see Figure 3 In this example, a hinge 8 is also fixedly installed on the outer surface of the first fixture box 1, and the second fixture box 10 is rotatably installed on the first fixture box 1 via the hinge 8. This arrangement, which connects the first fixture box 1 and the second fixture box 10 via the hinge 8, allows for selection of whether the first fixture box 1 and the second fixture box 10 are stacked or laid flat during processing, adapting to different processing conditions and improving the versatility of the overall device.

[0050] Furthermore, in this example, the silicon rod body 18 is adapted to the first slot 2 and the second slot 11, with the silicon rod body 18 located on the outer surface of the first slot 2 and the second slot 11. With this configuration, the first slot 2 and the second slot 11 are selected to match the diameter of the silicon rod, allowing the silicon rod to be smoothly placed into the slots. When processing is required at both ends, these ends can be exposed. When processing the middle portion of the silicon rod body 18, fixing devices can be installed on both sides, increasing the versatility of the overall device and facilitating its widespread use.

[0051] The following is a detailed explanation of the usage process of the silicon rod end face processing and fixing device given in this example.

[0052] Combination Figures 1 to 6 As shown, when using the silicon rod end face processing fixing device, the silicon rod body 18 is placed in the first slot 2 and the second slot 11, and then the second clamp box 10 is closed so that the extension block 6 is aligned with the positioning block 12; then the positioning bolt 7 is passed through the extension block 6 and screwed into the positioning block 12, and the positioning bolt 7 is gradually tightened. The positioning bolt 7 can tightly connect the first clamp box 1 and the second clamp box 10 together to ensure the structural stability of the entire fixing device when processing the silicon rod end face.

[0053] When placing the silicon rod body 18, a suitable combination of the first slot 2 and the second slot 11 is selected according to the diameter of the silicon rod. For silicon rods with larger diameters, slots with larger spacing are selected, and for silicon rods with smaller diameters, slots with smaller spacing are selected. The decreasing equidistant distribution design greatly improves the versatility of the fixing device, which can adapt to silicon rods of different diameters without the need to change different clamps, reducing production costs and clamp replacement time, and improving production efficiency.

[0054] Furthermore, the first clamp 4 and the second clamp 17 can precisely limit the silicon rod from different directions, preventing axial or radial displacement of the silicon rod during processing. The tightness of the clamps can be flexibly adjusted to meet the fixing requirements of silicon rods of different sizes, and a stable fixing state can be maintained during processing to ensure the accuracy and consistency of silicon rod end face processing.

[0055] By designing multiple first slots 3, first latches 4, second slots 9, third slots 16, and second latches 17, the silicon rod body 18 can be limited from multiple first slots 3, second slots 9, and third slots 16 when it is fixed, which can improve its stability when clamped.

[0056] When the fixing device is installed on the processing equipment, the first positioning hole 5 and the third positioning hole 15 are used to cooperate with the positioning pin or other positioning components on the processing equipment to make the fixing device accurately positioned in the processing position. When it is used with automated processing equipment, it is convenient for the control system to accurately identify and position the fixing device.

[0057] The design of connecting the first clamp box 1 and the second clamp box 10 via hinge 8 allows for selection of whether the first clamp box 1 and the second clamp box 10 are stacked or laid flat during processing, adapting to different processing conditions and improving the versatility of the overall device. According to the diameter of the silicon rod, the first slot 2 and the second slot 11 that match it are selected, and the silicon rod is placed smoothly into the slot. When it is necessary to process both ends, the ends can be exposed. When processing the middle part of the silicon rod body 18, the fixing device can be installed on both sides, which can improve the versatility of the overall device and facilitate its widespread use.

[0058] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A fixing device for processing the end face of silicon rods, comprising a first clamping box (1), a hinge (8), and a second clamping box (10), characterized in that: The first clamp box (1) has a first slot (2) on its outer surface. There are multiple identical first slots (2). The first clamp box (1) has a first slot (3) and a second slot (9) on its outer surface. The first slot (3) and the second slot (9) pass through multiple first slots (2). An extension block (6) is fixedly installed on the outer surface of the first clamp box (1). A second clamp box (10) is fixedly installed on the other end of the hinge (8). A second slot (11) and a third slot (16) are opened through the inner surface of the second clamp box (10). A positioning block (12) and a positioning rail (14) are fixedly installed on the outer surface of the second clamp box (10). A second positioning hole (13) is opened through the outer surface of the positioning block (12). A silicon rod body (18) is provided on the inner surface of the first slot (2) and the second slot (11).

2. The device for fixing the end face of a silicon rod according to claim 1, characterized in that: The extension block (6) and the positioning block (12) correspond to each other, and the outer surfaces of the extension block (6) and the positioning block (12) are threaded with positioning bolts (7) that penetrate the extension block (6) and extend to the outer surface of the positioning block (12).

3. The device for fixing the end face of a silicon rod according to claim 1, characterized in that: The first slot (2) and the second slot (11) are provided in the same number of times, and the multiple first slots (2) and second slots (11) are distributed in a decreasing equidistant manner.

4. The device for fixing the end face of a silicon rod according to claim 1, characterized in that: The inner surfaces of the first slot (3) and the second slot (9) are threaded with a first latch (4), and the inner surface of the third slot (16) is threaded with a second latch (17). The first latch (4) passes through multiple first slots (2), and the second latch (17) passes through multiple third slots (16).

5. The device for fixing the end face of a silicon rod according to claim 4, characterized in that: The first card slot (3), the first card bolt (4), the second card slot (9), the third slot (16) and the second card bolt (17) are provided in multiples, and the multiple first card slots (3), the first card bolt (4), the second card slot (9), the third slot (16) and the second card bolt (17) are distributed at equal intervals.

6. The device for fixing the end face of a silicon rod according to claim 1, characterized in that: The first fixture box (1) has a first positioning hole (5) on its outer surface, and the positioning rail (14) has a third positioning hole (15) on its outer surface.

7. The device for fixing the end face of a silicon rod according to claim 1, characterized in that: A hinge (8) is fixedly installed on the outer surface of the first clamp box (1), and a second clamp box (10) is installed on the first clamp box (1) by rotating the hinge.

8. The device for fixing the end face of a silicon rod according to claim 1, characterized in that: The silicon rod body (18) is adapted to the first slot (2) and the second slot (11), and the silicon rod body (18) is located on the outer surface of the first slot (2) and the second slot (11).

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