A high-k precursor material filling module

Abstract

The utility model discloses a kind of High-K precursor material filling module, specifically related to filling technical field, including filling control module, solvent steel bottle, product steel bottle, solvent receiving steel bottle, second tail gas valve, material import valve and nitrogen import valve, the filling control module includes three-way valve I, three-way valve II, three-way valve III and three-way valve IV, three-way valve I, three-way valve II, three-way valve III and three-way valve IV are linkage control by PLC controller, second outlet valve and second import valve are provided on the solvent steel bottle.The utility model relates to a kind of High-K precursor material filling module, reduce the product waste caused by pipeline too long during cleaning replacement in filling process;Reduce the operating frequency of personnel when cleaning replacement, reduce the probability of misoperation, system automatic replacement frequency is high replacement efficiency is high;Modular design, small, less space is occupied when installing;Replacement efficiency is high, effect is good, reduce the pollution to filling pipeline.

Description

Technical Field

[0001] This utility model relates to the field of filling technology, and in particular to a High-K precursor material filling module. Background Technology

[0002] High-K materials are characterized by high activity, high viscosity, flammability, explosiveness, and high value. Currently, the filling of precursor materials is done directly through on-site EP pipelines. When the cylinders are removed after filling, the filling pipelines need to be replaced. The replacement pipelines mostly use manual valves, which are complex. During replacement, there are many valves that are opened and closed frequently, which can easily lead to personnel misoperation, resulting in insufficient cleaning and replacement of the pipelines, contaminating the product or the filling pipelines. Utility Model Content

[0003] The main objective of this invention is to provide a High-K precursor material filling module, which can effectively solve the problems in the background art.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] A High-K precursor material filling module includes a filling control module, a solvent cylinder, a product cylinder, a solvent receiving cylinder, a second exhaust valve, a material inlet valve, and a nitrogen inlet valve. The filling control module includes three-way valves I, II, III, and IV, which are linked and controlled by a PLC controller. The solvent cylinder is equipped with a second outlet valve and a second inlet valve. The product cylinder is equipped with a third inlet valve and a third outlet valve. The solvent receiving cylinder is equipped with a first inlet valve and a first outlet valve. The nitrogen inlet valve is connected to port a of three-way valve I via a pipeline. The second outlet valve is connected to port b of three-way valve I via a pipeline. The material inlet valve is connected to port a of three-way valve II via a pipeline. The system is as follows: the third inlet valve is connected to port b of three-way valve II via a pipeline; port c of three-way valve I and port c of three-way valve II are connected via a pipeline; the second exhaust valve is connected to port a of three-way valve III via a pipeline; the first inlet valve is connected to port b of three-way valve IV via a pipeline; port a of three-way valve IV is connected to port b of three-way valve III via a pipeline; the third outlet valve is connected to port c of three-way valve III via a pipeline; port c of three-way valve IV is connected to a vacuum interface; the second inlet valve is connected to a nitrogen outlet valve via a pipeline; the nitrogen outlet valve is connected to the pipeline connecting the nitrogen inlet valve and three-way valve I via a pipeline; the first outlet valve is connected to a first exhaust valve via a pipeline; the first exhaust valve is connected to the pipeline connecting the second exhaust valve and three-way valve III via a pipeline.

[0006] Preferably, a bypass valve is installed between the second outlet valve and the second inlet valve, between the third inlet valve and the third outlet valve, and between the first inlet valve and the first outlet valve.

[0007] Compared with the prior art, the present invention has the following beneficial effects:

[0008] This utility model discloses a High-K precursor material filling module, which reduces product waste caused by excessively long pipelines during the filling process due to cleaning and replacement. By setting up a PLC controller to control three-way valves I1, II2, III3, and IV4, the frequency of manual operation during cleaning and replacement is reduced, lowering the probability of misoperation. The system has a high automatic replacement frequency and high replacement efficiency. The modular design results in a small size and minimal space occupation during installation. The high replacement efficiency and good effect, through a combination of solvent cleaning and vacuum suction to remove high-viscosity residues, can reduce contamination of the filling pipeline. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0010] Figure 2 This is the control logic flowchart of this utility model.

[0011] In the diagram: 1. Three-way valve I; 2. Three-way valve II; 3. Three-way valve III; 4. Three-way valve IV; 5. First tail gas valve; 6. First inlet valve; 7. First outlet valve; 8. Second tail gas valve; 9. Material inlet valve; 10. Nitrogen inlet valve; 11. Nitrogen outlet valve; 12. Second outlet valve; 13. Second inlet valve; 14. Third inlet valve; 15. Third outlet valve; 16. Bypass valve; 17. Solvent cylinder; 18. Product cylinder; 19. Solvent receiving cylinder. Detailed Implementation

[0012] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0013] like Figure 1-2As shown, a High-K precursor material filling module includes a filling control module, a solvent cylinder 17, a product cylinder 18, a solvent receiving cylinder 19, a second tail gas valve 8, a material inlet valve 9, and a nitrogen inlet valve 10. The filling control module includes three-way valves I1, II2, III3, and IV4. These three-way valves are linked and controlled by a PLC controller. The PLC controller controls the three-way valves... The system is controlled by valves I1, II2, III3, and IV4 without manual operation. The solvent cylinder 17 is equipped with a second outlet valve 12 and a second inlet valve 13. The product cylinder 18 is equipped with a third inlet valve 14 and a third outlet valve 15. The solvent receiving cylinder 19 is equipped with a first inlet valve 6 and a first outlet valve 7. The nitrogen inlet valve 10 is connected to port a of the three-way valve I1 via a pipeline. The second outlet valve 12 is connected to the three-way valve via a pipeline. The material inlet valve 9 is connected to port b of valve I1 via a pipeline, and the third inlet valve 14 is connected to port b of three-way valve II2 via a pipeline. Ports c of three-way valve I1 and three-way valve II2 are connected via a pipeline. The second exhaust valve 8 is connected to port a of three-way valve III3 via a pipeline. The first inlet valve 6 is connected to port b of three-way valve IV4 via a pipeline, and port a of three-way valve IV4 is connected to port b of three-way valve III3 via a pipeline. The third outlet valve 15 is connected to port c of the three-way valve III3 via a pipeline. Port c of the three-way valve IV4 is connected to the vacuum interface. The second inlet valve 13 is connected to a nitrogen outlet valve 11 via a pipeline. The nitrogen outlet valve 11 is connected to a pipeline that connects to the nitrogen inlet valve 10 and the three-way valve I1. The first outlet valve 7 is connected to a first tail gas valve 5 via a pipeline. The first tail gas valve 5 is connected to a pipeline that connects to the second tail gas valve 8 and the three-way valve III3.

[0014] A bypass valve 16 is installed between the second outlet valve 12 and the second inlet valve 13, between the third inlet valve 14 and the third outlet valve 15, and between the first inlet valve 6 and the first outlet valve 7.

[0015] The working principle of this utility model is as follows:

[0016] Step 1: Before filling, connect the solvent cylinder 17, product cylinder 18, and solvent receiving cylinder 19 to the corresponding interfaces;

[0017] Step 2: Open the solvent and nitrogen flow routes, and sequentially open the nitrogen outlet valve 11, the second outlet valve 12 and the second inlet valve 13 of the solvent cylinder 17, open the first inlet valve 6 and the first outlet valve 7, the first tail gas valve 5 and the second tail gas valve 8 of the solvent receiving cylinder 19, open the nitrogen inlet valve 10, and confirm that the third inlet valve 14 and the third outlet valve 15 of the product cylinder 18 are closed and the bypass valve 16 is open.

[0018] Step 3: Start the nitrogen purging system. Open the three-way valve I1ac channel, the three-way valve II2bc channel, and the three-way valve III3ac channel. At this time, the filling pipeline enters the nitrogen purging state. Nitrogen enters the following channels in sequence through nitrogen inlet valve 10: - three-way valve I1ac channel - three-way valve II2bc channel - bypass valve 16 - three-way valve III3ac channel - second tail gas valve 8 - vent main pipe, replacing any air that may be present in the original pipeline.

[0019] Step 4: After nitrogen purging for 3 minutes (adjustable time), start the filling system. At this time, three-way valve I1 is closed, three-way valve II2ab channel is open, and three-way valve III3ac channel is open. Manually close the bypass valve 16 of product cylinder 18, open the third inlet valve 14 and the third outlet valve 15 of product cylinder 18, and open the material inlet valve 9. High-K enters product cylinder 18 through the material inlet valve 9, three-way valve II2ab, and the third inlet valve 14 in sequence. After High-K filling is completed, manually close the third inlet valve 14 and the third outlet valve 15 of product cylinder 18, open the bypass valve 16, and manually close the material inlet valve 9.

[0020] Step 5: Start the solvent cleaning system. At this time, the three-way valve I1bc channel, three-way valve II2bc channel, three-way valve III3bc channel, and three-way valve IV4ab channel are open. Under the pressure of nitrogen, the solvent passes sequentially through the second outlet valve 12, three-way valve I1bc channel, three-way valve II2bc channel, bypass valve 16, three-way valve III3bc channel, three-way valve IV4ab channel, and first inlet valve 6 into the solvent receiving cylinder 19. After 30 seconds, three-way valve I1 closes and three-way valve IV4ac channel opens to perform vacuuming for 30 seconds. After a few seconds, the three-way valve I1bc channel opens, and the three-way valve IV4ab channel opens to continue entering the solvent cleaning pipeline. The solvent cleaning and vacuuming operations are repeated several times. The high-viscosity residue is removed by the combination of solvent cleaning and vacuum suction. The three-way valve I1ac channel opens, the three-way valve II2bc channel opens, the three-way valve III3ac channel opens, and the three-way valve IV4 closes. Nitrogen purging is performed for 1 minute, which is adjustable. At this time, the cleaning and purging of the filling pipeline is completed. The product cylinder 18 can be removed, and the pipeline interface connected to the product cylinder 18 is sealed with a VCR cap.

[0021] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A High-K precursor material filling module, characterized in that: The system includes a filling control module, a solvent cylinder (17), a product cylinder (18), a solvent receiving cylinder (19), a second tail gas valve (8), a material inlet valve (9), and a nitrogen inlet valve (10). The filling control module includes three-way valve I (1), three-way valve II (2), three-way valve III (3), and three-way valve IV (4). The three-way valves I (1), II (2), III (3), and IV (4) are controlled by a PLC controller. The solvent cylinder (17) is equipped with... The product cylinder (18) is equipped with a second outlet valve (12) and a second inlet valve (13). The product cylinder (18) is equipped with a third inlet valve (14) and a third outlet valve (15). The solvent receiving cylinder (19) is equipped with a first inlet valve (6) and a first outlet valve (7). The nitrogen inlet valve (10) is connected to port a of three-way valve I (1) via a pipeline. The second outlet valve (12) is connected to port b of three-way valve I (1) via a pipeline. The material inlet valve (9) is connected to three-way valve II (2) via a pipeline. The first inlet valve (6) is connected to the b port of the three-way valve II (2) via a pipeline. The c ports of the three-way valve I (1) and the c ports of the three-way valve II (2) are connected via a pipeline. The second exhaust valve (8) is connected to the a port of the three-way valve III (3) via a pipeline. The first inlet valve (6) is connected to the b port of the three-way valve IV (4) via a pipeline. The a port of the three-way valve IV (4) is connected to the b port of the three-way valve III (3) via a pipeline. The third outlet valve (15) is connected to the three-way valve III (3) via a pipeline. The c port of the three-way valve III (3) is connected, the c port of the three-way valve IV (4) is connected to the vacuum interface, the second inlet valve (13) is connected to the nitrogen outlet valve (11) through a pipeline, the nitrogen outlet valve (11) is connected to the pipeline of the nitrogen inlet valve (10) and the three-way valve I (1) through a pipeline, the first outlet valve (7) is connected to the first tail gas valve (5) through a pipeline, the first tail gas valve (5) is connected to the pipeline of the second tail gas valve (8) and the three-way valve III (3) through a pipeline.

2. The High-K precursor material filling module according to claim 1, characterized in that: A bypass valve (16) is installed between the second outlet valve (12) and the second inlet valve (13), between the third inlet valve (14) and the third outlet valve (15), and between the first inlet valve (6) and the first outlet valve (7).

Images