Air blowing plate, cleaning device and apparatus
By designing the contraction and expansion tube structures within the nozzle, the gas flow rate is converted from subsonic to supersonic, solving the problem of flow rate attenuation in the blowing component under vacuum conditions and improving the cleanliness and reliability of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHENZHEN XINGGUANG LISUO TECHNOLOGY CO LTD
- Filing Date
- 2025-07-07
- Publication Date
- 2026-06-26
AI Technical Summary
Existing air blowing components exhibit rapid airflow velocity reduction in a vacuum environment, making it difficult to remove contaminants from the surfaces of equipment components, thus reducing cleanliness and affecting the reliability of equipment use.
Design an air blowing plate that uses a constriction tube and expansion tube structure inside the nozzle to change the gas flow velocity from subsonic to supersonic. Through the combination of multi-stage air intake units and nozzles, ensure uniform gas flow velocity distribution and increase coverage area.
It increases gas flow rate, ensures the cleanliness of equipment component surfaces, prevents contaminant deposition, and improves equipment reliability and cleaning effectiveness.
Smart Images
Figure CN224405942U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of cleanroom management technology, and more particularly to an air blowing plate, cleaning device, and equipment. Background Technology
[0002] In vacuum environments, equipment such as semiconductor manufacturing, pharmaceutical, and chemical manufacturing equipment typically requires a high degree of cleanliness for the surfaces of its internal components. Currently, air-blowing components are commonly used to create air curtains to isolate or blow away dust and other contaminants, preventing their accumulation on the surfaces of internal components. However, the airflow velocity from existing air-blowing components rapidly decreases, making it difficult to completely remove dust and other contaminants from the component surfaces. This reduces the cleanliness of the component surfaces, potentially causing equipment malfunction and impacting its reliability. Utility Model Content
[0003] This application provides an air blowing plate, a cleaning device, and an equipment that can increase the flow rate of the gas ejected from the air blowing plate, solve the problem of rapid gas flow rate decay, and ensure a high degree of cleanliness on the surface of the equipment's components, thereby ensuring the reliability of the equipment.
[0004] In a first aspect, this application provides an air blowing plate having a first end and a second end. The air blowing plate is provided with a gas flow channel and a nozzle, both of which are located inside the air blowing plate. The gas flow channel has an air inlet and an air outlet. The air inlet is located at the first end. The nozzle includes a contraction tube and an expansion tube connected to each other. The air outlet, the contraction tube, and the expansion tube are sequentially connected. The expansion tube has a jet outlet facing away from the contraction tube. The jet outlet is located at the second end. In the direction from the first end to the second end, the inner diameter of the contraction tube gradually decreases, and the inner diameter of the expansion tube gradually increases.
[0005] In this embodiment, the gas first enters the gas flow channel of the blowing plate. At this time, the gas velocity in the gas flow channel is less than the speed of sound. That is, the gas in the gas flow channel is subsonic gas. After the gas enters the nozzle from the outlet of the gas flow channel, it first enters the constriction tube of the nozzle, and then enters the expansion tube through the throat of the nozzle. Specifically, when the gas is in the constriction tube, the gas pressure gradually increases as the inner diameter of the constriction tube gradually decreases from the first end to the second end. At this time, the pressure energy of the gas is converted into kinetic energy, causing the gas to accelerate and the gas velocity gradually increases. When the gas passes through the throat of the nozzle, the gas velocity reaches the speed of sound. After entering the expansion tube, the gas further expands as the inner diameter of the expansion tube gradually increases from the first end to the second end, and the pressure energy of the gas continues to be converted into kinetic energy, causing the gas velocity to exceed the speed of sound. Finally, the gas is ejected from the nozzle. At this time, the gas ejected by the blowing plate is supersonic gas. That is, the Mach number of the gas ejected by the blowing plate is greater than 1.
[0006] It is understandable that by setting nozzles inside the blowing plate, and making the nozzles include contraction and expansion tubes arranged along the gas flow direction, the pressure energy of the gas is converted into kinetic energy under the acceleration effect of the contraction and expansion tubes of the nozzles. This allows the gas velocity to continuously change from subsonic to supersonic, increasing the flow velocity of the gas ejected from the blowing plate. Compared to existing blowing components where the highest Mach number of the ejected gas can only reach 1, the blowing plate of this application can increase the flow velocity of the gas ejected from the blowing plate to above the speed of sound, making the Mach number of the gas greater than 1. This ensures that the gas ejected from the blowing plate can maintain high-speed flow even in a vacuum environment, thereby solving the problem of rapid velocity decay of the gas ejected from the blowing plate in a vacuum environment and ensuring good cleaning effect of the blowing plate on contaminants. Furthermore, the gas flow channel and nozzles are set inside the blowing plate, which can reduce the assembly steps of the gas flow channel and nozzles. In addition, due to the plate-shaped design of the blowing plate, it can be embedded in narrow slits to achieve contamination control in narrow spaces.
[0007] In one possible implementation, there are multiple air outlets, each positioned opposite to and spaced apart from the air inlet; there are multiple nozzles, each nozzle's constriction tube connected to one of the air outlets. It is understood that by providing multiple nozzles, with each nozzle corresponding to and connected to an air outlet, the coverage area of the gas ejected from the air-blowing plate can be increased, achieving large-area coverage of pollutants, thereby improving the cleaning effect of the air-blowing plate in removing pollutants.
[0008] In one possible implementation, the gas flow channel includes at least N stages of air intake units, where N is an integer greater than or equal to 1. Each stage of the air intake unit includes at least one air intake group. Each air intake group includes a uniform air distribution section and two air distribution sections. Both air distribution sections are connected to the uniform air distribution section. The uniform air distribution section has a first port located away from the air distribution sections, and each air distribution section has a second port located away from the uniform air distribution section. The multiple stages of the air intake units are respectively the 1st stage air intake unit to the Nth stage air intake unit, which are connected sequentially. In the 1st stage air intake unit, the first port of the air intake group is connected to the air intake port. In the Nth stage air intake unit, the second port of the air intake group is connected to the air outlet. Between any two adjacent stages of the air intake units, one of the second ports of the mth stage air intake unit is connected to one of the first ports of the (m+1)th stage air intake unit, where m is a positive integer and m+1 is less than or equal to N.
[0009] Understandably, by including at least one intake unit in the gas channel of the blowing plate, the gas, after entering the gas equalization section from the first port, diffuses evenly within the equalization section, then passes through the two gas distribution sections, and exits from the second ports of the two gas distribution sections, thus achieving gas diversion. After diversion, the gas flows into the nozzle from the outlet in multiple paths. This configuration ensures a uniform gas flow distribution from each outlet, thereby guaranteeing a uniform gas flow distribution from the blowing plate.
[0010] In one possible implementation, in each of the air intake groups, the two air distribution sections are symmetrically arranged about the first pipe opening. With this arrangement, after the gas undergoes uniform diffusion through the gas equalization section, it enters the two air distribution sections with almost the same volume and rate, thereby achieving a balanced distribution of air pressure in the two air distribution sections of each air intake group, and thus ensuring a uniform distribution of the gas flow rate ejected from the blowing plate.
[0011] In one possible implementation, the gas channel and the nozzle are integrally formed. This configuration reduces the assembly steps of the gas channel and nozzle, improves machinability, and avoids the sealing between the gas channel and nozzle being affected by the machining accuracy and assembly accuracy of the parts. This prevents internal air leakage of the blowing plate and improves the reliability of the blowing plate.
[0012] In one possible implementation, the thickness d of the air blowing plate is greater than or equal to 2 mm and less than or equal to 20 mm. With this configuration, due to the small thickness of the air blowing plate, it can be embedded in narrow spaces, meeting the user's cleaning requirements for contaminants in these spaces and preventing the accumulation of contaminants, thereby achieving pollution control in narrow spaces.
[0013] Secondly, this application also provides a cleaning device, which includes an air pump, a collection component, and an air-blowing plate as described above. The air pump is connected to the air inlet and is used to input gas into the gas flow channel. The collection component is disposed opposite to the expansion tube and is used to collect the gas output from the jet nozzle. The cleaning device provided by this application, by employing the aforementioned air-blowing plate, can improve the cleaning effect on contaminants. Furthermore, contaminants blown away by the air-blowing plate are easily dispersed. By setting up the collection component and using it to collect the gas output from the air-blowing plate, contaminants carried in the gas output from the air-blowing plate can be drawn into the collection component, preventing the contaminants carried in the output gas from dispersing, thereby achieving the collection and cleaning of contaminants.
[0014] Thirdly, this application also provides an apparatus comprising a cavity, a component to be cleaned, and a cleaning device as described above. The cavity has a working chamber, and both the component to be cleaned and the cleaning device are located within the working chamber. The component to be cleaned includes a surface to be cleaned and a fixed surface, which are disposed opposite to each other. At least a portion of the surface to be cleaned is located on the side of the second end opposite to the first end, and the air jet is located on the side of the surface to be cleaned opposite to the fixed surface.
[0015] In this embodiment, the gas output from the air jet nozzle of the air blowing plate can form an air curtain on the side of the surface to be cleaned away from the fixed surface, so as to isolate or blow away pollutants, thereby preventing pollutants from depositing on the surface to be cleaned, ensuring a high degree of cleanliness of the surface to be cleaned, and thus avoiding pollutants from affecting the normal operation of the equipment, ensuring good reliability of the equipment.
[0016] In one possible implementation, the nozzle has a central axis, and the angle between the central axis and the surface to be cleaned is greater than or equal to 0° and less than 180°. In this embodiment, by adjusting the positional relationship between the central axis of the nozzle and the surface to be cleaned, the direction of the gas ejected from the nozzle's air outlet can be changed, thereby achieving pollution suppression or cleaning of contaminants on the surface to be cleaned, preventing contaminants from depositing on the surface to be cleaned, ensuring a high degree of cleanliness of the surface to be cleaned, and thus helping to ensure the normal operation of the equipment and improve the reliability of the equipment.
[0017] In one possible implementation, the surface to be cleaned is planar, and the cross-sectional shape of the air jet is rectangular. The rectangular air jet can better match the planar surface to be cleaned, allowing the airflow to cover the surface more evenly and improving cleaning efficiency. Attached Figure Description
[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the background art, the accompanying drawings used in the embodiments of this application or the background art will be described below.
[0019] Figure 1 This is a schematic diagram of the structure of a device provided in this application;
[0020] Figure 2 yes Figure 1 A schematic diagram of the cross-sectional structure of the air blowing plate of the cleaning device in the equipment shown, cut along point AA.
[0021] Figure 3 yes Figure 2 A schematic diagram of the cross-sectional structure of the air blowing plate at another angle;
[0022] Figure 4 yes Figure 2 The diagram shows a cross-sectional structure of the air blowing plate after it is cut along BB in the first embodiment.
[0023] Figure 5 yes Figure 2 Enlarged view of region C in the middle;
[0024] Figure 6 yes Figure 5 A schematic diagram of the first-stage intake unit in the gas flow channel shown;
[0025] Figure 7 yes Figure 5 A schematic diagram of the second-stage intake unit in the gas flow channel shown;
[0026] Figure 8 yes Figure 2 Enlarged schematic diagram of region D in the middle;
[0027] Figure 9 yes Figure 2 A partial structural schematic diagram of a specific example of the air blowing plate shown;
[0028] Figure 10 yes Figure 2 A schematic diagram of the flow field simulation of the gas ejected from the blowing plate.
[0029] Figure 11 It is gas from Figure 4 A schematic diagram showing the trajectory of the air ejected from the blowing plate;
[0030] Figure 12 The items to be cleaned and Figure 2 The diagram shows a cross-sectional structure of the air blowing plate after it is cut along BB in the second embodiment.
[0031] Figure 13 It is gas from Figure 12 A schematic diagram showing the trajectory of the air ejected from the blowing plate;
[0032] Figure 14 The items to be cleaned and Figure 2The diagram shows a cross-sectional structure of the air blowing plate after it is cut along BB in the third embodiment.
[0033] Figure 15 It is gas from Figure 14 The diagram shows the trajectory of the air ejected from the blowing plate.
[0034] Explanation of reference numerals in the attached figures:
[0035] 10-Gas flow channel; 11-Intake group;
[0036] 100 - Equipment; 110 - Cavity; 120 - Item to be cleaned; 130 - Cleaning device; 131 - Air blowing plate; 132 - Air pump; 133 - Collection item; 101 - Air inlet; 102 - Air outlet; 111 - Air distribution section; 112 - Air distribution section; 11a - Primary air inlet group; 11b - Secondary air inlet group; 10U - Air inlet unit; 10U1 - First-stage air inlet unit; 10U2 - Second-stage air inlet unit;
[0037] 110a - Working chamber; 120a - Surface to be cleaned; 120b - Fixed surface; 131a - First end; 131b - Second end; 1111 - First port; 1112 - Second port; 111a - Primary gas equalization section; 112a - Primary gas distribution section; 111b - Secondary gas equalization section; 112b - Secondary gas distribution section;
[0038] 20 - Nozzle; 21 - Contraction tube; 22 - Expansion tube;
[0039] 221 - Jet nozzle; 201 - Central axis. Detailed Implementation
[0040] The embodiments of this application are described below with reference to the accompanying drawings.
[0041] Embodiments of this application provide an air-blowing plate, a cleaning device, and an apparatus. The air-blowing plate is used in the cleaning device. The cleaning device can be used in the apparatus. The apparatus can be, but is not limited to, semiconductor manufacturing equipment, pharmaceutical equipment, and chemical equipment, which require high surface cleanliness of their components in a vacuum environment and need self-cleaning capabilities. For example, the apparatus can be a rapid thermal processing apparatus. In semiconductor manufacturing, rapid thermal processing equipment can heat the substrate of a wafer to selectively or non-selectively produce high-quality single-crystal thin films with the same crystal structure as the substrate on the substrate surface, or perform annealing treatments on the wafer. In semiconductor manufacturing, rapid thermal processing equipment typically needs to operate in a vacuum environment to ensure extremely high surface cleanliness of its components, thereby preventing damage to the wafer caused by contaminants such as particles or impurities adhering to the component surface.
[0042] In other embodiments, the device may also be located in an atmospheric environment and require a self-cleaning function; this application does not impose any limitations on this. For example, the device may be a cleaning device for a cleanroom or a household cleaning machine. Here, "cleanroom" refers to a space where the air cleanliness reaches a specified level and is suitable for human activity.
[0043] Please see Figure 1 , Figure 1 This is a schematic diagram of the structure of a device 100 provided in this application.
[0044] In this embodiment, the device 100 includes a cavity 110, a component to be cleaned 120, and a cleaning device 130. The cavity 110 has a working chamber 110a. Both the component to be cleaned 120 and the cleaning device 130 are located within the working chamber 110a. Exemplarily, the component to be cleaned 120 is fixedly mounted on the wall of the working chamber 110a. The component to be cleaned 120 includes a surface to be cleaned 120a and a fixing surface 120b, which are disposed opposite to each other. The fixing surface 120b is used to fix it to the wall of the working chamber 110a.
[0045] The cleaning device 130 is used to purge the surface 120a to be cleaned, thereby isolating or removing contaminants to ensure a high level of cleanliness. Specifically, the cleaning device 130 includes an air blowing plate 131 and an air pump 132. The air pump 132 is connected to the air blowing plate 131 and is used to input gas into the air blowing plate 131. The flow rate of the gas input into the air blowing plate 131 by the air pump 132 is between 1 SLM and 10 SLM (Standard Liters per Minute). The air blowing plate 131 is used to output gas to isolate or purge contaminants using gas, thereby ensuring a high level of cleanliness of the surface 120a to be cleaned.
[0046] In some other embodiments, when the device 100 is in an atmospheric environment, the cleaning device 130 also includes a collection element 133. The collection element 133 is located on the side of the blowing plate 131 away from the air pump 132 and is used to collect the gas output from the blowing plate 131. Exemplarily, the collection element 133 can be a suction nozzle. It is understood that when the cleaning device 130 is in an atmospheric environment, contaminants blown away by the blowing plate 131 are easily dispersed. By providing the collection element 133 in the working chamber 110a, contaminants carried in the gas output from the blowing plate 131 can be drawn into the collection element 133, preventing contaminants from dispersing within the working chamber 110a, thereby achieving the collection and cleaning of contaminants. Furthermore, by adjusting the installation position of the collection element 133 within the working chamber 110a, the flow field design within the working chamber 110a can be adjusted, ensuring that all dispersed contaminants are collected into the collection element 133, thus optimizing the cleaning effect of the cleaning device 130.
[0047] Please refer to the following: Figure 2 , Figure 3 and Figure 4 , Figure 2 yes Figure 1 A schematic diagram of the cross-sectional structure of the air blowing plate 131 of the cleaning device 130 in the device 100 shown, cut along point AA. Figure 3 yes Figure 2 The diagram shows a cross-sectional view of the air blowing plate 131 from another angle. Figure 4 yes Figure 2 The diagram shows a cross-sectional view of the air-blowing plate 131 after it has been cut along line BB in the first embodiment. "Cut along line AA" means cutting along the plane containing line AA, and "cut along line BB" means cutting along the plane containing line BB. Furthermore, for ease of description, the width direction of the air-blowing plate 131 is designated as the first direction X, the length direction as the second direction Y, and the thickness direction as the third direction Z. The first direction X, the second direction Y, and the third direction Z are arranged in pairs.
[0048] In this embodiment, the air blowing plate 131 has a thin plate structure. For example... Figure 4As shown, the thickness d of the air blowing plate 131 is greater than or equal to 2 mm and less than or equal to 20 mm. In actual production, the thickness of the air blowing plate 131 can be adjusted based on factors such as the design of the internal flow channel and the actual installation environment of the air blowing plate 131 in the equipment 100. It is understood that by setting the thickness of the air blowing plate 131 between 4 mm and 20 mm, it is ensured that the air blowing plate 131 is relatively thin, allowing it to be embedded in the narrow gap between two components in the equipment 100, meeting the installation requirements of the cleaning device 130 in confined spaces and other scenarios, thus achieving cleaning of confined spaces where dust easily accumulates. For example, the thickness of the air blowing plate 131 is 3 mm, the length of the air blowing plate 131 is 300 mm, and the width of the air blowing plate 131 is 200 mm. Furthermore, the air blowing plate 131 can be made of a hard metal material. The hard metal material has a hardness range between 250 HV and 600 HV. For example, the air blowing plate 131 may be made of stainless steel or aluminum alloy.
[0049] Specifically, the air blowing plate 131 has a first end 131a and a second end 131b. Along the first direction X, the first end 131a and the second end 131b are spaced apart and arranged opposite to each other. At least a portion of the surface 120a of the part to be cleaned 120 is located on the side of the second end 131b opposite to the first end 131a.
[0050] The blowing plate 131 is provided with a gas flow channel 10 and a nozzle 20, both of which are located inside the blowing plate 131. In this embodiment, the gas flow channel 10 and the nozzle 20 are integrally formed. Exemplarily, the gas flow channel 10 and the nozzle 20 can be formed on the inner side of the blowing plate 131 by 3D printing integral forming. It is understood that by using 3D printing integral forming to form the gas flow channel 10 and the nozzle 20 on the inner side of the blowing plate 131, the assembly steps of the gas flow channel 10 and the nozzle 20 can be reduced, resulting in high machinability. It can also avoid the sealing between the gas flow channel 10 and the nozzle 20 being affected by the machining accuracy of the parts and the assembly accuracy between the parts, thereby preventing air leakage inside the blowing plate 131 and thus improving the reliability of the blowing plate 131. In some other embodiments, the gas flow channel 10 and the nozzle 20 can also be formed on the inner side of the blowing plate 131 by casting or machining methods to achieve integral forming of the gas flow channel 10 and the nozzle 20.
[0051] Please refer to the following: Figure 2 and Figure 5 , Figure 5 yes Figure 2 A magnified view of region C in the middle.
[0052] In this embodiment, the gas flow channel 10 has an inlet 101 and an outlet 102. Specifically, the inlet 101 is located at the first end 131a. The inlet 101 is connected to the air pump 132 so that the gas generated by the air pump 132 can be input into the gas flow channel 10 through the inlet 101 and output through the outlet 102. In this embodiment, there are multiple outlets 102, which are spaced apart from each other.
[0053] Specifically, the gas flow channel 10 includes at least N stages of intake units 10U, where N is a positive integer greater than or equal to 1. Each stage of intake unit 10U includes at least one intake group 11. For example... Figure 5 As shown, each air intake assembly 11 includes an air equalization section 111 and two air distribution sections 112. The air equalization section 111 has a first port 1111 facing a first end 131a. The first port 1111 allows gas to enter the air equalization section 111. The two air distribution sections 112 are each connected to the side of the air equalization section 111 opposite to the first port 1111 and communicate with the air equalization section 111. For example, the two air distribution sections 112 are spaced apart along the second direction Y. Each air distribution section 112 has a second port 1112 located away from the air equalization section 111. The second ports 1112 of the two air distribution sections 112 communicate with the first port 1111 and are spaced apart from each other. For example, the two second ports 1112 are spaced apart along the second direction Y. In this embodiment, after the gas enters the gas equalization section 111 from the first port 1111, it will diffuse evenly in the gas equalization section 111, then pass through the two gas distribution sections 112, and be output from the second port 1112 of the two gas distribution sections 112, so as to realize the gas diversion process.
[0054] Furthermore, in each air intake group 11, the two gas distribution sections 112 are symmetrically arranged about the first port 1111. With this arrangement, after the gas is uniformly diffused by the gas equalization section 111, it can enter the two gas distribution sections 112 with almost the same volume and rate, thereby achieving a balanced distribution of gas pressure in the two gas distribution sections 112 of each air intake group 11. In some other embodiments, the two gas distribution sections 112 in each air intake group 11 may also be asymmetrically arranged; this application does not impose any restrictions on this.
[0055] In this embodiment, the intake unit 10U has multiple stages. The multiple intake units 10U are the first stage intake unit 10U1 to the Nth stage intake unit (not shown in the figure). Along the first direction X shown in the figure, the first stage intake unit 10U1 to the Nth stage intake unit are connected sequentially. In the first stage intake unit 10U1, the first port 1111 of the intake group 11 is connected to the intake port 101. In the Nth stage intake unit, the second port 1112 of the intake group 11 is connected to the exhaust port 102. Between any two adjacent stages of intake units 10U, a second port 1112 of the mth stage intake unit (not shown in the figure) is connected to a first port 1111 of the (m+1)th stage intake unit (not shown in the figure). Here, m is a positive integer, and m+1 is less than or equal to N.
[0056] It is understood that by including multiple stages of air intake units 10U in the gas flow channel 10 of the blowing plate 131, the gas can be evenly distributed through the air intake group 11 in each stage of the air intake unit 10U during the process of the gas passing through the gas flow channel 10. Finally, the gas is divided into multiple paths and flows into the nozzle 20 from the air outlet 102. With this configuration, it can be ensured that the gas flow rate of each air outlet 102 is evenly distributed, thereby ensuring that the gas flow rate ejected by the blowing plate 131 is evenly distributed.
[0057] In addition, such as Figure 5 As shown, in any two adjacent intake units 10U, the gas equalization section 111 of the (m+1)th intake unit, which is connected to the gas distribution section 112 of the mth intake unit, is symmetrically arranged with respect to the gas equalization section 111 of the mth intake unit. With this arrangement, the gas flow channel 10 has a symmetrical structure as a whole, thereby ensuring the uniformity of the gas output from the outlet 102 of the gas flow channel 10.
[0058] The following will be based on Figure 5 The structure of a gas flow channel 10 shown is illustrated as an example.
[0059] Please refer to the following: Figure 5 and Figure 6 , Figure 6 yes Figure 5 A schematic diagram of the structure of the first-stage intake unit 10U1 in the gas flow channel 10 shown.
[0060] like Figure 5 As shown, the gas flow channel 10 has two stages of intake units 10U, namely, the first-stage intake unit 10U1 and the second-stage intake unit 10U2. The first-stage intake unit 10U1 includes a first-stage intake group 11a, which includes a first-stage gas equalization section 111a and two first-stage gas distribution sections 112a, both of which are connected to the first-stage gas equalization section 111a. Specifically, in the first-stage intake group 11a, the first port 1111 of the first-stage gas equalization section 111a is connected to the intake port 101.
[0061] Please refer to the following: Figure 5 and Figure 7 , Figure 7 yes Figure 5 A schematic diagram of the structure of the second-stage intake unit 10U2 in the gas flow channel 10 shown.
[0062] The second-stage intake unit 10U2 includes two second-stage intake groups 11b. Each second-stage intake group 11b of the second-stage intake unit 10U2 includes a second-stage air distribution section 111b and two second-stage air distribution sections 112b, with both second-stage air distribution sections 112b communicating with the second-stage air distribution section 111b. The second-stage air distribution section 111b of each second-stage intake group 11b is connected to a second port 1112 of the first-stage intake group 11a. At this time, the first port 1111 of each second-stage air distribution section 111b coincides with a second port 1112 of the first-stage intake group 11a.
[0063] When the gas generated by the air pump 132 is input into the gas flow channel 10 through the air inlet 101, the gas first enters the first-stage uniform gas distribution section 111a of the first-stage air intake unit 10U1. After being uniformly diffused in the first-stage uniform gas distribution section 111a, the gas enters the two first-stage gas distribution sections 112a for diversion. At this time, the gas completes the first diversion in the first-stage air intake unit 10U1. The gas in each first-stage gas distribution section 112a enters one of the second-stage uniform gas distribution sections 111b of the second-stage air intake unit 10U2. After being uniformly diffused in the second-stage uniform gas distribution section 111b, the gas enters the two second-stage gas distribution sections 112b for diversion. At this time, the gas completes the second diversion in the second-stage air intake unit 10U2, forming four airflow paths. Finally, the four airflow paths enter the corresponding nozzles 20 through the air outlet 102 of the gas flow channel 10.
[0064] During this process, since each intake unit 11 can evenly divide one gas stream into two airflow streams, the four airflow streams formed after the gas undergoes two splits have almost the same volume and velocity, enabling a balanced distribution of air pressure within the gas flow channel 10. Simultaneously, the gas distribution sections 112 in each intake unit 10U are relatively independent, preventing cross-flow of gas within each section 112 and achieving precise control of airflow distribution. This, in turn, improves the uniformity of airflow distribution output by the blowing plate 131.
[0065] Please refer to the following: Figure 2 , Figure 8 and Figure 9 , Figure 8 yes Figure 2 Enlarged diagram of region D in the middle. Figure 9 yes Figure 2 A partial structural schematic diagram of a specific example of the air blowing plate 131 shown.
[0066] In this embodiment, the nozzle 20 is located on the side of the air outlet 102 opposite to the air inlet 101. For example, the nozzle 20 is a Laval nozzle. In this embodiment, as... Figure 8 As shown, the edge profile of nozzle 20 is a polygonal shape. In some other embodiments, such as... Figure 9 As shown, the edge contour of the nozzle 20 can also be curved, and this application does not impose strict restrictions on this.
[0067] Specifically, the nozzle 20 includes a contraction tube 21 and an expansion tube 22 connected to each other. The air outlet 102, the contraction tube 21, and the expansion tube 22 are connected in sequence. In this embodiment, as... Figure 2 As shown, the contraction tube 21 is connected to and communicates with the outlet 102 of the gas flow channel 10 to achieve communication with the gas flow channel 10. The inner diameter of the contraction tube 21 gradually decreases from the first end 131a to the second end 131b. For example, the inner diameter of the contraction tube 21 gradually decreases in the second direction Y from the first end 131a to the second end 131b. In some other embodiments, the inner diameter of the contraction tube 21 may also gradually decrease in the third direction Z from the first end 131a to the second end 131b; this application does not impose strict limitations on this.
[0068] In this embodiment, along the second direction Y, the inner diameter W1 of the end of the contraction tube 21 facing the air outlet 102 is between 5 and 15 mm. For example, along the second direction Y, the inner diameter W1 of the end of the contraction tube 21 facing the air outlet 102 is 10 mm. Along the first direction X, the length L1 of the contraction tube 21 along the first direction X is between 5 and 15 mm. For example, along the first direction X, the length L1 of the contraction tube 21 is 10 mm.
[0069] The expansion tube 22 is connected to the contraction tube 21. Along the first direction X, the length L2 of the expansion tube 22 is between 5 and 15 mm. For example, along the first direction X, the length L2 of the expansion tube 22 is 10 mm. Along the direction away from the gas flow channel 10, the inner diameter of the expansion tube 22 gradually increases. That is, from the first end 131a to the second end 131b, the inner diameter of the expansion tube 22 gradually increases. For example, from the first end 131a to the second end 131b, the inner diameter of the expansion tube 22 in the second direction Y gradually increases. In some other embodiments, from the first end 131a to the second end 131b, the inner diameter of the expansion tube 22 in the third direction Z may also gradually increase; this application does not impose strict limitations on this.
[0070] In this embodiment, the expansion tube 22 has a jet nozzle 221 facing away from the contraction tube 21. The jet nozzle 221 is located at the second end 131b and on the side of the surface 120a to be cleaned of the part 120 that faces away from the fixed surface 120b. The inner diameter W2 of the jet nozzle 221 is between 5 and 15 mm. For example, the inner diameter W2 of the jet nozzle 221 is 10 mm. In this embodiment, the jet nozzle 221 is rectangular, and the surface 120a to be cleaned is planar. The rectangular jet nozzle 221 better matches the planar surface 120a to be cleaned, allowing the airflow to cover the surface 120a more evenly and improving cleaning efficiency. In other embodiments, the jet nozzle 221 may also be circular, elliptical, or other irregular shapes; this application does not impose strict limitations on this.
[0071] In this embodiment, by providing a jet nozzle 221 at the second end 131b, the gas is ejected from the jet nozzle 221 and passes through at least part of the surface to be cleaned 120a, thereby isolating or blowing away contaminants, preventing contaminant deposition on the surface to be cleaned 120a, and ensuring the high cleanliness of the surface to be cleaned 120a.
[0072] Furthermore, the end of the expander tube 22 facing the contraction tube 21 and the end of the contraction tube 21 facing the outlet 102 together form the throat of the nozzle 20. Along the second direction Y, the inner diameter of the end of the contraction tube 21 facing away from the outlet 102 is between 0.6 mm and 4 mm, and the inner diameter of the end of the expander tube 22 facing the contraction tube 21 is also between 0.6 mm and 4 mm. In this embodiment, the inner diameter of the end of the expander tube 22 facing the contraction tube 21 is equal to the inner diameter of the end of the contraction tube 21 facing the outlet 102. For example, the inner diameter of the end of the contraction tube 21 facing away from the outlet 102 is 1 mm, and the inner diameter of the end of the expander tube 22 facing the contraction tube 21 is 1 mm. That is, the inner diameter of the throat of the nozzle 20 is 1 mm. With this setting, good flow of gas from the contraction tube 21 into the expander tube 22 can be ensured.
[0073] Please see Figure 10 , Figure 10 yes Figure 2 A schematic diagram of the flow field simulation of the gas ejected from the blowing plate 131 is shown.
[0074] This application conducts a simulation experiment on the gas flow field ejected from the aforementioned air blowing plate 131, and the results are as follows: Figure 10As shown. Experimental results show that the gas velocity inside the blowing plate 131 is less than the speed of sound, which is 340 m / s. At this point, the Mach number of the gas is less than 1. In other words, the gas inside the blowing plate 131 is subsonic gas. The Mach number refers to the ratio of gas velocity to the speed of sound. When the gas is ejected from the blowing plate 131, its velocity exceeds the speed of sound. At this point, the Mach number of the gas ejected from the blowing plate 131 is greater than 1. In other words, the gas ejected from the blowing plate 131 is supersonic gas. Therefore, the blowing plate 131 provided in this application can achieve a continuous conversion from subsonic to supersonic gas, increasing the velocity of the gas ejected from the blowing plate 131.
[0075] Please refer to it again. Figure 2 In this embodiment, the gas generated by the air pump 132 first enters the gas flow channel 10 of the blowing plate 131 and is split within the gas flow channel 10 to ensure that the airflow ejected by the blowing plate 131 is uniformly distributed. At this time, the gas velocity in the gas flow channel 10 is less than the speed of sound. That is, the gas in the gas flow channel 10 is subsonic gas. After the gas enters the nozzle 20 from the outlet 102 of the gas flow channel 10, it first enters the contraction tube 21 of the nozzle 20, and then enters the expansion tube 22 through the throat of the nozzle 20. Specifically, when the gas is in the contraction tube 21, the gas pressure gradually increases because the inner diameter of the contraction tube 21 gradually decreases from the first end 131a to the second end 131b. At this time, the pressure energy of the gas is converted into kinetic energy, causing the gas to accelerate and the gas velocity gradually increases. When the gas passes through the throat of the nozzle 20, the gas velocity reaches the speed of sound. After entering the expansion tube 22, the gas expands further due to the gradual increase in the inner diameter of the expansion tube 22 from the first end 131a to the second end 131b. The pressure energy of the gas continues to be converted into kinetic energy, causing the gas velocity to exceed the speed of sound. Finally, the gas is ejected from the jet nozzle 221. At this point, the gas ejected from the blowing plate 131 is supersonic gas. That is, the Mach number of the gas ejected from the blowing plate 131 is greater than 1.
[0076] It is understood that by providing a nozzle 20 inside the blowing plate 131, and making the nozzle 20 include a contraction tube 21 and an expansion tube 22 arranged along the gas flow direction, the pressure energy of the gas is converted into kinetic energy under the acceleration effect of the contraction tube 21 and the expansion tube 22 of the nozzle 20, so that the gas velocity can achieve a continuous change from subsonic to supersonic speed, thereby increasing the flow velocity of the gas ejected by the blowing plate 131. Compared with the existing blowing components, the maximum Mach number of the gas ejected can only reach 1, the blowing plate 131 of this application can increase the flow velocity of the gas ejected by the blowing plate 131 to above the speed of sound, so that the Mach number of the gas ejected by the blowing plate 131 is greater than 1, ensuring that the gas ejected by the blowing plate 131 can still maintain high-speed flow in a vacuum environment, thereby solving the problem of rapid attenuation of the flow velocity of the gas ejected by the blowing plate 131 in a vacuum environment, and thus ensuring that the cleaning device 130 has a good cleaning effect on the part to be cleaned 120. Meanwhile, since the inner diameter of the end of the contraction tube 21 facing the expansion tube 22 is equal to the inner diameter of the end of the expansion tube 22 facing the contraction tube 21, the gas flows smoothly from the contraction tube 21 into the expansion tube 22, which can further ensure the smoothness of the gas flow rate from subsonic speed to supersonic speed, and improve the reliability of the blowing plate 131.
[0077] In addition, since the air blowing plate 131 adopts a plate-shaped design, the air blowing plate 131 can be embedded in the narrow space between two components in the equipment 100, thereby achieving pollution control in the narrow space inside the equipment 100, improving the cleanliness of the surface of the components inside the equipment 100, preventing pollutants from affecting the normal operation of the equipment 100, and ensuring the good reliability of the equipment 100.
[0078] Please refer to the following: Figure 4 and Figure 11 , Figure 11 It is gas from Figure 4 A schematic diagram showing the trajectory of the gas ejected from the blowing plate 131. The arrows indicate the direction of the gas flow.
[0079] The nozzle 20 also has a central axis 201, and the included angle α between the central axis 201 and the surface 120a to be cleaned is ( Figure 4 (not shown in the diagram) The angle is greater than or equal to 0° and less than 180°. In this embodiment, the angle between the central axis 201 and the surface 120a to be cleaned is 0°. Figure 11 As shown, gas is ejected from the jet outlet 221 of the nozzle 20 and flows in the first direction X. At this time, the air curtain formed by the gas ejected from the jet outlet 221 can not only isolate the contaminants, but also blow the contaminants away in the first direction X, keeping the contaminants away from the surface to be cleaned 120a, thereby preventing the contaminants from depositing on the surface to be cleaned 120a and ensuring a high degree of cleanliness of the surface to be cleaned 120a.
[0080] Please refer to it again. Figure 2In this embodiment, there are multiple nozzles 20. Along the second direction Y, the multiple nozzles 20 are arranged side-by-side. Exemplarily, along the second direction Y, the multiple nozzles 20 are spaced apart. In some other embodiments, the multiple nozzles 20 may also be arranged sequentially along the second direction Y; this application does not strictly limit the distance between two adjacent nozzles 20. In this embodiment, the contraction tube 21 of each nozzle 20 is connected to the outlet 102 of a gas flow channel 10. The expansion tube 22 of each nozzle 20 is connected to a contraction tube 21.
[0081] It is understandable that by setting multiple nozzles 20 and ensuring that each nozzle 20 corresponds to and is connected to an air outlet 102, the coverage area of the gas ejected by the air blowing plate 131 can be increased, achieving large-area coverage of the surface 120a to be cleaned. This further enhances the inhibitory effect of the cleaning device 130 on contaminants, thereby further improving the cleaning effect of the cleaning device 130 and ensuring the high cleanliness of the surface 120a of the part to be cleaned, thus helping to ensure the reliable operation of the equipment 100. At the same time, because the gas is diverted through the gas flow channel 10, the gas flow rate exiting each air outlet 102 is evenly distributed, making the gas flow rate entering each nozzle 20 also evenly distributed. This ensures that each nozzle 20 of the air blowing plate 131 achieves a balanced pressure distribution, thereby ensuring that the gas flow rate ejected from the air outlet 221 of each nozzle 20 is uniform. Furthermore, by increasing the number of branches in the gas flow channel 10, the number of air outlets 102 and nozzles 20 can be increased, thereby further increasing the coverage of the gas sprayed by the air blowing plate 131, which in turn can further improve the cleaning effect of the cleaning device 130 on contaminants and further ensure the high cleanliness of the surface 120a of the part to be cleaned 120.
[0082] Please refer to the following: Figure 12 and Figure 13 , Figure 12 It is part 120 to be cleaned and Figure 2 The diagram shows a cross-sectional view of the air-blowing plate 131 after it is cut along BB in the second embodiment. Figure 13 It is gas from Figure 12 A schematic diagram showing the trajectory of the gas ejected from the blowing plate 131. The arrows indicate the direction of the gas flow.
[0083] The air blowing plate 131 shown in this embodiment differs from the air blowing plate 131 shown in the first embodiment above in that the angle α between the central axis 201 of the nozzle 20 and the surface 120a to be cleaned is greater than 0°. In this embodiment, in the direction from the first end 131a to the second end 131b, the angle between the central axis 201 of the nozzle 20 and the surface 120a to be cleaned is greater than 0° and less than 90°. Figure 13As shown, after the gas is ejected from the nozzle 20's air outlet 221, it flows away from the surface 120a to be cleaned. At this time, the air curtain formed after the gas is ejected from the nozzle 20's air outlet 221 can not only isolate the contaminants, but also keep the contaminants away from the surface 120a to be cleaned, thereby preventing the contaminants from depositing on the surface 120a to be cleaned and ensuring a high degree of cleanliness of the surface 120a to be cleaned.
[0084] Please refer to the following: Figure 14 and Figure 15 , Figure 14 It is part 120 to be cleaned and Figure 2 The diagram shows a cross-sectional view of the air-blowing plate 131 after it is cut along BB in the third embodiment. Figure 15 It is gas from Figure 14 A schematic diagram showing the trajectory of the air ejected from the blowing plate 131.
[0085] The air-blowing plate 131 shown in this embodiment differs from the air-blowing plate 131 shown in the second embodiment above in that, in the direction from the first end 131a to the second end 131b, the angle α between the central axis 201 of the nozzle 20 and the surface 120a to be cleaned is greater than or equal to 90° and less than 180°. For example... Figure 15 As shown, the gas is ejected from the jet outlet 221 of the nozzle 20 and flows toward the surface 120a to be cleaned. At this time, since the flow velocity of the gas ejected from the air blowing plate 131 is greater than the speed of sound, the air blowing plate 131 can sweep away the contaminants on the surface 120a to be cleaned through the air curtain formed by the high-speed flowing gas, preventing the deposition of contaminants on the surface 120a to be cleaned, thereby achieving the cleaning of the surface 120a to be cleaned and ensuring a high degree of cleanliness of the surface 120a to be cleaned.
[0086] In the air blowing plate 131 provided in this application, a nozzle 20 is provided on the inner side of the air blowing plate 131. Under the acceleration action of the contraction tube 21 and expansion tube 22 of the nozzle 20, the pressure energy of the gas is converted into kinetic energy, enabling the gas velocity to continuously change from subsonic to supersonic speed. This increases the flow rate of the gas ejected from the air blowing plate 131, thereby solving the problem of rapid attenuation of the gas velocity ejected from the air blowing plate 131 in a vacuum environment. This ensures that the cleaning device 130 has a good cleaning effect on the part 120 to be cleaned. At the same time, because the air blowing plate 131 adopts a plate-shaped design, it can be embedded in the slit between the two parts 120 to be cleaned in the device 100, realizing the contamination control of the narrow space inside the device 100, improving the cleanliness of the surface 120a of the part 120 to be cleaned in the device 100, preventing contaminants from affecting the normal operation of the device 100, and ensuring the good reliability of the device 100.
[0087] Based on this, by adjusting the angle between the central axis 201 of the nozzle 20 and the surface 120a to be cleaned, the direction of the gas ejected from the air outlet 221 of the nozzle 20 can be changed, thereby achieving pollution suppression or cleaning of contaminants on the surface 120a to be cleaned, preventing contaminants from depositing on the surface 120a to be cleaned, ensuring a high degree of cleanliness of the surface 120a to be cleaned, and thus helping to ensure the normal operation of the equipment 100 and improve the reliability of the equipment 100.
[0088] The above are merely some embodiments and implementation methods of this application. The scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
Claims
1. A blow plate characterized by, The air blowing plate has a first end and a second end. The air blowing plate is provided with a gas flow channel and a nozzle. The gas flow channel and the nozzle are both located inside the air blowing plate. The gas flow channel has an air inlet and an air outlet. The air inlet is located at the first end. The nozzle includes a contraction tube and an expansion tube connected to each other. The air outlet, the contraction tube, and the expansion tube are connected in sequence. The expansion tube has a jet outlet opposite to the contraction tube. The jet outlet is located at the second end. In the direction from the first end to the second end, the inner diameter of the contraction tube gradually decreases, and the inner diameter of the expansion tube gradually increases.
2. The blow plate of claim 1, wherein, There are multiple air outlets, and each of the multiple air outlets is arranged opposite to the air inlet and is spaced apart from each other; There are multiple nozzles, and the constriction tube of each nozzle is connected to an air outlet.
3. The air-blowing plate according to claim 1 or 2, characterized in that, The gas flow channel includes at least N stages of air intake units, where N is an integer greater than or equal to 1. Each stage of the air intake unit includes at least one air intake group. Each air intake group includes a gas equalization section and two gas distribution sections. The two gas distribution sections are connected to the gas equalization section. The gas equalization section has a first port located away from the gas distribution section. Each gas distribution section has a second port located away from the gas equalization section. The multi-stage intake units are numbered from stage 1 to stage N, and are connected sequentially. In stage 1, the first port of the intake group is connected to the air inlet. In stage N, the second port of the intake group is connected to the air outlet. Between any two adjacent stages of intake units, one second port of stage m is connected to one first port of stage m+1, where m is a positive integer and m+1 is less than or equal to N.
4. The air-blowing plate according to claim 3, characterized in that, In each of the aforementioned air intake groups, the two air distribution sections are symmetrically arranged about the first pipe opening.
5. The air-blowing plate according to any one of claims 1, 2, and 4, characterized in that, The gas flow channel and the nozzle are integrally formed.
6. The air-blowing plate according to claim 3, characterized in that, The gas flow channel and the nozzle are integrally formed.
7. The air-blowing plate according to any one of claims 1, 2, 4 and 6, characterized in that, The thickness d of the air blowing plate is greater than or equal to 2 mm and less than or equal to 20 mm.
8. The air blowing plate according to claim 3, characterized in that, The thickness d of the air blowing plate is greater than or equal to 2 mm and less than or equal to 20 mm.
9. The air blowing plate according to claim 5, characterized in that, The thickness d of the air blowing plate is greater than or equal to 2 mm and less than or equal to 20 mm.
10. A cleaning device, characterized in that, It includes an air pump, a collector, and an air blowing plate as described in any one of claims 1 to 9, wherein the air pump is in communication with the air inlet and is used to input gas into the gas flow channel; the collector is disposed opposite to the expansion tube and is used to collect the gas output from the jet nozzle.
11. A device, characterized in that, The device includes a cavity, a component to be cleaned, and a cleaning device as described in claim 10. The cavity has a working chamber, and both the component to be cleaned and the cleaning device are located within the working chamber. The component to be cleaned includes a surface to be cleaned and a fixed surface, and the air jet is located on the side of the surface to be cleaned away from the fixed surface.
12. The device according to claim 11, characterized in that, The nozzle has a central axis, and the angle between the central axis and the surface to be cleaned is greater than or equal to 0° and less than 180°.
13. The device according to claim 11, characterized in that, The surface to be cleaned is a plane, and the cross-sectional shape of the jet nozzle is rectangular.