A silicon carbide crystal preparation crucible lifting device

Abstract

The utility model relates to silicon carbide crystal preparation technical field especially relates to a silicon carbide crystal preparation is used crucible lifting device, including including base, still include: restriction part, install the restriction part on the base, install the placing part on the base and be located restriction part below, and the crucible, the crucible installs in placing part, and then through the adjusting spare drive multiple connecting rods and the pawl move to the direction close to the connecting frame center axle or away, with the can adjust the clamping or release the clamping state to the crucible, rely on multiple connecting rods and the contact of crucible lateral wall, can the lateral wall of the crucible is clamped, rely on multiple pawl and the contact of the lateral wall and the bottom of crucible, can the crucible is clamped and holds, improved the stability in the process of crucible promotion, also make the promotion of the crucible is not restricted to whether the crucible has the pot rim, make the device use limitedness reduce, improved the practicality of device.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide crystal preparation technology, and in particular to a crucible lifting device for silicon carbide crystal preparation. Background Technology

[0002] Silicon carbide crystals are typically prepared using chemical vapor deposition (CVD) or high-temperature solid-state reaction methods. Silicon and carbon sources react at high temperatures, and silicon carbide is deposited from the vapor phase into a crucible to form crystals. The entire process requires precise control of temperature, atmosphere, and flow rate to ensure crystal uniformity and high purity. Using high-temperature resistant crucibles, such as graphite or silicon carbide crucibles, is crucial for ensuring stable growth.

[0003] Patent number CN115595654B, entitled "A Single Crystal Furnace Semiconductor Graphite Crucible Lifting Device," describes: "It includes a base, a furnace body fixedly mounted on the top of the base, a graphite crucible movably fitted inside the furnace body, a first fixing plate fixedly mounted on the middle of one end of the top of the base, a first guide column fixedly mounted on the outer end of the top of the base on the same side as the first fixing plate, and a telescopic rod fixedly mounted on the middle of the first fixing plate. This invention, through the coordinated structure of a fan, exhaust assembly, and pressure plate assembly, allows for better heat exchange and faster cooling of the graphite crucible during the cooling process after crucible lifting. The fan generates airflow that moves the pressure plate assembly downwards inside the fixed outer shell. The airflow enters the connecting chamber through air holes, causing cool air to be discharged from the bottom of the air duct to blow on the graphite crucible. This airflow improves the heat exchange effect inside the graphite crucible."

[0004] The above-mentioned device relies on contact with the rim of the crucible to lift it. However, not all crucibles used in the preparation of silicon carbide crystals have rims. If the above-mentioned device uses a crucible without a rim, the lifting and clamping stability of the crucible will be greatly reduced, the device will have great limitations and low practicality. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by using a limiting part to clamp the side wall of the crucible and support the bottom, thereby achieving stable clamping and lifting of crucibles with or without protruding rims. This solves the technical problem that the equipment is only applicable to crucibles with rims, which limits its use during the lifting process.

[0006] To address the above technical issues, the following technical solution is adopted:

[0007] A crucible lifting device for silicon carbide crystal preparation includes a base and further includes:

[0008] A limiting part is mounted on the base;

[0009] A placement part is mounted on the base and below the limiting part; and

[0010] Crucible, the crucible being installed inside the placement section;

[0011] During lifting, the limiting part clamps the crucible's sidewalls and supports the bottom to stably clamp and lift crucibles with or without protruding rims.

[0012] Preferably, the air intake includes: the limiting portion includes:

[0013] A column, at least one column is vertically installed above the base;

[0014] A connecting frame, which is vertically and slidably mounted on a column;

[0015] A clamping element, wherein a clamping element for holding the crucible is installed below the connecting frame; and

[0016] An adjusting component is installed above the connecting frame for adjusting the clamping state of the clamping component.

[0017] Preferably, the air intake includes: the clamping member includes:

[0018] Sliding blocks: Multiple sliding blocks are slidably arranged on the inner wall of the connecting frame;

[0019] A connecting rod is mounted below the sliding block for clamping the sidewall of the crucible; and

[0020] The bottom end of the connecting rod is equipped with a claw for supporting the bottom of the crucible.

[0021] Preferably, the air intake includes a Z-shaped connecting rod.

[0022] Preferably, the air intake includes: the adjusting member includes:

[0023] A fixing frame is mounted on the connecting frame;

[0024] A transmission rod is rotatably mounted on each of the plurality of sliding blocks;

[0025] The connecting block has the top ends of the plurality of transmission rods rotatably mounted on it.

[0026] A limiting rod, wherein the limiting rod is mounted on a fixed frame, and a connecting block is mounted on the limiting rod; and

[0027] A driving component, which is mounted on a fixed frame and has its output end mounted on a limiting rod;

[0028] The vertical height of the connecting block is adjusted by the driving component driving the limiting rod, so that multiple sliding blocks slide simultaneously toward or away from the central axis of the connecting frame.

[0029] Preferably, the air intake includes: the limiting rod has a threaded structure, and the connecting block is threaded on the limiting rod.

[0030] Preferably, the air intake includes: the placement portion includes:

[0031] A furnace body is mounted on the base and below the connecting frame;

[0032] A receiving tray, wherein a receiving tray is installed inside the furnace body, and the receiving tray is adapted to the crucible; and

[0033] The receiving plate has a movable groove that is adapted to the claw.

[0034] Preferably, the air intake includes: a drive unit mounted on the base, the drive unit comprising:

[0035] Mounting bracket, the base on which the mounting bracket is mounted; and

[0036] A power rod is mounted on a mounting bracket, and its output end is connected to a connecting bracket.

[0037] The beneficial effects of this utility model are:

[0038] In this invention, an adjusting component moves multiple connecting rods and claws toward or away from the central axis of the connecting frame, thereby adjusting the clamping or unclamping state of the crucible. The crucible's sidewall is clamped by the contact between the multiple connecting rods and the sidewall, and the crucible is clamped and supported by the contact between the multiple claws and the sidewall and bottom of the crucible. This improves the stability of the crucible during the lifting process and makes the lifting of the crucible unrestricted by whether the crucible has a rim, reducing the limitations of the device and improving its practicality.

[0039] In this invention, the clamping component can be adjusted by adjusting the distance between the sliding block and the central axis of the connecting frame. This allows the limiting part to clamp crucibles of various sizes, thereby enabling the equipment to lift crucibles of various sizes, thus improving the applicability and practicality of the device.

[0040] In summary, this device has the advantages of minimal limitations and high applicability. Attached Figure Description

[0041] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 A schematic diagram of the overall structure of the crucible lifting device used for silicon carbide crystal preparation.

[0043] Figure 2 A schematic diagram of the internal structure of the furnace body for a crucible lifting device used in the preparation of silicon carbide crystals.

[0044] Figure 3 A schematic diagram of the receiving plate, moving groove, crucible, and part of the furnace body separation structure of the crucible lifting device for silicon carbide crystal preparation.

[0045] Figure 4 An enlarged schematic diagram of the crucible and part of the limiting section of a crucible lifting device for silicon carbide crystal preparation.

[0046] Figure 5 Crucible lifting device for silicon carbide crystal preparation Figure 4 A magnified view of A in the middle.

[0047] 1. Base; 2. Drive unit; 21. Mounting bracket; 22. Power rod; 3. Limiting unit; 31. Connecting bracket; 32. Column; 33. Clamping component; 331. Sliding block; 332. Connecting rod; 333. Claw; 34. Adjusting component; 341. Fixing bracket; 342. Limiting rod; 343. Drive unit; 344. Connecting block; 345. Transmission rod; 4. Placement unit; 41. Furnace body; 42. Receiving plate; 43. Moving slot; 5. Crucible. Detailed Implementation

[0048] The technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings.

[0049] Example 1

[0050] like Figure 1 and Figure 2 As shown, a crucible lifting device for silicon carbide crystal preparation includes a base 1, and further includes: a limiting part 3, which is installed on the base 1; a placement part 4, which is installed on the base 1 and below the limiting part 3; and a crucible 5, which is installed in the placement part 4. During lifting, the limiting part 3 clamps the side wall of the crucible 5 and supports the bottom to stably clamp and lift the crucible 5 with a protruding rim or the crucible 5 without a rim.

[0051] It is worth mentioning that when the drive unit 2 drives the limiting unit 3 to rise to its highest point, the limiting unit 3 completely leaves the interior of the placement unit 4, and does not affect the installation of the cover on the placement unit 4 to reduce heat loss inside the placement unit 4.

[0052] Furthermore, such as Figures 2 to 4 As shown, the limiting part 3 includes: a column 32, at least one column 32 is vertically mounted above the base 1; a connecting frame 31, the connecting frame 31 is vertically slidably mounted on the column 32; a clamping member 33, a clamping member 33 for clamping the crucible 5 is mounted below the connecting frame 31; and an adjusting member 34, an adjusting member 34 for adjusting the clamping state of the clamping member 33 is mounted above the connecting frame 31. The clamping member 33 includes: a sliding block 331, a plurality of sliding blocks 331 are slidably mounted on the inner wall of the connecting frame 31; a connecting rod 332, a connecting rod 332 for clamping the side wall of the crucible 5 is mounted below the sliding blocks 331; and a claw 333, a claw 333 for supporting the bottom of the crucible 5 is mounted at the bottom end of the connecting rod 332. The connecting rod 332 is a Z-shaped bent rod.

[0053] In this embodiment, the connecting frame 31 can be stably raised or lowered by the column 32. The cross section of the sliding block 331 can be cross-shaped or T-shaped to ensure that the sliding block 331 slides stably within the connecting frame 31. When the connecting rod 332 is set to Z-shaped, when its lower part contacts and clamps the crucible 5, there is a certain distance between its upper part and the crucible 5. When there is a pot rim on the crucible 5, the pot rim is prevented from affecting the clamping of the lower part of the connecting rod 332 on the crucible 5.

[0054] Furthermore, such as Figures 2 to 5 As shown, the adjusting component 34 includes: a fixed frame 341, which is mounted on the connecting frame 31; transmission rods 345, which are rotatably mounted on multiple sliding blocks 331; a connecting block 344, on which the top ends of the multiple transmission rods 345 are rotatably mounted; a limiting rod 342, which is mounted on the fixed frame 341 and the connecting block 344 is mounted on the limiting rod 342; and a driving component 343, which is mounted on the fixed frame 341 and whose output end is mounted on the limiting rod 342. The driving component 343 drives the limiting rod 342 to adjust the vertical height of the connecting block 344, causing the multiple sliding blocks 331 to slide simultaneously towards or away from the central axis of the connecting frame 31. The limiting rod 342 has a threaded structure, and the connecting block 344 is threaded onto the limiting rod 342.

[0055] In this embodiment, the adjusting member 34 can drive multiple sliding blocks 331 to simultaneously approach or move away from the central axis of the connecting frame 31. Preferably, the limiting rod 342 has a threaded structure. At this time, the corresponding driving member 343 is a motor that drives the limiting rod 342 to rotate. Subsequently, the height of the connecting block 344 can be precisely adjusted by relying on the rotation of the limiting rod 342. When the position of the connecting block 344 is determined, the distance between two adjacent sliding blocks 331 is the same to ensure the stability of clamping.

[0056] Furthermore, such as Figures 2 to 4 As shown, the placement part 4 includes: a furnace body 41, which is mounted on the base 1 and below the connecting frame 31; a receiving plate 42, which is installed inside the furnace body 41 and is adapted to the crucible 5; and a moving groove 43, which is provided on the receiving plate 42 and is adapted to the claw 333.

[0057] In this embodiment, the furnace body 41 can provide high temperature to the crucible 5. This part of the structure is a mature existing technology, so it will not be described in detail. The moving groove 43 is adapted to the claw 333. When the claw 333 is inserted into the moving groove 43 and moves, part of the claw 333 can move to the bottom of the crucible 5 so that the crucible 5 can be supported in the future.

[0058] Furthermore, such as Figure 1 As shown, it also includes a drive unit 2 mounted on the base 1. The drive unit 2 includes: a mounting bracket 21, on which the base 1 is mounted; and a power rod 22, which is mounted on the mounting bracket 21 and whose output end is connected to the connecting bracket 31.

[0059] In this embodiment, the power rod 22 can drive the connecting frame 31 to rise or fall stably with the assistance of the column 32. The power rod 22 is a mature existing technology, and the model of the power rod 22 is the same as that of the telescopic rod mentioned in the background art.

[0060] Work steps

[0061] Step 1: When it is necessary to lift the crucible 5, first open the placement part 4, and then rely on the power rod 22 to drive the connecting frame 31 to slide on the column 32, so that the claw 333 descends and falls into the moving groove 43.

[0062] Step 2: The control drive component 343 drives the limit rod 342 to rotate, which in turn drives the connecting block 344 to rise under the constraint of multiple sets of transmission rods 345, sliding blocks 331 and connecting frame 31. Then, the multiple transmission rods 345 drive the corresponding sliding blocks 331 to move towards the central axis of the connecting frame 31, which causes the multiple connecting rods 332 and the claws 333 to converge, so that the lower parts of the multiple connecting rods 332 cooperate to clamp the side wall of the crucible 5, and the multiple claws 333 cooperate to support the bottom of the crucible 5, thus completing the clamping of the crucible 5. Then, the power rod 22 drives the connecting frame 31 to rise stably with the cooperation of the column 32, thus completing the lifting of the crucible 5.

[0063] In the description of this utility model, it should be understood that the terms "front and back", "left and right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model.

[0064] Of course, those skilled in the art should understand that the term "a" should be understood as "at least one" or "one or more". That is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element can be multiple. The term "a" should not be understood as a limitation on the quantity.

[0065] The above are merely preferred embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art under the technical guidance of this utility model should be included within the scope of protection of this utility model. Therefore, the scope of protection of this utility model should be determined by the scope of the claims.

Claims

1. A lifting device for a crucible for the production of silicon carbide crystals, comprising a base (1), characterized in that, Also includes: Restriction part (3), the base (1) is equipped with restriction part (3); The placement part (4) is mounted on the base (1) and below the limiting part (3); and A crucible (5) is installed inside the placement part (4); During lifting, the limiting part (3) clamps the side wall of the crucible (5) and supports the bottom to stably clamp and lift the crucible (5) with a protruding rim or without a rim.

2. The apparatus according to claim 1, wherein The limiting part (3) includes: A column (32) is vertically installed above the base (1). A connecting frame (31) is vertically slidably mounted on a column (32); Clamping member (33), a clamping member (33) for holding the crucible (5) is installed below the connecting frame (31); and Adjustment component (34): An adjustment component (34) for adjusting the clamping state of the clamping component (33) is installed above the connecting frame (31).

3. The apparatus according to claim 2, wherein the apparatus is characterized by: The clamping member (33) includes: Sliding blocks (331): Multiple sliding blocks (331) are slidably arranged on the inner wall of the connecting frame (31). A connecting rod (332) is mounted below the sliding block (331) for clamping the side wall of the crucible (5); and The bottom end of the connecting rod (332) is equipped with a claw (333) for supporting the bottom of the crucible (5).

4. The crucible lifting device for silicon carbide crystal preparation according to claim 3, characterized in that, The connecting rod (332) is a Z-shaped bent rod.

5. The crucible lifting device for silicon carbide crystal preparation according to claim 3, characterized in that, The adjusting member (34) includes: Fixing frame (341), the fixing frame (341) is installed on the connecting frame (31); A transmission rod (345) is rotatably mounted on each of the plurality of sliding blocks (331). The top ends of the plurality of transmission rods (345) are rotatably mounted on the connecting block (344); A limiting rod (342) is mounted on a fixing frame (341), and a connecting block (344) is mounted on the limiting rod (342); and A driving component (343) is mounted on a fixed frame (341), and its output end is mounted on a limiting rod (342); Among them, the vertical height of the connecting block (344) is adjusted by the driving component (343) driving the limiting rod (342), so that multiple sliding blocks (331) slide simultaneously toward the central axis of the connecting frame (31) or away from the central axis of the connecting frame (31).

6. The crucible lifting device for silicon carbide crystal preparation according to claim 5, characterized in that, The limiting rod (342) has a threaded structure, and the connecting block (344) is threaded on the limiting rod (342).

7. The crucible lifting device for silicon carbide crystal preparation according to claim 3, characterized in that, The placement part (4) includes: Furnace body (41) is installed on the base (1) and below the connecting frame (31). A receiving plate (42) is installed inside the furnace body (41), and the receiving plate (42) is compatible with the crucible (5); and The receiving plate (42) is provided with a movable groove (43) and the movable groove (43) is adapted to the claw (333).

8. The crucible lifting device for silicon carbide crystal preparation according to claim 2, characterized in that, It also includes a drive unit (2) mounted on the base (1), the drive unit (2) comprising: Mounting bracket (21), the mounting bracket (21) is mounted on the base (1); and A power rod (22) is mounted on a mounting bracket (21) and its output end is connected to a connecting bracket (31).

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