An oxidation diffusion grate exhaust device

Abstract

The utility model belongs to the technical field of oxidation diffusion furnace, concretely relates to an oxidation diffusion furnace exhaust device, including oxidation diffusion furnace main part, the outlet port department of the top left side edge of oxidation diffusion furnace main part is fixed with the exhaust pipe, the outside fixed of exhaust pipe has the exhaust tank, the both ends outlet port department of exhaust tank all are fixed with the outlet pipe, the bottom of exhaust tank is fixed in the top of oxidation diffusion furnace main part through two symmetrical support rod fixed connection, the utility model discloses an oxidation diffusion furnace exhaust device, when needing to replace the filter screen of left side, can through starting servo motor drive second gear to carry out clockwise rotation, and transmission in first gear drives inverted L type rotating pipe to rotate one hundred and eighty degrees, and then the one end of inverted L type rotating pipe is aligned with the outlet round mouth of right side exhaust cover, thereby making the waste gas in the stove can be discharged from the right end outlet round mouth, right side exhaust cover and right side outlet pipe.

Description

Technical Field

[0001] This utility model belongs to the field of oxidation diffusion furnace technology, and specifically relates to an exhaust device for an oxidation diffusion furnace. Background Technology

[0002] Oxidation diffusion furnaces are key pieces of equipment in semiconductor manufacturing and the photovoltaic industry, mainly used for processes such as oxidation, diffusion, and annealing of silicon wafers. During the process, a large amount of waste gas containing particulate matter, dopants, and reaction byproducts is generated inside the furnace. This waste gas must be discharged in a timely manner through an exhaust system to avoid polluting the furnace environment or affecting the uniformity of the process.

[0003] Existing oxidation diffusion furnace exhaust systems typically employ a top exhaust port connected to an exhaust pipe, with a filter (such as a quartz fiber filter or a sintered metal filter element) installed at the exhaust pipe's outlet to intercept solid pollutants in the exhaust gas, preventing their direct emission into the external environment or downstream waste gas treatment systems. However, this design has significant drawbacks:

[0004] Filter screen is prone to clogging: During long-term operation, particulate matter and dopants (such as oxides of phosphorus and boron) will gradually adhere to the surface of the filter screen, resulting in increased air resistance, decreased exhaust efficiency, and even affecting the stability of gas pressure inside the furnace, thereby interfering with the uniformity of the process.

[0005] Replacement requires shutdown: Clogged filters need to be manually removed and replaced, which necessitates interrupting the operation of the oxidation diffusion furnace. Semiconductor manufacturing demands extremely high equipment continuity and process stability. Frequent shutdowns not only reduce production efficiency but can also lead to inconsistent batch performance and increased scrap rates due to process interruptions. Therefore, there is an urgent need for a new type of oxidation diffusion furnace exhaust device that can enable rapid replacement of filter components the day before or after operation without requiring shutdown, while ensuring filtration effectiveness and avoiding process interruptions and production capacity losses caused by shutdowns.

[0006] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0007] The purpose of this invention is to provide an exhaust device for an oxidation diffusion furnace to solve the problem that existing filters are prone to clogging, requiring shutdown for replacement, which leads to process interruption and production loss.

[0008] To achieve the above objectives, this utility model provides the following technical solution:

[0009] An exhaust device for an oxidation diffusion furnace includes an oxidation diffusion furnace body. An exhaust pipe is fixedly connected to an outlet at the top left edge of the oxidation diffusion furnace body. An exhaust box is fixedly connected to the outside of the exhaust pipe. Exhaust pipes are fixedly connected to both ends of the exhaust box. The bottom of the exhaust box is fixedly connected to the top of the oxidation diffusion furnace body by two symmetrically arranged support rods. The top of the exhaust box has two symmetrically arranged insertion ports. A filter screen is movably inserted into each of the two insertion ports. A top plate is fixedly connected to the top of each filter screen. A handle is fixedly connected to the top of each top plate. Two symmetrically arranged baffles are movably attached to the opposite side walls of the two filter screens. The baffles are fixedly connected to the inner wall of the exhaust box. Hand-tightening screws are movably inserted into the two baffles near the top of the exhaust box. The hand-tightening screws are threaded to the outer wall of the exhaust box. A switching exhaust assembly is installed inside the exhaust box and connected to the top of the exhaust pipe.

[0010] Preferably, the switching exhaust assembly includes two symmetrically arranged exhaust hoods fixedly connected to the exhaust box, and one end of each of the two exhaust hoods is fixedly connected to the interior of the circular vent hood through an exhaust port.

[0011] Preferably, an inverted L-shaped rotating tube is rotatably connected inside the circular vent hood, the bottom end of the inverted L-shaped rotating tube is fixedly connected to the top rotating end of the rotary joint, and the bottom end of the rotary joint is fixedly connected to the top end of the exhaust pipe.

[0012] Preferably, a first gear is fixed to the outside of the inverted L-shaped rotating tube below the circular vent hood, and a second gear is meshed with the outside of the first gear.

[0013] Preferably, a servo motor is fixedly connected to the bottom of the exhaust box on the left side of the exhaust pipe, and the output shaft of the servo motor extends into the exhaust box and is fixedly connected to the mounting shaft hole of the second gear.

[0014] Preferably, the ends of the two air vents that are far apart are movably attached to the outside of the filter screen.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] (1) When the filter screen on the left side needs to be replaced, the servo motor can be started to drive the second gear to rotate clockwise, and the transmission to the first gear drives the inverted L-shaped rotating tube to rotate 180 degrees. Then, one end of the inverted L-shaped rotating tube is aligned with the gas outlet of the right gas outlet hood, so that the exhaust gas in the furnace can be discharged from the right gas outlet, the right gas outlet hood and the right gas outlet pipe. After that, the left hand screw can be loosened to release the pressure on the left filter screen. Then, the filter screen connected to the top plate can be pulled out from the insertion port by the handle. In this way, the two filters can be switched without stopping the machine, avoiding the problem of process interruption and production capacity loss caused by machine stoppage. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the internal planar unfolded structure of the exhaust box of this utility model;

[0019] Figure 3 This is a schematic diagram of the unfolded three-dimensional structure of the air hood and the circular ventilation hood of this utility model;

[0020] Explanation of key figure labels:

[0021] 1. Oxidation diffusion furnace body; 11. Exhaust pipe; 12. Exhaust box; 121. Gas outlet pipe; 13. Support rod; 2. Filter screen; 21. Baffle; 22. Hand screw; 23. Top plate; 24. Handle; 3. Switching exhaust assembly; 31. Circular vent hood; 311. Gas outlet round port; 32. Gas outlet hood; 33. Inverted L-shaped rotating pipe; 34. Rotary joint; 35. First gear; 36. Second gear. Detailed Implementation

[0022] The technical solution of this utility model patent will be clearly and completely described below. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0023] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model.

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] Filter screen 2 is prone to clogging: During long-term operation, particulate matter and dopants such as phosphorus and boron oxides will gradually adhere to the surface of the filter screen, resulting in increased air resistance, decreased exhaust efficiency, and even affecting the stability of gas pressure inside the furnace, thereby interfering with the uniformity of the process.

[0026] Replacement requires shutdown: Clogged filters need to be manually removed and replaced, which necessitates interrupting the operation of the oxidation diffusion furnace. Semiconductor manufacturing demands extremely high equipment continuity and process stability; frequent shutdowns not only reduce production efficiency but can also lead to inconsistent performance between batches of products due to process interruptions, increasing the scrap rate.

[0027] See attached document Figure 1-3 An exhaust device for an oxidation diffusion furnace includes an oxidation diffusion furnace body 1. An exhaust pipe 11 is fixedly connected to the exhaust port at the top left edge of the oxidation diffusion furnace body 1. An exhaust box 12 is fixedly connected to the outside of the exhaust pipe 11. Exhaust pipes 121 are fixedly connected to the exhaust ports at both ends of the exhaust box 12. The bottom end of the exhaust box 12 is fixedly connected to the top of the oxidation diffusion furnace body 1 by two symmetrically arranged support rods 13. Two symmetrically arranged insertion ports are opened on the top of the exhaust box 12, and a filter screen 2 is movably inserted into each insertion port. Each of the two filter screens 2 has a top plate 23 fixedly attached to its top, and a handle 24 fixedly attached to the top of each top plate 23. Two symmetrically arranged baffles 21 are movably attached to the side wall of each of the two filter screens 2 facing away from each other. The baffles 21 are fixedly attached to the inner wall of the exhaust box 12. Hand screws 22 are movably inserted into the two baffles 21 near the top of the exhaust box 12. The hand screws 22 are threaded to the outer wall of the exhaust box 12. The switching exhaust assembly 3 is installed inside the exhaust box 12 and is connected to the top of the exhaust pipe 11.

[0028] The baffle 21 is designed so that the filter screen 2 can be in a straight and vertical position after being inserted into the insertion port, avoiding skewing and gaps.

[0029] Furthermore, such as Figure 1-3 As shown, in order to switch the filtering operation of the two filters 2 and to replace the non-working filters 2 without stopping the machine, a switching exhaust assembly 3 is provided, including two symmetrically arranged exhaust hoods 32 fixedly connected to the exhaust box 12. The opposite ends of the two exhaust hoods 32 are fixedly connected to the inside of a circular vent 31 through an exhaust port 311. An inverted L-shaped rotating pipe 33 is rotatably connected inside the circular vent 31, and the bottom end of the inverted L-shaped rotating pipe 33 is fixedly connected to a rotary joint 3. The top rotating end of 4 and the bottom end of the rotary joint 34 are fixedly connected to the top end of the exhaust pipe 11. The circular vent 31 is provided with a first gear 35 fixed to the outside of the inverted L-shaped rotating pipe 33. The outside of the first gear 35 is meshed with a second gear 36. The left side of the exhaust pipe 11 is provided with a servo motor fixed to the bottom end of the exhaust box 12. The output shaft of the servo motor extends into the exhaust box 12 and is fixedly connected to the mounting shaft hole of the second gear 36. The two exhaust hoods 32 are both movably attached to the outside of the filter screen 2 at opposite ends.

[0030] The servo motor can be controlled using existing PLC technology, which will not be described in detail here. In addition, the top of the servo motor is fixed to the bottom of the exhaust box 12 with a heat insulation plate. The heat insulation plate can be made of ceramic fiber board, which has a good heat insulation effect.

[0031] Rotary joint 34 is a component for rotating connection of two pipes in the prior art, which can be found by searching on Baidu, and will not be described here.

[0032] In actual use, when it is necessary to replace the filter screen 2 on the left, the servo motor can be started to drive the second gear 36 to rotate clockwise, which in turn drives the first gear 35 to rotate the inverted L-shaped rotating tube 33 180 degrees. Then, one end of the inverted L-shaped rotating tube 33 is aligned with the air outlet 311 of the right air outlet hood 32, so that the exhaust gas in the furnace can be discharged from the right air outlet 311, the right air outlet hood 32 and the right air outlet pipe 121. After that, the left hand screw 22 can be loosened to release the clamping force on the left filter screen 2. Then, the filter screen 2 connected to the top plate 23 can be pulled out from the insertion port through the handle 24. In this way, the two filters screens 2 can be switched and replaced without stopping the machine, avoiding the problem of process interruption and production loss caused by machine stoppage.

[0033] The foregoing description of specific exemplary embodiments of the present invention is for illustrative and explanatory purposes. These descriptions are not intended to limit the present invention to the precise forms disclosed, and it will be apparent that many changes and variations can be made in accordance with the foregoing teachings. The exemplary embodiments were chosen and described in order to explain the specific principles of the present invention and its practical application, thereby enabling those skilled in the art to implement and utilize various different exemplary embodiments of the present invention, as well as various different choices and variations. The scope of the present invention is intended to be defined by the claims and their equivalents.

Claims

1. An exhaust device for an oxidation diffusion furnace, comprising an oxidation diffusion furnace body (1), an exhaust pipe (11) fixedly connected to the exhaust port at the left edge of the top of the oxidation diffusion furnace body (1), an exhaust box (12) fixedly connected to the outside of the exhaust pipe (11), exhaust pipes (121) fixedly connected to the exhaust ports at both ends of the exhaust box (12), and the bottom end of the exhaust box (12) fixedly connected to the top of the oxidation diffusion furnace body (1) by two symmetrically arranged support rods (13), characterized in that, The top of the exhaust box (12) has two symmetrically arranged insertion ports, and a filter screen (2) is movably inserted into each of the two insertion ports. A top plate (23) is fixed to the top of each filter screen (2), and a handle (24) is fixed to the top of each top plate (23). Two symmetrically arranged baffles (21) are movably attached to the opposite side wall of each of the two filter screens (2). The baffles (21) are fixed to the inner wall of the exhaust box (12). A hand screw (22) is movably inserted into each of the two baffles (21) near the top of the exhaust box (12). The hand screws (22) are threaded to the outer wall of the exhaust box (12). A switchable exhaust assembly (3) is installed inside the exhaust box (12) and connected to the top of the exhaust pipe (11).

2. The exhaust device for the oxidation diffusion furnace according to claim 1, characterized in that, The switching exhaust assembly (3) includes two symmetrically arranged exhaust hoods (32) fixedly attached to the exhaust box (12). The opposite ends of the two exhaust hoods (32) are fixedly connected to the interior of the circular ventilation hood (31) through an exhaust port (311).

3. The exhaust device for the oxidation diffusion furnace according to claim 2, characterized in that, The circular vent hood (31) is rotatably connected to an inverted L-shaped rotating tube (33). The bottom end of the inverted L-shaped rotating tube (33) is fixedly connected to the top rotating end of the rotary joint (34). The bottom end of the rotary joint (34) is fixedly connected to the top end of the exhaust pipe (11).

4. The exhaust device for the oxidation diffusion furnace according to claim 3, characterized in that, The circular ventilation hood (31) is provided with a first gear (35) fixed to the outside of the inverted L-shaped rotating tube (33) below it, and a second gear (36) is meshed with the outside of the first gear (35).

5. The exhaust device for the oxidation diffusion furnace according to claim 4, characterized in that, A servo motor is fixed to the bottom of the exhaust box (12) on the left side of the exhaust pipe (11). The output shaft of the servo motor extends into the exhaust box (12) and is fixed to the mounting shaft hole of the second gear (36).

6. The exhaust device for the oxidation diffusion furnace according to claim 2, characterized in that, The two air vents (32) are both movably attached to the outer side of the filter screen (2) at opposite ends.

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