An apparatus for automated tapping of single crystal wafers

Abstract

This invention provides an automated device for tapping single-crystal samples, relating to the field of single-crystal silicon technology. The device includes: a base, a fixing mechanism, a driving mechanism, a tapping hammer, and a controller. The fixing mechanism is mounted on top of the base. The driving mechanism is mounted on top of the base and located to one side of the fixing mechanism. The tapping hammer is mounted on the driving mechanism. The controller is electrically connected to the fixing mechanism and the driving mechanism. The fixing mechanism includes: a fixing platform and at least two fixing members. The fixing platform is mounted on top of the base. At least two fixing members are mounted on top of the base, and the controller is electrically connected to the fixing members. This invention achieves automated tapping detection of single-crystal samples through the design of the driving mechanism, greatly improving detection efficiency. Compared to manual tapping, it reduces a significant amount of manpower and time costs, avoids the introduction of non-silicon and safety hazards caused by manual operation, and prevents detection deviations caused by inconsistent sample tapping sizes.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon technology, and in particular to an automated device for tapping monocrystalline samples. Background Technology

[0002] The photovoltaic market is currently in a state of "involutionary" competition. To survive in the photovoltaic market, technological innovation and cost reduction and efficiency improvement are key.

[0003] Currently, carbon and oxygen content is a key indicator of single crystal quality in the single crystal pulling process and a crucial step in ensuring semiconductor material quality. Our company currently uses an infrared spectrometer. The first step is sample preparation, where a circular silicon wafer with a thickness of 1.5-2.5mm is cut from one end of the crystal rod. After cleaning both sides, a square sample is tapped with a diamond pen and then placed in a carbon and oxygen detection instrument for testing.

[0004] Currently, the sample tapping process is all done manually, which is inefficient. The uneven quality of the samples affects the testing quality and poses risks of silicon slag splashing and silicon wafer scratches. Manual tapping is also more likely to introduce non-silicon materials, increasing the quality risks of sample recycling. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides an automated device for tapping single-crystal samples. Through the design of the drive mechanism, it realizes automated tapping detection of single-crystal samples, which greatly improves the detection efficiency. Compared with manual tapping, it reduces a lot of manpower and time costs, and avoids non-silicon introduction and safety hazards caused by manual operation. It also avoids detection deviations caused by inconsistent tapping sizes of samples.

[0006] The technical solution adopted in this utility model is:

[0007] An automated device for striking single-crystal samples, comprising:

[0008] Base;

[0009] A fixing mechanism is installed on top of the base;

[0010] A drive mechanism is mounted on top of the base and located on one side of the fixing mechanism;

[0011] A striking hammer is mounted on the drive mechanism and, after installation, is positioned above the fixing mechanism;

[0012] A displacement sensor is mounted on the drive mechanism;

[0013] The controller is electrically connected to the fixing mechanism, the driving mechanism, and the displacement sensor;

[0014] The fixing mechanism includes:

[0015] A fixed platform is installed on top of the base;

[0016] At least two fasteners are installed on the top of the base and are positioned opposite each other on both sides of the fixed platform, and the controller is electrically connected to the fasteners.

[0017] Optionally, the fixed platform has an adsorption chamber inside, a through hole communicating with the adsorption chamber is provided on the top of the fixed platform, and a vacuum tube communicating with the adsorption chamber is provided on one side of the fixed platform, and the vacuum tube is connected to an external vacuum device.

[0018] Optionally, the fastener includes:

[0019] A drive unit is mounted on top of the base, with its movable end facing the fixed platform, and the controller is electrically connected to the drive unit;

[0020] A fixing plate is installed at the movable end of the drive component.

[0021] Optionally, the fixing plate has anti-slip texture on the side facing the single crystal sample.

[0022] Optionally, the drive mechanism includes:

[0023] A mounting bracket is installed on top of the base, and the mounting bracket has a mounting opening on the side facing the fixed platform;

[0024] The lead screw is vertically installed inside the mounting opening;

[0025] The sleeve rod is vertically installed inside the mounting opening and located on one side of the lead screw;

[0026] A threaded sleeve plate has a threaded opening that matches the lead screw and a sliding opening that matches the sleeve rod. When the threaded sleeve plate is fitted onto the lead screw and the sleeve rod, it is located above the fixed platform. The striking hammer is mounted on the threaded sleeve plate.

[0027] A drive motor is provided, the drive shaft of which is connected to the lead screw, and the controller is electrically connected to it.

[0028] Optionally, a buffer pad is provided at the end of the hammer that contacts the single crystal sample.

[0029] Optionally, a force sensor is provided at the end of the striking hammer away from the fixed platform, and the force sensor is electrically connected to the controller.

[0030] Optionally, the automated device for knocking the single-crystal sample further includes:

[0031] A displacement sensor is mounted on the drive mechanism and electrically connected to the controller.

[0032] Optionally, the fasteners are four in number and arranged in a rectangular pattern around the fixed platform.

[0033] Compared with the prior art, the beneficial effects of this utility model are:

[0034] 1. The design of the drive mechanism realizes the automated tapping test of single crystal samples, which greatly improves the test efficiency. Compared with manual tapping, it reduces a lot of manpower and time costs, and avoids non-silicon introduction and safety hazards caused by manual operation, and avoids test deviations caused by inconsistent tapping size of samples.

[0035] 2. By adding a vacuum adsorption fixation method to the fixed platform, the fixation effect of single crystal samples is further improved, ensuring the accuracy and reliability of the detection.

[0036] 3. The single crystal sample is clamped and fixed by four fasteners, which is easy to operate and can correct the position of the single crystal sample on the fixed platform, so that the center of the single crystal sample is aligned with the center of the fixed platform, ensuring the accuracy and consistency of the tapping test.

[0037] 4. To reduce wear and silicon slag splashing caused by the hammer on the single-crystal sample, a buffer pad is fixedly installed at the end of the hammer closest to the sample. The buffer pad is made of rubber, effectively reducing wear and protecting the surface quality of the sample. This prevents excessive wear from affecting silicon consumption and avoids metal powder contamination and silicon slag splashing that could pose safety hazards.

[0038] 5. To enable real-time monitoring of the striking force of the hammer, a force sensor is fixedly installed at the end of the hammer furthest from the single-crystal sample. The force sensor is connected to the controller via a signal line. This allows for accurate real-time monitoring of the striking force, providing precise data feedback to the controller. The controller can then compare and adjust based on the set striking force parameters and the actual measured values ​​to ensure consistent sample size.

[0039] 6. To accurately measure the stroke of the striking hammer, a displacement sensor is mounted on the top of the drive mechanism's mounting bracket, located on one side of the lead screw. This displacement sensor is connected to the controller via a signal line. The sensor accurately measures the hammer's stroke, helping the controller precisely control its trajectory and position. This ensures the hammer strikes the single-crystal sample precisely within the correct position and stroke range each time. Attached Figure Description

[0040] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0041] Figure 1 A schematic diagram of the overall structure of the device for automating the knocking of single-crystal samples.

[0042] Figure 2 This is a schematic diagram of the drive mechanism.

[0043] Figure 3 This is a schematic diagram of the fixed mechanism.

[0044] Figure 4 A schematic diagram of a device for automating the knocking of single-crystal samples, featuring a negative pressure adsorption structure.

[0045] Figure 5 This is a schematic diagram of the internal structure of a fixed platform.

[0046] Figure label:

[0047] 1. Base;

[0048] 2. Fixing mechanism; 21. Fixing platform; 211. Adsorption chamber; 212. Through hole; 213. Vacuum tube; 22. Fixing component; 221. Driving component; 222. Fixing plate; 223. Anti-slip texture;

[0049] 3. Drive mechanism; 31. Mounting bracket; 32. Mounting opening; 33. Lead screw; 34. Sleeve rod; 35. Threaded sleeve plate; 36. Threaded opening; 37. Sliding opening; 38. Drive motor;

[0050] 4. Striking hammer;

[0051] 5. Controller;

[0052] 6. Cushioning pad;

[0053] 7. Force sensor;

[0054] 8. Displacement sensor. Detailed Implementation

[0055] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0056] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use, or the orientation or positional relationship commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0057] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0058] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0059] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided, but those skilled in the art will recognize the application of other processes and / or the use of other materials.

[0060] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0061] like Figure 1 As shown, this embodiment of the invention provides an automated device for striking single-crystal samples, comprising: a base 1, a fixing mechanism 2, a driving mechanism 3, a striking hammer 4, and a controller 5. The fixing mechanism 2 is mounted on top of the base 1. The driving mechanism 3 is mounted on top of the base 1 and located to one side of the fixing mechanism 2. The striking hammer 4 is mounted on the driving mechanism 3, and after installation, it is positioned above the fixing mechanism 2. The controller 5 is electrically connected to the fixing mechanism 2 and the driving mechanism 3.

[0062] In use, the single crystal sample is placed on the fixing mechanism 2, and then the controller 5 controls the fixing mechanism 2 to fix it. After the single crystal sample is fixed, the controller 5 controls the drive mechanism 3 to move, which drives the hammer 4 fixed on the drive mechanism 3 to strike the single crystal sample.

[0063] More specifically, when this device strikes a square single-crystal sample, the sample only needs to be placed on the fixing mechanism 2 to secure it. The operator sets parameters such as striking force, frequency, and number of strikes (at least two strikes) on the controller 5. The controller 5 then controls the drive mechanism 3 based on these parameters. The drive mechanism 3 drives the striking hammer 4 in a linear reciprocating motion (moving up and down), completing the striking action on the single-crystal sample.

[0064] The output shaft of the motor drives the lead screw 33 to rotate. Since the threaded sleeve 35 is threadedly engaged with the lead screw 33, the rotation of the lead screw 33 is converted into linear motion of the threaded sleeve 35 along the axial direction of the lead screw 33, which in turn drives the hammer 4 mounted on the threaded sleeve 35 to move up and down reciprocally, completing the hammering action on the single crystal sample.

[0065] More specifically, such as Figure 3 As shown, the fixing mechanism 2 includes a fixing platform 21 and at least two fixing members 22. The fixing platform 21 is mounted on the top of the base 1. The at least two fixing members 22 are mounted on the top of the base 1 and are arranged opposite each other on both sides of the fixing platform 21. The controller 5 is electrically connected to the fixing members 22.

[0066] After the single crystal sample is placed on the fixed platform 21, the controller 5 controls the two oppositely arranged fixing members 22 to move relative to each other, so that the single crystal sample placed on the fixed platform 21 is clamped by the two oppositely arranged fixing members 22 and fixed between the fixed platform 21 and the two fixing members 22.

[0067] This fixing method avoids the displacement that occurs during the tapping process when manually fixing single crystal samples, which affects the accuracy of the test.

[0068] The design of drive mechanism 3 enables automated tapping inspection of single-crystal samples, greatly improving inspection efficiency. Compared to manual tapping, it significantly reduces manpower and time costs, avoids the introduction of non-silicon and safety hazards caused by manual operation, and prevents inspection deviations due to inconsistent tapping sizes.

[0069] In another embodiment, such as Figure 4 and Figure 5 As shown, the fixed platform 21 has an adsorption chamber 211 inside, and a through hole 212 communicating with the adsorption chamber 211 is provided on the top of the fixed platform 21. A vacuum tube 213 communicating with the adsorption chamber 211 is provided on one side of the fixed platform 21, and the vacuum tube 213 is connected to an external vacuum device.

[0070] To improve the fixation effect of the fixing mechanism 2 on the single crystal sample, a cavity is provided inside the fixing platform 21. A through-hole 212 communicating with the adsorption cavity 211 is provided on the top of the fixing platform 21 (the through-holes 212 are arranged in a rectangular array on the top of the fixing platform 21). A vacuum tube 213 communicating with the adsorption cavity 211 is provided on one side of the fixing platform 21 (in specific implementation, multiple vacuum tubes 213 can be provided according to the adsorption requirements), and the vacuum tube 213 is connected to external vacuum equipment.

[0071] When in use, the vacuum pump generates negative pressure, which causes the single crystal sample placed on top of the fixed platform 21 to be adsorbed on top of the fixed platform 21. This can effectively improve the fixation effect of the single crystal sample and further ensure that the single crystal sample will not be displaced during the detection process.

[0072] For thin or smooth single-crystal samples, vacuum adsorption can provide additional stabilizing forces, ensuring the accuracy and reliability of the detection.

[0073] In another embodiment, such as Figure 1 and Figure 2 As shown, the fixing member 22 includes a driving member 221 and a fixing plate 222. The driving member 221 is mounted on the top of the base 1, with its movable end facing the fixing platform 21. The controller 5 is electrically connected to the driving member 221. The fixing plate 222 is mounted on the movable end of the driving member 221.

[0074] In use, the controller 5 controls the movement of the drive component 221, which drives the fixing plate 222 installed at its end to move toward the side wall of the single crystal sample, so that the fixing plate 222 abuts against the side wall of the single crystal sample.

[0075] In another embodiment, such as Figure 1 and Figure 4As shown, there are four fasteners 22, which are arranged in a rectangular pattern around the fixed platform 21.

[0076] The single crystal sample is clamped and fixed by four fasteners 22, which is easy to operate and can realize the position correction of the single crystal sample on the fixed platform 21, so that the center of the single crystal sample is aligned with the center of the fixed platform 21, ensuring the accuracy and consistency of the tapping test.

[0077] The mounting plates 222 installed on the four fasteners 22 can accommodate single crystal samples of different sizes, improving the versatility of the equipment.

[0078] It should be noted that the driving component 221 in this embodiment is a cylinder, a linear motor, an electric telescopic rod, or other mechanism capable of linear reciprocating motion.

[0079] In another embodiment, such as Figure 1 and Figure 3 As shown, the fixing plate 222 has anti-slip texture 223 on the side facing the single crystal sample. In order to prevent the single crystal sample from shifting during the clamping process, the fixing plate 222 is a rubber plate, and anti-slip texture 223 is provided on the side facing the single crystal sample.

[0080] In another embodiment, such as Figure 1 and Figure 2 As shown, the drive mechanism 3 includes: a mounting bracket 31, a lead screw 33, a sleeve 34, a threaded sleeve plate 35, and a drive motor 38. The mounting bracket 31 is mounted on the top of the base 1, and has a mounting opening 32 on the side facing the fixed platform 21. The lead screw 33 is vertically mounted within the mounting opening 32. The sleeve 34 is vertically mounted within the mounting opening 32 and is located on one side of the lead screw 33. The threaded sleeve plate 35 has a threaded opening 36 that mates with the lead screw 33 and a sliding opening 37 that mates with the sleeve 34. When the threaded sleeve plate 35 is fitted onto the lead screw 33 and the sleeve 34, it is positioned above the fixed platform 21, and the striking hammer 4 is mounted on the threaded sleeve plate 35. The drive motor 38 is connected to the lead screw 33 and electrically connected to the controller 5.

[0081] When it is necessary to strike the single crystal sample, the controller 5 controls the drive motor 38 to move, the drive motor 38 drives the lead screw 33 to rotate, and the threaded sleeve 35 installed on the lead screw 33 moves along the axis of the lead screw 33 to strike the single crystal sample.

[0082] During the striking process, the controller 5 needs to control the drive motor 38 to rotate in both directions to achieve linear reciprocating motion.

[0083] In another embodiment, such as Figure 2 As shown, a buffer pad 6 is provided at the end of the hammer 4 that contacts the single crystal sample.

[0084] To reduce wear and silicon slag splashing caused by the hammer 4 on the single-crystal sample, a buffer pad 6 is fixedly installed at the end of the hammer 4 closest to the single-crystal sample. The buffer pad 6 is made of rubber, effectively reducing wear caused by the hammer 4 on the single-crystal sample and protecting the surface quality of the sample. This avoids excessive wear affecting silicon consumption and prevents metal powder contamination and silicon slag splashing that could pose safety hazards.

[0085] In another embodiment, such as Figure 1 , Figure 2 and Figure 4 As shown, a force sensor 7 is provided at the end of the striking hammer 4 away from the fixed platform 21, and the force sensor 7 is electrically connected to the controller 5.

[0086] To monitor the striking force of the hammer 4 in real time, a force sensor 7 is fixedly installed at the end of the hammer 4 furthest from the single-crystal sample. The force sensor 7 is connected to the controller 5 via a signal line. This allows for accurate real-time monitoring of the striking force of the hammer 4, providing precise data feedback to the controller 5. The controller 5 can then compare and adjust based on the set striking force parameters and the actual measured values ​​to ensure consistent sample size.

[0087] In another embodiment, such as Figure 1 , Figure 2 and Figure 4 As shown, the automated single-crystal sample tapping device further includes a displacement sensor 8. The displacement sensor 8 is mounted on the drive mechanism 3 and electrically connected to the controller 5.

[0088] To accurately measure the travel of the striking hammer 4, a displacement sensor 8 is mounted on the top of the mounting bracket 31 of the drive mechanism 3. This displacement sensor 8 is located on one side of the lead screw 33. The displacement sensor 8 is connected to the controller 5 via a signal line. This displacement sensor 8 accurately measures the travel of the striking hammer 4, helping the controller 5 to precisely control the trajectory and position of the striking hammer 4. This ensures that the striking hammer 4 strikes the single-crystal sample at the accurate position and within the correct travel range each time.

[0089] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An automated device for striking single-crystal samples, characterized in that, include: Base; A fixing mechanism is installed on top of the base; A drive mechanism is mounted on top of the base and located on one side of the fixing mechanism; A striking hammer is mounted on the drive mechanism and, after installation, is positioned above the fixing mechanism; The controller is electrically connected to the fixing mechanism and the driving mechanism; The fixing mechanism includes: A fixed platform is installed on top of the base; At least two fasteners are installed on the top of the base and are positioned opposite each other on both sides of the fixed platform, and the controller is electrically connected to the fasteners.

2. The apparatus for automatically tapping single-crystal samples according to claim 1, characterized in that, The fixed platform has an adsorption chamber inside, and a through hole communicating with the adsorption chamber is provided on the top of the fixed platform. A vacuum tube communicating with the adsorption chamber is provided on one side of the fixed platform, and the vacuum tube is connected to an external vacuum device.

3. The apparatus for automatically tapping single-crystal samples according to claim 1 or 2, characterized in that, The fastener includes: A drive unit is mounted on top of the base, with its movable end facing the fixed platform, and the controller is electrically connected to the drive unit; A fixing plate is installed at the movable end of the drive component.

4. The apparatus for automatically tapping single-crystal samples according to claim 3, characterized in that, The fixing plate has anti-slip texture on the side facing the single crystal sample.

5. The apparatus for automatically tapping single-crystal samples according to claim 1, characterized in that, The drive mechanism includes: A mounting bracket is installed on top of the base, and the mounting bracket has a mounting opening on the side facing the fixed platform; The lead screw is vertically installed inside the mounting opening; The sleeve rod is vertically installed inside the mounting opening and located on one side of the lead screw; A threaded sleeve plate has a threaded opening that matches the lead screw and a sliding opening that matches the sleeve rod. When the threaded sleeve plate is fitted onto the lead screw and the sleeve rod, it is located above the fixed platform. The striking hammer is mounted on the threaded sleeve plate. A drive motor is provided, the drive shaft of which is connected to the lead screw, and the controller is electrically connected to it.

6. The apparatus for automatically tapping single-crystal samples according to claim 1, characterized in that, A buffer pad is provided at the end of the hammer that contacts the single crystal sample.

7. The apparatus for automatically tapping single-crystal samples according to claim 1, characterized in that, A force sensor is installed at the end of the striking hammer away from the fixed platform, and the force sensor is electrically connected to the controller.

8. The apparatus for automatically tapping single-crystal samples according to claim 1 or 7, characterized in that, The automated device for knocking single-crystal samples further includes: A displacement sensor is mounted on the drive mechanism and electrically connected to the controller.

9. The apparatus for automatically tapping single-crystal samples according to claim 1, characterized in that, The fixing components are four in number and are arranged in a rectangular shape around the fixed platform.

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