A flexible microwave radiator and magnetic detection system for magnetic detection of diamond NV color centers

Abstract

This invention discloses a flexible microwave radiator and magnetic detection system for magnetic detection of NV centers in diamond. The flexible microwave radiator includes a flexible dielectric substrate and a conductive layer disposed on the substrate. The conductive layer is patterned to form a power supply area and a radiation area electrically connected to the power supply area. The power supply area is used to connect a microwave signal source, and the radiation area has a through-hole penetrating the flexible dielectric substrate. The flexible dielectric substrate is bent at the position corresponding to the radiation area towards the side opposite to the conductive layer to form a bend. The radiation area and the through-hole bend along with the bend, and the bend allows it to approach the diamond containing NV centers from the side, enabling the through-hole to apply microwave radiation to the NV centers of the diamond from the side. This invention can ensure that the microwave radiator is close to the diamond for microwave coupling while reducing the obstruction of the excitation light and fluorescence collection light path above the diamond, thereby improving fluorescence collection efficiency, system signal-to-noise ratio, and magnetic detection sensitivity.

Description

Technical Field

[0001] This utility model relates to the field of quantum sensing technology, specifically to a flexible microwave radiator and magnetic detection system for detecting the NV color center of diamond. Background Technology

[0002] Magnetic detection technology based on diamond NV centers can be used to detect changes in magnetic fields caused by defects on the sample surface or inside. Existing diamond NV center magnetic detection systems typically include an optical path module, objective lens, sensing probe, microwave module, and excitation device. During operation, the excitation light output from the optical path module is irradiated by the objective lens onto the diamond in the sensing probe, exciting the NV centers within the diamond to produce fluorescence. The microwave module provides microwave signals to the diamond NV centers through a microwave radiator to control the spin state of the NV centers. The fluorescence generated by the diamond is then collected by the objective lens and returned to the optical path module, where it is acquired by a light collector, thus obtaining a detection signal related to the sample's magnetic field.

[0003] In existing magnetic detection systems based on diamond NV center probes, the microwave radiator is typically a small helical antenna made of rigid metal wire (such as copper wire). To improve detection sensitivity, the diamond needs to be positioned close to the sample surface during detection, which means the microwave antenna can only be placed above or slightly above the diamond. However, the excitation light needs to be emitted from the upper objective lens onto the diamond, and the excited fluorescence also needs to be collected by the same objective lens and then returned to the light collector. The rigid antenna structure located above the diamond inevitably blocks part of the light path, leading to a decrease in fluorescence collection efficiency, thereby reducing the overall signal-to-noise ratio and measurement sensitivity of the system.

[0004] Therefore, it is necessary to provide a microwave radiator that can reduce the obstruction of the fluorescence collection optical path while radiating microwaves close to the diamond. Utility Model Content

[0005] The purpose of this invention is to provide a flexible microwave radiator and magnetic detection system for diamond NV color center magnetic detection, in order to solve the problem that the rigid metal wire microwave antenna in the existing diamond NV color center magnetic detection system usually needs to be set above or to the side of the diamond, which easily blocks the excitation light and fluorescence collection light path, resulting in reduced fluorescence collection efficiency, decreased system signal-to-noise ratio and limited detection sensitivity.

[0006] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0007] In a first aspect, this utility model provides a flexible microwave radiator for diamond NV color core magnetic detection, comprising:

[0008] Flexible dielectric substrate;

[0009] A conductive layer is disposed on the flexible dielectric substrate, and the conductive layer is patterned to form a power supply area and a radiation area electrically connected to the power supply area; the power supply area is used to connect to a microwave signal source; the radiation area is provided with a through hole penetrating the flexible dielectric substrate;

[0010] The flexible dielectric substrate is bent at the position corresponding to the radiation region toward the side opposite to the conductive layer to form a bend. The radiation region and the via bend along with the bend, and at least a portion of the via is bent toward the direction away from the power supply region.

[0011] The bent portion can approach the diamond containing the NV color center from the side, so that the through hole can apply microwave radiation to the NV color center of the diamond from the side.

[0012] In some embodiments, after bending, the axis of the through hole changes from being perpendicular to the plane where the power supply area is located to being parallel to the plane where the power supply area is located.

[0013] In some embodiments, the radiation zone includes an inner ring and an outer ring;

[0014] The inner ring is an open ring that surrounds the through hole, with one end connected to the power supply area and the other end connected to the outer ring;

[0015] The outer ring is also an open ring, which surrounds the inner ring.

[0016] In some embodiments, the power supply area includes:

[0017] A straight conductive part, the end of which is away from the bent part is used to connect to a radio frequency transmission line and is connected to a microwave signal source through the radio frequency transmission line.

[0018] In some embodiments, the linear conductive portion includes a first linear conductive portion, a second linear conductive portion, and a third linear conductive portion connected sequentially and with gradually increasing width along a direction away from the bend, wherein the third linear conductive portion is used to install a connector for connecting the radio frequency transmission line.

[0019] In some embodiments, the flexible dielectric substrate is made of polyimide.

[0020] In some embodiments, the material of the conductive layer includes copper or silver.

[0021] In some embodiments, the thickness of the flexible dielectric substrate is 0.1 mm to 0.2 mm.

[0022] Secondly, this utility model provides a magnetic detection system based on diamond NV color centers, comprising:

[0023] The stage is used to hold the sample to be tested.

[0024] The sensing probe includes an elongated support and a diamond containing an NV color center disposed at the end, the diamond being suspended above the surface of the sample to be tested;

[0025] An optical path module, disposed above the diamond, is used to emit excitation light to the diamond and collect fluorescence from the diamond;

[0026] The flexible microwave radiator according to any one of the first aspects of this utility model, wherein the bent portion of the flexible microwave radiator is disposed on the side of the diamond, for laterally emitting microwave signals toward the diamond.

[0027] In some embodiments, the distance between the bent portion and the diamond does not exceed 0.5 mm.

[0028] Compared with the prior art, the beneficial effects of this utility model include at least the following:

[0029] The flexible microwave radiator for magnetic detection of diamond NV centers provided by this invention features a flexible dielectric substrate bent at the radiation region to form a bent portion, causing both the radiation region and the via to bend together. At least a portion of the via is bent away from the power supply area. In use, the bent portion can approach the diamond containing NV centers from the side, allowing microwave radiation to be applied to the NV centers from the side. The effective radiation portion of the flexible microwave radiator (i.e., the via region) is no longer located directly above the diamond, but radiates from its side. Therefore, the excitation light incident path and the fluorescence return path between the objective lens and the diamond are no longer blocked by the microwave radiator, fundamentally eliminating the obstruction of the optical path by existing rigid antennas. This allows the fluorescence generated by the diamond NV centers to be collected by the objective lens to the maximum extent, directly improving the fluorescence signal intensity and detection signal-to-noise ratio of the system. Attached Figure Description

[0030] Figure 1 A schematic diagram of the structure of a flexible microwave radiator for diamond NV color magnetic core detection in an unbent state, according to an embodiment of this utility model;

[0031] Figure 2 This is a schematic diagram of the structure of the flexible microwave radiator after bending, provided as an embodiment of the present invention, used in a magnetic detection system based on diamond NV color centers.

[0032] Explanation of reference numerals in the attached figures:

[0033] 100 - Flexible dielectric substrate; 110 - Bending portion; 200 - Radiation area; 210 - Through-hole; 300 - Power supply area;

[0034] 10-Stage; 20-Sample to be tested; 30-Sensing probe; 31-Slender support; 32-Diamond; 40-Optical path module; 50-Microwave signal source. Detailed Implementation

[0035] The present invention will be further described below with reference to specific embodiments.

[0036] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below in conjunction with specific embodiments. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0037] A magnetic detection system based on diamond NV centers typically includes an optical path module, objective lens, sensing probe, microwave module, and stage. During operation, excitation light emitted from the optical path module is directed through the objective lens to the diamond at the end of the sensing probe, exciting the NV centers within the diamond to produce fluorescence. The microwave module provides microwave signals to the NV centers via a microwave radiator to modulate their spin state. The fluorescence emitted by the diamond is then collected by the objective lens and transmitted back to the optical path module, where it is acquired and analyzed by a light collector to obtain detection results related to the magnetic field of the sample.

[0038] In existing magnetic detection systems, to improve magnetic detection sensitivity, the diamond containing the NV center is typically placed as close as possible to the surface of the sample, and the microwave radiator also needs to be positioned close to the diamond to ensure sufficient intensity of the microwave signal on the NV center. In current technology, the microwave radiator is usually a small helical antenna formed by winding rigid metal wire and positioned above or slightly above the diamond. However, the area above the diamond also serves as the incident channel for the excitation light and the return collection channel for the fluorescence. Therefore, the rigid microwave antenna positioned above can easily obstruct the optical path, thus affecting the fluorescence collection efficiency and reducing the system's signal-to-noise ratio and measurement sensitivity.

[0039] To address the aforementioned problems, this invention provides a flexible microwave radiator for magnetic detection of NV color centers in diamond. The flexible microwave radiator utilizes the bendable properties of a flexible dielectric substrate, forming a bend at a corresponding position in the radiation area. This allows the microwave radiation region to approach the diamond from the side and apply microwave radiation towards the NV color centers within the diamond from the side, thereby reducing obstruction of the optical path above the diamond.

[0040] Specifically, please combine Figure 1 and Figure 2The flexible microwave radiator for diamond NV color core magnetic detection provided in this embodiment includes a flexible dielectric substrate 100 and a conductive layer disposed on the flexible dielectric substrate. The conductive layer is patterned to form a power supply region 300 and a radiation region 200 electrically connected to the power supply region 300. The power supply region 300 is used to connect a microwave signal source 50 to input a microwave signal to the radiation region 200, and the radiation region 200 is provided with a through-hole 210 penetrating the flexible dielectric substrate.

[0041] In this design, the flexible dielectric substrate 100 is bent at the location corresponding to the radiation region 200 towards the side opposite to the conductive layer, forming a bent portion 110. Specifically, the conductive layer is disposed on one side of the flexible dielectric substrate 100, and the area where the radiation region 200 is located is not planar, but is bent together with the flexible dielectric substrate 100 in a direction opposite to the conductive layer. Since the radiation region 200 is disposed on the bent area of ​​the flexible dielectric substrate 100, the radiation region 200 and the via 210 are also bent along with the bent portion 110. Furthermore, at least a portion of the via 210 is bent toward a direction away from the power supply region 300.

[0042] In actual use, the bent portion 110 can be arranged on the side of the diamond 32 containing the NV color center and approach the diamond 32 from the side, so that the through hole 210 applies microwave radiation from the side toward the NV color center of the diamond 32 (the conductive layer structure around the through hole forms a local microwave radiation area through the through hole).

[0043] In this embodiment, the flexible dielectric substrate 100 can be a flexible thin sheet structure, and the conductive layer can be formed on the surface of the flexible dielectric substrate 100 by means of copper plating, deposition, etching, etc. The via 210 can be set at the center of the radiation region 200 or at a position near the radiation center within the radiation region 200, so that a local microwave radiation region is formed near the via 210.

[0044] In this embodiment, a flexible dielectric substrate 100 is provided, and a bending portion 110 is formed in the flexible dielectric substrate 100 at the position corresponding to the radiation region 200. This transforms the originally planar radiation region 200 into a laterally arranged radiation structure, allowing the radiation region 200 to approach the diamond 32 laterally, avoiding the situation where rigid helical antennas occupy the space above the diamond 32. Furthermore, by providing a through-hole 210 penetrating the flexible dielectric substrate 100 in the radiation region 200, and bending the radiation region 200 and the through-hole 210 along with the bending portion 110, the radiation area near the through-hole 210 can be transferred to a lateral position, thereby forming a local microwave radiation center near the diamond 32 and improving the efficiency of microwave action on the NV color center. At least a portion of the through-hole 210 is bent toward the direction away from the power supply area 300, which is located away from the diamond 32. This allows the through-hole 210, which performs microwave radiation, and its surrounding area to be positioned close to the side of the diamond 32. The power supply connection area and the radiation area are spatially separated, which is beneficial for microwave signal input and also helps to reduce the obstruction of the excitation light and fluorescence collection light path above the diamond 32, thereby improving fluorescence collection efficiency, the signal-to-noise ratio of the system, and the detection sensitivity.

[0045] In this embodiment, after bending, the axis of the through hole 210 changes from being perpendicular to the plane where the power supply area 300 is located to being parallel to the plane where the power supply area 300 is located.

[0046] Specifically, when the flexible dielectric substrate 100 is not bent, the through-hole 210, as a hole structure penetrating the flexible dielectric substrate 100, has its axis perpendicular to the plane where the flexible dielectric substrate 100 is located, that is, perpendicular to the plane where the power supply area 300 is located. When the portion where the radiation area 200 is located forms the bend 110, the through-hole 210 bends along with the bend 110, so that the axis of the through-hole 210 is no longer perpendicular to the plane where the power supply area 300 is located, but changes to be approximately parallel to the plane where the power supply area 300 is located due to the bend. That is, the through-hole 210 changes from its original "upward / downward" state to a "sideward" state, so that the local area where the through-hole 210 is located can approach the diamond 32 from the side.

[0047] In this embodiment, after bending, the axis of the through hole 210 changes from being perpendicular to the plane where the power supply area 300 is located to being parallel to the plane where the power supply area 300 is located, so that the center of the through hole 210 can be directly facing the side of the diamond 32, thereby improving the coupling efficiency of microwaves from the flexible microwave radiator to the diamond 32.

[0048] In this embodiment, the radiation region 200 includes an inner ring and an outer ring. The inner ring is an open ring that surrounds the through hole 210, with one end connected to the power supply region 300 and the other end connected to the outer ring. The outer ring is also an open ring that surrounds the inner ring.

[0049] Specifically, the radiation zone 200 adopts a double-ring structure. The inner ring is located close to the through hole 210 and extends around the through hole 210. The outer ring is located outside the inner ring and continues to surround the inner ring. The inner ring is directly connected to the power supply zone 300, so that the microwave signal input to the power supply zone 300 is first transmitted to the inner ring, and then connected to the outer ring from the other end of the inner ring, so that the microwave current is distributed around the through hole 210 and within the inner and outer ring regions.

[0050] In this embodiment, by configuring the radiation region 200 into a structure including an inner ring and an outer ring, with the inner ring surrounding the through-hole 210 and the outer ring surrounding the inner ring, a hierarchical conductive pattern distribution can be formed around the through-hole 210. Since the inner ring is directly adjacent to the through-hole 210, and one end is connected to the power supply region 300 while the other end is connected to the outer ring, the microwave signal input from the power supply region 300 can be transmitted and distributed around the area near the through-hole 210, thereby enhancing the local microwave field around the through-hole 210. Furthermore, the outer ring surrounding the inner ring allows the radiation region 200 to form a more concentrated local radiation area within a smaller area. When the bend 110 approaches the diamond 32 from the side, the area near the through-hole 210 can more effectively apply microwave radiation to the NV color center, improving the coupling efficiency between the microwave and the NV color center.

[0051] In this embodiment, the power supply area 300 includes a straight conductive part, one end of which is away from the bent part 110 and is used to connect to a radio frequency transmission line, and is connected to a microwave signal source 50 through the radio frequency transmission line.

[0052] Specifically, the power supply area 300 can adopt a strip-shaped conductive structure extending along the flexible dielectric substrate 100, i.e., a straight conductive section. One end of the straight conductive section is connected to the radiation area 200, and the other end is located away from the bend 110 and is used to connect to an external radio frequency transmission line. The radio frequency transmission line is then connected to a microwave signal source 50 to input microwave signals to the flexible microwave radiator.

[0053] By placing the connection end of the linear conductive part on the side away from the bending part 110, the external connection part can avoid the detection area near the diamond 32, while leaving the relatively confined area near the diamond 32 mainly for the bending part 110 and the radiation area 200.

[0054] In this embodiment, a linear conductive part is provided in the power supply area 300 to provide a microwave input path between the microwave signal source 50 and the radiation area 200. The end of the linear conductive part away from the bend 110 is used to connect to the radio frequency transmission line, so that the external signal connection position is away from the microwave radiation area on the side of the diamond 32. This reduces the space occupied by the connection part in the detection area, makes it easier for the bend 110 to approach the diamond 32 more flexibly, and reduces the interference of the power supply connection structure on the optical path and probe arrangement.

[0055] Furthermore, the linear conductive portion includes a first linear conductive portion, a second linear conductive portion, and a third linear conductive portion connected in sequence and with gradually increasing width along the direction away from the bending portion 110. The third linear conductive portion is used to install a connector for connecting the radio frequency transmission line.

[0056] Specifically, the section near the radiation region 200 can be a narrower first linear conductive portion, the intermediate transition section can be a second linear conductive portion with a width greater than the first linear conductive portion, and the end away from the bend 110 can be a third linear conductive portion with a further increased width. The third linear conductive portion is used to install the connector for connecting the radio frequency transmission line. The linear conductive portion as a whole can adopt a progressively wider structure, rather than a structure with a constant width throughout. On the one hand, this keeps the portion near the radiation region 200 relatively small in size, and on the other hand, it allows the connection end away from the bend 110 to have a larger connection area.

[0057] This embodiment, by dividing the linear conductive portion into a first linear conductive portion, a second linear conductive portion, and a third linear conductive portion connected sequentially with gradually increasing widths, enables the power supply area 300 to maintain a relatively narrow structure near the radiation area 200, thereby reducing the space occupied near the radiation area 200. Simultaneously, a wider third linear conductive portion is formed at a location away from the bend 110 to increase the contact area at the connection point with the radio frequency transmission line. This not only improves the stability and ease of assembly of the connection but also helps to reduce connection difficulties or insufficient mechanical strength caused by excessively narrow local connection ends.

[0058] In this embodiment, the flexible dielectric substrate 100 is made of polyimide. Polyimide is a commonly used flexible substrate material with good flexibility, insulation, heat resistance, and mechanical stability. Using polyimide as the flexible dielectric substrate 100 allows the flexible dielectric substrate 100 to form a bending portion 110 at the corresponding position in the radiation region 200, while also providing support for the conductive layer.

[0059] In this embodiment, by using polyimide as the material of the flexible dielectric substrate 100, the good flexibility of polyimide makes it easier to form the required bending portion 110 in the radiating region 200, thereby facilitating the transformation of the microwave radiating structure from a planar to a lateral structure. At the same time, polyimide also has good insulation and heat resistance, which is beneficial for providing stable support for the conductive layer and reducing the risk of deformation, damage, or insulation failure due to insufficient material properties during microwave radiator operation, thereby improving the reliability of the device.

[0060] In this embodiment, the conductive layer is made of copper or silver. Both copper and silver have high conductivity, making them suitable as conductive layer materials in microwave radiators. After the conductive layer forms the power supply region 300 and the radiation region 200, the microwave signal can be transmitted along the conductive layer to the radiation region 200, forming a local microwave radiation region near the via 210. By setting the conductive layer material to copper or silver, this embodiment can utilize the high conductivity of copper or silver to reduce the transmission loss of the microwave signal in the power supply region 300 and the radiation region 200. Under the same input conditions, more microwave energy can be transmitted to the radiation region 200 and act on the NV color center, which is beneficial to improving microwave radiation efficiency and microwave field intensity. Furthermore, lower transmission loss can also reduce the heating of the conductive layer and improve the stability of the microwave radiator in continuous operation.

[0061] In this embodiment, the thickness of the flexible dielectric substrate 100 is 0.1 mm to 0.2 mm. Specifically, the flexible dielectric substrate 100 can be made of flexible sheet material with a thickness of 0.1 mm, 0.12 mm, 0.15 mm, 0.18 mm, or 0.2 mm. This ensures that the flexible dielectric substrate 100 has a certain bending capability while maintaining its basic structural stability after bending.

[0062] This embodiment controls the thickness of the flexible dielectric substrate 100 within the range of 0.1mm to 0.2mm, thus balancing the flexibility and support strength of the flexible dielectric substrate 100. If the flexible dielectric substrate 100 is too thick, it will be difficult to form the required bending portion 110 at the corresponding position of the radiation region 200, and the springback after bending may also be large; if the flexible dielectric substrate 100 is too thin, although it is easy to bend, its structural support capacity is insufficient, which may lead to the unstable shape of the bending portion 110, thereby affecting the positional stability of the radiation region 200 and the through hole 210 relative to the diamond 32.

[0063] Based on the same inventive concept, this embodiment also provides a magnetic detection system based on diamond NV color centers. The magnetic detection system includes a stage 10, a sensing probe 30, an optical path module 40, and a flexible microwave radiator as described in any of the above embodiments.

[0064] The stage 10 is used to place the sample 20 to be tested. The sensing probe 30 includes an elongated support 31 and a diamond 32 containing NV color centers disposed at its end, the diamond 32 being suspended above the surface of the sample 20. The optical path module 40 is disposed above the diamond 32, used to emit excitation light towards the diamond 32 and collect fluorescence from the diamond 32. The bent portion 110 of the flexible microwave radiator is disposed on the side of the diamond 32, used to laterally emit microwave signals towards the diamond 32.

[0065] During operation, the sample 20 to be tested is placed on the stage 10, with the diamond 32 at the end of the sensing probe 30 close to the surface of the sample 20. The optical path module 40 emits excitation light from above towards the diamond 32, exciting the NV centers within the diamond 32 to emit fluorescence. Simultaneously, the bent portion 110 of the flexible microwave radiator applies a microwave signal from the side towards the diamond 32 to modulate the spin state of the NV centers. The fluorescence signal is then collected by the upper optical path module 40 and used for subsequent detection and analysis.

[0066] This embodiment employs the aforementioned flexible microwave radiator in the magnetic detection system, with its bent portion 110 positioned to the side of the diamond 32, spatially separating the microwave radiation path from the optical detection path. The optical path module 40 can still be located above the diamond 32 for excitation and fluorescence collection, while the microwave radiator performs microwave coupling from the side, thereby reducing the microwave radiator's obstruction of the upper optical path. This improves fluorescence collection efficiency, enhances the system's signal-to-noise ratio, and further increases magnetic detection sensitivity.

[0067] In this embodiment, the distance between the bent portion 110 and the diamond 32 does not exceed 0.5 mm. Specifically, the bent portion 110 can be arranged within 0.5 mm of the diamond, for example, 0.4 mm, 0.3 mm, 0.2 mm or even smaller, as long as it does not affect the normal detection arrangement between the diamond 32 and the sample 20 to be tested, as well as the excitation of the diamond and fluorescence collection by the optical path module 40.

[0068] In this embodiment, by controlling the distance between the bent portion 110 and the diamond to no more than 0.5 mm, the through hole 210 and its surrounding radiation region 200 can be brought closer to the NV color center within the diamond. Because the distance between the microwave radiation region and the NV color center is reduced, the intensity of the microwave field at the NV color center location can be increased, thereby enhancing the coupling efficiency between the microwave field and the NV color center and improving the control effect on the spin state of the NV color center.

[0069] It should be noted that the flexible dielectric substrate material, conductive layer material, through-hole shape, bending angle, radiation area size, power supply area size, and specific positional relationship between the bent part and the diamond described in the above embodiments can all be adjusted according to actual application requirements. As long as the bent part can be formed in the part where the radiation area is located, and the microwave radiation structure can approach the diamond containing the NV color center from the side and apply microwave radiation to it, it should be considered to fall within the protection scope of this utility model.

[0070] It should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the scope of protection of the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the scope of protection of the present utility model.

Claims

1. A flexible microwave radiator for diamond NV color center magnetic detection, characterized by, include: Flexible dielectric substrate; A conductive layer is disposed on the flexible dielectric substrate, and the conductive layer is patterned to form a power supply area and a radiation area electrically connected to the power supply area; The power supply area is used to connect to a microwave signal source; the radiation area is provided with a through hole penetrating the flexible dielectric substrate; The flexible dielectric substrate is bent at the position corresponding to the radiation region toward the side opposite to the conductive layer to form a bend. The radiation region and the via bend along with the bend, and at least a portion of the via is bent toward the direction away from the power supply region. The bent portion can approach the diamond containing the NV color center from the side, so that the through hole can apply microwave radiation to the NV color center of the diamond from the side.

2. The flexible microwave radiator as described in claim 1, characterized in that, After bending, the axis of the through hole changes from being perpendicular to the plane where the power supply area is located to being parallel to the plane where the power supply area is located.

3. The flexible microwave radiator as described in claim 1, characterized in that, The radiation zone includes an inner ring and an outer ring; The inner ring is an open ring that surrounds the through hole, with one end connected to the power supply area and the other end connected to the outer ring; The outer ring is also an open ring, which surrounds the inner ring.

4. The flexible microwave radiator as described in claim 1, characterized in that, The power supply area includes: A straight conductive part, the end of which is away from the bent part is used to connect to a radio frequency transmission line and is connected to a microwave signal source through the radio frequency transmission line.

5. The flexible microwave radiator as described in claim 4, characterized in that, The linear conductive portion includes a first linear conductive portion, a second linear conductive portion, and a third linear conductive portion connected in sequence and whose width gradually increases along the direction away from the bending portion. The third linear conductive portion is used to install a connector for connecting the radio frequency transmission line.

6. The flexible microwave radiator as described in claim 1, characterized in that, The flexible dielectric substrate is made of polyimide.

7. The flexible microwave radiator as described in claim 1, characterized in that, The conductive layer is made of copper or silver.

8. The flexible microwave radiator as described in claim 1, characterized in that, The thickness of the flexible dielectric substrate is 0.1 mm to 0.2 mm.

9. A magnetic detection system based on diamond NV centers, characterized in that, include: The stage is used to hold the sample to be tested. The sensing probe includes an elongated support and a diamond containing an NV color center disposed at the end, the diamond being suspended above the surface of the sample to be tested; An optical path module is disposed above the diamond and is used to emit excitation light to the diamond and collect fluorescence from the diamond; The flexible microwave radiator according to any one of claims 1 to 8, wherein the bent portion of the flexible microwave radiator is disposed on the side of the diamond for laterally emitting microwave signals toward the diamond.

10. The magnetic detection system as described in claim 9, characterized in that, The distance between the bent portion and the diamond does not exceed 0.5 mm.

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