Graphite tooling for solar cell production

Abstract

The utility model discloses a graphite tool for solar cell production belongs to the field of solar cell plating antireflection film, including paddle, the both sides of paddle are equally provided with the clamping hole, and the clamping hole is adapted to the size of alloy ball, and the alloy ball left side lap has alloy screw, and the alloy screw left side lap has ceramic post, and the ceramic post one end rotationally connected has ceramic knob, and the most right side alloy ball clamping has the outer layer tooling. The utility model discloses the rigid connection mode between paddle is optimized as the flexible connection mechanism based on elastic structure, and the design allows the independent disassembly and replacement when a single paddle needs to be replaced, significantly simplifies the maintenance process, avoids the time loss produced by sequentially disassembling all paddles required by traditional rigid connection, adopts the bionic fishbone structure design air duct, and the air flow of paddle rotation center area (the core area of easy turbulence / vortex) is integrated and guided by optimizing the convection field.

Description

Technical Field

[0001] This utility model relates to the field of antireflective coating technology for solar cells, and in particular to a graphite tooling for solar cell production. Background Technology

[0002] 1. Traditional graphite boats use a rigid connection structure with ceramic support rods. During use, when a single blade is damaged, the entire boat needs to be disassembled and replaced. This operation not only exposes the process chamber to the atmosphere and interrupts the production line, but also consumes a significant amount of time for maintenance.

[0003] 2. In traditional parallel blade configurations, when receiving process gases (such as argon) introduced from the top, uneven flow field distribution easily leads to turbulence in the central region, while the flow velocity in the lateral regions is higher due to the channel effect. This, combined with the electric field gradient, easily causes uneven spatial distribution of plasma ionization (lower in the center and on the sides), resulting in insufficiently ionized corrosive groups (such as F...). + Cl + Plasma poses a risk of preferential corrosion to the silicon wafers / crystals carried on both sides of the paddle.

[0004] Therefore, a graphite tooling for solar cell production is proposed. Utility Model Content

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A graphite tooling for solar cell production includes a paddle, with snap-fit ​​holes on both the upper and lower sides of the paddle, the snap-fit ​​holes being adapted to the size of an alloy ball, an alloy screw being attached to the left side of the alloy ball, a ceramic column being attached to the left side of the alloy screw, a ceramic knob being rotatably connected to one end of the ceramic column, and an outer tooling being snapped onto the alloy ball on the far right.

[0007] Preferably, the blade has fixing holes on both sides, a fishbone air duct on its surface, pseudo-plate holes on both sides, and a clamp fixedly connected to its surface.

[0008] Preferably, the fixing hole is adapted to the size of the ceramic rod, a ceramic ring is slidably connected to the side of the ceramic rod, and ceramic screws are fixedly connected to both ends of the ceramic rod.

[0009] Preferably, an anode conductive lug is fixedly connected to the top left side of the odd-numbered blades, and a cathode conductive lug is fixedly connected to the bottom left side of the even-numbered blades.

[0010] Preferably, hollow graphite blocks are disposed between the anode conductive ears and between the cathode conductive ears.

[0011] Preferably, the propeller blade has seven ionization holes inside, and fishbone air ducts are formed around each of the seven ionization holes.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0013] 1. The rigid connection between the blades is optimized into a flexible connection mechanism based on an elastic structure. This design allows for independent disassembly and replacement of individual blades when they need to be replaced, which significantly simplifies the maintenance process and avoids the time loss caused by the sequential disassembly of all blades required by the traditional rigid connection.

[0014] 2. The air duct is designed with a biomimetic fishbone structure to optimize the flow field. This design integrates and guides the airflow in the central area of ​​the blade rotation (the core area that is prone to turbulence / vortex). The air duct is designed with special holes on both sides for installing pseudo-plates (guide plates / turbulence plates) to effectively adsorb or dissipate excess plasma, thereby suppressing its etching effect on the downstream wafer surface. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of a graphite tooling for solar cell production proposed in this utility model.

[0016] Figure 2 This is a schematic diagram of the structure of a graphite tooling paddle used in the production of solar cells according to this utility model.

[0017] Figure 3 This is a schematic diagram of the structure of the graphite tooling ceramic ring and ceramic column used in the production of solar cells according to this utility model.

[0018] Figure 4 An exploded view of the ceramic ring of a graphite tooling used in the production of solar cells according to this utility model.

[0019] Figure 5 This is a cross-sectional view of a graphite tooling ceramic column used in the production of solar cells according to this utility model.

[0020] Figure 6 This is an exploded view of a graphite tooling ceramic column used in the production of solar cells according to this utility model.

[0021] Figure 7 This is a schematic diagram of the structure of the fishbone air duct of a graphite tooling for solar cell production proposed in this utility model.

[0022] Figure 8 This is an exploded view of the ceramic knob of a graphite tooling used in the production of solar cells according to this utility model.

[0023] In the diagram: 1. Propeller blade; 11. Outer tooling; 12. Anode conductive lug; 13. Cathode conductive lug; 14. Fixing hole; 15. Fishbone air duct; 16. Pseudo-plate hole; 17. Snap-fit ​​hole; 18. Fixture; 2. Ceramic rod; 21. Ceramic screw; 22. Ceramic ring; 3. Ceramic column; 31. Ceramic knob; 32. Alloy screw; 33. Alloy ball; 4. Hollow graphite block. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0025] Reference Figures 1-8 A graphite tooling for solar cell production includes a blade 1. The blade 1 has snap-fit ​​holes 17 on both the upper and lower sides. The snap-fit ​​holes 17 are adapted to the size of an alloy ball 33. An alloy screw 32 is attached to the left side of the alloy ball 33. A ceramic column 3 is attached to the left side of the alloy screw 32. A ceramic knob 31 is rotatably connected to one end of the ceramic column 3. An outer tooling 11 is snapped onto the rightmost alloy ball 33.

[0026] It should be noted that: reference Figure 8 The ceramic knob 31 is connected to the ceramic column 3 by welding the bearings that are rotatably connected to the two sides of the ceramic knob 31 to the internal holes of the ceramic column 3. This allows the ceramic knob 31 to not only connect the two ceramic columns 3, but also to rotate the ceramic knob 31 to squeeze the ball to the left. This is the existing technology and will not be described in detail hereafter.

[0027] With the above technical solution, the ceramic knob 31 is provided with rotating columns on both the left and right sides. A protrusion is provided on the outermost side of the rotating column to connect the two ceramic columns 3. When installing, the ceramic knob 31 needs to be placed on the site first, and rotate the ceramic knob 31 counterclockwise by 180 degrees. Align the locking hole 17 of the paddle 1 with the notch of the ceramic column 3 and press it slightly to push the alloy ball 33 into the locking hole 17. Then rotate it 180 degrees to rotate the part of the ceramic knob 31 with the missing part to the right side of the alloy ball 33. The alloy spring will move the alloy ball 33 to the right a small part to achieve complete locking.

[0028] Specifically, the blade 1 has fixing holes 14 on both sides, a fishbone air duct 15 on the surface of the blade 1, pseudo plate holes 16 on both sides of the blade 1, and a clamp 18 fixedly connected to the surface of the blade 1.

[0029] Through the above technical solution, the blades 1 are fixed using the traditional ceramic rod 2 and ceramic ring 22. First, the ceramic ring 22 is placed between the fixing holes 14 of the two blades 1. The ceramic rod 2 is pushed into the fixing holes 14 and the ceramic ring 22. After all the blades 1 are fixed with the ceramic rod 2, the two ends are fixed with ceramic screws 21 to achieve insulation between the two blades 1. The flow field is optimized by using the fishbone air duct 15. Its core principle is to achieve wind pressure balance and uniform air volume distribution through a special branch structure design, thereby reducing energy loss and improving ventilation efficiency. It can overcome the shortcomings of insufficient air volume, uneven wind pressure and high energy consumption at the end of traditional equal cross-section air ducts or simple branch air ducts. It integrates and guides the airflow in the rotation center area of ​​the blades 1 (the core area that is prone to turbulence / vortex) so that the silicon wafer has more sufficient contact with rare gases.

[0030] The air duct is designed with dedicated holes on both sides for installing dummy plates (flow guide plates / turbulence deflectors). The dummy plates are used to effectively adsorb or dissipate excess plasma, thereby suppressing its etching effect on the downstream wafer surface.

[0031] Specifically, the fixing hole 14 is adapted to the size of the ceramic rod 2, the ceramic rod 2 is slidably connected to the side of the ceramic rod 2, and the ceramic screws 21 are fixedly connected to both ends of the ceramic rod 2.

[0032] Specifically, an anode conductive lug 12 is fixedly connected to the top left side of the odd-numbered blades 1, and a cathode conductive lug 13 is fixedly connected to the bottom left side of the even-numbered blades 1.

[0033] By using the above technical solution, the thickness is increased at the edges of the odd-numbered blades 1, which increases the current flow after energization, changes the electric field inside the blades 1, and makes the ionized rare gas more uniform.

[0034] Specifically, hollow graphite blocks 4 are arranged between the anode conductive ears 12 and between the cathode conductive ears 13.

[0035] Specifically, the propeller blade 1 has seven ionization holes inside, and fishbone air ducts 15 are provided around the seven ionization holes.

[0036] Working principle:

[0037] In use, the ceramic knob 31 has rotating columns on both sides. A protrusion is provided on the outermost side of the rotating column to connect the two ceramic columns 3. During installation, the ceramic knob 31 should be placed on the site and rotated 180 degrees counterclockwise. The snap-fit ​​hole 17 of the paddle 1 should be aligned with the notch of the ceramic column 3 and pressed slightly to push the alloy ball 33 into the snap-fit ​​hole 17. Then, rotate the ceramic knob 31 180 degrees to rotate the missing part to the right side of the alloy ball 33. The alloy spring will move the alloy ball 33 to the right slightly to achieve complete locking.

[0038] Based on the above, when a single propeller 1 is damaged, rotate all ceramic knobs 31 180 degrees, then pull out the ceramic rods 2 on both sides, and manually pull the damaged propeller 1 to the left or right. Use a new propeller 1 to slowly push it in from both sides of the graphite boat, so that the alloy ball 33 is completely inserted into the locking hole 17. Finally, rotate all ceramic knobs 31 to rotate the missing part to the right side of the alloy ball 33. Use the alloy spring to move the alloy ball 33 to the right a small part to achieve complete locking. Finally, use the ceramic rods 2 to fix all the propellers 1 on both sides.

[0039] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A graphite tooling for solar cell production, comprising a paddle (1), characterized in that, The blade (1) has snap-fit ​​holes (17) on both the upper and lower sides. The snap-fit ​​holes (17) are adapted to the size of the alloy ball (33). An alloy screw (32) is attached to the left side of the alloy ball (33). A ceramic column (3) is attached to the left side of the alloy screw (32). A ceramic knob (31) is rotatably connected to one end of the ceramic column (3). The outer tooling (11) is snapped onto the rightmost alloy ball (33).

2. The graphite tooling for solar cell production according to claim 1, characterized in that, The blade (1) has fixing holes (14) on both sides, a fishbone air duct (15) on the surface of the blade (1), pseudo plate holes (16) on both sides of the blade (1), and a clamp (18) fixedly connected to the surface of the blade (1).

3. The graphite tooling for solar cell production according to claim 2, characterized in that, The fixing hole (14) is adapted to the size of the ceramic rod (2), and a ceramic ring (22) is slidably connected to the side of the ceramic rod (2). Ceramic screws (21) are fixedly connected to both ends of the ceramic rod (2).

4. The graphite tooling for solar cell production according to claim 1, characterized in that, The odd-numbered blades (1) are fixedly connected to the top left side with an anode conductive lug (12), and the even-numbered blades (1) are fixedly connected to the bottom left side with a cathode conductive lug (13).

5. The graphite tooling for solar cell production according to claim 4, characterized in that, Hollow graphite blocks (4) are disposed between the anode conductive ears (12) and between the cathode conductive ears (13).

6. The graphite tooling for solar cell production according to claim 1, characterized in that, The propeller (1) has seven ionization holes inside, and fishbone air ducts (15) are formed around the seven ionization holes.

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