A CVD coating tool suitable for the outer wall surface of an arc top blind pipe product

Abstract

The utility model discloses a CVD coating frock suitable for arc top blind pipe class product outer wall surface, including cloth gas board, install a plurality of support pegs on cloth gas board, and arc top blind pipe adopts the mode of arc top downward, flat mouth upward and deposits, be equipped with the gas hole on the cover, and the support post one side is equipped with the thimble, and the support peg body and the support post lower part all are equipped with the support ring board, and the support ring board's lower part all are equipped with the assembly guide rod, and the assembly guide rod both sides are equipped with the first plane, and the neck-in portion outside is equipped with the buckle, and the buckle middle part is equipped with the assembly hole that cooperates with the assembly guide rod, and the assembly hole both sides are equipped with the second plane corresponding with the first plane, the utility model discloses arc top blind pipe adopts the mode of arc top downward, flat mouth upward and deposits, and the technological gas goes in and goes out, and arc top downward is favorable to dispersing airflow, guarantees the deposition effect of arc top, from outside, and the support peg and the support post lower part are connected with cloth gas board through the buckle, avoids the problem that traditional screw connection is difficult to separate because of CVD product coating adhesion, and is convenient to dismount.

Description

Technical Field

[0001] This utility model belongs to the field of CVD coating tooling, and specifically relates to a CVD coating tooling suitable for the outer wall surface of arc-top blind tube products. Background Technology

[0002] Chemical vapor deposition (CVD), as a cutting-edge material surface treatment technology, uses gaseous reactants to undergo chemical reactions under specific conditions, thereby endowing the surface of materials with unique functional properties while maintaining the original composition and mechanical properties of the substrate. This technology, with its excellent process characteristics, can prepare a variety of coating materials such as pyrolytic carbon (PyC), silicon carbide (SiC), tantalum carbide (TaC), and boron nitride (BN).

[0003] These coating materials, with their superior performance, have been widely applied in numerous key fields. In industrial manufacturing, they significantly improve the wear resistance and cutting performance of cutting tools; in aerospace, they are used to manufacture special composite materials that are resistant to high temperatures and corrosion; in the nuclear industry, they provide critical protective materials for nuclear reactors; and in the biomedical field, they contribute to the development of biocompatible medical materials. Meanwhile, CVD technology also demonstrates strong application potential in materials synthesis, commonly used to prepare high-performance powders, bulk materials, novel crystals, ceramic fibers, and diamond films. Especially in the manufacturing of large-scale integrated circuits, CVD technology is a core process for preparing key thin-film materials such as ferroelectric, insulating, magnetic, and optoelectronic materials, playing an irreplaceable role in promoting the development of the electronic information industry.

[0004] In the single-sided CVD coating production of large, curved-top cylindrical products, the structural design of the tooling plays a decisive role in coating uniformity, process stability, and production costs. This process requires the tooling materials to withstand high-temperature reaction environments while possessing good gas conductivity and chemical stability. Currently, traditional CVD tooling, such as... Figure 1 As shown, the fixture mainly includes an air distribution plate 2, which has several air distribution holes 3. Support pins 4 and pillars 6 are installed within the air distribution holes 3, and a pin 7 is provided on one side of the pillar 6. Although this fixture can meet basic process requirements to a certain extent, a series of key problems have gradually emerged in actual application, seriously affecting production efficiency and product quality.

[0005] First, poor coating uniformity easily leads to carbon buildup defects. For CVD coatings on the outer walls of large, arc-top blind tube products, the traditional deposition method is to have the arc top facing upwards and the flat end facing downwards, such as... Figure 1As shown. To prevent CVD process gases from entering the blind tube and coating its inner wall, a cover plate 5 is typically installed at the flat end of the blind tube. Cover plates 5 are mainly of two types: non-perforated and perforated. When a non-perforated cover plate is used, during actual production, the expansion of the existing gas inside the blind tube during vacuuming and heating operations of the deposition furnace will exert pressure on the cover plate, causing misalignment between the cover plate and the blind tube, resulting in poor sealing. While a perforated cover plate can alleviate the pressure problem caused by gas expansion to some extent, it cannot completely prevent CVD process gases from entering the blind tube. Regardless of the type of cover plate used, unreacted deposition materials and byproducts (such as silicides and carbides) will adhere to the inner surface of the blind tube. These residues not only affect the appearance quality of the product but may also adversely affect its performance. Furthermore, due to the upward placement of the arc apex and the characteristics of the process gas flow distribution, unreacted deposition materials and byproducts are also easily deposited at the arc apex, further exacerbating coating defects and reducing the product yield.

[0006] Secondly, the difficulty in assembling and disassembling tooling leads to high production costs. Traditional tooling typically uses threaded nuts to connect the supports and pillars. During the process, CVD process gases inevitably seep into the connection surfaces. Under high temperatures, these gases react chemically with the metal materials at the connection surfaces, forming deposits that bond the bolts and nuts together. This makes disassembly extremely difficult, increasing the labor intensity for workers and easily damaging tooling components, thus affecting the tooling's reusability. Frequent tooling changes not only increase equipment procurement costs but also extend production cycles and reduce production efficiency, resulting in persistently high costs for CVD coating tooling. Utility Model Content

[0007] The purpose of this invention is to overcome the shortcomings of the prior art and provide a CVD coating fixture suitable for the outer wall surface of arc-top blind tube products, so as to solve the problems of poor coating uniformity, easy carbon buildup and difficult disassembly and assembly that exist when using traditional arc-top blind tube CVD fixtures.

[0008] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0009] A CVD coating fixture suitable for the outer wall surface of products with arc-top blind tubes includes a gas distribution plate, which is parallel to the bottom of the deposition furnace and at a distance of not less than 100 mm from the bottom. The gas distribution plate has a plurality of gas distribution holes. A plurality of support pins are installed on the gas distribution plate, each support pin including a support pin body. The arc-top blind tube is deposited with the arc-top facing down and the flat opening facing up. The support pin body is used to support the arc-top of the arc-top blind tube. A cover plate is provided on the upper part of the flat opening of the arc-top blind tube, and the cover plate has vent holes. The gas distribution plate also has a plurality of pillars, and a pin is provided on one side of each pillar. The pin abuts against the side of the arc-top blind tube.

[0010] Both the support pin body and the lower part of the support column are provided with a support ring plate. The diameter of the support ring plate is larger than the diameter of the air distribution hole. The lower part of the support ring plate is provided with an assembly guide rod. The assembly guide rod has a neck in the middle and a first plane on both sides. The outer side of the neck is provided with a buckle. The buckle has an assembly hole in the middle that cooperates with the assembly guide rod. The assembly hole has a second plane on both sides that corresponds to the first plane.

[0011] Furthermore, the tip angle of the axial section of the support pin body and the ejector pin is not greater than 90°.

[0012] Furthermore, the upper and lower parts of the air distribution hole are provided with chamfers, and the lower part of the support ring plate is provided with a boss that matches the chamfer.

[0013] Furthermore, the support column is provided with a plurality of first mounting holes, and the ejector pin is installed in the first mounting holes; the ejector pin is provided with two nuts, which are located on both sides of the support column respectively.

[0014] Furthermore, the support column also has several second mounting holes, which are arranged perpendicularly to the first mounting holes.

[0015] Furthermore, a pressure block is provided on the upper part of the cover plate to restrict the displacement of the cover plate.

[0016] Furthermore, the upper part of the cover plate is provided with a limiting ring plate, which is bolted to the cover plate or integrally formed, and the pressure block is placed inside the limiting ring plate.

[0017] Furthermore, the upper end of the limiting ring plate is provided with a flange that extends above the vent hole.

[0018] The beneficial effects of this utility model are:

[0019] 1) The arc-top blind tube of this utility model adopts the deposition method with the arc-top facing down and the flat opening facing up. The process gas enters from the bottom and exits from the top. The arc-top facing down is conducive to dispersing the airflow and ensuring the deposition effect of the arc-top. From the outside, the support and the lower part of the support are connected to the gas distribution plate by the buckle, avoiding the problem of traditional threaded connection due to the adhesion of CVD product coating and difficulty in separation, making disassembly and assembly convenient.

[0020] 2) Both the upper and lower parts of the air distribution hole are chamfered, and the lower part of the support ring plate is provided with a boss that matches the chamfer. This helps to increase the contact area between the support ring plate and the air distribution plate, thereby ensuring the stability of the support pin and the support column. At the same time, the chamfer also has a certain flow guiding effect, which is conducive to the dispersion and uniform distribution of process gas.

[0021] 3) The support column is provided with multiple first mounting holes, which facilitates the adjustment of the position of the ejector pin according to the height of the arc-top blind tube; the ejector pin is connected to the support column through two nuts, which facilitates the adjustment of the distance between the ejector pin and the outer wall of the arc-top blind tube according to the diameter of the arc-top blind tube, thus ensuring the stability of the side support of the arc-top blind tube; the support column is also provided with several second mounting holes arranged perpendicularly to the first mounting holes. After the ejector pin is installed in the second mounting holes, it is used to support other products in the furnace.

[0022] 4) By setting a limiting ring plate on the cover plate and placing a pressure block inside the limiting ring plate, the cover plate is prevented from shifting during vacuuming and heating, thus ensuring the stability of the blind tube deposition at the top of the arc.

[0023] 5) The upper end of the limiting ring plate is provided with a flange extending above the vent hole, which prevents byproducts from entering the interior of the arc top blind tube through the vent hole during the deposition process, thus ensuring the quality of the arc top blind tube deposition. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of a traditional arc-top blind tube CVD coating fixture.

[0025] Figure 2 This is a schematic diagram of a CVD coating fixture structure applicable to the outer wall surface of arc-shaped blind pipe products according to this utility model.

[0026] Figure 3 This is a schematic diagram of the air distribution plate structure.

[0027] Figure 4 This is an exploded view of the support pin and the clip.

[0028] Figure 5 This is an exploded view of the support pillar and the buckle.

[0029] Figure 6 This is an exploded view of the cover plate and the pressure block.

[0030] In the diagram, 1. Arc-shaped blind pipe; 2. Air distribution plate; 3. Air distribution hole; 31. Chamfer; 4. Support pin; 41. Support pin body; 42. Support ring plate; 43. Boss; 44. Neck; 45. Assembly guide rod; 46. First plane; 47. Buckle; 48. Assembly hole; 49. Second plane; 5. Cover plate; 51. Vent hole; 52. Limiting ring plate; 53. Flanged edge; 6. Support column; 61. First mounting hole; 62. Second mounting hole; 7. Ejector pin; 8. Pressure block. Detailed Implementation

[0031] The following will be combined with the appendix Figures 1-6The technical solutions in the embodiments of this utility model are clearly and completely described herein. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0032] In the description of this utility model, it should be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0033] like Figure 2 As shown, a CVD coating fixture suitable for the outer wall of arc-top blind tube products includes a gas distribution plate 2 for distributing and uniformly distributing gas from the furnace bottom, supporting the fixture and the product. The gas distribution plate 2 is parallel to the furnace bottom and the distance between the gas distribution plate 2 and the furnace bottom is not less than 100mm. The gas distribution plate 2 is provided with a plurality of gas distribution holes 3. Figure 3 , Figure 4 As shown, several support pins 4 are installed on the gas distribution plate 2. Each support pin 4 includes a support pin body 41. The arc-top blind pipe 1 deposits gas with the arc-top facing downwards and the flat opening facing upwards. The support pin body 41 is used to support the arc-top of the arc-top blind pipe. The process gas enters from the bottom and exits from the top. The arc-top facing downwards helps to disperse the airflow and ensures the deposition effect at the arc-top. Figure 2 As shown, the upper part of the flat opening of the arc-top blind tube 1 is provided with a cover plate 5, the cover plate 5 is provided with a vent hole 51, and the air distribution plate 2 is also provided with several support columns 6. A pin 7 is provided on one side of the support column 6. The pin 7 presses against the side of the arc-top blind tube 1 and works together with the support nail 4 to fix the arc-top blind tube.

[0034] like Figure 4 , Figure 5As shown, both the support pin body 41 and the support column 6 are provided with a support ring plate 42 at their lower parts. The diameter of the support ring plate 42 is larger than the diameter of the air distribution hole 3. The lower part of the support ring plate 42 is provided with an assembly guide rod 45. The assembly guide rod 45 has a neck 44 in the middle and a first plane 46 on both sides. The neck 44 has a buckle 47 on its outer side. The buckle 47 has an assembly hole 48 in the middle that mates with the assembly guide rod 45. The assembly hole 48 has a second plane 49 on both sides that corresponds to the first plane 46. When installing the buckle 47, the first plane 46 and the second plane 49 are aligned, and the buckle 47 is put onto the assembly guide rod 45. When the buckle 47 moves to the neck 44, the buckle 47 is rotated to make the first plane 46 and the second plane 49 misaligned. The support ring plate 42 and the buckle 47 are used to clamp the support pin body 41 onto the air distribution plate 2. This assembly method avoids the problem of traditional threaded connections being difficult to separate due to the adhesion of CVD product coating, and is convenient to disassemble and assemble.

[0035] As a preferred embodiment, the tip angle of the axial section of the support pin body 41 and the ejector pin 7 is not greater than 90°, so as to reduce the influence of the tip on the airflow.

[0036] like Figure 3 As shown, the upper and lower parts of the air distribution hole 3 are provided with chamfers 31, and the lower part of the support ring plate 42 is provided with a boss 43 that cooperates with the chamfers 31. This helps to increase the contact area between the support ring plate 42 and the air distribution plate 2, thereby ensuring the stability of the support pin 4 and the support column 6. At the same time, the chamfers 31 also have a certain guiding effect, which is conducive to the uniform distribution of process gas.

[0037] like Figure 5 As shown, the support column 6 is provided with a plurality of first mounting holes 61, and the ejector pin 7 is installed in the first mounting holes 61. The plurality of first mounting holes 61 facilitates the adjustment of the position of the ejector pin 7 according to the height of the arc-shaped blind tube. The ejector pin 7 is provided with two nuts, which are located on both sides of the support column 6 respectively, so as to facilitate the adjustment of the distance between the ejector pin 7 and the outer wall of the arc-shaped blind tube according to the diameter of the arc-shaped blind tube, thus ensuring the stability of the side support of the arc-shaped blind tube.

[0038] like Figure 5 As shown, the support column 6 also has several second mounting holes 62, which are arranged perpendicularly to the first mounting holes 61. When other products are deposited together in the deposition furnace, another ejector pin 7 is installed in the second mounting hole 62 to support the other products in the furnace.

[0039] like Figure 2 As shown, a pressure block 8 is provided on the upper part of the cover plate 5. The pressure block 8 presses on the cover plate 5 to prevent the cover plate 5 from shifting during the vacuuming and heating process.

[0040] like Figure 6As shown, the upper part of the cover plate 5 is provided with a limiting ring plate 52. The limiting ring plate 52 is bolted to the cover plate 5 or integrally formed. The pressure block 8 is placed inside the limiting ring plate 52 to restrict the movement of the pressure block 8, which further ensures the stability of the blind tube deposition at the top of the arc.

[0041] like Figure 6 As shown, the upper end of the limiting ring plate 52 is provided with a flange 53, which extends above the vent hole 51, preventing byproducts from entering the interior of the arc top blind tube through the vent hole 51 during the deposition process, thus ensuring the quality of the arc top blind tube deposition.

[0042] The above content is merely an example and illustration of the structure of this utility model. Those skilled in the art can make various modifications or additions to the specific embodiments described or use similar methods to replace them, as long as they do not deviate from the scope defined by the structure of the utility model, they should all fall within the protection scope of this utility model.

Claims

1. A CVD coating fixture suitable for the outer wall surface of arc-top blind pipe products, comprising an air distribution plate having a plurality of air distribution holes; and a plurality of support pins mounted on the air distribution plate, each support pin comprising a support pin body, characterized in that, The arc-top blind tube is deposited with the arc-top facing down and the flat opening facing up. The support pin body is used to support the arc-top of the arc-top blind tube. The upper part of the flat opening of the arc-top blind tube is provided with a cover plate, the cover plate is provided with a vent hole, and the air distribution plate is also provided with several support columns. A pin is provided on one side of the support column, and the pin is pressed against the side of the arc-top blind tube. Both the support pin body and the lower part of the support column are provided with a support ring plate. The diameter of the support ring plate is larger than the diameter of the air distribution hole. The lower part of the support ring plate is provided with an assembly guide rod. The assembly guide rod has a neck in the middle and a first plane on both sides. The outer side of the neck is provided with a buckle. The buckle has an assembly hole in the middle that cooperates with the assembly guide rod. The assembly hole has a second plane on both sides that corresponds to the first plane.

2. The CVD coating fixture for the outer wall surface of arc-top blind tube products according to claim 1, characterized in that, The angle of the tip of the axial section of the support pin body and the ejector pin is not greater than 90°.

3. The CVD coating fixture for the outer wall surface of arc-top blind tube products according to claim 1, characterized in that, Both the upper and lower parts of the air distribution hole are chamfered, and the lower part of the support ring plate is provided with a boss that matches the chamfer.

4. The CVD coating fixture for the outer wall surface of arc-top blind tube products according to claim 1, characterized in that, The support column is provided with several first mounting holes, and the ejector pin is installed in the first mounting holes; the ejector pin is provided with two nuts, which are located on both sides of the support column respectively.

5. The CVD coating fixture for the outer wall surface of arc-top blind tube products according to claim 4, characterized in that, The support column also has several second mounting holes, which are arranged perpendicularly to the first mounting holes.

6. A CVD coating fixture for the outer wall surface of arc-top blind tube products according to any one of claims 1-5, characterized in that, The upper part of the cover plate is provided with a pressure block to restrict the displacement of the cover plate.

7. The CVD coating fixture for the outer wall surface of arc-top blind pipe products according to claim 6, characterized in that, The upper part of the cover plate is provided with a limiting ring plate, which is bolted to the cover plate or integrally formed, and the pressure block is placed inside the limiting ring plate.

8. The CVD coating fixture for the outer wall surface of arc-top blind tube products according to claim 7, characterized in that, The upper end of the limiting ring plate is provided with a flange, which extends above the vent hole.

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